JP2009108367A - Surface treatment apparatus of treatment tank switching system and mobile liquid receiving device used in the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface treatment apparatus of treatment tank switching system which can perform a surface treatment of an article to be treated even during working to exfoliate and clean metal particles of palladium or the like, stuck to the inner wall of a treatment tank; and to provide a mobile liquid receiving device which solves the adverse effect caused by carrying-in of a liquid from a previous process. <P>SOLUTION: A first treatment tank 1 and a second treatment tank 2 are parallelly arranged, and a pre-treatment tank 3 and a post-treatment tank 4 are arranged at the front and the rear, respectively, of the first treatment tank in the longitudinal direction. An article W to be treated is carried by switching a first treatment tank carrying route R1 passing through midair positions of a carrying-in part 1A and a carrying-out part 1B of the first treatment tank and a second treatment tank carrying route R2. A mobile liquid receiving device 30 is arranged at the carrying-in part 1A and the carrying-out part 1B of the first treatment tank. In the case when the article to be treated is carried according to the second treatment tank transfer route R2, a mobile liquid receiving part 31 is moved to a position capable of receiving a liquid so as to prevent the carrying-in of the liquid. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a surface treatment apparatus for performing chemical treatment such as chemical copper plating on the surface of an object to be treated such as a substrate, and switches two rows of treatment tanks arranged in parallel to one of the treatment tanks. The present invention relates to a surface treatment apparatus capable of performing surface treatment and a movable liquid receiving apparatus used in the apparatus.

  For example, in a surface treatment operation such as chemical copper plating, if chemical treatment is performed for about a week, metal particles such as palladium adhere to the inner wall of the treatment vessel (chemical solution vessel), resulting in a poor precipitation reaction. In such a case, the cleaning solution is put into the treatment tank from which the chemical solution has been discharged and the metal particles such as palladium adhering to the inner wall are dissolved with the stripping solution for 1 to 2 days. The operation of the processing apparatus must be stopped until the metal particle peeling cleaning operation with the peeling liquid is completed.

  In view of such circumstances, the present invention provides a surface treatment in one treatment tank during a cleaning operation such as dissolution / peeling of metal particles such as palladium adhering to the inner wall of the treatment tank for performing plating or other chemical treatment on the surface of the object to be treated. When the work is stopped, the treatment tank is switched to perform the surface treatment work in the other treatment tank, and the chemical treatment such as chemical copper plating is continuously performed during the cleaning work of one treatment tank. An object of the present invention is to provide a surface treatment apparatus of the type.

  In addition, in the treatment tank switching type surface treatment apparatus provided to solve the above-mentioned problems, the movable liquid used in the treatment tank switching type surface treatment apparatus that can solve the adverse effects caused by the introduction of liquid from the previous process. An object is to provide a receiving device. That is, rinsing of the pretreatment tank attached to the object to be treated in the treatment object carrying-in part of the treatment tank (first treatment tank) during the cleaning operation such as dissolution and peeling of metal particles such as palladium adhering to the inner wall of the treatment tank When the liquid is brought in and the chemical solution in the other processing tank attached to the processing object is brought into the processing object carry-out portion of the processing tank (first processing tank) that is also being cleaned, peeling during the peeling cleaning work The object is to solve the adverse effect of being mixed in the liquid, diluting the stripping solution, and weakening the dissolution / peeling function.

  In order to solve the above problems, a surface treatment apparatus of a treatment tank switching type according to the present invention is a treatment tank that performs plating or other chemical treatment on the surface of an object to be processed, and has one end side in the longitudinal direction of the object to be processed. A first treatment tank, a second treatment tank, and a first treatment tank in which a treatment tank of a long tank having a loading portion and the other end side as a carry-out portion of an object to be processed are arranged in parallel with each other along the longitudinal direction. A pretreatment tank such as a washing tank and a posttreatment tank arranged linearly with the first treatment tank before and after the longitudinal direction, and a workpiece holding for holding (suspending) the workpiece to be surface-treated downward The first and second treatment tanks, the pretreatment tank, and the post-treatment tank are open at the top, and the object to be treated by the conveyance means. The objects to be processed held by the object holder are immersed in the treatment liquids of the pretreatment tank, the first treatment tank, and the posttreatment tank in order. In the surface treatment apparatus configured to be able to be switched to a treatment process and a treatment process that is sequentially immersed in each treatment liquid of the pretreatment tank, the second treatment tank, and the post-treatment tank, The process of conveying the object to be held in the air in the horizontal direction from the position above the pretreatment tank to the position above the carry-in part of the first treatment tank, from the position above the carry-in part vertically into the treatment liquid in the first treatment tank The step of feeding, the step of transporting in the liquid in the horizontal direction while being immersed in the treatment liquid in the first treatment tank from the position in the liquid at the carry-in part to the carry-out part, the process for taking out in the vertical direction from the liquid position in the carry-out part A first processing tank transport process for transporting in the order of a horizontal transport process from the position to the top position of the post-treatment tank, and a horizontal transport from the top position of the pre-treatment tank to the top position of the first process tank This process, this import A path switching process for carrying in the air in the horizontal direction perpendicular to the longitudinal direction of the first processing tank from the upper position to the upper position of the carrying section of the second processing tank, and the vertical direction from the upper position of the loading section into the processing liquid of the second processing tank The process of feeding into the liquid, the process of transporting in the liquid in the horizontal direction while being immersed in the processing liquid in the second processing tank from the position in the liquid in the carry-in part to the carry-out part, the process of taking out in the vertical direction from the liquid in the carry-out part A path switching process for carrying in the air in the horizontal direction perpendicular to the longitudinal direction of the second processing tank from the take-out position to the position above the unloading part of the first processing tank, and in the horizontal direction from the position above the unloading part to the position above the post-processing tank It is characterized in that it is configured to be switched to one of the second process tank transport strokes for transport in the order of the transport stroke.

  Further, in the surface treatment apparatus of the processing tank switching type according to the present invention, the transport means is supported by a rail that supports the workpiece holder so that the workpiece can be transported, and a workpiece holder that is supported by the rail. The rail is arranged in a horizontal state corresponding to the pretreatment tank, and pretreats the object to be treated held by the object holder. A pretreatment section rail that moves up and down to an upper position that is positioned above the tank and a lower position that is immersed in the liquid; and a horizontal position that corresponds to each of the first treatment tank and the second treatment tank. A first processing section rail and a second processing section rail arranged at a lower position where the processing object held in the processing object holding body can be immersed in the liquid of each processing tank, and in a horizontal state corresponding to the post-processing tank The object to be processed which is disposed and held on the object holder is placed above the post-treatment tank. A post-processing section rail vertically moved to an upper position to be positioned and a lower position to be immersed in the liquid, a loading section switching rail disposed in a horizontal state corresponding to the loading section of the processing tank, and unloading of the processing tank And a carry-out section switching rail disposed in a horizontal state corresponding to the section, and when the workpiece holding body is transported according to the first processing tank transport process, the transport section switching rail is at an upper position. It is configured to move up and down to an upper position aligned in series with the end portion of the pretreatment section rail and a lower position aligned in series with the start end of the first treatment section rail of the first treatment tank, In the case where the workpiece holder is transported according to the second processing tank transport process, the upper position aligned in series with the terminal end of the preprocessing section rail at the upper position, and the position above the loading section of the second processing tank. The longitudinal direction of the first treatment tank It is configured to move laterally in an orthogonal direction and move up and down to a lower position aligned in series with the start end of the second processing unit rail at the lateral movement position, and the unloading unit switching rail In the case of transferring the workpiece holder in accordance with the tank transfer process, the starting end of the post-processing section rail at the lower position and the upper position aligned in series with the terminal end of the first processing section rail of the first processing tank In the case where the workpiece holder is transported according to the second processing tank transport process, the second processing section rail of the second processing tank It moves up and down between a lower position and an upper position that are aligned in series with the end portion, and a longitudinal direction of the second processing tank from the upper position to an upper position that is aligned in series with the start end of the post-processing section rail. It is configured to move horizontally in the orthogonal direction, and the push A feeding means for transferring and transferring the workpiece holder supported by the pre-processing section rail along the rail to a loading section switching rail aligned in series with the pre-processing section rail at an upper position; The workpiece holder is transferred from the carry-in portion of the first treatment tank to the carry-out portion along the carry-in portion switching rail, the first processing portion rail, and the carry-out portion switching rail that are aligned in series at the lower position. A first processing unit pushing means capable of transferring the object to be processed held by the holder while being immersed in the processing liquid; the loading unit switching rail aligned in series at the lower position; and the second processing unit rail And the workpiece holder is transferred from the carry-in portion of the second treatment tank to the carry-out portion along the carry-out portion switching rail, and the workpiece to be treated held by the holder can be transferred while being immersed in the treatment liquid. 2Processing part pusher And an unloading push means for transferring and transferring the workpiece holding body, which is transferred and supported by the unloading section switching rail, along the rail to the post-processing section rail aligned in series with the unloading section switching rail at the upper position. It is characterized by comprising.

  Moreover, the movable liquid receiving apparatus used for the surface treatment apparatus of the treatment tank switching type according to the present invention adheres to the object to be treated held by the object holder on the carry-in part and the carry-out part of the first treatment tank. Movable liquid receiving devices each having a substantially box-shaped movable liquid receiving portion that is open upward to receive the fall of the treated liquid, and the movable liquid receiving portion is connected to the carry-in portion in the first processing tank. A liquid receiving position that covers each upper opening of the unloading unit, a workpiece holder that does not cover each upper opening of the loading unit and unloading unit in the first processing tank, and is transported according to the first processing tank transporting process; The movable body is configured to move to a liquid receiving non-permitted position that does not hinder the conveyance of the object to be processed held by the holding body, and when the object holding body is transferred according to the second processing tank transfer process, the movable type is used. The liquid receiver is moved to a position where the liquid can be received, and the first In the case of conveying the workpiece support member in accordance with the physical vessel transferring process is characterized by being configured to move the liquid receiving disable position the movable liquid receiving portion.

  The movable liquid receiving device is characterized in that the movable liquid receiving portion is pivoted so as to be movable between a sideways position where the liquid can be received and a substantially upright position where the liquid cannot be received.

  Further, the movable liquid receiving device is provided with a discharge pipe for discharging the liquid received by the receiving part to the outside of the processing tank, and the bottom of the receiving part is gradually directed toward the discharge pipe. It is characterized by having a slanted shape that is low.

  According to the surface treatment apparatus of the treatment tank switching system according to the present invention, during the cleaning work such as dissolution / peeling of metal particles such as palladium attached to the inner wall of the treatment tank for performing plating or other chemical treatment on the surface of the object to be treated. Even when the surface treatment work in one treatment tank (first treatment tank) is stopped, the treatment tank is switched to perform the surface treatment work in the other treatment tank (second treatment tank), and one treatment tank (first treatment tank) During the cleaning operation, the chemical treatment such as chemical copper plating and other surface treatments can be performed.

  Moreover, according to the surface treatment apparatus of the treatment tank switching system according to the present invention, the second treatment tank is of course used when the object to be treated held by the object holder is conveyed according to the first treatment tank conveyance process. Also when transporting according to the transport process, it is switched and transported via the carry-in section above and the carry-out section above the first processing tank, thereby reducing the cost of equipment and the object holder (object to be treated). Can be made faster.

  Moreover, according to the movable liquid receiving apparatus used in the surface treatment apparatus of the treatment tank switching type according to the present invention, it is possible to solve the adverse effects caused by bringing in liquid from the previous process. That is, the washing liquid of the pretreatment tank attached to the object to be treated is brought into the carry-in portion of the treatment tank (first treatment tank) during the cleaning operation such as dissolution / peeling of metal particles such as palladium adhering to the inner wall of the treatment tank. During the peeling and cleaning operation, the chemical solution of the other processing tank (second processing tank) attached to the object to be processed is brought into the carry-out portion of the processing tank (first processing tank) during the cleaning operation. In the stripping solution, the stripping solution can be diluted, and the adverse effect that the dissolution / stripping function of the stripping solution is weakened by the dilution can be solved. Thus, according to the processing tank switching type surface treatment apparatus according to the present invention in which the movable liquid receiving device is arranged in the carry-in part and the carry-out part of the first treatment tank, as described above, the liquid is brought in from the previous process. Therefore, even when the surface treatment of the object to be processed is performed by switching from the first treatment tank to the second treatment tank, it is switched and transferred via the carry-in section empty position and the unload-out section empty position of the first treatment tank. Therefore, the cost of the equipment can be reduced and the speed of conveyance of the object holder (object to be processed) can be increased. In other words, in the case of the processing tank switching method in which the movable liquid receiving device of the present invention is not provided, the processing tank switching step must be handled before and after the processing tank. The conveyance driving means becomes complicated, for example, because a conveyance means for conveying the workpiece holder (object to be processed) from the switching position outside the tank to the carry-in portion of the second treatment tank is required, and thus conveyance driving troubles are caused. There are many disadvantages in that the cost and maintenance required for transport driving are very high. Further, in the case of the processing tank switching method in which the movable liquid receiving device of the present invention is not provided, the processing tank switching process must be performed before and after the processing tank, and the object to be processed is in the air. There are adverse effects such as longer standing time and increased costs due to the addition of pretreatment tanks and posttreatment tanks. The present invention can solve the above-mentioned adverse effects.

  Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view schematically showing a surface treatment apparatus of a treatment tank switching type according to the present invention, FIG. 1 (A) shows a first treatment tank conveyance process, and FIG. 1 (B) shows a second treatment tank. The conveyance process is shown. FIGS. 2 and 3 show the present invention in which a workpiece holding body for holding the workpiece to be surface-treated downward and a conveying means (rail, pusher means) for conveying the workpiece holding body are added. It is the front view and top view of a surface treatment apparatus of a processing tank switching system.

  The surface treatment apparatus of the treatment tank switching system of the present invention is configured as a treatment tank that performs plating or other chemical treatment on the surface of the object to be treated (in this embodiment, a plating treatment tank that performs surface treatment such as chemical copper plating). ), And the long processing tanks are arranged in parallel with each other along the longitudinal direction, with one end side in the longitudinal direction being a carry-in part for the object to be processed and the other side being a carry-out part for the object to be treated. The first treatment tank 1, the second treatment tank 2, and the washing tank disposed linearly with the first treatment tank 1 before and after the longitudinal direction of the first treatment tank 1 (the immersion transfer direction of the object to be treated) A pretreatment tank 3 and a posttreatment tank 4, a workpiece holder 10 that vertically suspends a workpiece W such as a printed circuit board to be surface-treated, and a conveyor that conveys the workpiece holder 10 And means 20. Each of the first and second treatment tanks 1 and 2 is a continuous long tank without a partition wall, and the workpiece W is introduced into the treatment liquid at one end side (right side in FIGS. 1 to 3) of each treatment tank 1 and 2. The carry-in portions 1A and 2A and the other end side (left side in FIGS. 1 to 3) serve as carry-out portions 1B and 2B from which the workpiece W is taken out from the treatment liquid. The pretreatment tank 3 and the posttreatment tank 4 are formed in a plurality of pretreatment tanks 3 and a plurality of posttreatment tanks 4 by partition walls. Moreover, both the said processing tanks 1, 2, the pre-processing tank 3, and the post-processing tank 4 are the structures which opened the upper part. In this surface treatment apparatus, the workpiece W held by the workpiece holder 10 by the transport means 20 is immersed in each treatment liquid in the pretreatment tank 3, the first treatment tank 1, and the posttreatment tank 4 in order. It can be switched to a processing step to be performed, and a processing step to be sequentially immersed in each processing solution of the pretreatment tank 3, the second treatment tank 2, and the post-treatment tank 4. 1A and 1B, the movable liquid receiver 30 (movable liquid receiver 31) is indicated by a two-dot chain line, which will be described later.

  The workpiece W held on the workpiece holder 10 by the transport means 20 is schematically shown in FIG. 1 (A) and the first treatment tank transport step R1 schematically shown in FIG. 1 (A). It was configured so as to be switched to one of the second treatment tank transport stroke R2 and transported.

  In the first treatment tank transport step R1, the workpiece W held by the workpiece holder 10 is moved from the upper position (upper position) of the pretreatment tank 3 immediately before the pretreatment process to the first treatment tank 1. The process of carrying in the air in the horizontal direction up to the upper position (upper position) of the carry-in part 1A, the process of entering the process liquid in the first treatment tank 1 from the upper position (upper position) of this carry-in part 1A in the vertical direction, The process of carrying in the liquid in the horizontal direction to transfer while being immersed in the treatment liquid of the first treatment tank 1 from the position in the liquid of 1A to the carry-out part 1B of the first treatment tank 1, the unloading part 1B of the first treatment tank 1 The process of taking out in the vertical direction from the submerged position, transporting in the order of the process of transporting in the air in the horizontal direction from this take-out position (above the unloading part 1B) to the over-treatment position of the post-treatment tank 4 immediately after the post-treatment step, in plan view This is a linear transport process. In addition, the substrate as the workpiece W suspended vertically on the workpiece holder 10 is the substrate of the substrate in the air transport / liquid transport process in the horizontal direction in the first processing tank transport process R1. The surface is transported in a posture parallel to the transport direction.

  Further, in the second processing tank transporting step R2, the workpiece W held in the workpiece holding body 10 is transferred from the upper position of the pretreatment tank 3 immediately before the pretreatment process into the carry-in portion of the first treatment tank 1. The process of carrying in the air in the horizontal direction to the upper position of 1A, the first processing tank 1 from the upper position (upper position) of the loading section 1A to the upper position of the loading section 2A located on the start end side of the second processing tank 2 A path switching process for air conveyance in a horizontal direction orthogonal to the longitudinal direction of the first processing tank (that is, in a horizontal direction orthogonal to the horizontal conveyance of the first treatment tank conveyance process R1), In the treatment liquid in the second treatment tank 2 from the position in the liquid of the carry-in part 2A to the carry-out part 2B located on the terminal end side of the second treatment tank 2 The process of transporting in the liquid in the horizontal direction while being immersed in the second treatment tank 2 The process of taking out from the liquid position of the exit part 2B in the vertical direction, from the take-out position (above position of the unloading part 2B) to the overlying position (upper position) of the unloading part 1B of the first treatment tank 1 A path switching process for air transport in a horizontal direction orthogonal to the longitudinal direction (that is, in a horizontal direction orthogonal to the horizontal transport of the first processing tank transport process R1), the unloading portion 1B of the first processing tank 1 This is a transport process having a bypass parallel path in plan view, transported in the order of the process of air transport in the horizontal direction from the upper position (upper position) to the upper position of the post-processing tank 4 immediately after the post-processing step. In addition, the substrate as the workpiece W suspended vertically on the workpiece holder 10 is transported in the horizontal direction in the second processing tank transport step R2 (excluding the air transport in the path switching step). In the process of transporting in liquid, the substrate surface of the substrate is transported in a posture parallel to the transport direction.

  Each of the rails 21 that supports the transporting unit 20 so that the workpiece holder 10 can be transported, and a feed that can sequentially transport and drive the workpiece holder 10 supported by the rail in one direction along the rail. Means 22 are used.

  The rails 21 are arranged in a horizontal state corresponding to the pretreatment tank 3, and an upper position and a liquid for positioning the workpiece W held on the workpiece holder 10 above the pretreatment tank 3. A pretreatment section rail 21A that moves up and down to a lower position to be immersed therein, and a horizontal state corresponding to each of the first treatment tank 1 and the second treatment tank 2, and is held by the workpiece holder 10 Corresponding to the first processing section rail 21C and the second processing section rail 21D, which are fixedly arranged at lower positions where the processed object W can be immersed in the liquids of the processing tanks 1 and 2, respectively. A post-processing section that is disposed horizontally and moves up and down between an upper position where the workpiece W held by the workpiece holder 10 is positioned above the post-treatment tank 4 and a lower position where it is immersed in the liquid. A horizontal state corresponding to the rail 21F and the carrying-in portions 1A and 2A of the processing tanks 1 and 2 A rail 21B switching one loading unit was set, unloading unit 1B of the processing bath 1, it is constituted by one of the unloading unit switching rails 21E which is disposed in a horizontal position in response to 2B.

  The carry-in portion switching rail 21B is in series with the end portion of the pretreatment portion rail 21A located at the upper position when carrying the treatment object holder 10 (the treatment object W) according to the first treatment tank conveyance step R1. Are moved up and down to the upper position aligned in series with the lower end position aligned in series with the starting end of the first processing section rail 21C of the first processing tank 1 at the position, and the second processing tank transport process R2 When the workpiece holder 10 (the workpiece W) is conveyed according to the above, the upper position aligned in series with the end portion of the pretreatment rail 21A at the upper position, and the second treatment tank from this position 2 is moved laterally in a direction perpendicular to the longitudinal direction of the first processing tank 1 (see FIG. 3) to the upper position (upper position) of the second loading section 2A, and the start end of the second processing section rail 21D at the lateral movement position. Move up and down to a lower position aligned in series It is the sea urchin configuration.

  The unloading part switching rail 21 </ b> E is a terminal end of the first processing part rail 21 </ b> C of the first processing tank 1 when transporting the object holder 10 (the object W to be processed) according to the first processing tank transporting process R <b> 1. To the lower position aligned in series with the upper portion and the upper position aligned in series with the start end of the post-processing section rail 21F located in the upper position, and to be processed in accordance with the second processing tank transport process R2 When transporting the holding body 10 (the workpiece W), it moves up and down to a lower position and an upper position aligned in series with the terminal end of the second processing section rail 21D of the second processing tank 2, From the upper position to the upper position aligned in series with the start end of the post-processing section rail 21F, it is configured to move laterally (see FIG. 3) in a direction perpendicular to the longitudinal direction of the second processing tank 2. .

  The pushing means 22 transfers and transfers the workpiece holding body 10 supported by the pretreatment section rail 21A along the rail to the carry-in section switching rail 21B aligned in series with the pretreatment section rail 21A at the upper position. The carry-in pushing means 22A for sequentially transferring from the immediately preceding pretreatment tank 3 to the upper position of the carry-in part 1A of the first treatment tank 1, the carry-in part switching rail 21B aligned in series at the lower position, A workpiece W is transferred from the carry-in portion 1A of the first treatment tank 1 to the carry-out portion 1B along the one treatment portion rail 21C and the carry-out portion switching rail 21E, and is held by the hold body 10. The first processing section pushing means 22B that can be transferred while being immersed in the processing liquid, the loading section switching rail 21B, the second processing section rail 21D, and the like that are serially aligned at the lower position. The workpiece holder 10 is transferred from the carry-in portion 2A to the carry-out portion 2B of the second processing tank 2 along the carry-out portion switching rail 21E, and the workpiece W held by the holder 10 is immersed in the treatment liquid. The second processing unit pushing means 22C that can be transferred while being transferred, and the post-processing unit that aligns the workpiece holder 10 that is transferred and supported by the carry-out unit switching rail 21E in series with the carry-out unit switching rail 21E in the upper position. It is constituted by unloading pushing means 22D for transferring and transferring the object to be processed 10 transferred to the rail 21F along the rail and sequentially transferred along the post-processing section rail 21F. Yes.

  The pushing means (22A, 22B, 22C, 22D) includes a driving rod 23 that reciprocates along a rail track, and an engagement body 24 that is attached to the driving rod 23 at a predetermined interval. In the forward movement in the transport direction (movement in the direction of the arrow), the engaging body 24 engages with the workpiece holding body 10 supported by the rail (the engaging portion 11 protruding from the upper portion of the holding body 10). The holding body 10 is sequentially transferred in one direction along the rail. However, when the driving rod 23 moves backward in the counter-conveying direction (movement in the counter-arrow direction), the object to be processed whose engaging body 24 is supported by the rail. It is configured not to be engaged with the holding body 10 (engagement portion 11 protruding from the upper part of the holding body 10) and to transfer the holding body 10.

  In the pretreatment unit, the workpiece W held by the workpiece holder 10 is immersed in the liquid of the pretreatment tank 3 at the lowered position (lower position) of the pretreatment section rail 21A that moves up and down. At the position), the workpiece W held by the workpiece holder 10 is taken out from the liquid in the pretreatment tank 3 and moved forward (moving in the direction of the arrow) in the transport direction at the taken-up position (upper position). The workpiece holding body 10 is engaged with the engaging body 24 of the carry-in pushing means 22A, and the holding body 10 is conveyed along the rail to the upper position of the next pretreatment tank 3 and finally the holding body. The body 10 is transferred and transferred to the carry-in part switching rail 21 </ b> B waiting at a position above the carry-in part 1 </ b> A of the first processing tank 1.

  In the post-processing section, the workpiece holder 10 supported by the unloading section switching rail 21 </ b> E rising above the unloading section 1 </ b> B of the first processing tank 1 is moved in the transport direction (moving in the arrow direction). ) Is engaged with the engagement body 24 of the carry-out pushing means 22D and is transferred to the post-processing section rail 21F, and is conveyed to an upper position of the post-processing tank 4. At this position, the workpiece W held by the workpiece holder 10 is placed in the liquid of the post-treatment tank 4 at the lowered position (lower position) of the vertically moving post-processing section rail 21F, and is immersed in the liquid. The workpiece W held by the workpiece holder 10 at the (upper position) is taken out of the liquid in the post-treatment tank 4 and moved forward (in the direction of the arrow in the direction of the arrow) at the taken-up position (upward position). The workpiece holder 10 is engaged with the engaging body 24 of the carry-out pushing means 22D that moves, and the holder 10 is conveyed along the rail to the upper position of the next post-treatment tank 4.

  In the surface treatment parts (plating treatment parts) of the first and second treatment tanks 1 and 2, a plurality of stationary positions are set at regular intervals in the conveyance direction by the treatment part pushing means (22B, 22C), The workpiece W held by the object holder 10 is sequentially immersed in a stationary state at each stationary position for a certain time (for example, about 30 seconds), and each stationary position is sequentially transported in the liquid in the transporting direction, and chemical copper plating is performed. The surface treatment is performed.

  In the case where the processing object holding body 10 (and the processing object W held on the holding body 10) is transported according to the second processing tank transporting process R2 in the surface treatment apparatus of the processing tank switching type of the present invention, the processing object The holding body 10 (the workpiece W) is transported in the air in the horizontal direction from the upper position of the pretreatment tank 3 in the pretreatment step to the upper position of the loading section 1A of the first processing tank 1, and the upper position of the loading section 1A. Then, the route is switched over to the upper position of the carry-in part 2A of the second processing tank 2 through the air. At that time, the washing liquid of the pretreatment process attached to the workpiece W is brought into the carry-in part 1A of the first treatment tank 1, and the washing liquid falls into the carry-in part 1A, and the washing liquid is being peeled and cleaned. It is mixed in the stripping solution, and the stripping solution is diluted, resulting in a problem that weakens the dissolution / peeling function. Similarly, when the workpiece holding body 10 (the workpiece W) is transported according to the second processing tank transport step R2, the workpiece W taken out from the unloading portion 2B liquid of the second processing tank 2 is used. Is routed in the air from this take-out position to the upper position of the unloading section 1B of the first processing tank 1, and is passed through the unloading section 1B of the first processing tank 1 in the air to the post-processing tank 4 in the post-processing step. At that time, the treatment liquid (chemical solution) of the second treatment tank 2 attached to the workpiece W is brought into the carry-out portion 1B of the first treatment tank 1, and the first treatment tank 1 is carried out. The processing liquid (chemical liquid) falls on the part 1B, the processing liquid (chemical liquid) is mixed into the peeling liquid during the peeling cleaning work, the peeling liquid is diluted, and the adverse effect of weakening the dissolution / peeling function occurs.

  In order to eliminate such harmful effects, the first processing tank 1 has a loading portion 1A and an unloading portion 1B that are open at the top to receive a drop of the processing liquid adhering to the processing object W held on the processing object holder 10. A movable liquid receiving device 30 having a box-shaped movable liquid receiving portion 31 was provided.

  The movable liquid receiving part 31 includes a liquid receiving position that covers the upper openings of the carry-in part 1A and the carry-out part 1B in the first treatment tank 1, and the carry-in part 1A and the carry-out part 1B in the first treatment tank 1. The workpiece holder 10 that is transported in accordance with the first processing tank transporting stroke R1 and does not cover each upper opening, and is movable to a liquid-reception-impossible position that does not hinder the transport of the workpiece W held by the holder. When the object holder 10 (object W) is conveyed according to the second treatment tank conveyance process R2, the movable liquid receiver 31 is moved to a liquid receivable position. When the workpiece holder 10 (the workpiece W) is transported in accordance with the first processing tank transport step R1, the movable liquid receiver 31 is moved to a liquid unreceivable position. .

  In the embodiment of FIGS. 4 to 6, a sideways position (shown by a solid line in FIG. 4) where the movable liquid receiving portion 31 can be received and a substantially standing position where the liquid cannot be received (shown by a two-dot chain line in FIG. 4) The carry-in part 1A and the carry-out part 1B are pivotally arranged so as to be openable and closable.

  A pivot 33 is pivotally supported on a bearing body 32 disposed between the first and second treatment tanks 1 and 2 so that the axial direction of the pivot is along the longitudinal direction of the treatment tanks 1 and 2. The movable liquid receiving portion 31 is fixed in a reversible manner, and an operation lever 34 is fixed to the pivot 33. An air cylinder (not shown) is connected to the operation end side of the operation lever 34, and the air cylinder reciprocates. The opening and closing of the movable liquid receiving portion 31 can be controlled by driving.

  Further, as shown in FIG. 6, the movable liquid receiving part 31 is provided with a discharge pipe 35 for discharging the liquid received by the receiving part to the outside of the processing tank, and the bottom 31a of the receiving part is connected to the discharge pipe 35. It has an inclined shape that is gradually lowered.

It is the top view which showed the outline of the present invention descriptively. It is the front view which showed the surface treatment apparatus of this invention schematically. It is the top view which showed roughly the surface treatment apparatus of this invention. It is the longitudinal cross-sectional view which showed the movable state of the movable liquid receptacle apparatus of this invention. It is a top view of the movable liquid receptacle apparatus of this invention. It is a longitudinal cross-sectional view of the movable liquid receptacle apparatus which follows the AA arrow line of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st processing tank 2 2nd processing tank 3 Pre-processing tank 4 Post-processing tank 1A Loading part of 1st processing tank 1B Unloading part of 1st processing tank 2A Loading part of 2nd processing tank 2B Unloading part of 2nd processing tank DESCRIPTION OF SYMBOLS 10 To-be-processed object holding body W To-be-processed object R1 1st process tank conveyance process R2 2nd process tank conveyance process 20 Transfer means 21 Rail 21A Pre-processing part rail 21B Carry-in part switching rail 21C 1st process part rail 21D 2nd process part Rail 21E Unloading section switching rail 21F Post-processing section rail 22 Pushing means 22A Loading push means 22B First processing section pushing means 22C Second processing section pushing means 22D Unloading pushing means 30 Movable liquid receiving device 31 Movable liquid receiving section 31a Bottom of movable liquid receiving part 35 Drain pipe

Claims (4)

A treatment tank that performs plating or other chemical treatment on the surface of an object to be treated, and is a long tank treatment tank in which one end side in the longitudinal direction is a carry-in part for the work piece and the other end is a carry-out part for the work piece. A first treatment tank and a second treatment tank arranged in parallel with each other along the longitudinal direction, and a water washing tank arranged linearly with the first treatment tank before and after the longitudinal direction of the first treatment tank. A pre-treatment tank, a post-treatment tank, a workpiece holder that holds a workpiece to be surface-treated downward, and a conveying means that conveys the workpiece holder; Each of the pretreatment tank, the second treatment tank, and the post-treatment tank is sequentially immersed in the treatment liquids of the pretreatment tank, the first treatment tank, and the post-treatment tank. In the surface treatment apparatus configured to be switchable to a treatment process that is sequentially immersed in the treatment liquid,
A step of horizontally conveying the object to be held by the object holder by the conveying means in the horizontal direction from the upper position of the pretreatment tank to the position of the first processing tank in the loading section; The process of vertically feeding into the processing liquid of one processing tank, the process of transporting the liquid in the horizontal direction while being immersed in the processing liquid of the first processing tank from the position in the liquid in the loading section to the unloading section, the liquid in the discharging section A first process tank transporting process for transporting in the order of the process of taking out from the middle position in the vertical direction, the process of transporting in the air in the horizontal direction from this take-out position to the upper position of the post-processing tank, and the first processing tank from the upper position of the pretreatment tank A step of horizontally carrying the air in the horizontal direction up to the carry-in portion above, a path switching step in which the air is carried in the horizontal direction perpendicular to the longitudinal direction of the first treatment tank from the carry-over portion to the over-load position of the second treatment tank, Over the carry-in section A process of vertically feeding the liquid into the processing liquid of the second processing tank from the apparatus, a process of transporting the liquid in the horizontal direction while being immersed in the processing liquid of the second processing tank from the position of the liquid in the loading section to the unloading section, The process of taking out vertically from the position in the unloading part liquid, the path switching process of carrying in the air in the horizontal direction perpendicular to the longitudinal direction of the second processing tank from this take-out position to the position above the unloading part of the first processing tank, Processing tank switching characterized in that it is configured to switch to one of the second processing tank transport strokes for transport in the order of the air transport process in the horizontal direction from the position to the upper position of the post-treatment tank. Surface treatment equipment.   2. The surface treatment apparatus according to claim 1, wherein a substantially box having an upper portion opened to receive a drop of a treatment liquid attached to an object to be processed held by an object holding body in the carry-in portion and the carry-out portion of the first treatment tank. A movable liquid receiving device having a movable liquid receiving portion having a shape, and a liquid receiving position that covers each upper opening of the carry-in portion and the carry-out portion in the first processing tank; The workpiece holder that is not covered with the upper openings of the carry-in portion and the carry-out portion in the first treatment tank and that is conveyed according to the first treatment tank conveyance process, and the conveyance of the workpiece that is held by the holder It is configured to move to an unreceptible liquid receiving position, and when the workpiece holder is transferred according to the second processing tank transfer process, the movable liquid receiving portion is moved to a liquid receiving position, Carries the workpiece holder according to the first treatment tank transport process Device receiving mobile solution used for the surface treatment apparatus of the processing tank switching method which is characterized by being configured to move the liquid receiving disable position the movable liquid receiving portion in the case of.   3. The treatment tank switching type surface treatment apparatus according to claim 2, wherein the movable liquid receiving portion is pivotally disposed so as to be movable between a sideways position where the liquid can be received and a substantially standing position where the liquid cannot be received. Movable liquid receiver for use in   The movable liquid receiving part is provided with a discharge pipe for discharging the liquid received by the receiving part to the outside of the processing tank, and the bottom part of the receiving part is gradually inclined toward the discharge pipe. A movable liquid receiving apparatus used for the surface treatment apparatus of the treatment tank switching type according to claim 2.

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