JP5602553B2 - Surface treatment equipment - Google Patents

Description

  The present invention relates to a surface treatment apparatus having a surface treatment tank and a pretreatment tank.

  2. Description of the Related Art As a surface treatment apparatus, for example, an electroplating treatment apparatus for plating a work surface, a continuous plating treatment apparatus that continuously conveys a work such as a circuit board in a plating tank is known. The workpiece is suspended and held by a conveyance jig conveyed along the power supply rail (guide rail), and is continuously conveyed in the plating tank while being fed from the power supply rail via the conveyance jig. In the plating tank, anodes are arranged on both sides of the work conveyance path serving as a cathode, and an electric field is formed between the cathode and the anode to electrolyze the plating solution to plate the work surface.

  Here, a structure in which a power supply rail is arranged above the plating tank (Patent Document 1) and a structure in which the power supply rail is extended in parallel with the longitudinal direction of the plating tank at a position deviated from above the plating tank are known. (Patent Document 2). The latter structure is excellent in that dust generated when the conveying jig slides on the power supply rail can be prevented from falling into the plating tank.

  The workpiece is a substrate or the like used in an electronic device or a semiconductor device, and a hole such as a through hole that is a through hole or a via hole that is a non-through hole may be formed. The surface treatment apparatus needs to perform surface treatment, for example, plating treatment on the inside of these holes. This is because the through hole is a through hole for conducting the front and back surfaces of the substrate, and the via hole is a non-through hole for conducting the internal wiring to the surface layer, and the inside of the hole portion needs to be plated.

  When bubbles exist in these holes, problems have been pointed out that the inside of the holes is not surface-treated by the bubbles (Patent Documents 3 to 5).

Japanese Patent No. 3025254 Japanese Patent No. 3591721 Japanese Patent Laid-Open No. 11-350187 JP 2004-111893 A JP 2008-308708 A

  In Patent Document 3, an atomized liquid generated by using a two-fluid spray nozzle or ultrasonic waves is applied to the surface of a work to wet the inside of the fine hole, and then plating is performed. In Patent Document 4, by adding ultrasonic waves while immersing a workpiece in an aqueous solution having a surface tension of 300 to 600 μN / cm by adding an anionic surfactant, bubbles in non-through holes of the workpiece are removed. It has been removed. In Patent Document 5, since the work is immersed in a pretreatment solution having a surface tension with respect to the work smaller than that of the plating treatment liquid, and the pretreatment solution has a small contact angle with the inner surface of the micropore, In the meantime, the pretreatment solution enters, and the bubbles filling the inside of the micropores are separated from the inner surface of the micropores.

  However, it is more difficult to remove bubbles that have entered the inside of the hole by simply increasing the wettability of the workpiece, such as by further miniaturizing the diameter of the hole such as a through hole or a via hole.

  In some aspects of the present invention, bubbles attached to the workpiece can be physically removed to improve surface treatment capability.

One embodiment of the present invention provides:
A guide rail,
A transport jig that holds the workpiece guided by the guide rail and transported along a transport direction along the guide rail;
A surface treatment tank for surface-treating the workpiece held by the conveyance jig;
A pretreatment tank that is disposed upstream of the surface treatment tank in the conveyance direction and immerses the workpiece held in the conveyance jig in a treatment liquid; and
Applying vibration to the transfer jig holding the work immersed in the treatment liquid in the pretreatment tank, and a vibration applying unit for vibrating the work in the treatment liquid;
It is characterized by having.

  According to one aspect of the present invention, vibration is applied to the conveying jig that holds the workpiece immersed in the treatment liquid in the pretreatment tank. Thereby, the workpiece vibrates in the processing liquid. As a result, the bubbles adhering to the workpiece can be removed from the workpiece. The bubbles attached to the workpiece include bubbles attached to the workpiece surface. Therefore, the present invention is not necessarily limited to a work with holes. This is because if air bubbles adhere to the surface of the workpiece, the surface treatment capability of that portion is inferior. In addition, when a penetrating or non-penetrating hole is formed in the work, bubbles remaining in the hole are also discharged from the hole by the vibration of the work. In addition, even if the bubbles removed from the hole are reattached to the workpiece surface, the bubbles can be removed from the workpiece surface by the vibration of the workpiece. In this way, air bubbles can be removed from the workpiece by the pretreatment, so that the inner surface of the hole can also be surface treated in the subsequent surface treatment process.

  Here, vibration may be applied to the workpiece being held in the processing liquid and being transferred in the processing liquid, but if the work is stopped in the processing liquid, vibration is applied to the conveying jig. It is preferable in terms of easy. When the workpiece is vibrated in the processing liquid, the bubbles released from the regulation of the surface of the workpiece and the wall of the hole are lifted by buoyancy, so that the bubbles can be physically discharged from the workpiece. . In addition, a vibration provision part can be installed also in a post-processing tank other than a pre-processing tank.

  In one aspect of the present invention, the conveying jig connects the guided portion guided by the guide rail, the holding portion that holds the workpiece in a suspended state, and the guided portion and the holding portion. And the vibration applying unit can apply vibration to the connecting unit of the conveying jig.

  Since the guided portion is engaged with the guide rail, the vibration is easily attenuated. In the holding unit, the holding state of the work is easily affected by vibration. In that respect, if it is a connecting portion, there is no harmful effect as long as the connecting function is maintained.

In one aspect of the present invention, the guide rail extends in parallel with a direction from the pretreatment tank toward the surface treatment tank at a position deviated from above the surface treatment tank and the pretreatment tank, The connecting portion of the conveying jig hangs down from the base end portion on the guided portion side toward the free end portion in the horizontal direction, and hangs down from the free end portion of the horizontal portion toward the holding portion. Hanging part,
The vibration applying unit can apply vibration to the drooping portion.

  The hanging portion to which vibration is applied is connected to the free end portion of the horizontal portion extending from the base end portion of the guided portion supported by the guide rail. For this reason, the workpiece | work can be vibrated effectively in a process liquid by the way to vibrate the free end of a cantilever.

  In one aspect of the present invention, the vibration applying unit may include a striking unit that strikes the transport jig. Although various methods can be considered for applying vibration, the striking unit of the vibration applying unit can apply vibration to the conveying jig by hitting the conveying jig at least once. In particular, by striking the lower part of the weight in the connecting part of the conveying jig and the connecting part, the conveying jig of the cantilever structure can be vibrated effectively. Since this vibration is transmitted to the workpiece, the workpiece can be vibrated in the processing liquid.

  In one aspect of the present invention, the hitting part can move in a direction intersecting the surface of the workpiece and hit the conveying jig. Preferably, the striking part can move in a direction perpendicular to the surface of the workpiece and strike the transport jig. In either case, since the pressure of the processing liquid acts on both surfaces of the workpiece, the processing liquid can serve as a buffer material and can alleviate an excessive impact on the conveying jig.

  In one aspect of the present invention, the vibration imparting portion includes a first arm portion that holds the hitting portion so as to be pivotable around a fulcrum, and a striking position and a standby position around the fulcrum. And a driving unit that reciprocally rotates.

  Thus, the striking part can be reciprocated between the striking position and the standby position by rotating the striking part via the first arm part by the driving part. If the striking part is at the standby position, the striking part does not interfere with the transport path of the transport jig, so that the transport jig can be transported along the transport path. If the striking unit is driven after the transport of the transport jig is stopped, the transport jig can be hit.

  In one aspect of the present invention, the vibration applying unit may further include a stopper unit that contacts the first arm unit at the hitting position.

  If it carries out like this, a striking part can be stopped reliably at a striking position. By providing the stopper portion, even if the conveying jig is not present, the hitting portion can be stopped at a predetermined position, and safety is improved.

  In one aspect of the present invention, the striking portion is fixed to the first arm portion and slidably supported by the fixing portion, and the first arm portion comes into contact with the stopper portion and stops. And a sliding part protruding forward from the fixed part by the inertial force at the time, and the sliding part may hit the conveying jig.

  In this way, if the conveyance jig exists in the middle of the sliding portion moving forward by inertia force or at the moving end, the sliding portion can collide with the conveyance jig and hit the conveyance jig. By doing so, the vibration applying force can be increased.

  In one aspect of the present invention, the vibration applying unit further includes a second arm unit that is driven by the driving unit and moves integrally with the first arm unit around the fulcrum, and the striking unit is held. The first distance from the operating point of the first arm part to the fulcrum may be longer than the second distance from the force point to which the driving force from the driving part is transmitted to the second arm part to the fulcrum. it can.

  If it carries out like this, the moving speed of the hit | damage part when driving a 2nd arm part with the drive force of a drive part will become quick, and the inertial force provided to a sliding part can be increased. Thereby, the impact force given to a conveyance jig by a sliding part can be increased.

It is a schematic plan view of the continuous plating apparatus which concerns on embodiment of this invention. It is a figure explaining the operation | movement which conveys intermittently the conveyance jig | tool to a plating tank, and conveys a conveyance jig continuously in a plating tank. It is a figure explaining the operation | movement which conveys a conveyance jig intermittently in a part of pretreatment tank. It is a figure explaining the operation | movement which conveys a conveyance jig intermittently in the other part of a pre-processing tank. It is a schematic longitudinal cross-sectional view of a plating tank. It is a schematic perspective view of a conveyance jig. It is a side view which shows a pretreatment tank and a vibration provision part. It is a top view of the vibration provision part which has a striking part in a standby position. It is a top view of the vibration provision part which shows the state just before a 1st arm part contact | abuts to a stopper part. It is a top view of the vibration provision part which shows the striking state immediately after the 1st arm part contact | abutted to the stopper part.

  Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the contents of the present invention described in the claims, and all the configurations described in the present embodiment are indispensable as means for solving the present invention. Not necessarily.

1. Overview of Surface Treatment Apparatus FIG. 1 is a plan view of a surface treatment apparatus, for example, a continuous plating treatment apparatus. The continuous plating apparatus 10 includes a circulation conveyance path 100 in which a plurality of conveyance jigs 30 respectively holding workpieces 20 such as circuit boards are circulated and conveyed along, for example, a clockwise circulation conveyance direction A in FIG. In FIG. 1, some of the workpieces 20 and some of the conveying jigs 30 are not shown.

  In the circulation conveyance path 100, a plating tank (surface treatment tank in a broad sense) 200 for surface-treating, for example, plating the workpiece 20 held on each of the plurality of conveyance jigs 30, and the circulation conveyance path 100 more than the plating tank 200. An unprocessed workpiece 20 provided upstream and a carry-in portion 210 for carrying in the plurality of conveyance jigs 30, and a processed workpiece 20 provided downstream of the circulation conveyance path 100 with respect to the plating tank 200 from the plurality of conveyance jigs 30. An unloading unit 220 for unloading is provided.

  The circulation conveyance path 100 includes a first straight conveyance path 110, a second straight conveyance path 120 parallel to the first straight conveyance path 110, and a plurality of circulation conveyance paths 100 from one end of the first straight conveyance path 110 to one end of the second straight conveyance path 120. The first turning device 130 that horizontally delivers at least one of the conveying jigs 30 and the other end of the first straight conveying path 110 from the other end of the second straight conveying path 120 to at least one of the plurality of conveying jigs 30. And a second turning device 140 for horizontally turning and delivering the two.

  In the present embodiment, the plating tank 200 is provided along the second straight conveyance path 120, and the carry-in part 210 and the carry-out part 220 are provided in the first straight conveyance path 110. The circulation conveyance path 100 may further include a pretreatment tank group 230 disposed on the upstream side of the plating tank 200 and a posttreatment tank group 240 disposed on the downstream side of the plating tank 200.

  In the pretreatment tank group 230, for example, a degreasing tank 230 </ b> A, a hot water washing tank 230 </ b> B, a water washing tank 230 </ b> C, a shower tank 230 </ b> D, and a pickling tank 230 </ b> E are sequentially arranged between the carry-in unit 210 and the plating tank 200. Consists of. The post-treatment tank 240 is configured by arranging, for example, a shower tank 240A and a water washing tank 240B in this order from the upstream side between the plating tank 200 and the carry-out unit 220. Note that the number and type of the pretreatment tank group 230 and the posttreatment tank group 240 can be changed as appropriate. Moreover, in the present embodiment apparatus, the work 20 turned by the first turning device 130 is washed in the shower tank 230D during turning. Similarly, the workpiece 20 turned by the second turning device 140 is washed in the shower tank 240A during turning.

  In the pretreatment tank group 230 and the posttreatment tank group 240, the conveyance jig 30 is intermittently conveyed. For this purpose, the pretreatment tank group 230 and the post-treatment tank group 240 are provided with two types of guide rails that convey and guide the conveyance jig 30. One is fixed rails 232, 234, 235, 242, and 243 for intermittently transporting the transport jig 30 in the same processing tank. The other one is elevating rails 231, 233, 236, and 241 that can intermittently convey the conveyance jig 30 across the partition walls between different treatment tanks.

  In the first and second straight conveyance paths 110 and 120 other than the shower tanks 230D and 240A of the pretreatment tank group 230 and the posttreatment tank group 240, one or a plurality of conveyances are performed along the two types of guide rails and the guide rails. The conveying jig 30 is intermittently conveyed by a pusher that moves the jig 30 by a unit distance. The intermittent conveyance operation will be described later with reference to FIGS.

  In the shower tanks 230D and 240A in the pretreatment tank group 230 and the posttreatment tank group 240, the conveyance jig 30 is intermittently conveyed by the first and second turning devices 130 and 140. For this purpose, the first turning device 130 includes two turning rails 131 and 132 that are integrally driven to rotate, and the second turning device 140 includes two turning rails 141 and 142 that are integrally driven to rotate. Have

  For example, in the first turning device 130, the transfer jig 30 is supported on one of the two turning rails 131 and 132 located on the upstream side in the circulation and conveyance direction, and the other located on the downstream side in the circulation and conveyance direction is empty. In this state, the two rolling rails 131 and 132 are integrally and intermittently driven by 180 °. The same applies to the second turning device 140. The work 20 held by the conveying jig 30 that is rotated by the first and second rotating devices 130 and 140 is subjected to shower cleaning in the shower tank 230D or the shower tank 240A. At this time, the shower tanks 230D and 240A do not need to contain a liquid for immersing the workpiece 20, so that even if there is a partition wall, it may be low, and the horizontal conveyance of the workpiece 20 is not hindered.

  As shown in FIG. 1, each of the two rolling rails 131, 132, 141, 142 provided in each of the first and second turning devices 130, 140 is in the stop position at the first, second, The four guide rails 234, 235, 242, and 243 respectively disposed at both ends of the straight conveyance paths 110 and 120 are arranged on a straight line with the corresponding ones.

  The plating tank 200 is provided with a power supply rail (guide rail in a broad sense) 201 that extends in parallel with the longitudinal direction of the plating tank 200 in the plan view of FIG. It has been. The plurality of conveying jigs 30 supported by the power supply rails 201 are arranged in the plating tank 200 and hold the workpieces 20 respectively. Further, a continuous conveyance unit 400 that continuously conveys the plurality of conveyance jigs 30 along the power supply rail 201 is provided along the power supply rail 201. The continuous conveyance operation will be described later with reference to FIG.

  The circulation conveyance path 100 further includes a jig return conveyance path 150 extending from the carry-out section 220 to the carry-in section 210 of the first straight conveyance path 110. The jig return conveyance path 150 includes, for example, two endless chains 151 and 152. The jig return conveyance path 150 has a function of returning and conveying the empty conveyance jig 30 from the carry-out unit 220 to the carry-in unit 210 and a function of waiting the empty conveyance jig 30 on the upstream side of the carry-in unit 210. .

2. FIG. 2 shows a continuous conveyance operation of the conveyance jig 30 in the plating tank 200 and an intermittent conveyance operation of the conveyance jig 30 between the pickling tank 230E and the plating tank 200. It shows. In FIG. 2, among the three transport jigs 30 supported by the lifting rail 236, the leading transport jig 30 indicated by a chain line is transferred from the lift rail 236 to the position indicated by the solid line on the power supply rail 201. The state immediately after is shown.

  In FIG. 2, the lifting rail 236 can be lifted and lowered along the lifting shaft 252 by driving the lifting motor 250. The elevating rail 236 has a length that can support the four conveyance jigs 30, and two or three conveyance jigs 30 are supported in actual driving. Therefore, a space for supporting at least one conveyance jig 30 is provided as an empty space.

  Before the lifting rail 236 is lifted from the state of FIG. 2, the feeding jig 30 (not shown in FIG. 2) in the shower tub 230 </ b> D is fed so as to be supported by the lifting rail 236. . Thus, the elevating rail 236 carrying the three conveying jigs 30 is raised. An upper pusher 260 is disposed at the raised position. The upper pusher 260 has three feeding pieces 264 on the rod 262. The rod 262 can be moved forward and backward by a feed ball screw 268 driven by a feed motor 266.

  On the other hand, a first driving piece 320 is fixed to each of the three conveying jigs 30 instructed by the lifting rail 236. When the elevating rail 236 is raised, the three first drive pieces 320 are disposed in front of the three feed pieces 264 of the upper pusher 260. Thereafter, when the rod 262 is moved forward, the three feed pieces 264 moving forward together with the rod 262 push the three first drive pieces 320, and the three conveying jigs 30 are moved forward by a unit distance. Thus, the leading transport jig 30 is moved from above the pickling tank 230E to above the plating tank 200.

  Thereafter, the lifting rail 236 is lowered. Thereby, the leading conveyance jig 30 is arranged in the plating tank 200 as indicated by a chain line in FIG. Thus, in order to get over the partition wall 237 between different treatment tanks, the transport jig 30 is intermittently transported using the lifting rail 236 and the upper pusher 260.

  The leading conveyance jig 30 (illustrated by a chain line) supported on the lifting rail 236 is transferred from the lifting rail 236 to the power supply rail 201 by the lower pusher 270. The lower pusher 270 has a feed piece 274 supported by the rod 272. On the other hand, the transport jig 30 has a second drive piece 321 that can come into contact with the feed piece 274, and the second drive piece 321 of the leading transport jig 30 supported on the elevating rail 236 serves as the feed piece 274. Arranged forward. Thereafter, when the rod 272 is moved forward, the feed piece 274 moving forward together with the rod 272 pushes the second drive piece 321 and the conveying jig 30 is moved forward in the arrow A direction by a unit distance. Thus, the leading transport jig 30 is moved from above the pickling tank 230E to above the plating tank 200. It is transferred from the elevating rail 236 to the power supply rail 201.

  At this time, the workpiece 20 supported by the subsequent conveyance jig 30 advanced by the rod 272 by the sequential control of the rod 272 is performed on the power supply rail 201 at a low speed and continuously. The workpiece 20 supported by 30 is arranged with a slight gap G. The narrower the gap G, the better. However, it is necessary to prevent interference between the preceding and succeeding workpieces 20, and the design value is set to 10 mm or a dimension before and after that. When the gap G is large, electrolysis concentrates on both ends of the work 20, so that the plating thickness at both ends of the work 20 becomes thick as so-called dog bone (dog bone), and in-plane uniformity cannot be ensured. Because.

  Next, with reference to FIG.3 and FIG.4, the operation | movement which conveys the conveyance jig | tool 30 intermittently in the pretreatment tank group 230 is demonstrated. 3 and 4, similarly to the intermittent transfer operation in FIG. 2, the intermittent transfer operation only in the same tank is performed using the lower pushers 280, 284, 286 and the fixed rails 232, 234, 235 and is different. In the case where the intermittent conveyance operation exceeding the partition wall 237 is included between the tanks, the intermittent conveyance operation is performed using the upper pusher 282 and the lifting rail 233. Although FIG. 4 shows a developed view from the washing tank 230C to the pickling tank 230E, the intermittent conveyance in the shower tank 230D is performed in place of the fixed rail instead of the stationary rail 131 or the rotating rail. 132 is used, and intermittent conveyance between the rolling rail 131 (132) and the fixed rails 234 and 235 before and after the rolling rail 131 (132) is performed by the lower pushers 284 and 286. Although the description of the intermittent transfer operation in the post-processing tank group 240 is omitted, it is performed in the same manner as described above using the rotating rails 141 and 142, the fixed rails 242 and 243, and a lower pusher (not shown).

3. Plating Tank FIG. 5 is a schematic sectional view of the plating tank 200. The plating tank 200 has a frame body 202 having an open top. Two anode boxes 203 are arranged opposite to each other in the frame body 202, and anode balls 203A that are consumables are accommodated in the anode box 203. Two rows of nozzle tubes 204 are arranged between the two anode boxes 203. A plurality of nozzles 204 </ b> A are fixed in a vertical row to each of the two rows of nozzle tubes 204, and the plating solution can be ejected toward both surfaces of the workpiece 20. The lower ends of the two rows of nozzle tubes 204 are respectively fixed to the distribution piping 205.

  On both sides of the workpiece 20, a guide member for conveying and guiding the workpiece 20 and a mask member for masking the upper and lower ends of the workpiece 20 can be provided. Furthermore, the height positions of the guide member and the mask member can be adjusted in accordance with the entire length of the workpiece 20. Since the mask member masks the upper and lower end portions of the work 20, it is possible to prevent the electric field from concentrating on the lower end of the work 20 and increasing the plating thickness.

4). Conveying jig As shown in FIG. 6, the conveying jig 30 that holds the workpiece 20 includes a guided part 300, a connecting part 330, and a holding part 340. The guided portion 300 is a portion guided by the power supply rail 201. The holding part 340 is a part that holds the workpiece 20 in a suspended state. The connecting part 330 is a part that connects the guided part 300 and the holding part 340.

  Here, as shown in FIG. 6, the power supply rail 201 that guides the guided portion 300 has a vertical cross section of an upper surface 201A, a lower surface 201B, a first side surface 201C on the plating tank 200 side, and a first side surface 201C. It is a rectangular cross section which has 2nd side 201D which opposes. The shape of the power supply rail 201 is a guide rail (fixed rails 232, 234, 235, 242, 243, lift rails 231, 233, 236, 241, or rolling rail 131 that intermittently conveys the conveying jig 30 outside the plating tank 200. , 132, 141, 142).

  For example, as illustrated in FIG. 6, the continuous conveyance unit 400 includes a chain 410 and a plurality of toothed blocks 420 fixed to the chain 410.

  The guided portion 300 includes at least one power supplied portion 301 that is in contact with the upper surface 201A of the power supply rail 201, at least one that is in rolling contact with the first side surface 201C of the power supply rail 201, for example, two first rollers 302, and the first portion of the power supply rail 201. At least one, for example, three second rollers 303 that are in rolling contact with the two side surfaces 201 </ b> D, and a meshed portion 304 that meshes with the toothed block 420 of the continuous conveyance means 400. Furthermore, at least one, for example, two third rollers 305 that are in rolling contact with the lower surface 201B of the power supply rail 201 can be provided. Thus, the guided portion 300 having the power-supplied portion 301 that comes into contact with the upper surface 201A of the power supply rail 201 by its own weight is in contact with the first and second rollers 302 so as to sandwich the both side surfaces 201C and 201D of the power supply rail 201. , 303 to the power supply rail 201. Furthermore, by providing the third roller 305 that is in rolling contact with the lower surface 201B of the power supply rail 201, the vertical movement of the conveying jig 30 can be regulated. Since the turning rails 131, 132, 141, and 142 have the same shape as the power supply rail 201, the conveying jig 30 may fluctuate in the horizontal direction or the vertical direction even during the turning operation in which the conveying jig 30 is held on these turning rails. There is no.

  The guided portion 300 itself guided by the power supply rail 201 is provided with a meshed portion 304 that meshes with the toothed block 420 of the continuous conveying means 400 and applies a conveying force to the guided portion 300. 300 is smoothly conveyed on the power supply rail 201. As shown in FIG. 6, the guided portion 300 includes the above-described first and second drive pieces 320 and 321 and a detected piece for sensing the presence or absence of the conveying jig 30 (second detected portion). ) 322 is provided.

  As shown in FIG. 6, the connecting portion 330 of the conveying jig 30 connects the guided portion 300 and the holding portion 340 that are arranged separately from each other. In the present embodiment, since the conveying jig 30 has the shape shown in FIG. 6, the feeding rail 201 that guides the guided part 300 of the conveying jig 30 as shown in FIG. Can be a position deviated from above the plating tank 200. Thereby, dust generated when the guided part 300 slides on the power supply rail 201 does not fall into the plating tank 200. In the present embodiment, the connecting portion 330 is suspended from the base end portion on the guided portion 300 side toward the free end portion in the horizontal direction, and the horizontal portion 331 hangs down from the free end portion of the horizontal portion 331 toward the holding portion 340. And a drooping portion 332.

  The horizontal portion 331 of the connecting portion 330 is placed on the two chains 151 and 152 of the return conveyance path 150 shown in FIG. 1, and the conveyance jig 30 is conveyed back along the return conveyance path 150.

  As shown in FIG. 6, the holding unit 340 includes a plurality of, for example, three chuck units 341 that chuck the upper portion of the workpiece 20. A movable chuck portion can be provided on both sides of the three chuck portions 341 as standard equipment or as an option so that the workpiece 20 having a wide width can be held. The movable chuck portion can be slidable according to the width of the workpiece 20.

5. Pretreatment tank and vibration applying part 5.1. Pretreatment Tank As described above, the pretreatment tank group 230 of this embodiment has a degreasing tank 230A, a hot water washing tank 230B, a water washing tank 230C, a shower tank 230D, and a pickling tank 230E on the upstream side of the plating tank 200. ing. Among these, the pretreatment tank in which the vibration imparting unit 500 described below is disposed is a pretreatment tank in which the workpiece 20 is immersed in the treatment liquid for treatment, and the tanks 230A, 230B, and 230C excluding the shower tank 230D. , 230E. If any one of these is provided with the vibration imparting unit 500, a tank in which a treatment liquid containing a surfactant is preferably used, for example, a degreasing tank 230A. Hereinafter, although described as the pretreatment tank 230A, the same applies to the case where the vibration applying unit 500 is provided in any of the pretreatment tanks 230B, 230C, and 230E other than the degreasing tank 230A. In addition to the pretreatment tank, the vibration imparting unit 500 can also be installed in a posttreatment tank 240B that uses a treatment liquid.

5.2. FIG. 7 shows the application of vibration that vibrates the work 20 in the processing liquid 290 by applying vibration to the conveying jig 30 holding the work 20 immersed in the processing liquid in the pretreatment tank 230A. Part 500 is shown. As shown in FIG. 7, the conveyance jig 30 carried into the pretreatment tank 270 </ b> A is received from the vibration applying unit 500 during, for example, stopping on the guide rail (elevating rail or fixed rail) 231 or 232 shown in FIG. 1. Vibration is applied. Thereby, the workpiece 20 vibrates in the processing liquid 290.

  When the workpiece 20 is vibrated in the treatment liquid 290, bubbles attached to the surface of the workpiece 20 are physically removed from the workpiece 20. When a hole such as a through hole (through hole) or a via hole (non-through hole) is formed in the work 20, the relative position between the bubbles staying in the hole and the hole of the work 20 is It changes according to the vibration period. This is because the hole portion of the workpiece 20 vibrates integrally with the workpiece 20, whereas the bubbles are given a rising force due to buoyancy. In this way, the bubbles released from the restriction of the wall portion of the hole portion rise due to the buoyancy, so that the bubbles can be physically discharged from the hole portion. Bubbles that are excluded from the holes of the workpiece 20 and reattached to the surface of the workpiece 20 are also physically removed from the surface of the workpiece 20 by the vibration of the workpiece 20. The surfactant in the treatment liquid 290 can facilitate the contact of the treatment liquid with the surface or hole of the workpiece 20 and promote the above-described bubble removal action.

  In this way, bubbles can be removed from the surface and holes of the workpiece 20 in the pretreatment tank 230A. Therefore, in the subsequent plating process (surface treatment process) in the plating tank 200, the surface of the workpiece 20 and the inner surfaces of the holes are also removed. Plating treatment (surface treatment) can be performed. In this way, it is possible to prevent a defect without plating from occurring on a part of the surface of the work 20 or a hole. Note that vibration may be applied to the workpiece that is held by the conveyance jig 30 and is being conveyed in the processing liquid 290, but if the workpiece 20 is stopped in the treatment liquid 290, This is preferable because vibration can be easily applied. Furthermore, if the bending rigidity of the workpiece 20 is low, when the workpiece 20 vibrates during conveyance in the processing liquid 290, the hydraulic pressure acting on the workpiece 20 increases with conveyance, and the workpiece 20 may be bent. There is. Also in this sense, it is preferable to vibrate the workpiece 20 that is stopped in the treatment liquid 290.

5.3. Next, the site | part which the vibration provision part 500 provides a vibration to the conveyance jig 30 is demonstrated. As described above, the conveying jig 30 includes the guided portion 300 guided by the guide rail (elevating rail or fixed rail) 231 or 232, the holding portion 340 that holds the workpiece 20 in the suspended state, and the guided portion 300. And a connecting portion 330 that connects the holding portion 340. In the present embodiment, the vibration imparting unit 500 imparts vibration to the connecting portion 330 of the conveying jig 30. Since the guided portion 300 is engaged with the guide rail (fixed rail) 231 or 232, the vibration is easily damped. In the holding unit 340, the holding state of the workpiece 20 is easily affected by vibration. In this respect, the connecting portion 300 is not harmful as long as the connecting function is maintained.

  Here, in this embodiment, as shown in FIGS. 1 and 7, the guide rail (elevating rail or fixed rail) 231 or 232 is located at a position off the upper side of the pretreatment tank 230A. It extends parallel to the transport direction. For this reason, as described above, the connecting portion 300 of the conveying jig 30 includes a horizontal portion 331 extending in the horizontal direction from the base end portion on the guided portion 300 side toward the free end portion, and the free end portion of the horizontal portion 331. And a hanging portion 332 that hangs down toward the holding portion 340. In this case, the vibration applying unit 500 can apply vibration to the drooping portion 332 as shown in FIG.

  Here, the drooping portion 332 to which the vibration is applied is, as shown in FIG. 7, a horizontal portion 331 extending from the base end portion of the guided portion 300 supported by the guide rail (elevating rail or fixed rail) 231 or 232. Connected to the free end. For this reason, the workpiece | work 20 can be effectively vibrated in the process liquid 290 by the procedure which vibrates the free end of a cantilever.

  As described above, as a positional relationship between the processing tank and the guide rail, there is a case where the guide rail is arranged above the processing tank as in Patent Document 1 described above. The present invention can also be applied to the arrangement structure of Patent Document 1. Also in this case, the conveying jig has a guided portion, a holding portion, and a connecting portion having the same functions as described above. However, the connecting portion in this case is formed only by the hanging portion 332 without having the horizontal portion 331. . Therefore, the vibration applying unit 500 can apply vibration to the connecting portion (hanging portion) of the conveying jig.

5.4. Vibration Applying Method of Vibration Applying Unit The vibration applying unit 500 of the present embodiment can include a hitting unit 510 that hits the conveying jig 30 as shown in FIG. Although various methods can be considered for applying vibration, the striking unit 510 of the vibration applying unit 500 can apply vibration to the transport jig 30 by striking the transport jig 30 at least once. Particularly, by striking the hanging portion 332 in the connecting portion 330 of the conveying jig 30 and the connecting portion 330, the conveying jig 30 having a cantilever structure can be vibrated effectively. Since this vibration is transmitted to the workpiece 20, the workpiece 20 can be vibrated in the processing liquid 290.

  Here, as shown in FIG. 7, the striking portion 510 can move in the direction B intersecting the surface of the workpiece 20, preferably in the direction B orthogonal to the surface of the workpiece 20, and strike the conveying jig 30. In this case, the pressure of the processing liquid 290 acts on both surfaces of the workpiece 20, so that the processing liquid 290 acts as a cushioning material, and an excessive impact on the conveying jig 30 can be reduced. Therefore, even if the transport jig 30 is hit, most of the hitting force can be received by the processing liquid 290, and the transport jig 30 is prevented from being damaged. In other words, it is preferable not to hit in the direction parallel to the surface of the workpiece 20. This is because the processing liquid 290 cannot be expected to function as a buffer material in this case. However, since the vibration effect is great, there is no denying that the ball is hit in a direction parallel to the surface of the workpiece 20.

5.5. FIG. 8 to FIG. 10 are plan views of the vibration applying unit 500, and show different states of the vibration applying unit 500, respectively. FIG. 8 shows a standby position of the hitting unit 510, and FIGS. 9 and 10 show a state where the hitting unit 510 has moved from the standby position toward the hitting position.

  As shown in FIGS. 8 to 10, the vibration applying unit 500 includes a first arm unit 520 that holds the striking unit 510 so as to be rotatable around the fulcrum 522, and a first arm unit 520 around the fulcrum 522. Can have a drive unit, for example, an air cylinder 530, which reciprocates between the striking position and the standby position. Thus, the striking part 510 can be reciprocated between the striking position and the standby position by rotating the striking part 510 via the first arm part 520 by the driving part 530. If the striking part 510 is in the standby position, the striking part 510 does not interfere with the transport direction A (transport path 100) of the transport jig 30, so that the transport jig 30 can be transported along the transport direction A (transport path 100). . If the striking unit 510 is driven after the transport of the transport jig 30 is stopped, the transport jig 30 can be hit.

  Here, the vibration imparting unit 500 may further include a stopper unit 540 that contacts the first arm unit at the striking position. In this way, as shown in FIGS. 9 and 10, the striking portion 510 can be reliably stopped at a striking position where the transport direction A of the transport jig 30 and the striking portion 510 intersect, for example, at right angles. The stopper portion 540 can stop the striking portion 510 by contacting the first arm portion 520. By providing the stopper part 510, even if the conveyance jig 30 does not exist, the striking part 510 can be stopped at a predetermined position, and safety is improved.

  The striking portion 510 held by the first arm portion 520 rotated by the air cylinder 530 moves along a rotation locus RT1 shown in FIG. As shown in FIGS. 9 and 10, a stopper portion 540 is provided to stop the striking portion 510 at a position where the transport direction A of the transport jig 30 and the striking portion 510 are orthogonal to each other, for example. As a result, the striking portion 510 can move in the direction B intersecting the surface of the workpiece 20, preferably in the direction perpendicular to the surface of the workpiece 20, as shown in FIG.

  Here, not only the function of simply stopping the stopper portion 540 but also a portion of the striking portion 510 can be used to apply an inertial force. For this purpose, as shown in FIGS. 8 to 10, the striking portion 510 is fixed to the first arm portion 520 and is supported by the fixing portion 512 so as to be slidable, and the first arm portion 520 is And a sliding portion 514 protruding forward from the fixed portion 512 by an inertial force when being brought into contact with the stopper portion 540 and stopped. In this case, the sliding portion 514 hits the conveying jig 30.

  In FIG. 8 where the hitting portion 510 is in the standby position and in FIG. 9 which shows a state immediately before the hitting portion 510 is stopped by the stopper portion 540, the sliding portion 514 is in the retracted position. When the hitting portion 510 is stopped by the stopper portion 540, the fixing portion 512 is also stopped, but as shown in FIG. 10, the sliding portion 514 moves forward by inertial force. When the striking part 510 moves from the position of FIG. 10 to the position of FIG. 8 and the movement of the first arm part 520 is stopped, the sliding part 514 is returned to the original position shown in FIG.

  Here, a flange portion 512 </ b> A can be formed at the tip of the shaft-shaped fixing portion 512. On the other hand, a stepped hole can be formed in the cylindrical sliding portion 514 through which the shaft-like fixing portion 512 is inserted. The sliding portion 514 protrudes forward until the flange portion 512A of the fixing portion 512 is engaged with the step surface of the stepped hole. If the conveyance jig 30 exists in the middle of the sliding part 514 moving forward from the position of FIG. 9 to the position of FIG. 10 or at the moving end, the sliding part 514 collides with the conveyance jig 30 and causes the conveyance jig 30 to move. Can be hit. By doing so, the vibration applying force can be increased.

  In addition, the sensor 550 which detects that the hit | damage part 510 exists in the standby position shown in FIG. 8 can be provided. The sensor 550 can be detected in a non-contact manner, for example, by a change in light or a capacitance value, but may be a contact type. The step of detecting the hitting portion 510 with the sensor 550 can be incorporated into the driving sequence of the hitting portion 510.

  In the present embodiment, the vibration applying unit 500 further includes a second arm unit 524 that is driven by the driving unit 530 and moves integrally with the first arm unit 520 around the fulcrum 522, as shown in FIG. The first distance L1 from the operating point of the first arm where the hitting portion 510 is held to the fulcrum is the second distance from the power point at which the driving force from the driving unit 530 is transmitted to the second arm unit 524 to the fulcrum 522. The distance can be longer than the distance L2.

  If it carries out like this, the moving speed of the hit | damage part 510 when driving the 2nd arm part 524 with the drive force of the drive part 530 will become quick, and the inertial force provided to the sliding part 514 can be increased. Thereby, the impact force applied to the conveyance jig 30 by the sliding part 514 can be increased.

  Here, as shown in FIG. 9 and FIG. 10, the second arm portion 524 moves on the rotation locus RT <b> 2 around the fulcrum 522. Therefore, the air cylinder 530 serving as a drive unit is supported at the rear end of the cylinder 531 so as to be rotatable at the fulcrum 532, and the rod 533 driven forward and backward by the cylinder 532 is connected to the second arm unit 524 via the fulcrum 534. Has been.

  Although the present embodiment has been described in detail as described above, it will be easily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention. For example, a term described at least once together with a different term having a broader meaning or the same meaning in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. All combinations of the present embodiment and the modified examples are also included in the scope of the present invention.

  20 Workpieces, 30 Transfer jig, 100 Circulation transfer path, 200 Surface treatment tank (plating tank), 201 Guide rail (power supply rail), 231 to 236 Guide rail (fixed rail or lifting rail), 300 Guided part, 330 Connection Part, 331 horizontal part, 332 hanging part, 340 holding part, 500 vibration applying part, 510 striking part, 520 first arm part, 522 fulcrum, 524 second arm part, 530 driving part (air cylinder), 540 stopper part

Claims (8)

A guide rail,
A transport jig that holds the workpiece guided by the guide rail and transported along a transport direction along the guide rail;
A surface treatment tank for surface-treating the workpiece held by the conveyance jig;
A pretreatment tank that is disposed upstream of the surface treatment tank in the conveyance direction and immerses the workpiece held in the conveyance jig in a treatment liquid; and
Applying vibration to the transfer jig holding the work immersed in the treatment liquid in the pretreatment tank, and a vibration applying unit for vibrating the work in the treatment liquid;
Have
The transport jig is
A guided portion guided by the guide rail;
A holding unit for holding the workpiece in a suspended state;
A connecting portion for connecting the guided portion and the holding portion;
Have
The surface treatment apparatus , wherein the vibration applying unit applies vibration to the connecting portion of the transport jig . In claim 1,
The guide rail extends in parallel with the direction from the pretreatment tank toward the surface treatment tank at a position deviated from above the surface treatment tank and the pretreatment tank.
The connecting portion of the conveying jig is
A horizontal portion extending in the horizontal direction from the base end portion on the guided portion side toward the free end portion; and
A hanging portion that hangs from the free end portion of the horizontal portion toward the holding portion;
Including
The surface treatment apparatus, wherein the vibration applying unit applies vibration to the hanging portion. In claim 1 or 2 ,
The vibration treatment unit includes a striking unit that strikes the transport jig. In claim 3 ,
The surface treatment apparatus according to claim 1, wherein the striking unit moves in a direction intersecting the surface of the workpiece and strikes the conveying jig. In claim 3 or 4 ,
The vibration applying unit is
A first arm portion for holding the striking portion rotatably around a fulcrum;
A drive unit that reciprocally drives the first arm unit to a striking position and a standby position around the fulcrum;
A surface treatment apparatus comprising: In claim 5 ,
The vibration applying unit is
The surface treatment apparatus further comprising a stopper portion that contacts the first arm portion at the hitting position. In claim 6 ,
The striking part is
A fixed portion fixed to the first arm portion;
A sliding portion that is slidably supported by the fixed portion and protrudes forward from the fixed portion by an inertial force when the first arm portion is brought into contact with the stopper portion and stopped;
Including
The surface treatment apparatus, wherein the sliding portion strikes the conveying jig. In claim 7 ,
The vibration applying unit is
A second arm portion that is driven by the driving portion and moves integrally with the first arm portion around the fulcrum;
The first distance from the operating point of the first arm part where the striking part is held to the fulcrum is the second distance from the force point to which the driving force from the driving part is transmitted to the second arm part to the fulcrum. A surface treatment apparatus characterized by being longer than a distance.

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