JP6909524B2 - Jig transfer member and surface treatment device and method - Google Patents

Jig transfer member and surface treatment device and method Download PDF

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JP6909524B2
JP6909524B2 JP2020558320A JP2020558320A JP6909524B2 JP 6909524 B2 JP6909524 B2 JP 6909524B2 JP 2020558320 A JP2020558320 A JP 2020558320A JP 2020558320 A JP2020558320 A JP 2020558320A JP 6909524 B2 JP6909524 B2 JP 6909524B2
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jig
holding
work
holding portion
jig holding
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JPWO2020105524A1 (en
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昌秀 渡部
昌秀 渡部
勝己 石井
勝己 石井
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Almex Technologies Inc
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1619—Apparatus for electroless plating
    • C23C18/1628—Specific elements or parts of the apparatus
    • C23C18/163—Supporting devices for articles to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1655—Process features
    • C23C18/1664—Process features with additional means during the plating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C25D17/08—Supporting racks, i.e. not for suspending
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/422—Plated through-holes or plated via connections characterised by electroless plating method; pretreatment therefor

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrochemistry (AREA)
  • Chemically Coating (AREA)
  • Coating Apparatus (AREA)

Description

本発明は、無電解メッキ等の表面処理に用いられるワーク保持治具を搬送する治具搬送部材並びに表面処理装置及び方法等に関する。 The present invention relates to a jig transporting member for transporting a work holding jig used for surface treatment such as electroless plating, and a surface treatment apparatus and method.

例えば無電解メッキは、電解メッキと相違して浴中を電流が流れないため、メッキ処理されるワークは導電体のみならずプラスチックやセラミックスのような非導電体とすることができる利点がある。 For example, electroless plating has an advantage that the workpiece to be plated can be not only a conductor but also a non-conductor such as plastic or ceramics because a current does not flow in the bath unlike electroplating.

特許文献１に、無電解メッキ液を収容したメッキ槽の中に、複数のワークを、無電解メッキ液が流通可能な隙間を介して鉛直に立てて並べ、あるいはラックに吊り下げて、バッチ処理することが開示されている（請求項１，３及び図４）。 According to Patent Document 1, a plurality of workpieces are arranged vertically in a plating tank containing an electroless plating solution through a gap through which the electroless plating solution can flow, or suspended in a rack for batch processing. (Claims 1 and 3 and FIG. 4).

特開２００６−９３６５１号公報Japanese Unexamined Patent Publication No. 2006-93651

メッキ液中に気泡が存在し、かつ、気泡がワークに付着していると、気泡が存在する領域はメッキ不良となる。特に、ワークに貫通孔や有底孔が存在することがある。ワークが回路基板であると、基板の両面を導通させるスルーホールや、上下の導電層同士を導通させるためのコンタクトホールまたはビアが設けられるからである。そのような孔には気泡が停留し易く、メッキ不良が生じやすい。 If air bubbles are present in the plating solution and the air bubbles are attached to the work, the area where the air bubbles are present becomes poorly plated. In particular, the work may have through holes or bottomed holes. This is because when the work is a circuit board, through holes for conducting both sides of the board and contact holes or vias for conducting the upper and lower conductive layers are provided. Bubbles are likely to stay in such holes, and plating defects are likely to occur.

本発明は、ワークに付着する気泡に起因した処理不良を低減することができる治具搬送部材並びに表面処理装置及び方法を提供することを目的とする。 An object of the present invention is to provide a jig transfer member, a surface treatment apparatus and a method capable of reducing processing defects caused by air bubbles adhering to a work.

（１）本発明の一態様は、
ワークを垂下して保持するワーク保持治具が着脱自在に装着される治具保持部と、
前記治具保持部を支持する支持部と、
前記治具保持部と前記支持部とを連結する連結部と、
を有し、
前記連結部は、外力が付与されている時に前記治具保持部と前記支持部との連結が解除され、前記外力が解除されている時に前記治具保持部と前記支持部とを連結し、連結時には、平面視で前記治具保持部と前記支持部との相対角度が異なる複数の連結位置の一つを選択可能である治具搬送部材に関する。(1) One aspect of the present invention is
A jig holding part to which a work holding jig that hangs and holds the work is detachably attached,
A support portion that supports the jig holding portion and a support portion
A connecting portion that connects the jig holding portion and the supporting portion,
Have,
The connecting portion connects the jig holding portion and the supporting portion when an external force is applied, and connects the jig holding portion and the supporting portion when the external force is released. The present invention relates to a jig transporting member capable of selecting one of a plurality of connecting positions having different relative angles between the jig holding portion and the supporting portion in a plan view at the time of connecting.

本発明の一態様によれば、外力が付与されている時に治具保持部と支持部との連結が解除されるので、平面視で治具保持部と支持部との相対角度を変化させることができる。その後外力を解除すると、治具保持部と支持部とが連結される。それにより、平面視で治具保持部と支持部との相対角度が異なる複数の連結位置の一つが選択される。ワークは、治具保持部に保持されるワーク保持治具に取り付けられる。よって、平面視で治具保持部と支持部との相対角度を変更することにより、支持部に対して、ワークの主面の向きを変更させることができる。この治具搬送部材により処理槽内の処理液にワークが浸漬されている時に、治具搬送部材の支持部を第１方向に往復揺動させる。こうして、ワークに付着している気泡を除去する。その際に、往復揺動方向に対するワーク主面の向きを適宜設定することで、気泡を効率的に除去することができる。 According to one aspect of the present invention, since the connection between the jig holding portion and the supporting portion is released when an external force is applied, the relative angle between the jig holding portion and the supporting portion is changed in a plan view. Can be done. After that, when the external force is released, the jig holding portion and the supporting portion are connected. As a result, one of a plurality of connecting positions having different relative angles between the jig holding portion and the supporting portion in a plan view is selected. The work is attached to the work holding jig held by the jig holding portion. Therefore, by changing the relative angle between the jig holding portion and the supporting portion in a plan view, the orientation of the main surface of the work can be changed with respect to the supporting portion. When the work is immersed in the processing liquid in the processing tank by the jig transfer member, the support portion of the jig transfer member is reciprocally swung in the first direction. In this way, air bubbles adhering to the work are removed. At that time, air bubbles can be efficiently removed by appropriately setting the orientation of the work main surface with respect to the reciprocating swing direction.

（２）本発明の一態様（１）では、前記連結部は、複数の係合部と、少なくとも一つの被係合部とを含み、前記外力の付与により相対的に移動される前記治具保持部と前記支持部とによって、前記複数の係合部のいずれか一つと前記少なくとも一つの被係合部との係合が解除され、前記外力の解除により前記複数の係合のいずれか一つに前記少なくとも一つの被係合部が係合されても良い。こうすると、治具保持部と支持部との連結及び連結解除が容易であるとともに、複数の係合のいずれか一つに少なくとも一つの被係合部が係合されることで、回転後の位置が固定される。 (2) In one aspect (1) of the present invention, the connecting portion includes a plurality of engaging portions and at least one engaged portion, and the jig is relatively moved by applying an external force. The holding portion and the supporting portion disengage the engagement between any one of the plurality of engaging portions and the at least one engaged portion, and the disengagement of the external force disengages any one of the plurality of engaging portions. At least one of the engaged portions may be engaged with each other. By doing so, it is easy to connect and disconnect the jig holding portion and the supporting portion, and at least one engaged portion is engaged with any one of the plurality of engagements, so that after rotation, the engagement portion is engaged. The position is fixed.

（３）本発明の一態様（２）では、前記係合部は、前記少なくとも一つの被係合部が嵌入される孔または凹部とすることができる。こうすると、連結部の構造が簡易化され、治具保持部と支持部との連結及び連結解除がさらに容易となる。 (3) In one aspect (2) of the present invention, the engaging portion may be a hole or a recess into which the at least one engaged portion is fitted. This simplifies the structure of the connecting portion and makes it easier to connect and disconnect the jig holding portion and the supporting portion.

（４）本発明の一態様（２）または（３）では、
前記治具保持部は、被案内部を含み、
前記支持部は、前記被案内部を昇降可能に案内する案内部を含み、
前記連結部は、
前記被案内部と共に移動する可動部と、
前記可動部と対面して前記案内部に配置される固定部と、
を含み、
前記可動部と前記固定部との一方に前記複数の係合部が設けられ、
前記可動部と前記固定部との他方に前記少なくとも一つの被係合部を設けることができる。こうすると、治具保持部と支持部とを相対的に昇降させることで、治具保持部と支持部との連結及び連結解除を容易に行うことができる。(4) In one aspect (2) or (3) of the present invention,
The jig holding portion includes a guided portion and includes a guided portion.
The support portion includes a guide portion that guides the guided portion so as to be able to move up and down.
The connecting part
A movable part that moves together with the guided part,
A fixed portion arranged on the guide portion facing the movable portion, and a fixed portion.
Including
The plurality of engaging portions are provided on one of the movable portion and the fixed portion, and the plurality of engaging portions are provided.
The at least one engaged portion may be provided on the other side of the movable portion and the fixed portion. By doing so, the jig holding portion and the supporting portion can be relatively moved up and down, so that the jig holding portion and the supporting portion can be easily connected and disconnected.

（５）本発明の他の態様は、
ワークを垂下して保持するワーク保持治具が着脱自在に装着される治具搬送部材と、
前記ワーク保持治具に保持される複数のワークの表面を処理液により処理する処理槽と、
外部から搬入される前記ワーク保持治具を前記治具搬送部材に装着して、前記治具搬送部材を前記処理槽にロードするローダー部と、
を有し、
前記治具搬送部材は、本発明の一態様（１）〜（４）のいずれかに記載された治具搬送部材であって、前記治具保持部、前記支持部及び前記連結部を含み、
前記処理槽は、前記治具搬送部材を第１方向に往復揺動させる揺動部を含み、
前記ローダー部は、
前記治具搬送部材の前記治具保持部を昇降させる昇降部と、
上昇された前記治具保持部を水平面内で回転させる回転部と、
を含む表面処理装置に関する。(5) Another aspect of the present invention is
A jig transfer member to which a work holding jig that hangs and holds the work is detachably attached,
A treatment tank that treats the surfaces of a plurality of works held by the work holding jig with a treatment liquid, and
A loader unit that mounts the work holding jig carried in from the outside on the jig transporting member and loads the jig transporting member into the processing tank.
Have,
The jig transport member is the jig transport member according to any one of aspects (1) to (4) of the present invention, and includes the jig holding portion, the support portion, and the connecting portion.
The processing tank includes a swinging portion that swings the jig transport member back and forth in the first direction.
The loader unit
An elevating part that raises and lowers the jig holding part of the jig transport member, and an elevating part.
A rotating part that rotates the raised jig holding part in a horizontal plane, and a rotating part.
The present invention relates to a surface treatment apparatus including.

（６）本発明の他の態様（５）では、
前記回転部は、前記治具保持部に保持される前記複数のワークの前記表面が前記第１方向と非平行となるように、前記治具保持部を回転させることができる。(6) In another aspect (5) of the present invention,
The rotating portion can rotate the jig holding portion so that the surfaces of the plurality of works held by the jig holding portion are not parallel to the first direction.

（７）本発明のさらに他の態様は、
ワークを垂下して保持するワーク保持治具が着脱自在に装着される治具搬送部材と、
前記ワーク保持治具に保持される複数のワークの表面を処理液により処理する処理槽と、
外部から搬入される前記ワーク保持治具を前記治具搬送部材に装着して、前記治具搬送部材を前記処理槽にロードするローダー部と、
を有し、
前記治具搬送部材は、本発明の一態様（１）〜（４）のいずれかに記載された治具搬送部材であり、前記治具保持部、前記支持部及び前記連結部を含む表面処理装置で、前記複数のワークを表面処理する方法であって、
前記ローダー部で、
前記治具搬送部材の前記治具保持部を上昇させる工程と、
上昇された前記治具保持部を水平面内で回転させる工程と、
その後、前記治具保持部を下降させる工程と、
を含む表面処理方法に関する。(7) Yet another aspect of the present invention is
A jig transfer member to which a work holding jig that hangs and holds the work is detachably attached,
A treatment tank that treats the surfaces of a plurality of works held by the work holding jig with a treatment liquid, and
A loader unit that mounts the work holding jig carried in from the outside on the jig transporting member and loads the jig transporting member into the processing tank.
Have,
The jig transport member is the jig transport member according to any one of aspects (1) to (4) of the present invention, and is a surface treatment including the jig holding portion, the support portion, and the connecting portion. A method of surface-treating the plurality of workpieces with an apparatus.
In the loader section
The step of raising the jig holding portion of the jig transport member and
The process of rotating the raised jig holding portion in a horizontal plane, and
After that, the step of lowering the jig holding portion and
The present invention relates to a surface treatment method including.

（８）本発明のさらに他の態様（７）では、
前記処理槽は、前記治具搬送部材を第１方向に沿って往復揺動させる揺動部を含み、
前記回転工程は、前記治具保持部に保持される前記複数のワークの前記表面が前記第１方向と非平行となるように、前記治具保持部を回転させることができる。(8) In still another aspect (7) of the present invention,
The processing tank includes a swinging portion that swings the jig transport member back and forth along the first direction.
In the rotation step, the jig holding portion can be rotated so that the surfaces of the plurality of works held by the jig holding portion are not parallel to the first direction.

本発明の各態様（５）（７）によれば、ローダー部で昇降部により治具保持部を上昇させることで、治具保持部と支持部との連結が解除される。ローダー部で回転部により、上昇された治具保持部を水平面内で回転させることで、平面視で治具保持部と支持部との相対角度が変更される。その後、ローダー部で昇降部により治具保持部を下降させることで、治具保持部と支持部とが連結される。それにより、平面視で治具保持部と支持部との相対角度が異なる複数の連結位置の一つが選択される。このワーク保持治具が用いられる処理槽では、ワーク保持治具の支持部を第１方向に往復揺動させて、ワークに付着している気泡を除去する。その際に、往復揺動方向に対するワーク主面の向きを適宜設定することで、気泡を効率的に除去することができる。 According to the respective aspects (5) and (7) of the present invention, the connection between the jig holding portion and the supporting portion is released by raising the jig holding portion by the elevating portion in the loader portion. By rotating the raised jig holding portion in a horizontal plane by the rotating portion in the loader portion, the relative angle between the jig holding portion and the supporting portion is changed in a plan view. After that, the jig holding portion and the supporting portion are connected by lowering the jig holding portion by the elevating portion in the loader portion. As a result, one of a plurality of connecting positions having different relative angles between the jig holding portion and the supporting portion in a plan view is selected. In the processing tank in which this work holding jig is used, the support portion of the work holding jig is reciprocally swung in the first direction to remove air bubbles adhering to the work. At that time, air bubbles can be efficiently removed by appropriately setting the orientation of the work main surface with respect to the reciprocating swing direction.

本発明の各態様（６）（８）によれば、揺動によってワークの表面に処理液の液圧が多く作用する。それにより、ワークの表面、有底孔または貫通孔に停留していた気泡を、液圧によって効率的にワークから除去することができる。 According to the respective aspects (6) and (8) of the present invention, a large amount of hydraulic pressure of the treatment liquid acts on the surface of the work due to the shaking. Thereby, air bubbles staying on the surface of the work, the bottomed hole or the through hole can be efficiently removed from the work by hydraulic pressure.

本発明の一実施形態に係る表面処理装置の断面図である。It is sectional drawing of the surface treatment apparatus which concerns on one Embodiment of this invention. 図２（Ａ）及び図２（Ｂ）は表面処理装置の概略平面図である。2 (A) and 2 (B) are schematic plan views of the surface treatment apparatus. 図１の表面処理装置に用いられるワーク保持治具を示す図である。It is a figure which shows the work holding jig used for the surface treatment apparatus of FIG. 治具搬送部材の連結部に設けられる固定部の平面図である。It is a top view of the fixing part provided in the connecting part of a jig transport member. ローダー／アンローダー部（ローダー部、アンローダー部）で治具保持部が下降した状態を示す図である。It is a figure which shows the state which the jig holding part was lowered in the loader / unloader part (loader part, unloader part). ローダー／アンローダー部（ローダー部、アンローダー部）で治具保持部が上昇した状態を示す図である。It is a figure which shows the state which the jig holding part is raised in the loader / unloader part (loader part, unloader part). ローダー／アンローダー部（ローダー部、アンローダー部）に配置された治具搬送部材の平面図である。It is a top view of the jig transport member arranged in the loader / unloader part (loader part, unloader part). 図７の位置から治具保持部を４５°だけ回転させた状態を示す図である。It is a figure which shows the state which the jig holding part was rotated by 45 ° from the position of FIG. 図７の位置から治具保持部を９０°だけ回転させた状態を示す図である。It is a figure which shows the state which the jig holding part was rotated by 90 ° from the position of FIG.

以下の開示において、提示された主題の異なる特徴を実施するための多くの異なる実施形態や実施例を提供する。もちろんこれらは単なる例であり、限定的であることを意図するものではない。さらに、本開示では、様々な例において参照番号および／または文字を反復している場合がある。このように反復するのは、簡潔明瞭にするためであり、それ自体が様々な実施形態および／または説明されている構成との間に関係があることを必要とするものではない。さらに、第１の要素が第２の要素に「接続されている」または「連結されている」と記述するとき、そのような記述は、第１の要素と第２の要素とが互いに直接的に接続または連結されている実施形態を含むとともに、第１の要素と第２の要素とが、その間に介在する１以上の他の要素を有して互いに間接的に接続または連結されている実施形態も含む。また、第１の要素が第２の要素に対して「移動する」と記述するとき、そのような記述は、第１の要素及び第２の要素の少なくとも一方が他方に対して移動する相対的な移動を含む。 The following disclosures provide many different embodiments and examples for implementing the different features of the presented subject matter. Of course, these are just examples and are not intended to be limited. In addition, the present disclosure may repeat reference numbers and / or letters in various examples. This repetition is for brevity and clarity and does not itself require a relationship with the various embodiments and / or the configurations described. Further, when the first element is described as "connected" or "connected" to the second element, such a description is such that the first element and the second element are directly connected to each other. An embodiment in which the first element and the second element are indirectly connected or connected to each other with one or more other elements intervening between them, including embodiments connected or connected to. Also includes morphology. Also, when the first element is described as "moving" with respect to the second element, such a description is relative to the movement of at least one of the first element and the second element with respect to the other. Including movement.

図１は、表面処理装置１の断面図である。図１には、ワーク保持治具１０を搬送する治具搬送部材１００と、ワーク保持治具１０に保持される少なくとも一つ、例えば複数のワークＷの表面を処理液Ｑにより処理する処理槽２００とが示されている。表面処理装置１は、図２（Ａ）（Ｂ）に示すように、少なくとも一つ、例えば複数の処理槽２００−１〜２００−ｎ（ｎは複数）を有することができる。複数の処理槽２００−１〜２００−ｎは、メッキ処理等の表面処理槽の他、その表面処理の前後に必要な前処理槽及び/又は後処理槽を含むことができる。処理槽２００では、メッキ液などの処理液ＱにワークＷを浸漬することで、ワークＷを表面処理することができる。 FIG. 1 is a cross-sectional view of the surface treatment apparatus 1. In FIG. 1, a jig transporting member 100 for transporting a work holding jig 10 and a processing tank 200 for treating the surfaces of at least one, for example, a plurality of workpieces W held by the work holding jig 10 with a processing liquid Q. Is shown. As shown in FIGS. 2A and 2B, the surface treatment apparatus 1 can have at least one, for example, a plurality of treatment tanks 200-1 to 200-n (n is a plurality). The plurality of treatment tanks 200-1 to 200-n may include a surface treatment tank for plating and the like, as well as a pretreatment tank and / or a posttreatment tank required before and after the surface treatment. In the treatment tank 200, the work W can be surface-treated by immersing the work W in a treatment liquid Q such as a plating liquid.

図２（Ａ）に示す表面処理装置１Ａは、処理槽２００−１〜２００−ｎが連結された長手方向の一端にローダー／アンローダー部２１０を有する。図２（Ａ）では、ローダー／アンローダー部２１０において、外部から搬入されたワーク保持治具１０が治具搬送部材１００に装着される。ローダー／アンローダー部２１０は、ワーク保持治具１０が装着された治具搬送部材１００を処理槽２００にロードする。例えば治具搬送部材１００は、先ず処理槽２００−１に搬送された後に、処理槽２００−１から２００−ｎに順次間欠送りされながら、複数のワークＷが各処理槽２００−１〜２００−ｎでバッチ処理される。処理が完了すると、ローダー／アンローダー部２１０では、治具搬送部材１００からワーク保持治具１０が取り外される。 The surface treatment apparatus 1A shown in FIG. 2A has a loader / unloader portion 210 at one end in the longitudinal direction to which the treatment tanks 200-1 to 200-n are connected. In FIG. 2A, in the loader / unloader section 210, the work holding jig 10 carried in from the outside is mounted on the jig transporting member 100. The loader / unloader unit 210 loads the jig transfer member 100 to which the work holding jig 10 is mounted into the processing tank 200. For example, in the jig transfer member 100, first, the jig transfer member 100 is first transferred to the processing tank 200-1, and then the plurality of work Ws are sequentially intermittently fed from the processing tanks 200-1 to 200-n, and a plurality of work Ws are transferred to the processing tanks 200-1 to 200-. Batch processing is performed with n. When the process is completed, the work holding jig 10 is removed from the jig transfer member 100 in the loader / unloader unit 210.

図２（Ｂ）に示す表面処理装置１Ｂは、処理槽２００−１〜２００−ｎが連結された長手方向の一端にローダー部２２０を、長手方向の他端にアンローダー部２３０を有する。図２（Ｂ）では、ローダー部２２０において、外部から搬入されたワーク保持治具１０が治具搬送部材１００に装着される。ローダー部２２０は、ワーク保持治具１０が装着された治具搬送部材１００を処理槽２００にロードする。例えば治具搬送部材１００は、処理槽２００−１から２００−ｎに順次間欠送りされながら、複数のワークＷが各処理槽２００−１〜２００−ｎでバッチ処理される。処理が完了すると、アンローダー部２３０では、治具搬送部材１００からワーク保持治具１０が取り外される。 The surface treatment device 1B shown in FIG. 2B has a loader portion 220 at one end in the longitudinal direction to which the treatment tanks 200-1 to 200-n are connected, and an unloader portion 230 at the other end in the longitudinal direction. In FIG. 2B, in the loader section 220, the work holding jig 10 carried in from the outside is mounted on the jig transporting member 100. The loader unit 220 loads the jig transfer member 100 to which the work holding jig 10 is mounted into the processing tank 200. For example, in the jig transfer member 100, a plurality of work Ws are batch-processed in each of the processing tanks 200-1 to 200-n while being sequentially intermittently fed from the processing tanks 200-1 to 200-n. When the process is completed, the work holding jig 10 is removed from the jig transfer member 100 in the unloader unit 230.

ここで、図２（Ａ）に示すローダー／アンローダー部２１０と、図２（Ｂ）に示すローダー部２２０及びアンローダー部２３０には、外力付与装置２５０が配置される。この外力付与装置２５０は、ワーク保持治具１０及び治具搬送部材１００について説明した後に説明する。 Here, the external force applying device 250 is arranged in the loader / unloader section 210 shown in FIG. 2 (A) and the loader section 220 and the unloader section 230 shown in FIG. 2 (B). The external force applying device 250 will be described after the work holding jig 10 and the jig transporting member 100 have been described.

先ず、ワーク保持治具１０について説明する。ワーク保持治具１０は、例えば、本出願人によるPCT/JP2017/034924に開示された治具を用いることができる。ワーク保持治具１０について簡潔に説明すると、図１及び図２に示すように、ワーク保持治具１０は枠体１１を有する。枠体１１の上部には、複数例えば２０枚のワークＷの上端を保持して、ワークＷを垂下して支持する上部クランパー１２が固定されている。ワークＷが薄く、垂下しただけでは撓む場合等には、図１及び図２に示すように、下部クランパー１３がさらに設けられる。下部クランパー１３は枠体１１に対して上下動可能に支持されることが好ましい。こうすると、下部クランパー１３の自重により、ワークＷは下方に向けてテンションが付与され、ワークＷには撓みが生じない。枠体１１には、上方に伸びるアーム１４と、アーム１４の上部に設けられるフック１５とを有する。なお、図１及び図２に示すワーク保持治具１０は一例であり、ワークＷを垂下して保持できれば他の種々のワーク保持治具を用いることができる。 First, the work holding jig 10 will be described. As the work holding jig 10, for example, the jig disclosed in PCT / JP2017 / 034924 by the applicant can be used. Briefly explaining the work holding jig 10, as shown in FIGS. 1 and 2, the work holding jig 10 has a frame body 11. An upper clamper 12 that holds the upper ends of a plurality of, for example, 20 pieces of work W and suspends and supports the work W is fixed to the upper part of the frame body 11. When the work W is thin and bends only by hanging, a lower clamper 13 is further provided as shown in FIGS. 1 and 2. It is preferable that the lower clamper 13 is supported so as to be movable up and down with respect to the frame body 11. In this way, the work W is tensioned downward due to the weight of the lower clamper 13, and the work W does not bend. The frame body 11 has an arm 14 extending upward and a hook 15 provided on the upper portion of the arm 14. The work holding jig 10 shown in FIGS. 1 and 2 is an example, and various other work holding jigs can be used as long as the work W can be hung and held.

ワーク保持治具１０は、図３に示すように、複数のワークＷを撓ませずに平行に配置するバッチ処理用治具とすることができる。結果として、このワーク保持治具１０に保持された複数のワークＷをメッキ浴に浸漬すると、たとえ薄いワークＷであっても隣り合うワークＷ間には無電解メッキ液が流通できる適正な隙間が確保される。それにより、メッキ品質を維持しながら無電解メッキして複数のワークＷをバッチ処理することができる。 As shown in FIG. 3, the work holding jig 10 can be a batch processing jig in which a plurality of work Ws are arranged in parallel without bending. As a result, when a plurality of work Ws held by the work holding jig 10 are immersed in the plating bath, even if the work W is thin, there is an appropriate gap between adjacent work Ws so that the electroless plating solution can flow. Secured. As a result, a plurality of work Ws can be batch-processed by electroless plating while maintaining the plating quality.

次に、治具搬送部材１００について説明する。治具搬送部材１００は、図１に示すように、複数のワークＷを垂下して保持するワーク保持治具１０が着脱自在に装着される治具保持部１１０と、治具保持部１１０を支持する支持部１２０と、治具保持部１１０と支持部１２０とを連結する連結部１３０とを有する。連結部１３０は、外力が付与されている時に治具保持部１１０と支持部１２０との連結が解除され、外力が解除されている時に治具保持部１１０と支持部１２０とを連結する。連結時には、平面視で治具保持部１１０と支持部１２０との相対角度が異なる複数の連結位置の一つを選択可能である。 Next, the jig transfer member 100 will be described. As shown in FIG. 1, the jig transfer member 100 supports a jig holding portion 110 to which a work holding jig 10 for hanging and holding a plurality of work Ws is detachably mounted, and a jig holding portion 110. It has a support portion 120 to be formed, and a connecting portion 130 for connecting the jig holding portion 110 and the support portion 120. The connecting portion 130 connects the jig holding portion 110 and the supporting portion 120 when the external force is applied, and connects the jig holding portion 110 and the supporting portion 120 when the external force is released. At the time of connection, one of a plurality of connection positions having different relative angles between the jig holding portion 110 and the support portion 120 in a plan view can be selected.

治具搬送部材１００の治具保持部１１０は、ワーク保持治具１０のフック１５が着脱自在に懸垂支持する懸垂支持部１１１を有する。懸垂支持部１１１は、フック１５を位置決めする位置決め部１１１Ａを備える。ワーク保持治具１０のフック１５が位置決め部１１１Ａに案内されて図３に示すように懸垂支持部１１１に支持されることにより、ワーク保持治具１０が懸垂支持される。治具保持部１１０は、懸垂支持部１１１より上方に伸びる被案内部例えば断面円形の垂直軸部１１２をさらに有する。垂直軸部１１２は、上限ストッパー１１３を有することができる。 The jig holding portion 110 of the jig conveying member 100 has a hanging support portion 111 on which the hook 15 of the work holding jig 10 is detachably suspended and supported. The suspension support portion 111 includes a positioning portion 111A for positioning the hook 15. The work holding jig 10 is suspended and supported by the hook 15 of the work holding jig 10 being guided by the positioning portion 111A and supported by the suspension support portion 111 as shown in FIG. The jig holding portion 110 further includes a guided portion, for example, a vertical shaft portion 112 having a circular cross section, which extends upward from the suspension support portion 111. The vertical shaft portion 112 can have an upper limit stopper 113.

治具搬送部材１００の支持部１２０は、被案内部である垂直軸部１１２を昇降可能に案内する例えば円形の孔１２１Ａを備えた案内部１２１を有する。支持部１２０は、案内部１２１に連結された被係止部１２２と、被係止部１２２に連結された被搬送部１２３とをさらに有する。治具搬送部材１００の被係止部１２２は、図２（Ａ）（Ｂ）に示す表面処理装置１Ａ，１Ｂにおいて治具搬送部材１００が停止される各位置（処理槽２００−１〜２００−ｎ、ローダー／アンローダー部２１０、ローダー部２２０及びアンローダー部２３０）に配置された係止部２４０に係止される。それにより、ワーク保持治具１０が装着された治具搬送部材１００を各位置にて停止支持できる。治具搬送部材１００は、被搬送部１２３が図示しない搬送部と係合されて間欠搬送される。こうして、ワーク保持治具１０が装着された治具搬送部材１００を各位置に向けて間欠搬送できる。 The support portion 120 of the jig transfer member 100 has a guide portion 121 provided with, for example, a circular hole 121A that guides the vertical shaft portion 112, which is a guided portion, so as to be able to move up and down. The support portion 120 further includes a locked portion 122 connected to the guide portion 121 and a conveyed portion 123 connected to the locked portion 122. The locked portion 122 of the jig transfer member 100 is located at each position (treatment tanks 200-1 to 200-) at which the jig transfer member 100 is stopped in the surface treatment devices 1A and 1B shown in FIGS. n, the loader / unloader section 210, the loader section 220, and the unloader section 230) are locked to the locking section 240. As a result, the jig transfer member 100 to which the work holding jig 10 is mounted can be stopped and supported at each position. The jig transport member 100 is intermittently transported by engaging the transported portion 123 with a transport portion (not shown). In this way, the jig transfer member 100 to which the work holding jig 10 is mounted can be intermittently transported toward each position.

治具搬送部材１００の連結部１３０は、垂直軸部１１２の上部に固定されて垂直軸部１１２と共に移動する可動部１３１と、可動部１３１と対面して案内部１２１に配置される固定部１３２とを含む。なお、固定部１３２は案内部１２１と一体であっても良い。可動部１３１と固定部１３２との一方、例えば固定部１３２に、図４に示すように複数の係合部例えば孔１３２Ａまたは凹部が設けられる。可動部１３１と固定部１３２との他方、例えば可動部１３１に、少なくとも一つ例えば複数の被係合部であるピン１３１Ａが設けられる。 The connecting portion 130 of the jig transfer member 100 is a movable portion 131 that is fixed to the upper portion of the vertical shaft portion 112 and moves together with the vertical shaft portion 112, and a fixed portion 132 that is arranged on the guide portion 121 facing the movable portion 131. And include. The fixed portion 132 may be integrated with the guide portion 121. As shown in FIG. 4, a plurality of engaging portions such as holes 132A or recesses are provided in one of the movable portion 131 and the fixed portion 132, for example, the fixed portion 132. On the other side of the movable portion 131 and the fixed portion 132, for example, the movable portion 131 is provided with at least one pin 131A which is, for example, a plurality of engaged portions.

図５は、ローダー／アンローダー部２１０（ローダー部２２０、アンローダー部２３０）に配置される外力付与装置２５０を示す図である。外力付与装置２５０は、治具保持部１１０を昇降させる昇降部２６０と、上昇された治具保持部１１０を水平面内で回転させる回転部２７０とを有する。図５に示す実施形態では、回転部２７０が昇降部２６０を回転させる例であるが、これに限定されない。 FIG. 5 is a diagram showing an external force applying device 250 arranged in the loader / unloader unit 210 (loader unit 220, unloader unit 230). The external force applying device 250 has an elevating portion 260 for raising and lowering the jig holding portion 110, and a rotating portion 270 for rotating the raised jig holding portion 110 in a horizontal plane. In the embodiment shown in FIG. 5, the rotating portion 270 rotates the elevating portion 260, but the present invention is not limited to this.

昇降部２６０は、図６に示すように、昇降駆動部２６１と、昇降駆動部２６１により昇降される昇降軸２６２と、昇降軸２６２に固定されたプッシュロッド２６３と、を含むことができる。昇降駆動部２６１により、プッシュロッド２６３は、図５に示す下降位置から矢印Ａ方向に移動して、図６に示す上昇位置に設定される。図６に示す上昇位置では、プッシュロッド２６３が治具保持部１１０の懸垂支持部１１１を押し上げる。治具搬送部材１００のうち、支持部１２０は係止部２４０に係止される一方で、治具保持部１１０が支持部１２０に対して上昇移動される。この上昇移動は、治具保持部１１０のストッパー１１３が案内部１２１の下面に当接することで停止される。 As shown in FIG. 6, the elevating unit 260 can include an elevating drive unit 261, an elevating shaft 262 that is elevated by the elevating drive unit 261, and a push rod 263 fixed to the elevating shaft 262. The elevating drive unit 261 moves the push rod 263 from the descending position shown in FIG. 5 in the direction of arrow A, and is set to the ascending position shown in FIG. At the ascending position shown in FIG. 6, the push rod 263 pushes up the suspension support portion 111 of the jig holding portion 110. Of the jig transfer member 100, the support portion 120 is locked to the locking portion 240, while the jig holding portion 110 is moved upward with respect to the support portion 120. This ascending movement is stopped when the stopper 113 of the jig holding portion 110 comes into contact with the lower surface of the guide portion 121.

図６に示すように、上昇位置で停止されるように外力が付与されている時に、治具保持部１１０と支持部１２０とを連結する連結部１３０での連結が解除される。なぜなら、治具保持部１１０の垂直軸１１２に固定された可動部１３１が、支持部１２０の案内部１２１に配置された固定部１３２から離れ、ピン１３１Ａと孔１３２Ａとの係合が解除されるからです。 As shown in FIG. 6, when an external force is applied so as to stop at the ascending position, the connection at the connecting portion 130 connecting the jig holding portion 110 and the supporting portion 120 is released. This is because the movable portion 131 fixed to the vertical axis 112 of the jig holding portion 110 is separated from the fixed portion 132 arranged in the guide portion 121 of the support portion 120, and the engagement between the pin 131A and the hole 132A is released. Because.

図６に示す上昇位置で、回転部２７０が回転される。それにより、回転部２７０に搭載されている昇降部２６０が回転される。昇降部２６０に支持されている治具保持部１１０は、案内部１２１の孔１２１Ａに挿通されている垂直軸部１１２の軸周りで矢印Ｂ方向に回転させられる。こうして、平面視で、支持部１２０に対して治具保持部１１０が回転される。 The rotating portion 270 is rotated at the ascending position shown in FIG. As a result, the elevating part 260 mounted on the rotating part 270 is rotated. The jig holding portion 110 supported by the elevating portion 260 is rotated in the direction of arrow B around the axis of the vertical shaft portion 112 inserted through the hole 121A of the guide portion 121. In this way, the jig holding portion 110 is rotated with respect to the supporting portion 120 in a plan view.

その後、昇降部２６０により、プッシュロッド２６３が図６の上昇位置から図５の下降位置まで下降される。それにより、治具保持部１１０の垂直軸１１２に固定された可動部１３１が下降され、ピン１３１Ａが、回転後の固定部１３２の複数の孔１３２Ａのうち対向する孔１３２Ａに係合される。こうして、平面視で治具保持部１１０と支持部１２０との相対角度が異なる複数の連結位置の一つが選択される。 After that, the push rod 263 is lowered from the ascending position in FIG. 6 to the descending position in FIG. 5 by the elevating portion 260. As a result, the movable portion 131 fixed to the vertical axis 112 of the jig holding portion 110 is lowered, and the pin 131A is engaged with the opposing holes 132A among the plurality of holes 132A of the fixed portion 132 after rotation. In this way, one of a plurality of connecting positions having different relative angles between the jig holding portion 110 and the supporting portion 120 in a plan view is selected.

ローダー／アンローダー部２１０またはローダー部２２０で上記動作が実施された治具搬送部材１００は、処理槽２００−１〜２００−ｎに順次移動され、処理が完了するとローダー／アンローダー部２１０またはアンローダー部２３０へ移動される。ローダー／アンローダー部２１０またはアンローダー部２３０では、上述された昇降動作及び回転動作により、治具搬送部材１００は初期状態に戻される。 The jig transfer member 100 whose loader / unloader unit 210 or loader unit 220 has performed the above operation is sequentially moved to the processing tanks 200-1 to 200-n, and when the processing is completed, the loader / unloader unit 210 or the unloader unit 210 or the unloader unit 100 is moved. It is moved to the loader unit 230. In the loader / unloader unit 210 or the unloader unit 230, the jig transfer member 100 is returned to the initial state by the above-mentioned elevating and rotating operations.

図７〜図９は、処理槽２００に配置されたワーク保持治具１０またはワークＷの状態を示す平面図である。図７は、治具搬送部材１００の治具保持部１１０が回転されていない初期状態を示している。図８は、治具搬送部材１００の治具保持部１１０が図７の位置から４５°回転された状態を示す。図８は、治具搬送部材１００の治具保持部１１０が図７の位置から９０°回転された状態を示す。 7 to 9 are plan views showing a state of the work holding jig 10 or the work W arranged in the processing tank 200. FIG. 7 shows an initial state in which the jig holding portion 110 of the jig transport member 100 is not rotated. FIG. 8 shows a state in which the jig holding portion 110 of the jig transport member 100 is rotated by 45 ° from the position shown in FIG. FIG. 8 shows a state in which the jig holding portion 110 of the jig transport member 100 is rotated by 90 ° from the position shown in FIG.

ここで、処理槽２００は、治具搬送部材１００を第１方向に往復揺動させる揺動部を含む。この揺動部の機構については省略するが、例えば偏心カム機構などを用いて治具搬送部材１００を往復揺動する。図７において往復揺動方向がＹ軸方向と平行であれば、治具搬送部材１００の治具保持部１１０を回転させる必要性は乏しい。しかし、図７において往復揺動方向がＸ軸方向と平行であれば、治具搬送部材１００の治具保持部１１０を回転させる必要が生じる。なぜなら、ワークＷの主面が往復揺動方向Ｘ（第１方向）と平行となり、揺動による気泡の除去効果が少ないからである。 Here, the processing tank 200 includes a swinging portion that swings the jig transport member 100 back and forth in the first direction. Although the mechanism of the swinging portion is omitted, for example, an eccentric cam mechanism or the like is used to swing the jig transport member 100 back and forth. If the reciprocating swing direction is parallel to the Y-axis direction in FIG. 7, there is little need to rotate the jig holding portion 110 of the jig transport member 100. However, if the reciprocating swing direction is parallel to the X-axis direction in FIG. 7, it is necessary to rotate the jig holding portion 110 of the jig transport member 100. This is because the main surface of the work W is parallel to the reciprocating swing direction X (first direction), and the effect of removing air bubbles due to the swing is small.

そこで、例えば図８または図９に示すように、治具搬送部材１００の治具保持部１１０を回転させて、ワークＷの主面が往復揺動方向Ｘ（第１方向）と非平行となるように設定する。なお、治具保持部１１０の回転角度は、図８または図９は一例であり、他の種々の角度に設定しても良い。ワークＷの主面が往復揺動方向Ｘ（第１方向）と非平行となるように角度設定されると、揺動によってワークＷの主面に処理液Ｑの液圧が多く作用する。それにより、ワークＷの表面、有底孔または貫通孔に停留していた気泡を、液圧によって効率的にワークＷから除去することができる。 Therefore, for example, as shown in FIG. 8 or 9, the jig holding portion 110 of the jig transport member 100 is rotated so that the main surface of the work W becomes non-parallel to the reciprocating swing direction X (first direction). To set. The rotation angle of the jig holding portion 110 is shown in FIG. 8 or 9 as an example, and may be set to various other angles. When the angle is set so that the main surface of the work W is non-parallel to the reciprocating swing direction X (first direction), a large amount of hydraulic pressure of the treatment liquid Q acts on the main surface of the work W due to the swing. As a result, air bubbles staying on the surface, bottomed hole or through hole of the work W can be efficiently removed from the work W by hydraulic pressure.

１，１Ａ，１Ｂ…表面処理装置、１０…ワーク保持治具、１００…治具搬送部材、１１０…治具保持部、１１１…懸垂支持部、１１２…被案内部（垂直軸部）、１１３…ストッパー、１２０…支持部、１２１…被案内部、１２１Ａ…孔、１３０…連結部、１３１…可動部、１３１Ａ…被係合部（ピン）、１３２…固定部、１３２Ａ…係合部（孔）、２００，２００−１〜２００−ｎ…処理槽、２１０…ローダー／アンローダー部、２２０…ローダー部、２３０…アンローダー部、２４０…係止部、２５０…外力付与部、２６０…昇降部、２６３…プッシュロッド、２７０…回転部、Ｑ…処理液、Ｗ…ワーク 1,1A, 1B ... Surface treatment device, 10 ... Work holding jig, 100 ... Jig transfer member, 110 ... Jig holding part, 111 ... Suspended support part, 112 ... Guided part (vertical axis part), 113 ... Stopper, 120 ... Support part, 121 ... Guided part, 121A ... Hole, 130 ... Connecting part, 131 ... Movable part, 131A ... Engaged part (pin), 132 ... Fixed part, 132A ... Engaging part (hole) , 200, 200-1 to 200-n ... Processing tank, 210 ... Loader / unloader section, 220 ... Loader section, 230 ... Unloader section, 240 ... Locking section, 250 ... External force applying section, 260 ... Elevating section, 263 ... Push rod, 270 ... Rotating part, Q ... Processing liquid, W ... Work

Claims (8)

ワークを垂下して保持するワーク保持治具が着脱自在に保持され、垂直軸部を有する治具保持部と、
前記垂直軸部を昇降可能及び回転可能に案内する孔を有する案内部を含み、前記治具保持部を支持する支持部と、
前記治具保持部と前記支持部とを連結する連結部と、
を有し、
前記連結部は、
前記垂直軸部と共に移動する可動部と、
前記可動部の下方で前記案内部に配置される固定部と、
を含み、
前記可動部と前記固定部との一方に複数の係合部が設けられ、
前記可動部と前記固定部との他方に、前記複数の係合部の少なくとも一つに係合される少なくとも一つの被係合部が設けられ、
前記連結部は、前記治具保持部を上昇させる外力が付与されている時に前記複数の係合部の全てと前記少なくとも一つの被係合部との連結が解除され、前記外力が解除されている時に前記治具保持部と前記支持部とを連結し、連結時には、平面視で前記治具保持部と前記支持部との前記垂直軸部周りの相対角度が異なる複数の連結位置の一つを選択可能であることを特徴とする治具搬送部材。 Work holding fixture for holding suspended the work is held detachably, and the jig holding unit that having a vertical axis portion,
A support portion that includes a guide portion having a hole that guides the vertical shaft portion up and down and rotatably, and a support portion that supports the jig holding portion.
A connecting portion that connects the jig holding portion and the supporting portion,
Have,
The connecting part
A movable part that moves together with the vertical axis part,
A fixed portion arranged on the guide portion below the movable portion, and a fixed portion.
Including
A plurality of engaging portions are provided on one of the movable portion and the fixed portion.
At least one engaged portion that is engaged with at least one of the plurality of engaging portions is provided on the other side of the movable portion and the fixed portion.
When an external force for raising the jig holding portion is applied to the connecting portion, the connection between all of the plurality of engaging portions and the at least one engaged portion is released, and the external force is released. One of a plurality of connecting positions in which the jig holding portion and the supporting portion are connected at the time of being connected, and at the time of connecting, the relative angles of the jig holding portion and the supporting portion with respect to the vertical axis portion are different in a plan view. A jig transfer member characterized in that the above can be selected. 請求項１において、
前記可動部は、前記垂直軸部の上部に固定されることを特徴とする治具搬送部材。 In claim 1,
The movable portion is a jig transport member characterized in that the movable portion is fixed to an upper portion of the vertical shaft portion. 請求項１または２において、
前記係合部は、前記少なくとも一つの被係合部が嵌入される孔または凹部であることを特徴とする治具搬送部材。 In claim 1 or 2,
The jig transporting member is characterized in that the engaging portion is a hole or a recess into which the at least one engaged portion is fitted. 請求項１乃至３のいずれか一項において、
前記垂直軸部は、前記治具保持部の上昇移動を規制する上限ストッパを有することを特徴とする治具搬送部材。 In any one of claims 1 to 3 ,
The jig transport member is characterized in that the vertical shaft portion has an upper limit stopper that regulates the ascending movement of the jig holding portion. 請求項１乃至４のいずれか一項に記載された治具搬送部材であって、ワークを垂下して保持するワーク保持治具が前記治具保持部に着脱自在に装着される治具搬送部材と、
前記ワーク保持治具に保持される複数のワークの表面を処理液により処理する処理槽と、
外部から搬入される前記ワーク保持治具を前記治具搬送部材の前記治具保持部に装着して、前記治具搬送部材を前記処理槽にロードするローダー部と、
を有し、
前記処理槽は、前記治具搬送部材を第１方向に沿って往復揺動させる揺動部を含み、
前記ローダー部は、
前記治具搬送部材の前記治具保持部を昇降させる昇降部と、
上昇された前記治具保持部を水平面内で回転させる回転部と、
を含むことを特徴とする表面処理装置。 The jig transfer member according to any one of claims 1 to 4, wherein a work holding jig that suspends and holds the work is detachably attached to the jig holding portion. When,
A treatment tank that treats the surfaces of a plurality of works held by the work holding jig with a treatment liquid, and
A loader unit for mounting the work holding jig carried in from the outside on the jig holding portion of the jig transporting member and loading the jig transporting member into the processing tank.
Have ,
Pre Symbol treatment tank includes a swinging portion reciprocatingly oscillating the jig conveying member along the first direction,
The loader unit
An elevating part that raises and lowers the jig holding part of the jig transport member, and an elevating part.
A rotating part that rotates the raised jig holding part in a horizontal plane, and a rotating part.
A surface treatment device comprising. 請求項５において、
前記回転部は、前記治具保持部に保持される前記複数のワークの前記表面が前記第１方向と非平行となるように、前記治具保持部を回転させることを特徴とする表面処理装置。 In claim 5,
The rotating portion is a surface treatment apparatus characterized in that the jig holding portion is rotated so that the surfaces of the plurality of workpieces held by the jig holding portion are not parallel to the first direction. .. 請求項１乃至４のいずれか一項に記載された治具搬送部材であって、ワークを垂下して保持するワーク保持治具が前記治具保持部に着脱自在に装着される治具搬送部材と、
前記ワーク保持治具に保持される複数のワークの表面を処理液により処理する処理槽と、
外部から搬入される前記ワーク保持治具を前記治具搬送部材の前記治具保持部に装着して、前記治具搬送部材を前記処理槽にロードするローダー部と、を有する表面処理装置で、前記複数のワークを表面処理する方法であって、
前記ローダー部で、
前記治具搬送部材の前記治具保持部を上昇させる工程と、
上昇された前記治具保持部を水平面内で回転させる工程と、
その後、前記治具保持部を下降させる工程と、
を含むことを特徴とする表面処理方法。 The jig transfer member according to any one of claims 1 to 4, wherein a work holding jig that suspends and holds the work is detachably attached to the jig holding portion. When,
A treatment tank that treats the surfaces of a plurality of works held by the work holding jig with a treatment liquid, and
And mounting the work holding jig is carried externally on the jig holding portion of the jig conveying member, the jig conveying member in the surface treatment apparatus for organic and a loader unit for loading into the processing tank , A method of surface-treating the plurality of workpieces.
In the loader section
The step of raising the jig holding portion of the jig transport member and
The process of rotating the raised jig holding portion in a horizontal plane, and
After that, the step of lowering the jig holding portion and
A surface treatment method comprising. 請求項７において、
前記処理槽は、前記治具搬送部材を第１方向に沿って往復揺動させる揺動部を含み、
前記回転工程は、前記治具保持部に保持される前記複数のワークの前記表面が前記第１方向と非平行となるように、前記治具保持部を回転させることを特徴とする表面処理方法。 In claim 7,
The processing tank includes a swinging portion that swings the jig transport member back and forth along the first direction.
The rotation step is a surface treatment method characterized in that the jig holding portion is rotated so that the surfaces of the plurality of workpieces held by the jig holding portion are not parallel to the first direction. ..
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JP6117891B2 (en) * 2015-10-29 2017-04-19 アルメックスＰｅ株式会社 Surface treatment equipment
MY195297A (en) * 2016-09-29 2023-01-12 Almex Pe Inc Workpiece Holding Jig and Method for Attaching Workpiece to Workpiece Holding Jig

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CN113056576A (en) 2021-06-29
TW202037546A (en) 2020-10-16

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