JP3853093B2 - Automatic cleaning device transport mechanism - Google Patents

Automatic cleaning device transport mechanism Download PDF

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Publication number
JP3853093B2
JP3853093B2 JP31157898A JP31157898A JP3853093B2 JP 3853093 B2 JP3853093 B2 JP 3853093B2 JP 31157898 A JP31157898 A JP 31157898A JP 31157898 A JP31157898 A JP 31157898A JP 3853093 B2 JP3853093 B2 JP 3853093B2
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Japan
Prior art keywords
cleaning
jig
hook
transport mechanism
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP31157898A
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Japanese (ja)
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JP2000102771A (en
Inventor
孝 波多野
光広 浜中
裕之 蓮見
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ULTRASONIC ENGINEERING CO., LTD.
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ULTRASONIC ENGINEERING CO., LTD.
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Priority to JP31157898A priority Critical patent/JP3853093B2/en
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  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Description

【0001】
【産業上の利用分野】
本発明は、特にプリント基板等の板状物の洗浄を行う自動洗浄装置の搬送機構に関するものである。
【0002】
プリント基板等の洗浄を行う自動洗浄装置の搬送機構のひとつにフックアンドプレース方式搬送機構がある。フックアンドプレース方式搬送機構は、図5及び図6に示すように、洗浄処理工程部を構成する洗浄槽の上方に、洗浄槽の数より1個多い数のフックと、このフックに上下動と横移動を行わせる駆動部を積載した搬送台車部により構成され、各々のフックに図7及び図8に示す1〜8の動作を行わせて、洗浄治具を前工程から後工程へ順次搬送する搬送機構である。
【0003】
このフックアンドプレース方式搬送機構による洗浄タクトタイムは、たとえば、被洗浄物の搬送時の垂直方向の寸法が約300mmのプリント基板である場合は、洗浄槽その他の装置の構成部分の関係から被洗浄物の槽間における移動距離(フックの移動距離)は約1400mmとなり搬送に要する時間は33秒必要となる。
【0004】
また、図8のタイムチャートに示すように、必要洗浄時間を15秒とすると、洗浄作業に要する洗浄タクトタイムは搬送時間と洗浄時間の合計から、両者のオーバーラップする時間の5秒を除いた43秒となり、本例のように必要洗浄時間が短い場合は洗浄に供しない搬送時間が洗浄時間を上まわってしまうという欠点があった。
【0005】
このようにフックアンドプレース方式搬送機構では、一定の洗浄時間を確保して洗浄タクトタイムを短縮するためには搬送時間を短縮する、すなわち搬送速度を上げる方法しかなく、搬送速度を上げると被洗浄物を入れる洗浄治具が搬送中揺れたり、搬送動作のスタート、停止時に装置全体にショックによる大きな振動が発生するなど、搬送が不安定になるという問題があり、搬送時間の短縮にはおのずと限界があった。
【0006】
【発明が解決しようとする課題】
本発明は上記従来技術による欠点を解決すべく創案されたもので、フックアンドプレース方式搬送機構とエレベータ機構を組み合わせることにより搬送動作中も一定の必要洗浄時間を確保し、洗浄タクトタイムを短縮した自動洗浄装置の搬送機構を提供することを目的とするものである。
【0007】
上記目的を達成するための第1の手段としての自動洗浄装置の搬送機構は、一方向に順次配列された複数の洗浄槽を備えた自動洗浄装置に設けられ、被洗浄物を前記複数の洗浄槽間にて搬送する搬送機構であって、前記複数の洗浄槽の上方近傍に各々設置されて前記被洗浄物を前記洗浄槽内の下側位置と上側位置とに配置するとともに当該上下間にて搬送するエレベータ機構と、前記複数の洗浄槽の上方に配置されて前記被洗浄物を前記各エレベータ機構の前記上側位置間にて搬送するフックアンドプレース方式機構とを有することを特徴とする。また、第2の手段としての自動洗浄装置の搬送機構は、第1の手段の自動洗浄装置の搬送機構において、前記各エレベータ機構は、一回の動作で前記上側位置にある前記被洗浄物を前記下側位置に、前記下側位置にある前記被洗浄物を前記上側位置に搬送することを特徴とする。図1及び図2に示すように洗浄装置の上方にフックアンドプレース方式搬送機構を、そして、フックアンドプレース方式搬送機構と洗浄槽の間に各洗浄槽に対応させたエレベータ機構を設置する。
【0008】
エレベータ機構は図1、図2及び図3に示すように各洗浄槽の両側に配置したスプロケットと、上下方向にエンドレスに張ったチェインにより構成し、チェインには洗浄治具を吊り下げる治具受けが2個等間隔で取り付けてある。そして一回の動作につきチェインの半分の長さ、すなわち、上側にある治具受けが下側に、下側にある治具受けが上側に移動するようにする。そして、エレベータ機構の停止中にフックアンドプレース方式搬送機構により各々のエレベータ機構の上側の治具受けに吊り下げられている洗浄治具を次工程へ搬送し、次いで各々のエレベータ機構が動作し、エレベータ機構の下側の治具受けに吊り下げられている洗浄治具を上側へ、上側の治具受けに吊り下げられている洗浄治具を下側へ移動する搬送を行わせる。
【0009】
【作用】
上記構成を行えば、フックアンドプレース方式搬送機構によりエレベータ機構の上側にある洗浄治具を移動している間は、エレベータ機構の下側にある洗浄治具内の被洗浄物は洗浄槽内にあり洗浄が行われるため、純粋に搬送のみに要する時間はエレベータ機構の動作のみの時間となり、搬送動作中のほとんどの時間を洗浄に使用することができる。たとえば、従来の例による洗浄タクトタイムは43秒であったが、本発明によれば、図4のタイムチャートに示すように洗浄タクトタイムのうちエレベータ機構の動作時間の6秒間を除く、15秒間の搬送動作時間を洗浄に使用することができるため、洗浄タクトタイムは21秒に短縮することができ、洗浄作業の生産性を上げることができる。
【0010】
【発明の実施の形態】
以下、添付図面を参照して本発明の一実施形態について詳細に説明し、本発明の理解に供する。尚、以下に示す実施形態は駆動にエアーシリンダを用いている本発明を具体化した一実施例であって、本発明の技術的範囲を限定するものではない。
【0011】
ここに、図1は本発明の一実施形態における洗浄装置の搬送機構の全体構成を示す正面図、図2は側面図である。
【0012】
図1において洗浄装置用搬送機構は、フックアンドプレース方式搬送機構1と各々の洗浄槽18〜20及び乾燥槽21の上方両側に設置したエレベータ機構2と、洗浄治具4を洗浄装置内に搬入する搬入コンベア14と、洗浄装置内に搬入された洗浄治具4を所定の高さまで持ち上げる搬入ローダ15と、洗浄処理を終えた洗浄治具4を搬出コンベア17上へ搬送する搬出ローダ16と、洗浄治具4を洗浄装置外に搬出する搬出コンベア17とにより構成する。
【0013】
フックアンドプレース方式搬送機構1は洗浄槽の数より一個多い数のフック3を持つ洗浄治具吊り下げ部6と、洗浄処理工程部に沿って横移動が可能なようになっている搬送台車部5により構成し、洗浄治具吊り下げ部6は上下用シリンダ8により上下動作が行なえるようにリニアガイド7を介して搬送台車部5と連結されている。
【0014】
そして、搬送台車部5に横移動動作を行わせるための横送りシリンダ9と、洗浄治具4の搬送時、洗浄治具4の把手に対してフック3に進入と退避の横移動動作を行わせるエスケープ用シリンダ10を備え、横送りシリンダ9とエスケープ用シリンダ10はカップリングにより連結されている。
【0015】
エレベータ機構2は図3に示すようにスプロケット12を介して上下方向にエンドレスに張られたチェイン11により構成され、洗浄治具4を吊り下げる上側の治具受け13Aと下側の治具受け13Bの2個が取り付けてあり、スプロケット12の回転動作によるチェイン11の移動により、上側の治具受け13Aに吊り下げられている洗浄治具4が下側に、下側の治具受け13Bに吊り下げられている洗浄治具4が上側に移動するようになっている。スプロケット12の回転は、図示してないモーターにより行われる。
【0016】
次に、本実施例における搬送動作を説明する。
【0017】
図1において、洗浄治具4は搬入コンベア14により洗浄装置内に搬入され、搬入ローダ15により一定の高さまで持ち上げられると、フックアンドプレース方式搬送機構1の搬送台車部5のフック3が上下用シリンダ8により下降し、次にエスケープ用シリンダ10により右方向に移動し、洗浄治具4の把手の下に進入すると上下用シリンダ8により上昇し、フック3が洗浄治具4を持ち上げる。
【0018】
次に、横送りシリンダ9の動作により搬送台車部5が左方向に横移動を行ない、槽間距離だけ移動し、次工程のエレベータ機構2の上側治具受け13Aの位置に達すると上下用シリンダ8によりフック3が下降し、次にエスケープ用シリンダ10により左方向に横移動を行なって洗浄治具4の把手から退避し、洗浄治具4の次工程への搬送が終了する。次に上下用シリンダ8によりフック3が上昇すると横送りシリンダ9の動作により搬送台車部5は右方向に横移動を行い初期の位置に戻りフックアンドプレース方式搬送機構の一連の動作を終了する。
【0019】
フック3が上昇した後、所定の洗浄時間が経過した時点でエレベータ機構2が動作し、エレベータ機構2の上側の治具受け13Aに吊り下げてある洗浄治具4が洗浄槽内に下降し、下側の治具受け13Bに吊り下げてある洗浄治具4は洗浄槽の上方に運ばれ次工程への移動を待つ。洗浄槽内に下降した洗浄治具4内にある被洗浄物はこの時点で洗浄が始まる。そして、最終処理工程の乾燥を終了した洗浄治具4は搬出ローダ16により搬出コンベア17上へ搬出される。
【0020】
以上のように被洗浄物を入れた洗浄治具4は、上記の搬送動作を順次繰り返す搬送動作により所定の洗浄処理工程を搬送され洗浄処理が行われる。
【0021】
図4は以上の動作をタイムチャートに表したものであるが、本搬送機構を用いることにより、エレベーター機構2の動作時間を除く搬送時間がオーバーラップして洗浄に使用することができる。
【0022】
【発明の効果】
搬送機構部の動作中のほとんどの時間を、洗浄に使用することができるので、洗浄タクトタイムを短くでき洗浄作業の生産性を上げることができる。
【0023】
【図面の簡単な説明】
【図1】本発明の一実施形態に係る洗浄装置搬送機構の全体構成を示す正面図。
【図2】上記側面図。
【図3】本発明の一実施形態に係るエレベータ機構の説明図。
【図4】本発明の一実施形態に係る洗浄装置搬送機構のタイムチャート図。
【図5】従来の技術によるフックアンドプレース方式搬送機構の正面図。
【図6】上記側面図。
【図7】従来の技術によるフックアンドプレース方式搬送機構のフックの動作説明図。
【図8】上記搬送機構のタイムチャート図。
【0024】
【符号の説明】
1 フックアンドプレース方式搬送機構
2 エレベータ機構
3 フック
4 洗浄治具
5 搬送台車部
6 洗浄治具吊り下げ部
7 リニアガイド
8 上下用シリンダ
9 横送りシリンダ
10 エスケープ用シリンダ
11 チェイン
12 スプロケット
13A 上側治具受け
13B 下側治具受け
14 搬入コンベア
15 搬入ローダ
16 搬出ローダ
17 搬出コンベア
18 噴流洗浄槽
19 超音波洗浄槽
20 リンス槽
21 熱風乾燥槽
[0001]
[Industrial application fields]
The present invention particularly relates to a transport mechanism of an automatic cleaning apparatus that cleans a plate-like object such as a printed circuit board.
[0002]
One of the transport mechanisms of an automatic cleaning apparatus that cleans a printed circuit board or the like is a hook and place transport mechanism. As shown in FIGS. 5 and 6, the hook-and-place transfer mechanism has a number of hooks that is one more than the number of cleaning tanks above the cleaning tank constituting the cleaning processing step unit , and a vertical movement of the hooks. Consists of a transport carriage unit loaded with a drive unit that performs lateral movement. Each hook performs the operations 1 to 8 shown in FIGS. 7 and 8 to sequentially transport the cleaning jig from the previous process to the subsequent process. This is a transport mechanism.
[0003]
The cleaning tact time by the hook-and-place type transport mechanism is, for example, a printed circuit board having a vertical dimension of about 300 mm when transporting an object to be cleaned, due to the relationship between the components of the cleaning tank and other devices. The moving distance between the tanks of the objects (moving distance of the hook) is about 1400 mm, and the time required for conveyance is 33 seconds.
[0004]
In addition, as shown in the time chart of FIG. 8, when the required cleaning time is 15 seconds, the cleaning tact time required for the cleaning operation is excluded from the total of the transport time and the cleaning time, which is 5 seconds of the overlapping time of both. When the necessary cleaning time is short as in this example, there is a disadvantage that the conveyance time not used for cleaning exceeds the cleaning time.
[0005]
As described above, in the hook-and-place type transport mechanism, there is only a method of shortening the transport time, that is, increasing the transport speed in order to secure a certain cleaning time and shorten the cleaning tact time. There is a problem that the cleaning jig that puts the object in motion is unstable during transportation, and there is a problem that the equipment becomes unstable due to large vibrations caused by shocks when the transportation operation starts and stops, which naturally limits the shortening of the transportation time. was there.
[0006]
[Problems to be solved by the invention]
The present invention was devised to solve the above-mentioned drawbacks of the prior art, and by combining the hook-and-place type transport mechanism and the elevator mechanism, a certain necessary cleaning time was ensured even during the transport operation, and the cleaning tact time was shortened. An object of the present invention is to provide a transport mechanism for an automatic cleaning device.
[0007]
A transport mechanism of an automatic cleaning apparatus as a first means for achieving the above object is provided in an automatic cleaning apparatus having a plurality of cleaning tanks sequentially arranged in one direction, and the object to be cleaned is cleaned with the plurality of cleaning objects. A transport mechanism for transporting between the tanks, wherein each of the plurality of cleaning tanks is disposed in the vicinity of the upper side of the plurality of cleaning tanks, and the objects to be cleaned are disposed at a lower position and an upper position in the cleaning tank, and between the upper and lower positions. And an elevator mechanism that conveys the object to be cleaned between the upper positions of the elevator mechanisms. The elevator mechanism conveys the object to be cleaned between the upper positions of the elevator mechanisms. Further, the transport mechanism of the automatic cleaning device as the second means is the transport mechanism of the automatic cleaning device of the first means, wherein each of the elevator mechanisms moves the object to be cleaned in the upper position in one operation. The object to be cleaned at the lower position is transported to the upper position at the lower position. As shown in FIGS. 1 and 2, a hook-and-place transfer mechanism is installed above the cleaning device, and an elevator mechanism corresponding to each cleaning tank is installed between the hook-and-place transfer mechanism and the cleaning tank.
[0008]
As shown in FIGS. 1, 2 and 3, the elevator mechanism is composed of sprockets arranged on both sides of each cleaning tank and a chain stretched endlessly in the vertical direction. Are attached at equal intervals. Then, half the length of the chain per operation, that is, the upper jig receiver moves downward and the lower jig receiver moves upward. And, while the elevator mechanism is stopped, the cleaning jig suspended from the jig receiver on the upper side of each elevator mechanism is transferred to the next process by the hook-and-place transfer mechanism, and then each elevator mechanism is operated. The cleaning jig suspended from the lower jig receiver of the elevator mechanism is moved upward, and the cleaning jig suspended from the upper jig receiver is moved downward.
[0009]
[Action]
With the above configuration, while the cleaning jig on the upper side of the elevator mechanism is moved by the hook and place type transport mechanism, the object to be cleaned in the cleaning jig on the lower side of the elevator mechanism is placed in the cleaning tank. Since the cleaning is performed, the time required for the transportation only becomes the time for the operation of the elevator mechanism, and most of the time during the transportation operation can be used for the cleaning. For example, although the cleaning tact time according to the conventional example is 43 seconds, according to the present invention, as shown in the time chart of FIG. 4, 15 seconds excluding the operation time of the elevator mechanism from the cleaning tact time is 15 seconds. Therefore, the cleaning tact time can be shortened to 21 seconds, and the productivity of the cleaning operation can be increased.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings, in order to understand the present invention. In addition, embodiment shown below is one Example which actualized this invention which uses the air cylinder for a drive, Comprising: The technical scope of this invention is not limited.
[0011]
FIG. 1 is a front view showing the overall configuration of the transport mechanism of the cleaning apparatus in one embodiment of the present invention, and FIG. 2 is a side view.
[0012]
In FIG. 1, the cleaning device transport mechanism carries the hook-and-place transport mechanism 1, the elevator mechanisms 2 installed on both upper sides of the cleaning tanks 18 to 20 and the drying tank 21, and the cleaning jig 4 into the cleaning apparatus. A carry-in conveyor 14, a carry-in loader 15 that lifts the washing jig 4 carried into the washing device to a predetermined height, a carry-out loader 16 that carries the washing jig 4 that has undergone the cleaning process onto the carry-out conveyor 17, The cleaning jig 4 is constituted by a carry-out conveyor 17 that carries out the cleaning apparatus.
[0013]
Hook-and-place type conveying mechanism 1 and the lower portion 6 hanging washing jigs with the number of hooks 3 one more than the number of the cleaning tank, the transport carriage portion along the cleaning process unit so that the possible lateral movement The cleaning jig suspension 6 is connected to the transport carriage 5 via the linear guide 7 so that the vertical movement can be performed by the vertical cylinder 8.
[0014]
Then, the lateral movement cylinder 9 for causing the transport carriage unit 5 to perform the lateral movement operation and the lateral movement operation of entering and retracting the hook 3 with respect to the handle of the cleaning jig 4 are performed when the cleaning jig 4 is transported. An escape cylinder 10 is provided, and the lateral feed cylinder 9 and the escape cylinder 10 are coupled by a coupling.
[0015]
As shown in FIG. 3, the elevator mechanism 2 includes a chain 11 stretched endlessly up and down via a sprocket 12, and includes an upper jig receiver 13A and a lower jig receiver 13B for suspending the cleaning jig 4. The cleaning jig 4 suspended from the upper jig receiver 13A is suspended on the lower side and the lower jig receiver 13B by the movement of the chain 11 caused by the rotational movement of the sprocket 12. The lowered cleaning jig 4 is moved upward. The sprocket 12 is rotated by a motor (not shown).
[0016]
Next, the conveying operation in this embodiment will be described.
[0017]
In FIG. 1, when the cleaning jig 4 is carried into the cleaning device by the carry-in conveyor 14 and is lifted to a certain height by the carry-in loader 15, the hook 3 of the transport carriage unit 5 of the hook-and-place type transport mechanism 1 is used for the vertical movement. The cylinder 8 is lowered by the cylinder 8 and then moved to the right by the escape cylinder 10. When it enters under the handle of the cleaning jig 4, it is raised by the vertical cylinder 8 and the hook 3 lifts the cleaning jig 4.
[0018]
Next, when the carriage 5 is moved leftward by the operation of the lateral feed cylinder 9 and moved by the inter-tank distance, and reaches the position of the upper jig receiver 13A of the elevator mechanism 2 in the next process, the vertical cylinder The hook 3 is lowered by 8 and then moved to the left by the escape cylinder 10 to be retracted from the handle of the cleaning jig 4, and the transport of the cleaning jig 4 to the next process is completed. Next, when the hook 3 is lifted by the vertical cylinder 8, the transport carriage unit 5 moves rightward by the operation of the lateral feed cylinder 9, returns to the initial position, and the series of operations of the hook-and-place transport mechanism is completed.
[0019]
The elevator mechanism 2 operates when a predetermined cleaning time has elapsed after the hook 3 is lifted, and the cleaning jig 4 suspended on the jig receiver 13A on the upper side of the elevator mechanism 2 is lowered into the cleaning tank, The cleaning jig 4 suspended from the lower jig receiver 13B is carried above the cleaning tank and waits for movement to the next process. The object to be cleaned in the cleaning jig 4 lowered into the cleaning tank starts cleaning at this point. Then, the cleaning jig 4 that has finished drying in the final processing step is carried out onto the carry-out conveyor 17 by the carry-out loader 16.
[0020]
As described above, the cleaning jig 4 in which the object to be cleaned is placed is transported through a predetermined cleaning process by a transport operation that sequentially repeats the transport operation described above, and is subjected to a cleaning process.
[0021]
FIG. 4 shows the above operation in a time chart. By using this transport mechanism, the transport time excluding the operation time of the elevator mechanism 2 overlaps and can be used for cleaning.
[0022]
【The invention's effect】
Since most of the time during the operation of the transport mechanism can be used for cleaning, the cleaning tact time can be shortened and the productivity of the cleaning operation can be increased.
[0023]
[Brief description of the drawings]
FIG. 1 is a front view showing an overall configuration of a cleaning apparatus transport mechanism according to an embodiment of the present invention.
FIG. 2 is a side view of the above.
FIG. 3 is an explanatory diagram of an elevator mechanism according to an embodiment of the present invention.
FIG. 4 is a time chart of a cleaning apparatus transport mechanism according to an embodiment of the present invention.
FIG. 5 is a front view of a conventional hook-and-place type transport mechanism.
FIG. 6 is a side view of the above.
FIG. 7 is an operation explanatory view of a hook of a hook-and-place type transport mechanism according to a conventional technique.
FIG. 8 is a time chart of the transport mechanism.
[0024]
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Hook and place type conveyance mechanism 2 Elevator mechanism 3 Hook 4 Cleaning jig 5 Carriage carriage part 6 Cleaning jig suspension part 7 Linear guide 8 Vertical cylinder 9 Horizontal feed cylinder 10 Escape cylinder 11 Chain 12 Sprocket 13A Upper jig Receiver 13B Lower jig receiver 14 Carry-in conveyor 15 Carry-in loader 16 Carry-out loader 17 Carry-out conveyor 18 Jet cleaning tank 19 Ultrasonic cleaning tank 20 Rinse tank 21 Hot air drying tank

Claims (2)

一方向に順次配列された複数の洗浄槽を備えた自動洗浄装置に設けられ、被洗浄物を前記複数の洗浄槽間にて搬送する搬送機構であって
前記複数の洗浄槽の上方近傍各々設置されて前記被洗浄物を前記洗浄槽内の下側位置と上側位置とに配置するとともに当該上下間にて搬送するエレベータ機構と、
前記複数の洗浄槽の方に配置されて前記被洗浄物を前記各エレベータ機構の前記上側位置間にて搬送するフックアンドプレース方式機構と
を有することを特徴とする自動洗浄装置の搬送機構。
Provided an automatic cleaning device comprising a plurality of cleaning tanks which are sequentially arranged in one direction, a conveyor structure for conveying the object to be cleaned in between said plurality of cleaning tanks,
An elevator mechanism that is installed in the vicinity of the upper part of the plurality of cleaning tanks and arranges the object to be cleaned at a lower position and an upper position in the cleaning tank, and conveys the object between the upper and lower positions ;
Transport mechanism of an automatic cleaning device, characterized in that it comprises a hook-and-place system mechanism that conveys the object to be cleaned are placed on sides of the plurality of cleaning tanks at between the upper position of each elevator mechanism.
前記各エレベータ機構は、一回の動作で前記上側位置にある前記被洗浄物を前記下側位置に、前記下側位置にある前記被洗浄物を前記上側位置に搬送することを特徴とする請求項1に記載の自動洗浄装置の搬送機構。  Each of the elevator mechanisms transports the object to be cleaned in the upper position to the lower position and the object to be cleaned in the lower position to the upper position in one operation. Item 2. A transport mechanism for an automatic cleaning device according to Item 1.
JP31157898A 1998-09-28 1998-09-28 Automatic cleaning device transport mechanism Expired - Fee Related JP3853093B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31157898A JP3853093B2 (en) 1998-09-28 1998-09-28 Automatic cleaning device transport mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31157898A JP3853093B2 (en) 1998-09-28 1998-09-28 Automatic cleaning device transport mechanism

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JP3853093B2 true JP3853093B2 (en) 2006-12-06

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101786089B (en) * 2010-02-05 2012-07-04 深圳市新产业生物医学工程有限公司 Automatic cleaning device and cleaning method thereof

Families Citing this family (4)

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JP4714886B2 (en) * 2005-11-29 2011-06-29 東日本旅客鉄道株式会社 Cleaning device
CN104014509B (en) * 2014-06-09 2015-12-02 成都泰美克晶体技术有限公司 A kind of large stretch of cleaning machine
CN105195465B (en) * 2015-09-21 2017-07-18 同济大学 A kind of ultrasonic wave mega sonic wave combination frequency full-automatic optical element cleaning device
CN106362981A (en) * 2016-11-02 2017-02-01 深圳市深联电路有限公司 Device and method for improving electroplating water quality and saving water

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101786089B (en) * 2010-02-05 2012-07-04 深圳市新产业生物医学工程有限公司 Automatic cleaning device and cleaning method thereof

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