JP5279810B2 - Flat surface treatment equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface treatment apparatus, in which a clamping member of a jig is arranged nearly at the top of inside standing partitions and the treatment area of work treated in between the inside standing partitions is enlarged. <P>SOLUTION: In the surface treatment apparatus, a pair of extravasation tanks 30 are oppositely arranged so that each of inside standing partitions 32 faces each other while pinching a conveying channel 12, thereby forming downward-facing flowing liquid chambers 11L, 11R and an upward-facing flowing liquid chamber 21. The downward-facing flowing liquid chambers continuously flow downwardly a process liquid Qsp supplied from an upper-side opening section 13, and the upward-facing flowing liquid chamber continuously flows upwardly the process liquid Qsp resupplied from the underside. The one pair of extravasation tanks 30 have one pair of liquid level control end plates 33L, 33R for adjusting the liquid level of a process liquid supplied to the upper-side opening section of a down-stream-side flowing liquid chamber at the upper limit part of each of inside standing partitions. The one pair of liquid level control end plates are expanded so as to upwardly increase the distance in between the one pair of liquid level control end plates. The transport height position of a clamping member 80 of a jig is arranged in between the one pair of liquid level control end plates. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  In the present invention, a plate-shaped object conveyed in a vertically suspended state from the upstream side in the conveying direction is carried into a treatment tank and subjected to surface treatment in a treatment liquid, and the plate-shaped article after surface treatment is carried out of the treatment tank. And it is related with the surface treatment apparatus of the flat plate-shaped thing which surface-treats a several flat plate-shaped thing continuously by making it convey to the downstream.

  There are a batch processing method and a continuous processing method in the surface treatment method of the workpiece. In the batch processing method, as shown in FIG. 10, a plate-shaped object (work 200P1) is vertically suspended, and is sequentially conveyed to the processing tanks 10P10, 10P20, and 10P30 arranged in a row. That is, the workpiece 200P1 is immersed in the treatment liquid in the treatment tank 10P10 and subjected to surface treatment for a predetermined time, and then the work is lifted (V1), horizontally conveyed (H1), and lowered (V21) to treat the treatment liquid in the treatment tank 10P20. Immerse in. Thereafter, the same procedure is repeated.

  In the continuous processing method, as shown in FIG. 11, for example, the belt-like long plate material (work 200P2) is held in a horizontal state and is continuously conveyed according to the arrangement order of the processing tanks 10P11, 10P21, and 10P31. That is, each surface treatment is performed while the workpiece 200P2 is immersed in and passes through each processing solution through the opening 10UH provided at the top of each processing tank.

  Here, the batch processing method is widely adaptable to the work form (flat plate, solid, rod-like, etc.), but it is necessary to raise, horizontally convey and lower the workpiece between the treatment tanks. It is difficult to improve productivity. On the other hand, the continuous processing method does not require intermediate and intermittent conveyance (V1, H1, V21, etc.) between the processing tanks, so that the productivity is high. However, it is limited to a strip-like long plate material or a linear material that can be stretched between the most upstream uncoiler and the most downstream coiler. That is, the adaptability to the workpiece form is extremely narrow.

  By the way, from the point of homogenization of the liquid composition, compared with the case of the batch processing method that divides into a plurality of processing tanks when the processing time is long, one process having a tank length corresponding to the processing time. Management and maintenance of the continuous processing method in which processing is performed in the tank is easier. That is, stable quality processing can be performed. In the case of the continuous processing method, there is no concern about problems caused during transfer between processing tanks in the batch processing method (excessive reaction due to work surface adhesion liquid, oxidation progress due to atmospheric contact, and dust adhesion to the work surface). . All of these problems adversely affect quality.

  Thus, when high-quality electrolytic treatment (for example, plating treatment) is performed on the workpiece 200P1, as shown in FIG. 12, the workpiece is treated with a treatment liquid using a belt conveyor or the like disposed outside the tank in the electrolytic treatment tank 10EP. In particular, a continuous processing method is employed in which the electrolytic treatment is continuously performed while being horizontally conveyed (H20). However, in relation to other processing tanks, a batch processing type transport mode is adopted.

  That is, the workpiece 200P1 that is horizontally conveyed (H10) from the upstream side is put into the electrolytic treatment tank 10EP by lowering (V10). Moreover, the workpiece | work after a process is conveyed to a downstream processing tank by a raise (V30) and horizontal conveyance (H30). That is, this FIG. 12 can be said to indicate a compromise method combining a batch processing method and a continuous processing method.

  However, in the case of a thin plate-like printed circuit board (work 200P), for example, the work 200P swings or vibrates as the horizontal conveyance speed in the electrolytic treatment tank 10EP is increased. Further, the workpiece may bend in a direction orthogonal to the conveyance (X) direction, and the tip may be broken. In this case, since the distance between the electrodes in the electrolytic treatment tank 10EP varies, it is inevitable that the quality deteriorates. There is also a possibility that the workpiece 200P may be damaged or the interior member itself may be deformed due to a collision with the treatment tank interior member.

  In this regard, the present applicant has proposed a surface treatment apparatus provided with conveyance guide means having a plurality of wires (conveyance guides) stretched around a guide post (see Patent Document 1). According to this, since the free movement of the workpiece can be regulated between the wires (conveyance guides), the workpiece 200P can be stably and smoothly conveyed while maintaining the vertically suspended state (state). That is, high quality processing can be performed.

  However, in the above eclectic method, the workpiece 200P must be introduced (immersed) into the treatment liquid of the electrolytic treatment tank 10EP from outside the tank, and the work must be taken out of the treatment liquid after completion of the continuous electrolytic treatment. And the raising / lowering speed | rate of a workpiece | work is high speed (for example, 4 times speed) compared with the horizontal conveyance (H20) speed in the processing tank 10EP, in order to ensure the continuity of an electrolytic process. Accordingly, in the descent process during immersion, the tip portion of the workpiece 200P (the lower end portion in the vertically suspended state) receives a large liquid resistance, and thus is often bent, bent or rocked. As a result, the workpiece 200P may collide with a tank interior product (for example, the guide post, an electrode (not shown), etc.) and may stick to it.

  Further, in the case of a surface treatment apparatus constructed so that the workpiece 200P can be lowered suddenly between the conveyance guides, the leading end portion (lower end portion in the vertically suspended state) of the workpiece does not enter between the conveyance guides, so that conveyance cannot be started. . Accordingly, the present applicant incorporates a vertically suspended (appearance) state maintaining means in the processing tank 10EP, and prior to transporting the vertically suspended work 200P while being lowered from the tank, it is immersed on both sides of the work 200P. Provided a surface treatment apparatus formed such that a large number of clamping pieces were brought close to each other and the vertically suspended state (appearance state) could be maintained (maintained) by utilizing the forced pressing force (see Patent Document 2). According to this, the workpiece 200 </ b> P could be lowered straight into the processing liquid while being vertically suspended while preventing tip bending or the like when immersed in the processing tank 10 </ b> EP.

  Furthermore, as a solution to the problem caused between the above-described vertically suspended state maintaining means provided on the upstream side in the transport direction and the transport guide means, a surface treatment apparatus provided with a liquid jet introduction guide means between them is proposed (patent) Reference 3). The liquid jet introduction guide means is for forcibly jetting the liquid from both sides of the workpiece 200P during horizontal conveyance so as to prevent the tip of the workpiece from colliding with the conveyance guide.

  Thus, in the case of continuously surface-treating a thin plate-like workpiece 200P such as a printed circuit board (200P), it is actually the case that the above-described folding method is employed.

Japanese Patent Laid-Open No. 2001-23440 JP 2002-285398 A JP 2002-285396 A

  However, at the present time when higher quality of electronic parts and electronic devices is advanced and further miniaturization and cost reduction are strongly demanded, it is difficult to compromise the above compromise method. In other words, it is pointed out that in terms of production efficiency, the ascending / horizontal conveyance / lowering process for each treatment tank can be wiped out as well as reducing the size and cost of the apparatus by cleaning up the vertically suspended state maintaining means.

  With regard to this, trials have been repeated with the aim of realizing it, but it is considered difficult to realize a practical continuous processing system without solving the following technical matters described in a definite manner.

  That is, in FIG. 13, the workpiece 200P conveyed in the X direction from the processing tank 10P12 on the upstream side (right side) is carried into the processing tank 10P22 through the opening 13P and subjected to surface treatment during the continuous transition in the tank. And after a process, it is conveyed to the downstream (left side) process tank 10P32 through a back side opening part (illustration omitted). The treatment liquid (Qr) leaked from each opening is collected in the collection tank 17P and is recycled.

  Here, because of the peculiarity of the form of the printed circuit board (work 200P), it is horizontally transported in a vertically suspended state (both surfaces are vertical) with the work upper end (upper side) held between jigs on the work transport means side. Is done. On the other hand, the amount of liquid Qr leaking from the opening 13P is very large and flows out toward the upstream side.

  Thus, when the workpiece 200P conveyed in the vertically suspended state from the upstream processing tank 10P12 faces the large amount of the leaked liquid flow (Qr) that flows out and counters from the tip side 200F side, the workpiece 200P is inserted. It is bent or its tip is broken. That is, the plate-shaped object (200P) cannot be accurately and smoothly carried into the processing liquid in the processing tank (10P12) in a vertically suspended state.

  Therefore, in order to reduce the liquid leakage amount Qr, it is necessary to provide a pair of carry-in guide rollers 81PL and 81PR shown in FIG. 14A and to narrow the interval S1. Alternatively, in the case of a pair of carry-in guide blades 82PL and 82PR made of an elastic material shown in FIG. 14B, the interval S2 must be extremely small. However, as the liquid leakage amount Qr is reduced, a new problem that the tip of the workpiece directly collides with the guides (81PL, 81PR, 82PL, 82PR) occurs. Therefore, the continuous processing method has not yet been realized in the workpiece 200P which is much thinner and has a strong tendency to be flexible.

  The objective of this invention is providing the surface treatment method and surface treatment apparatus of a flat plate-shaped thing which can be reliably and smoothly carried in into the process liquid of a processing tank with a flat plate-shaped object suspended vertically.

  In the trial treatment tank 10P22, since a vertically long and slit-shaped opening 13P is provided in order to introduce a vertically suspended flat plate-shaped object (200P), as in the case of the dam outlet, A processing liquid flow (overflow) that spouts toward the upstream side with a corresponding momentum is generated. However, in the case of a water faucet, water flows downward but does not cause an overflow flow toward the front, regardless of the flow rate or strength. Further, if the workpiece 200P is carried into the processing liquid directed downward from the conveyance direction (lateral direction), an equivalent water pressure is applied to each side of the workpiece immediately after that, and a light tensile force directed downward is applied. Since it can be generated, it should be possible to prevent the workpiece from being bent or broken.

  The present invention is novel and useful as a result of tests and research focusing on these empirical rules and assumptions. In other words, the continuous flow of the processing liquid is positively generated to eliminate the generation of the jet liquid flow toward the upstream side, and the workpiece can be directly carried into the downward continuous flow liquid to enable continuous processing. It is what.

  Specifically, according to the first aspect of the present invention, the processing liquid is continuously flowed downward into the processing tank while the processing liquid is recirculated and used, and the flat plate-like product is pushed into the continuous flow processing liquid and is carried into the processing tank. In addition, surface treatment is performed using a downward continuous fluid treatment liquid during transportation, and after the surface treatment is finished, the flat plate material is pushed out from the treatment liquid flowing continuously, and is discharged from the treatment tank. Is the method.

  Further, the invention of claim 2 is that the processing liquid collected on the lower side of the electrolytic processing chamber is supplied from the lower side of the electrode chamber and supplied to the electrode chamber to continuously flow upward, and the processing liquid continuously flowing in the electrode chamber. While recirculating and re-feeding the electrolytic treatment chamber, the treatment liquid is continuously flowed downward, and the plate-shaped object is pushed into the continuous flow treatment liquid and carried into the electrolytic treatment chamber, and power is supplied during conveyance. A surface treatment method for a plate-shaped article, wherein the plate-shaped article is subjected to a surface treatment using a downward continuous fluid treatment solution, and after the surface treatment is finished, the plate-like article is pushed out of the continuous fluid treatment solution and taken out of the electrolytic treatment chamber. It is.

  According to a third aspect of the present invention, the processing tank is defined by a pair of upstanding partition walls arranged opposite to each other across the conveyance path, and the processing liquid is formed from a downward flowing liquid chamber capable of continuously flowing downward. The processing liquid collected on the lower side of the counter-flow fluid chamber is formed so that it can be recirculated while being re-supplied to the downward-fluid fluid chamber, and the flat plate is passed through the upstream loading opening and in the continuous fluid processing solution. Can be carried into the downward flow liquid chamber as it is pushed into, and the processed flat plate-shaped object can be carried out from the downward flow liquid chamber through the downstream discharge opening and pushed out from the continuous flow treatment liquid. It is the surface treatment apparatus of the flat plate-shaped object formed and formed so that surface treatment is possible using the downward continuous fluid treatment liquid during conveyance in the downward fluid liquid chamber.

  In the invention of claim 4, a pair of overflow tanks are arranged opposite to each other across the conveyance path, and the downward fluid chamber is defined as an internal space defined by the inner standing partition walls, and the upward fluid chamber is Formed as an internal space of each overflow tank, the downward flow liquid chamber overflows beyond the upper end of each overflow tank, and is formed so that the processing liquid Qsp supplied from the upper opening can flow downward continuously. In addition, the upward fluid chamber is formed so that the processing liquid Qsp re-supplied from the lower side can continuously flow upward, and a loading opening is provided on the upstream side in the transport direction of the downward fluid chamber and on the downstream side thereof. A recovery opening is provided, a recovery tank that can recover the processing liquid that flows down from the lower side opening of the downward fluid chamber, and the recovered processing fluid is pressurized and re-supplied to each upward fluid chamber And a liquid recirculation means capable of recirculating the treatment liquid while providing a plate-shaped object with an opening for carrying in In addition, it is possible to carry it into the downward flow liquid chamber by pushing it into the continuous flow treatment liquid, and to flow the downward flow by pushing the processed flat plate shape through the opening for unloading and from the continuous flow treatment liquid. A flat plate surface treatment apparatus that is formed so as to be able to be carried out from a liquid chamber, and is formed so as to be capable of being subjected to a surface treatment on a flat plate using a downward continuous fluid treatment liquid during conveyance in a downward flow liquid chamber.

  Furthermore, the invention according to claim 5 is arranged such that an electrode is disposed in each upward flowing liquid chamber so as to be opposed to each surface of the plate-shaped object with each inner standing partition wall interposed therebetween, and each inner standing partition wall is formed with the electrode and the plate-shaped object. And the bypass flow of the processing liquid from the upward fluid chamber to the downward fluid chamber can be suppressed. In the invention of claim 6, the inner standing partition is formed of a perforated plate. According to a seventh aspect of the present invention, the standing partition is formed from a cloth sheet member.

  Further, the invention of claim 8 is formed so that the flat plate-like object is a printed circuit board and can be conveyed in a vertically suspended state in which the upper end portion of the printed circuit board is sandwiched by a plurality of jigs on the conveying means side.

  According to invention of Claim 1, a flat plate-shaped thing can be reliably and smoothly carried in in the process liquid which flows downward in a process tank with a vertically suspended state. Therefore, continuous conveyance and high quality processing can be performed efficiently and stably.

  Further, according to the invention of claim 2, as in the case of the invention of claim 1, the flat plate-like object can be reliably and smoothly carried into the treatment liquid that flows downward in the treatment tank while being vertically suspended. In addition, the electrolytic treatment with power feeding between the flat plate and the electrode can be performed efficiently and stably.

Further, according to the invention of claim 3, as in the case of the invention of claim 1, the flat plate-like object can be reliably and smoothly carried into the processing liquid that flows downward in the processing tank while being vertically suspended. It can be easily implemented.

  Furthermore, according to the invention of claim 4, in addition to the effects similar to those of the invention of claim 3, in addition, a downward fluid chamber and an upward fluid chamber can be obtained using a pair of overflow tanks. Therefore, the liquid flow can be further stabilized and the structure is simple and the handling is easy.

  Furthermore, according to the invention of claim 5, in addition to the effects similar to the case of the invention of claim 4, the power feeding between the flat plate-like object and the electrode as in the case of the invention of claim 2 is achieved. Can be performed efficiently and stably. In addition, according to the invention of claim 6, the same effect as that of the invention of claim 5 can be obtained, and the cost can be further reduced. According to the seventh aspect of the invention, the same effect as in the case of the fifth aspect of the invention can be obtained, and further, the action of suppressing the bypass flow of the processing liquid can be enhanced.

  Furthermore, according to the invention of claim 8, in addition to being able to achieve the same effects as in the case of each invention from claim 3 to claim 7, the adaptability to further diversified printed circuit boards is wide and It can greatly contribute to the provision of high quality substrates.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view schematically showing a surface treatment apparatus according to a first embodiment of the present invention, mainly for explaining a treatment tank. It is the front view which represented typically for the surface treatment apparatus concerning the 2nd Embodiment of this invention to mainly demonstrate a processing tank. It is the front view which represented typically for describing the surface treatment apparatus concerning the 3rd Embodiment of this invention centering around a processing tank. Similarly, it is a front view for demonstrating the whole structure. Similarly, it is a front view for explaining a processing tank in detail. Similarly, it is a side view for demonstrating the whole structure. Similarly, it is a top view for demonstrating the whole structure. Similarly, it is a figure for demonstrating the inside standing partition which consists of a perforated plate. Similarly, it is a figure for demonstrating the modification of an inner side standing partition. It is a figure for demonstrating the prior art example of a batch processing system. It is a figure for demonstrating the prior art example of a continuous processing system. It is a figure for demonstrating the prior art example of a compromise method. It is a figure for demonstrating the problem in the case of processing a flat shape object by a continuous processing system. It is a figure for demonstrating the example of a guide apparatus in the case of processing a flat shape object by a continuous processing system.

(First embodiment)
As shown in FIG. 1 (schematic front view), the best surface treatment apparatus for carrying out this surface treatment method (invention of claim 1) is a pair of treatment tanks 10 arranged opposite to each other with a conveyance path 12 therebetween. The processing liquid Qsp partitioned by the standing partition walls 32AL and 32AR and supplied from the upper side is formed from the downward flow liquid chamber 11 (11L, 11R) capable of continuous downward flow (Qdp). The processing liquid Qdp that has flowed downward can be recovered, and the recovered processing liquid can be recirculated while being re-supplied to the upper side of the downward flow liquid chamber 11 (11L, 11R). ) Can be carried into the downward fluid chamber through the carrying-in opening 15IN provided on the upstream side in the conveying direction, and the processed flat plate-shaped object is directed downward through the carrying-out opening 15OT provided on the downstream side thereof. Can be removed from the fluid chamber Formed, it is formed so as to be able to perform a surface treatment on a flat plate-like object (200) using the processing solution Qdn continuous flow downwards during transfer of the downward flow liquid chamber.

  Here, the flat plate-like object is a printed circuit board (workpiece 200) in this embodiment. The workpiece 200 is continuously conveyed in the conveying direction (the direction perpendicular to the paper surface in FIG. 1 ... the conveying path 12) in a vertically suspended state in which the upper ends of the workpieces are sandwiched by a plurality of jigs 80 on the workpiece conveying means (70) side. The The plurality of jigs 80 are attached at a constant pitch in the transport direction. The work transfer means (70) and the like will be described in the third embodiment.

  To be sure, the basic configuration / function of this surface treatment method (apparatus) is that the plate-shaped object is transported in a vertically suspended state from the upstream side in the transport direction [X direction (see FIGS. 6 and 7)]. (200) is carried into the treatment tank 10, surface treatment is performed on the flat plate-shaped article in the treatment liquid of the treatment tank 10, and the flat plate-shaped article after the surface treatment is carried out of the treatment tank and conveyed downstream thereof. A plurality of flat plate-like objects are continuously surface-treated.

  The processing tank 10 has a downward flow defined by a pair of upstanding partition walls 32AL and 32AR disposed opposite (separated) in the tank width direction (left and right direction in FIG. 1) with the conveyance path 12 extending in the X direction interposed therebetween. The liquid chamber 11 is formed. The downward flowing liquid chamber 11 can be continuously flowed downward (Qdn) using the processing liquid Qsp supplied from the upper side. That is, a downward continuous liquid flow (zone) can be generated. When the transport path 12 is the center, the left side is a downward fluid chamber 11L and the right side is a downward fluid chamber 11R.

  An opening 13 for supplying the processing liquid is provided above the downward fluid chamber 11 (standing partition walls 32AL and 32AR), and an opening for discharging the flowing processing liquid is provided on the lower side. 19 is provided.

  Compared with the structure of the conventional example (for example, processing tank 10P22 in FIG. 13) having an open top and a four-sided wall, the present processing tank 10 relates to the flow of the processing liquid in the tank and the supply / discharge. The action (function) is completely different. In other words, it is understood as a unique structure. However, implementation (construction) is easy.

  Further, a loading opening 15IN for carrying the workpiece 200 in a vertically suspended state on the upstream side in the conveying direction of the processing tank 10 (downward flowing liquid chamber 11) (front side in the direction orthogonal to the paper surface in FIG. 1). And an unloading opening 15OT for unloading the processed workpiece 200 in a vertically suspended state (see FIG. 6).

  The processing liquid Qsp supplied through the upper open part 13 continuously flows downward in the downward flowing liquid chamber 11. That is, since the entire amount of the processing liquid Qdn naturally flows down in the vertical direction (may be pressurized flow), as in the case of the conventional example (FIG. 13), the processing liquid Qr becomes large and vigorous in the X direction by the water head. There is no inconvenience of leaking.

  Therefore, each opening 15 has a vertically long slit shape similar to that in the conventional example (FIG. 13), but the width direction dimension does not need to be determined and determined in a nervous manner as in the conventional example. As described above, since a phenomenon in which a large amount of the processing liquid (Qr) flows out from the opening 15 in the X direction does not occur, it can be determined freely. Further, since there is no need to provide a guide (81PL, 81PR, etc.), simplification of the apparatus and cost reduction can be promoted.

  Incidentally, in this embodiment, the thickness is reduced from about 5 times (5t) to 10 times (10t) of the thickness (t) of the workpiece 200 in consideration of manufacturing circumstances (see FIG. 5).

  The processing liquid Qsp supplied through the upper opening 13 of the downward fluid chamber 11 flows down through the chamber and is then discharged through the lower opening 19 and the discharged processing liquid Qdp is recovered in the recovery tank 40. The Further, the recovered processing liquid is configured to be recirculated while being re-supplied to the upper side (13) of the downward flowing liquid chamber 11 (11L, 11R) by the liquid recirculation means 50.

  The liquid recirculation means 50 is formed of a suction pipe 51, a recirculation pump 55, a filter 56, a supply pipe 52, and the like, pressurizing the processing liquid sucked from the recovery tank 40, and downward fluid chamber 11 (11L, 11R). ) To the upper side. In this embodiment, branch pipes 52L and 52R communicating with the supply pipe 52 are provided at the upper ends of the upright partition walls 32AL and 32AR, and upper openings are formed from the liquid ejection headers 53L and 53R connected to the branch pipes 52L and 52R. 13 to re-supply the processing solution. The liquid ejection headers 53L and 53R extend in the X direction and can eject a necessary and sufficient amount of processing liquid into the downward flowing liquid chambers 11L and 11R without interruption.

  Thus, the processing liquid Q in the downward flow liquid chambers 11L and 11R continuously flows downward due to the gravitational action. Observing around the loaded workpiece 200, it is equivalent to forming a downward continuous flow (region) of the processing liquid in each of the left and right downward flowing liquid chambers 11L and 11R. Therefore, unlike the conventional example (FIG. 13), there is no severe collision with the leaked jet liquid Qr, so that the tip side (200F) of the workpiece 20 is not bent or curved. That is, the workpiece 200 can be reliably and smoothly carried into the processing liquid.

  In addition, the flow-down treatment liquid (downward continuous flow liquid) Qdn applies an equivalent hydraulic pressure to each surface (front and back surfaces) of the immersed workpiece 200. That is, there is no pressure difference between the left and right of the workpiece 200. Moreover, the downward continuous flowing liquid (falling liquid) acts on the vertically suspended workpiece 200 having the upper end sandwiched between the jigs 80 so as to generate a tensile force from the upper end to the lower end.

  Thus, since the upper end (80) is a fixed end and the free end (tip end) is pulled downward, the workpiece 200 that has been loaded is vertically straightened as a single plate without swinging left or right or bending. It is smoothly transported in the processing liquid in the suspended state. Incidentally, in the case of the electrolytic treatment tank 10EP as in the third embodiment, the interval (distance between the electrodes) between the workpiece 200 and each electrode is constant, so that high-precision treatment can be performed stably.

  According to the first embodiment having such a configuration, the processing liquid collected on the lower side of the processing tank 10 is re-supplied from the upper side and recirculated and used, and the processing liquid is continuously flowed downward in the processing tank, The shaped article (200) is carried into the treatment tank so as to be pushed into the continuously flowing treatment liquid, and surface treatment is performed on the flat plate shaped article using the treatment liquid continuously flowing downward during the conveyance, and after the surface treatment is completed. The surface treatment method of extruding a flat plate-shaped object from the treatment tank by extruding it from the continuously flowing treatment liquid can be carried out reliably and efficiently.

  Specifically, the liquid recirculation means 50 (55) is driven to pressurize the processing liquid sucked from the liquid storage tank 40 and flow downward from the liquid ejection headers 53L and 53R through the upper opening 13 in the processing tank 10. Supply to the liquid chamber 11 (11L, 11R). A downward continuous flow (zone) of the processing liquid is generated in the downward flowing liquid chamber 11 (11L, 11R). This downward continuous flow (zone) is a liquid flow in a laminar flow state in which the processing liquid naturally flows vertically.

  Therefore, the processing liquid does not spout out from the upstream loading opening 15IN and the downstream unloading opening 15OT in the transport direction. The water is gently discharged from the lower opening 19 and collected in the lower collection tank 40. Due to the recirculating use of the processing liquid, a downward continuous flow continues during operation.

  Here, the plate-shaped object (work 200) transported in a vertically suspended state from the upstream side in the transport direction (the front side in FIG. 1) is transported into the processing tank 10 (11) from the transport opening 15IN. Is done. Instead of rushing against the jet liquid flow in the transport direction as in the case of the conventional example, it is carried in by being pushed into the continuously flowing processing liquid. In other words, the workpiece 200 is gently pushed from the front end side 200F (see FIGS. 6 and 12) so as to interrupt the laminar flow continuous liquid processing solution from the lateral direction (conveyance direction). Therefore, there is no folding or bending at the time of loading. That is, the flat plate-shaped object (200) can be reliably and smoothly carried into the processing liquid that flows downward in the processing tank 10 (11) while being vertically suspended.

  Further, in the treatment tank 10 (11), an equal pressure is applied to each surface (front and back surfaces) of the workpiece 200, so that the vibration due to the pressure difference does not occur. Further, the downward continuous fluid treatment liquid induces an action of pulling the workpiece 200 downward. Therefore, smooth conveyance in the processing liquid is ensured.

  The surface treatment can be applied to the workpiece 200 in this treatment liquid. At this time, the activity of the front and back surfaces of the workpiece 200 is enhanced by the surface wiping action of the downward continuous fluid treatment liquid. Uniform and high-quality surface treatment can be performed quickly without any unevenness. Further, unlike the conventional example (FIGS. 10, 11, and 12), there is no need to provide liquid stirring means or bubbling means in the tank.

  The workpiece 200 after the surface treatment is carried out from the treatment tank 10 (11) to the outside so as to be pushed out from the downward continuous fluid treatment solution, and is conveyed downstream thereof. Until the rear end side 200B (see FIG. 6) completely comes out of the unloading opening 15OT, the hydraulic pressure is uniform on both surfaces (front and back surfaces) of the workpiece 200 and the downward pulling action works. Can be carried out.

Thus, continuous conveyance and high quality processing can be performed reliably and stably, and as a result, a plurality of flat plate-shaped objects (printed circuit board 200) can be continuously surface-treated. Moreover, it is easy to implement, simple in structure and easy to handle.
(Second Embodiment)

  This second embodiment is shown in FIG. The basic configuration and function are the same as in the case of the first embodiment (FIG. 1), but the surface treatment is performed by arranging the treatment tank 10 (11, 21) with a pair of overflow tanks 30L, 30R facing each other. The device can be constructed.

  That is, in the surface treatment apparatus, a pair of overflow tanks 30L and 30R are arranged to face each other to form the downward fluid chamber 11 (11L and 11R) and the upward fluid chambers 21L and 21R. The chamber 11 (11L, 11R) is formed so that the processing liquid can continuously flow downward, and the upward fluid chambers 21L, 21R can be continuously flowed upward, and the opening for carrying in the downward fluid chamber 11 (11L, 11R) And a recovery tank 40 and a liquid recirculation means 50 necessary for recirculation and use of the processing liquid are provided, and the workpiece 200 is placed in the downward fluid chamber as in the first embodiment. And is capable of being surface-treated using the downward continuous fluid treatment liquid Qdn during conveyance in the downward fluid chamber 11.

  In addition, about the part which is common in the matter demonstrated in 1st Embodiment, the description is simplified or abbreviate | omitted.

  In FIG. 2, the pair of overflow tanks 30 </ b> L and 30 </ b> R are opposed to each other so that the inner standing partition walls 32 </ b> L and 32 </ b> R face each other with the conveyance path 12 therebetween. The overflow tanks 30L and 30R are upper open type overflow tanks, and the processing liquid Qsp overflowing (overflows) beyond the upper ends of the inner standing partition walls 32L and 32R is contained in the downward flow liquid chamber 11 (11L and 11R). To supply. Since the supply of the processing liquid is an overflow method, it is possible to perform a quieter, smoother and more stable uniform supply as compared with the case of the first embodiment.

  The downward flowing liquid chamber 11 (11L, 11R) constituting a part of the processing tank 10 is formed as an intra-compartment space defined by the inner standing partition walls 32L, 32R. The downward flowing liquid chamber 11 (11L, 11R) overflows the upper ends of the overflow tanks 30L, 30R and can continuously flow the processing liquid Qsp supplied from the upper opening 13 downward.

  Further, the upward fluid chambers 21L and 21R constituting a part of the processing tank 10 are formed as internal spaces of the overflow tanks 30L and 30R. The upward fluid chambers 21L and 21R are capable of continuously flowing the processing liquid resupplied from the lower side upward. That is, the upward flowing liquid chambers 21L and 21R generate the processing liquid Qup that flows continuously upward, that is, the upward liquid flow (zone) by using the processing liquid supplied from the lower side. Rectification boxes 36L and 36R are provided at the inner bottoms of the overflow tanks 30L and 30R, so that a stable upward flow can be generated and maintained.

  A carry-in opening 15IN is provided on the upstream side in the transport direction of the downward fluid chamber 11 (11L, 11R), and a carry-out opening 15OT is provided on the downstream side thereof. The width of the opening is the distance between the inner standing partition walls 32L and 32R of the overflow tanks 30L and 30R. However, a width narrower than the width corresponding to the distance between the inner standing partition walls 32L and 32R may be formed by attaching an adjustment plate.

  The collection tank 40 can collect the processing liquid discharged from the lower opening 19 of the downward fluid chamber 11 (11L, 11R). The liquid recirculation means 50 pressurizes the collected processing liquid and recirculates the processing liquid while re-supplying it to the upward flow liquid chambers 21L and 21R through the rectifying boxes (which may be rectifying headers) 36L and 36R. use.

  Thus, the workpiece 200 can be carried into the downward flowing liquid chamber 11 while being pushed through the loading opening 15IN provided on the upstream side in the conveyance direction and into the continuously flowing treatment liquid. It is formed so as to be able to be discharged from the downward flowing liquid chamber 11 so as to be pushed out from the processing liquid flowing continuously through the unloading opening 15OT provided on the downstream side, and downward while being conveyed in the downward flowing liquid chamber. The surface treatment can be performed on the workpiece 200 using a continuously flowing treatment liquid.

  Thus, according to the second embodiment, as in the case of the first embodiment, the plate-shaped object (work 200) flows downward in the treatment tank 10 (11) while being vertically suspended. It can be reliably and smoothly carried into the liquid. Moreover, since the downward fluid chamber 11 and the upward fluid chamber 21 may be formed using the pair of overflow tanks 30L and 30R, the embodiment can be realized more easily, and the processing fluid flow can be further stabilized.

Furthermore, the internal volume of the downward fluid chamber 11 (11L, 11R), the opening 15IN for carrying in, and the carrying out are simply changed by changing the arrangement interval around the conveying path 12 of the pair of overflow tanks 30L, 30R. Since the width of the opening 15OT can be adjusted, the adaptability to the thickness of the workpiece 200, the conveyance speed, and the like is wide.
(Third embodiment)

  This third embodiment is shown in FIGS. The basic configuration and function are the same as in the case of the second embodiment (FIG. 2), but the surface treatment is electrolytic treatment (here, plating treatment) and the treatment tank 10 is formed as an electrolytic treatment tank 10EP. It is. Further, it is the best for carrying out the surface treatment method according to the invention of claim 2.

  In FIG. 3, the surface treatment (electrolytic treatment) apparatus is similar to the case of the second embodiment in that the workpiece 200 is sandwiched between the upwardly flowing fluid chambers 21L and 21R and the inner standing partition walls (37L and 37R). The electrodes 35KL and 35KR are disposed so as to be able to face each surface (front and back surfaces), and the inner standing partition walls (37L and 37R) can promote energization between the electrodes 35KL and 35KR and the plate-shaped object (200). The flow of the processing liquid from the upward fluid chambers 21L and 21R to the downward fluid chambers 11L and 11R can be suppressed.

  That is, the upward fluid chambers 21L and 21R form electrode chambers 21EPL and 21EPR. Similarly, the downward fluid chambers 11L and 11R form electrolytic processing chambers 11EPL and 11EPR.

  The electrodes 35KL and 35KR are made of a large number of copper balls accommodated in the anode bags 35L and 35R, and can generate and supply copper ions in the processing liquid during power feeding. Since the surfaces of the electrodes 35KL and 35KR are washed by the upward flowing liquid Qup, copper ions can be generated and supplied with high efficiency and stability. In this respect, management of the treatment liquid composition becomes easy.

  The anode bags 35L and 35R are detachably attached to the overflow tanks 30EPL and 30EPR via mounting hook members 34L and 34R shown in FIG. Maintenance including replenishment and replacement of copper balls can be performed easily.

In this embodiment, in order to simplify the structure and reduce the cost, the inner standing partition walls (32L, 32R) are formed from the porous plate 37 shown in FIGS. Each perforated plate 37L, 37R is provided with a large number of through-holes 37h having a small diameter (for example, 1 ^mmφ ) selected in order to obtain an energization promoting effect and a bypass flow suppressing effect.

  The inner standing partition walls (32L, 32R) may be formed of, for example, a cloth sheet member or a cloth bag that can surround the whole. In the case of FIG. 9, a case where the cloth sheet member 38 is attached to the inner frame member 31 is shown. The effect | action which suppresses the bypass flow of a process liquid can be strengthened further.

  4-7, the liquid level adjustment weir plates 33L and 33R shown in FIG. 5 are provided at the upper ends of the inner frame members 31L and 31R that form a part of the electrolytic treatment tank 10EP, and the upper opening portion. The supply position (height) of the processing liquid to 13 can be adjusted. The liquid level adjustment weir plates 33L and 33R have an upwardly enlarged shape in order to avoid interference with the jig 80 being conveyed.

The work transfer means 70 is formed of a transfer structure 71 and a belt conveyor 78 that applies a transfer driving force to the transfer structure 71, and the work 200 is placed at a constant speed (for example, set to 1 to 2 m / min) and continuously in a tank. It is formed so that it can be conveyed inside. The transport structure 71 includes a rail 77 extending in the transport (X) direction shown in FIGS. 5 and 6, a carrier 72 mounted so as to be slidable (or rollable) along the rail 77, The holding member 74 is attached to the distal end of a cross arm member 73 that constitutes a part of the carrier 72, and a jig 80 that can be attached to and detached from the holding member 74.

  In this embodiment, the rail 77, the carrier 72, the belt conveyor 78, etc. are arranged outside the electrolytic treatment tank 10EP (on the right side in FIG. 4) so as to be finely generated at the relative sliding portion of the structure / means. Prevent dust from falling into 10EP. Expect higher quality processing.

  The power supply means supplies power to the workpiece 200 by sliding contact between the copper rail 77 and the carrier 72 and via the transport structure 71 (72, 73, 74, 80). That is, the negative (−) pole of the power supply device (not shown) is connected to the work (cathode) 200. A plus (+) electrode is connected to the electrodes (anode) 35KL and 35KR.

  As shown in FIG. 5, the jig (clamping tool) 80 has a main body base fixed to the holding member 74 by screws, a clamp that can be rotated around a fulcrum, and one end (tip) of the clamp that is constantly pressed against the main body base. The upper end of the workpiece 200 is sandwiched between the tip of the clamp and the main body base.

  As shown in FIGS. 6 and 7, the collection tank 40 is longer (about twice as long) as the tank length (length in the X direction) of the processing tank 10EP (30EPL, 30EPR). This is for facilitating the composition management of the treatment liquid and facilitating recirculation. In addition, it is possible to collect shibuki from the openings 15IN and 15OT and not contaminate the periphery of the apparatus.

  Therefore, guide means 90L and 90R are provided in the front and rear spaces of the processing tank 10EP, that is, the overflow tanks 30EPL and 30EPR, and the workpiece 200 before being carried into the electrolytic treatment chambers 11EPL and 11EPR and the product (200) after being carried out. The conveyance posture is formed so as to be maintained constant.

  The guide means 90 is formed of an upstream guide means 91U and a downstream guide means 91D shown in FIGS. 6 and 7, and a plurality of (five) synthetic resin ropes are stretched at equal intervals in the vertical direction and are transported. This is a structure in which a pair of 12 is disposed opposite to each other. In addition, it is different from the guide means mounted in the processing liquid of the conventional example (Patent Document 1).

  According to the third embodiment, the electrode chamber 21EP (a part of the treatment tank) is a treatment liquid collected on the lower side of the electrolytic treatment chamber 11EP (11EPL, 11EPR) constituting a part of the treatment tank 10EP. 21EPL, 21EPR) is supplied from the lower side to continuously flow the processing liquid upward, and the processing liquid that has flowed through the electrode chamber is re-supplied from the upper side to the electrolytic processing chamber so that it can be recycled and used in the electrolytic processing chamber. The liquid is continuously flowed downward, the flat plate-shaped object (work 200) is pushed downward into the continuous flow treatment liquid, is carried into the electrolytic treatment chamber, and power is supplied between the electrode and the flat plate-shaped object during transfer. A surface treatment method is carried out by applying a surface treatment to the flat plate-like product using a downward continuous fluid treatment liquid, and after the surface treatment is finished, the flat plate-like material is pushed out of the continuous fluid treatment solution and carried out of the electrolytic treatment chamber. It can be carried in.

  Thus, according to the third embodiment, in addition to the effects similar to those of the second embodiment, power feeding between the flat plate-shaped object (work 200) and the electrodes 35KL and 35KR is possible. Electrolytic treatment with a high efficiency can be performed.

  Furthermore, the present invention can greatly contribute to the provision of a high-quality board that is widely adaptable to the increasingly diversified printed circuit board 200.

  The present invention is useful when it is desired to carry out a surface treatment by directly bringing a thin and flexible flat plate shape (for example, a printed circuit board) into a processing solution.

DESCRIPTION OF SYMBOLS 10 Processing tank 11 Processing chamber 11L, 11R Downward flow liquid chamber 12 Transfer route 15IN Loading opening 15OT Outlet opening 21 Upward flowing liquid chamber 30 Overflow tank 32 Inner standing partition 35K Electrode 10EP Electrolytic processing tank 11EP Electrolytic processing chamber 21EP electrode chamber 30EP overflow tank 35 anode bag 37 perforated plate (inner standing partition)
38 Fabric sheet material (inner standing bulkhead)
DESCRIPTION OF SYMBOLS 40 Recovery tank 50 Liquid recirculation means 55 Recirculation pump 70 Work conveyance means 71 Conveyance structure 78 Belt conveyor 80 Jig 90 Guide means 200 Workpiece (printed circuit board ... flat plate-shaped object)

Claims (2)

A plate-shaped object that is held in a vertically suspended state by the clamp member of the jig and conveyed from the upstream side in the conveying direction is carried into the treatment tank, and the plate-shaped object is subjected to surface treatment in the treatment liquid of the treatment tank, In the surface treatment apparatus for a plate-shaped object formed so that a plurality of plate-shaped objects can be continuously surface-treated by carrying out the plate-shaped object after the surface treatment from the treatment tank and transporting it to the downstream side thereof,
A compartment in which a pair of overflow tanks are arranged to face each other so that the inner standing partition walls face each other across the conveyance path, and a downward fluid chamber constituting a part of the processing tank is partitioned by the inner standing partition walls An upward flowing liquid chamber formed as an internal space and constituting a part of the processing tank is formed as an internal space of each overflow tank,
The downward fluid chamber overflows beyond the upper end of each overflow tank, and the processing fluid supplied from the upper opening of the downstream fluid chamber is formed to be capable of continuous downward flow and the upward fluid The chamber is formed so that the processing liquid resupplied from the lower side can be continuously flowed upward,
The pair of overflow tanks has a pair of liquid level adjusting weir plates for adjusting the liquid level of the processing liquid supplied to the upper side opening of the downstream fluid liquid chamber, at the upper end of each inner standing partition wall,
The pair of liquid level adjustment weir plates is expanded so that the distance between the pair of liquid level adjustment weir plates increases upward,
A surface treatment apparatus for a flat plate-shaped object in which a conveyance height position of a clamp member of the jig is disposed between a pair of liquid level adjustment weir plates.   An electrode is disposed in each upward flowing liquid chamber so as to face each surface of the flat plate-like object with each inner standing partition wall interposed therebetween, and each inner stand-up partition promotes energization between the electrode and the flat plate-like object. The surface treatment apparatus for a flat plate-shaped object according to claim 1, wherein the surface treatment apparatus is configured to be capable of suppressing a bypass flow of the processing liquid from the upward fluid chamber to the downward fluid chamber.

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