JP3173836U - Horizontal electrolytic plating apparatus provided with means for removing oxygen gas bubbles adhering to a plate-like workpiece - Google Patents

Horizontal electrolytic plating apparatus provided with means for removing oxygen gas bubbles adhering to a plate-like workpiece Download PDF

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JP3173836U
JP3173836U JP2011007312U JP2011007312U JP3173836U JP 3173836 U JP3173836 U JP 3173836U JP 2011007312 U JP2011007312 U JP 2011007312U JP 2011007312 U JP2011007312 U JP 2011007312U JP 3173836 U JP3173836 U JP 3173836U
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正次 長倉
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丸仲工業株式会社
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Abstract

【課題】電解浴中の上下陽極間を板状被処理物が水平搬送される過程で被処理物を電解メッキする際に、被処理物の板面に付着する酸素ガス泡を効率的に除去し、均一なメッキ被膜の形成を可能にする水平電解メッキ装置を提供する。
【解決手段】板状被処理物Pの搬送通路2の上下位置に搬送通路の側部方向に向けた斜め噴流Gを吐出する吐出ノズルを形成した斜め噴流吐出管20A、20Bを配設し、且つ搬送通路2を間にした電解メッキ処理槽1の左右両側にオーバーフロー口26を設けたオーバーフロー槽25を配設した。板状被処理物の板面に付着した酸素ガス泡は斜め噴流吐出管20A、20Bの斜め噴流Gで搬送通路の側部方向に噴き飛ばす。噴き飛ばされ上昇現象で電解浴中を上昇した酸素ガス泡はオーバーフロー液の流れに誘導されてオーバーフロー口26からオーバーフロー槽25に流出する。
【選択図】図2
An object of the present invention is to efficiently remove oxygen gas bubbles adhering to a plate surface of an object to be processed during electrolytic plating while the plate-like object to be processed is horizontally conveyed between upper and lower anodes in an electrolytic bath. And a horizontal electrolytic plating apparatus that enables the formation of a uniform plating film.
Disclosed are oblique jet discharge pipes 20A and 20B in which discharge nozzles for discharging an oblique jet G directed in the direction of the side of the transport passage are formed at the upper and lower positions of the transport passage 2 of the plate-like workpiece P. In addition, an overflow tank 25 provided with overflow ports 26 was disposed on both the left and right sides of the electrolytic plating tank 1 with the conveyance passage 2 in between. Oxygen gas bubbles adhering to the plate surface of the plate-like workpiece are blown off in the direction of the side of the transport passage by the oblique jet G of the oblique jet discharge pipes 20A and 20B. Oxygen gas bubbles that are blown off and rise in the electrolytic bath due to the rising phenomenon are guided by the flow of the overflow liquid and flow out from the overflow port 26 to the overflow tank 25.
[Selection] Figure 2

Description

本考案は、プリント基板等の板状被処理物を水平搬送させながら電解メッキ処理する水平電解メッキ装置において、電解メッキ処理中に被処理物の板面に付着する大量の酸素ガス泡を効率的に除去し、泡付着に起因するメッキ被膜のばらつきを解消し、均一なメッキ被膜の形成を可能する技術に関する。   The present invention is a horizontal electrolytic plating apparatus that performs electrolytic plating while horizontally conveying a plate-like workpiece such as a printed circuit board, and efficiently generates a large amount of oxygen gas bubbles adhering to the plate surface of the workpiece during the electrolytic plating treatment. The present invention relates to a technique that eliminates the unevenness of the plating film caused by bubble adhesion and enables the formation of a uniform plating film.

特許文献1に、電解室内の電解浴中に上部陽極と下部陽極を配設し、電解浴中の上部陽極と下部陽極の間を板状物体が水平状態で連続的に通過されることによって、板状物体上に金属を電着する電解処理装置が公開されている。   In Patent Document 1, an upper anode and a lower anode are disposed in an electrolytic bath in an electrolytic chamber, and a plate-like object is continuously passed in a horizontal state between the upper anode and the lower anode in the electrolytic bath, An electrolytic treatment apparatus for electrodepositing metal on a plate-like object has been disclosed.

このような電解処理装置では、陽極として特に不溶性陽極を用いた場合、この陽極の所から大量の酸素ガスが発生し、この酸素ガスは電解浴中で大量の酸素ガス泡となって電解浴中を上昇する。大量発生した酸素ガス泡は水平姿勢で水平方向に搬送させながら電解メッキ処理される板状被処理物の板面に滞留し付着され易く、特に水平搬送される板状被処理物の下面部は酸素ガス泡の上昇現象で大量の酸素ガス泡が溜まり易い。水平搬送される板状被処理物の板面(特に下面部)に付着した大量の酸素ガス泡は、メッキされる板面と電解浴の接触を妨げ、板状被処理物の板面に均一なメッキ被膜を形成するのに大きな妨げとなっている。   In such an electrolytic treatment apparatus, when an insoluble anode is used as the anode, a large amount of oxygen gas is generated from the anode, and this oxygen gas becomes a large amount of oxygen gas bubbles in the electrolytic bath. To rise. Oxygen gas bubbles generated in large quantities are likely to stay and adhere to the plate surface of the plate-like object to be electroplated while being conveyed horizontally in a horizontal posture. Large amounts of oxygen gas bubbles tend to accumulate due to the rising phenomenon of oxygen gas bubbles. A large amount of oxygen gas bubbles adhering to the plate surface (especially the lower surface) of the plate-like workpiece to be transported horizontally hinders the contact between the plate surface to be plated and the electrolytic bath, and is uniform on the plate surface of the plate-like workpiece. This is a great hindrance to the formation of a smooth plating film.

特公平6−31476号公報Japanese Patent Publication No. 6-31476

本考案は、このような実情に鑑み、電解浴中の上下の陽極間をプリント基板等の板状被処理物が水平姿勢で水平方向に搬送通過される過程でこの板状被処理物の板面に電解メッキする水平電解メッキ装置において、電解メッキ処理中に板状被処理物の板面に付着する大量の酸素ガス泡を効率的に除去し、この酸素ガス泡の付着に起因したメッキ被膜のばらつきを解消し、板状被処理物に均一なメッキ被膜を形成することを技術課題とするものである。   In view of such a situation, the present invention provides a plate of the plate-like object to be processed in the process in which the plate-like object to be processed such as a printed circuit board is conveyed in a horizontal position between the upper and lower anodes in the electrolytic bath. In a horizontal electroplating apparatus for electrolytic plating on the surface, a large amount of oxygen gas bubbles adhering to the plate surface of the plate-like workpiece are efficiently removed during the electroplating process, and the plating film resulting from the adhesion of the oxygen gas bubbles It is a technical problem to eliminate the variation of the above and form a uniform plating film on the plate-like workpiece.

上記した課題を解決するため、本考案(請求項1の考案)は、平行な両側縁部をもつ板状被処理物(例えばプリント配線基板)の両側縁部をエンドレスに回転駆動される複数のクランプで保持し、電解メッキ処理槽の電解メッキ処理液中を板状被処理物の板面が上下になる水平姿勢で水平方向に連続搬送する搬送装置と、前記電解メッキ処理槽の電解メッキ処理液中に配設され、前記搬送装置で水平搬送される板状被処理物の搬送通路の上下位置に配設された上部陽極と下部陽極を備え、この上部陽極と下部陽極の間を搬送及び給電手段としての前記クランプを通じて陰極電流を給電された前記板状被処理物が水平に通過されることによって、前記板状被処理物の表面にメッキ被膜を形成する水平電解メッキ装置において、前記電解メッキ処理槽の処理液中であって、前記板状被処理物の搬送通路を間にした上下位置に上部斜め噴流吐出管と下部斜め噴流吐出管を配設し、この上下部の斜め噴流吐出管は前記被処理物の搬送方向と交差する方向に間隔をおいて多数の吐出ノズルをそれぞれ形成し、この上下部の斜め噴流吐出管の吐出ノズルは搬送通路を水平に通過する前記板状被処理物の相対する上下板面に向けてそれぞれ処理液を吐出すると共に該搬送通路の左右いずれか一方の同じ側部方向に向け斜めに処理液を吐出する斜め噴流を吐出するように形成し、この上下部の斜め噴流吐出管を搬送通路の搬送方向に間隔をおいた複数位置に、搬送通路の左側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管と、搬送通路の右側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管としてそれぞれ配設し、且つ、前記搬送通路を間にした電解メッキ処理槽の左右両側にオーバーフロー口を設けたオーバーフロー槽を配設し、電解メッキ処理槽の左右両側に設けたオーバーフロー口から溢れたメッキ処理槽内の処理液をオーバーフロー槽へ流出するようにしたことを特徴とする板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置を提供する。   In order to solve the above-described problem, the present invention (the invention of claim 1) is configured to provide a plurality of endless rotations of both side edges of a plate-like workpiece (for example, a printed wiring board) having parallel side edges. A holding device that holds the clamp and continuously conveys the electrolytic plating solution in the electrolytic plating bath horizontally in a horizontal posture in which the plate surface of the plate-like object is up and down, and the electrolytic plating treatment of the electrolytic plating bath An upper anode and a lower anode are disposed in the liquid and disposed at the upper and lower positions of the transport path of the plate-like workpiece to be horizontally transported by the transport device, and are transported between the upper anode and the lower anode. In the horizontal electrolytic plating apparatus for forming a plating film on the surface of the plate-like workpiece by horizontally passing the plate-like workpiece fed with a cathode current through the clamp as a power feeding means, Plating process An upper oblique jet discharge pipe and a lower oblique jet discharge pipe are disposed in the processing liquid of the tank at the upper and lower positions sandwiching the conveyance path of the plate-like workpiece, and the upper and lower oblique jet discharge pipes are A plurality of discharge nozzles are formed at intervals in a direction intersecting the transport direction of the workpiece, and the discharge nozzles of the upper and lower oblique jet discharge pipes horizontally pass through the transport passage. Each of the processing liquids is discharged toward the opposite upper and lower plate surfaces, and an oblique jet that discharges the processing liquid obliquely toward the same side direction of either one of the left and right sides of the transport passage is formed. The upper and lower oblique jet discharge pipes formed with discharge nozzles that discharge the oblique jet directed toward the left side of the transport passage at a plurality of positions spaced in the transport direction of the transport passage. Toward the right side of the transport path Disposed as upper and lower oblique jet discharge pipes formed with discharge nozzles for discharging oblique jets, and overflow tanks provided with overflow ports on both the left and right sides of the electroplating treatment tank with the conveyance passage in between In addition, oxygen gas bubbles adhering to the plate-like object to be processed are characterized in that the treatment liquid in the plating treatment tank overflowing from the overflow ports provided on the left and right sides of the electrolytic plating treatment tank flows out to the overflow treatment tank. A horizontal electrolytic plating apparatus provided with a removing means is provided.

この考案によれば、板状被処理物の板面に付着した酸素ガス泡は斜め噴流吐出管の吐出ノズルから吐出する斜め噴流で板面から離脱されると共に搬送通路の側部方向に強制移動され、強制移動された酸素ガス泡はその上昇現象によって移動先で電解浴中を上昇し、電解浴中を上昇した酸素ガス泡は前記オーバーフロー口から溢れオーバーフローする処理液の流れに誘導されてオーバーフロー槽に流出する。このように、本考案は、搬送通路の左右の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した斜め噴流吐出管と搬送通路を間にした電解メッキ処理槽の左右両側に配設したオーバーフロー槽の働きによって、板面に付着した酸素ガス泡を効果的に除去できると共に、除去した酸素ガス泡をオーバーフローする液に誘導されオーバーフロー槽に流出できる。したがって、考案によれば、板状被処理物の板面に付着した酸素ガス泡に起因するメッキ被膜のばらつきを解消でき、板状被処理物の板面に均一なメッキ被膜を形成できる。   According to this device, oxygen gas bubbles adhering to the plate surface of the plate-like workpiece are separated from the plate surface by the oblique jet discharged from the discharge nozzle of the oblique jet discharge pipe and forcedly moved in the direction of the side of the transport passage. The oxygen gas bubbles that are forcibly moved rise in the electrolytic bath at the destination due to the rising phenomenon, and the oxygen gas bubbles that have risen in the electrolytic bath are induced by the flow of the processing liquid overflowing from the overflow port and overflowing. It flows into the tank. In this way, the present invention is arranged on both the left and right sides of the electrolytic plating tank between the oblique jet discharge pipe and the conveyance passage formed with the discharge nozzle that discharges the oblique jet directed toward the left and right sides of the conveyance passage. By the action of the overflow tank, the oxygen gas bubbles adhering to the plate surface can be effectively removed, and the removed oxygen gas bubbles can be guided to the overflow liquid and flow out to the overflow tank. Therefore, according to the invention, variations in the plating film due to oxygen gas bubbles adhering to the plate surface of the plate-like workpiece can be eliminated, and a uniform plating film can be formed on the plate surface of the plate-like workpiece.

また、上記した課題を解決するため、本考案(請求項2の考案)は、前記搬送通路の左側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管と、搬送通路の右側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管を搬送通路の搬送方向に一定の間隔をおいた複数位置に交互に配設した、板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置を提供する。   Further, in order to solve the above-described problems, the present invention (the invention of claim 2) is directed to an upper and lower oblique jet discharge pipe formed with a discharge nozzle for discharging an oblique jet directed toward the left side of the transport passage. And upper and lower oblique jet discharge pipes, which form discharge nozzles that discharge oblique jets directed toward the right side of the transport passage, are alternately arranged at a plurality of positions at regular intervals in the transport direction of the transport passage. A horizontal electrolytic plating apparatus provided with a means for removing oxygen gas bubbles adhering to a plate-like workpiece is provided.

この考案によれば、搬送通路を水平に通過する板状被処理物はその板面に左右方向の斜め噴流を交互に受けることになるため、板面に付着した酸素ガス泡を左右方向に交互に強制移動でき、酸素ガス泡をより効率的に板面から離脱でき除去できる。さらに、搬送通路を水平に通過する板状被処理物の板面付近の処理液を均等に撹拌混合でき、板面付近の処理液の停滞よどみを効果的に解消できる。   According to this device, since the plate-like object to be horizontally passed through the conveyance path receives the oblique jet flow in the left-right direction alternately on the plate surface, oxygen gas bubbles adhering to the plate surface are alternately turned in the left-right direction. The oxygen gas bubbles can be separated from the plate surface and removed more efficiently. Furthermore, the processing liquid near the plate surface of the plate-like object to be processed that passes horizontally through the conveyance path can be uniformly stirred and mixed, and the stagnation of the processing liquid near the plate surface can be effectively eliminated.

また、上記した課題を解決するため、本考案(請求項3の考案)は、下部斜め噴流吐出管に形成した多数の吐出ノズルの形成範囲は、板状被処理物の搬送通路の横幅より広い範囲としたことを特徴とする、板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置を提供する。この考案によれば、水平搬送される板状被処理物の下面部に付着した大量の酸素ガス泡を特に効果的に除去できる。よって、水平搬送される板状被処理物の下面部は酸素ガス泡の上昇現象で大量の酸素ガス泡が溜まり易い、という弊害を解消できる。   Further, in order to solve the above-described problems, the present invention (the invention of claim 3) is such that the formation range of a large number of discharge nozzles formed in the lower oblique jet discharge pipe is wider than the lateral width of the conveying path of the plate-like workpiece. Provided is a horizontal electrolytic plating apparatus provided with means for removing oxygen gas bubbles adhering to a plate-like object to be processed, characterized by being in a range. According to this device, a large amount of oxygen gas bubbles adhering to the lower surface portion of the plate-like workpiece to be horizontally conveyed can be particularly effectively removed. Therefore, it is possible to eliminate the adverse effect that a large amount of oxygen gas bubbles easily accumulate due to the rising phenomenon of oxygen gas bubbles on the lower surface portion of the plate-like object to be horizontally conveyed.

また、本考案の上部斜め噴流吐出管は板状被処理物の搬送通路と上部陽極の間に配設し、下部斜め噴流吐出管は板状被処理物の搬送通路と下部陽極の間に配設してある。   In addition, the upper oblique jet discharge pipe of the present invention is disposed between the conveyance path of the plate-shaped workpiece and the upper anode, and the lower oblique jet discharge pipe is disposed between the conveyance path of the plate-shaped workpiece and the lower anode. It is set up.

また、本考案は、前記オーバーフロー槽から液排出管を介して排出される処理液を受ける液管理槽を備え、この液管理槽と上下部の斜め噴流吐出管が液供給管を介してそれぞれ接続され、この液供給管の途中に循環ポンプを介設し、この循環ポンプの作動で前記液管理槽内の処理液が前記液供給管を介して上下部の斜め噴流吐出管に送給される液循環式とした、板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置を提供する。   The present invention also includes a liquid management tank for receiving the processing liquid discharged from the overflow tank through the liquid discharge pipe, and the liquid management tank and the upper and lower oblique jet discharge pipes are connected to each other through the liquid supply pipe. A circulation pump is provided in the middle of the liquid supply pipe, and the processing liquid in the liquid management tank is fed to the upper and lower oblique jet discharge pipes through the liquid supply pipe by the operation of the circulation pump. Provided is a horizontal electrolytic plating apparatus equipped with a means for removing oxygen gas bubbles adhering to a plate-like object to be processed, which is a liquid circulation type.

本考案によれば、電解浴中の上下の陽極間をプリント基板等の板状被処理物が水平姿勢で水平方向に搬送通過される過程でこの板状被処理物の板面に電解メッキする水平電解メッキ装置において、電解メッキ処理中に板状被処理物の板面に付着する大量の酸素ガス泡を効率的に除去できるため、この酸素ガス泡の付着に起因したメッキ被膜のばらつきを解消し、板状被処理物に均一なメッキ被膜を形成できる。   According to the present invention, electrolytic plating is performed on the plate surface of the plate-like object to be processed in the process in which the plate-like object to be processed such as a printed circuit board is conveyed horizontally in a horizontal posture between the upper and lower anodes in the electrolytic bath. In horizontal electroplating equipment, a large amount of oxygen gas bubbles adhering to the plate surface of the plate-like workpiece can be efficiently removed during the electroplating process, eliminating variations in the plating film caused by the adhesion of oxygen gas bubbles. In addition, a uniform plating film can be formed on the plate-like workpiece.

本考案の実施形態を示す概略平面図である。1 is a schematic plan view showing an embodiment of the present invention. 本考案の実施形態を示す一部縦断側面図である。It is a partially vertical side view showing an embodiment of the present invention. 左右方向への斜め噴流を説明的に示した概略側面図である。It is the schematic side view which showed the diagonal jet to the left-right direction explanatoryly. 上下の斜め噴流吐出管の配設状態を示した概略正面図である。It is the schematic front view which showed the arrangement | positioning state of an upper and lower diagonal jet discharge pipe.

本考案の実施形態を図面に基づいて説明する。図1,図2の水平電解メッキ装置は、平行な両側縁部をもつ板状被処理物P(例えばプリント配線基板などの薄板状被処理物)の両側縁部をエンドレスに回転駆動される複数のクランプ5で保持し、電解メッキ処理槽1の処理液(電解メッキ処理液)W中を板状被処理物Pの板面が上下になる水平姿勢で水平方向に連続搬送する搬送装置3と、前記電解メッキ処理槽1の処理液W中に配設され、前記搬送装置3で水平搬送される板状被処理物Pの搬送通路2の上下位置に配設された陽極15(上部陽極15A,下部陽極15B)を備え、この上部陽極15Aと下部陽極15Bの間を搬送及び給電手段としての前記クランプ5を通じて陰極電流を給電された前記板状被処理物Pが水平に通過されることによって、前記板状被処理物Pの表面に金属メッキ被膜を形成するものである。   An embodiment of the present invention will be described with reference to the drawings. The horizontal electrolytic plating apparatus shown in FIGS. 1 and 2 is configured to rotate endlessly on both side edges of a plate-like workpiece P (for example, a thin plate-like workpiece such as a printed wiring board) having both side edges parallel to each other. A transfer device 3 that is held by the clamp 5 and continuously conveys in a horizontal posture in a horizontal posture in which the plate surface of the plate-like object P is vertically moved in the treatment liquid (electrolytic plating treatment liquid) W of the electrolytic plating treatment tank 1; Anode 15 (upper anode 15A) disposed in the processing liquid W of the electrolytic plating tank 1 and disposed at the upper and lower positions of the conveying path 2 of the plate-like object P to be horizontally conveyed by the conveying device 3. , A lower anode 15B), and the plate-like workpiece P fed with a cathode current through the clamp 5 as a conveying and feeding means is horizontally passed between the upper anode 15A and the lower anode 15B. , Gold on the surface of the plate-shaped workpiece P And it forms a plating film.

図1は、板状被処理物Pが板面を上下にした水平状態で左側から電解メッキ処理槽1に供給され、該処理槽1を該水平状態で連続的に矢印Aの方向に搬送させて通過し、電解メッキ処理後に処理槽1から右方向へ搬出される、装置の概略平面図を示している。なお、水平状態の板状被処理物Pを電解メッキ処理槽1に搬入する横長の搬入口1a、水平状態の板状被処理物Pを電解メッキ処理槽1から搬出する横長の搬出口1bには、この搬入口1aと搬出口1bに対応する処理槽1内側に上下二段のシールローラ(図示せず)を水平に配設し、処理液Wが搬入口1aと搬出口1bから漏れないようにシールされている。   FIG. 1 shows that a plate-like workpiece P is supplied to the electroplating treatment tank 1 from the left side in a horizontal state with the plate surface up and down, and the treatment tank 1 is continuously conveyed in the direction of arrow A in the horizontal state. FIG. 2 shows a schematic plan view of the apparatus that passes through and is discharged rightward from the processing tank 1 after electrolytic plating. In addition, the horizontally long plate-like workpiece P is carried into the electrolytic plating tank 1 and the horizontally long plate-like workpiece P is carried out from the electrolytic plating tank 1 to the horizontally long outlet 1b. Is provided with two upper and lower sealing rollers (not shown) horizontally inside the processing tank 1 corresponding to the carry-in port 1a and the carry-out port 1b, so that the processing liquid W does not leak from the carry-in port 1a and the carry-out port 1b. So that it is sealed.

前記搬送装置3は、板状被処理物Pの搬送通路2を間にした両側にエンドレスに回転駆動される搬送駆動ベルト4,4を備えた搬送手段をそれぞれ配設し、この搬送駆動ベルト4に等間隔をおいて多数のクランプ5・・・を取付け、前記搬送通路2を間にして互いに平行な内側の直線駆動経路部を移動する複数のクランプ5で平行な両側縁部をもつ板状被処理物Pの両側縁部を上下方向から挟持し、該板状被処理物Pの板面を上下にした水平状態で電解メッキ処理槽1のメッキ処理液W中を一方向(矢印A方向)に連続的に水平搬送するように構成されている。   The conveying device 3 is provided with conveying means provided with conveying driving belts 4 and 4 that are rotationally driven endlessly on both sides of the conveying path 2 of the plate-like workpiece P, and this conveying driving belt 4. A plurality of clamps 5 are attached at equal intervals to each other, and a plurality of clamps 5 that move in parallel inside linear drive path portions with the conveyance path 2 in between are plate-like shapes having parallel side edges. The both side edges of the workpiece P are sandwiched from above and below, and the plate surface of the plate-like workpiece P is turned upside down in one direction (in the direction of arrow A) in the plating solution W in the electrolytic plating bath 1. ) Is continuously transported horizontally.

前記搬送駆動ベルト4は、ローラ6,6に巻架され、搬送駆動用モータ(図示せず。)によって一方のローラ6を回転駆動させて、エンドレスに回転駆動されるように成っている。前記ローラ6には搬送駆動ベルト(タイミングベルト)4に合う歯が設けられている。エンドレスに回転駆動される前記搬送駆動ベルト4に等しい間隔を置いて取付けたクランプ5・・・は、図1に示したように複数のクランプ5で矩形の板状被処理物Pの側縁部を挟持できる間隔に取付けてある。なお、図1では、クランプ5・・・をエンドレスの搬送駆動ベルト4の一部範囲のみで表示したが、搬送駆動ベルト4の全範囲に亘り等間隔に取付けてある。搬送通路2を間にした両側に設けた搬送駆動ベルト4,4は、等速度で同期回転駆動されるように成っている。この搬送装置3,3による板状被処理物Pの搬送速度は、1分当たり0.5m〜2mとしてあり、板状被処理物の表面処理条件によって可変としてある。   The conveyance drive belt 4 is wound around rollers 6 and 6, and is rotated endlessly by rotating one roller 6 by a conveyance drive motor (not shown). The roller 6 is provided with teeth that match the conveyance drive belt (timing belt) 4. The clamps 5... Attached at equal intervals to the transport drive belt 4 that is rotationally driven by the endless are side edges of a rectangular plate-shaped workpiece P with a plurality of clamps 5 as shown in FIG. It is installed at an interval that can be held. In FIG. 1, the clamps 5... Are shown only in a partial range of the endless transport drive belt 4, but are attached at equal intervals over the entire range of the transport drive belt 4. The transport drive belts 4 and 4 provided on both sides with the transport path 2 in between are configured to be synchronously rotated at a constant speed. The conveying speed of the plate-like object P by the conveying devices 3 and 3 is 0.5 m to 2 m per minute, and is variable depending on the surface treatment conditions of the plate-like object.

前記クランプ5は、図2にその概略構成を示したように、上方部分が空中で陰極電流を給電され、下方部分が電解メッキ処理槽1のメッキ処理液W中を移動可能な位置に配される上下方向に長い構造を有し、下端部に板状被処理物Pの側端部を上下方向において保持及び開放するクランプ接点部7(上クランプ接点部と下クランプ接点部)を備えている。このクランプ接点部7を除く通電材から成るクランプ5の液中での液接触部分は絶縁被覆処理してある。図2に示したクランプ5は、前記搬送駆動ベルト4に取付けられる共に後述する固定ガイドレール(給電レール)8に係合される固定側クランプ杆9(この固定側クランプ杆9の下端部に下クランプ接点部を形成してある。)と、この固定側クランプ杆9に上下動自在に保持される可動側クランプ杆10を備え、この可動側クランプ杆10の下端部に形成した上クランプ接点部は、圧縮バネ11のバネ圧によって下動され、常態においてクランプ接点部7(上クランプ接点部と下クランプ接点部)を上下方向に閉じた状態に制御してある。搬送通路2の始端部2a位置と終端部2b位置におけるクランプ移動経路に高低差のあるクランプ開閉ガイド(図示せず)を配設し、クランプ5がクランプ開閉ガイド位置を通過する際に、クランプの上方部分に設けたクランプ開閉ガイド係合部材(図示せず)がクランプ開閉ガイドの高位ガイド面部に係合され、前記圧縮バネ11のバネ圧に抗して前記可動側クランプ杆10の上クランプ接点部を固定側クランプ杆9の下クランプ接点部から離間されるように上動させ、クランプ接点部7を上下方向に離間させた開状態に制御するように構成されている。これによって、被処理物Pの搬送通路2の始端部2aを通過するクランプ5を開状態から被処理物の側縁部をクランプ可能な閉状態に制御し、被処理物Pの搬送通路2の終端部2bを通過するクランプ5を閉状態から被処理物の側縁部を開放可能な開状態に制御できるようにしている。   As shown in FIG. 2, the clamp 5 is disposed at a position where the upper portion is fed with a cathode current in the air and the lower portion is movable in the plating solution W of the electrolytic plating bath 1. The clamp contact portion 7 (upper clamp contact portion and lower clamp contact portion) that holds and opens the side end portion of the plate-like workpiece P in the vertical direction is provided at the lower end portion. . The liquid contact portion in the liquid of the clamp 5 made of a current-carrying material excluding the clamp contact portion 7 is subjected to insulation coating. The clamp 5 shown in FIG. 2 is attached to the conveyance drive belt 4 and is fixed to a fixed side clamp rod 9 (latched on the lower end portion of the fixed side clamp rod 9) that is engaged with a fixed guide rail (feed rail) 8 described later. A clamp contact portion is formed), and a fixed clamp 9 is provided with a movable clamp 10 that can be moved up and down, and an upper clamp contact formed at the lower end of the movable clamp 10 Is moved downward by the spring pressure of the compression spring 11, and the clamp contact portion 7 (the upper clamp contact portion and the lower clamp contact portion) is normally controlled to be closed in the vertical direction. A clamp opening / closing guide (not shown) having a height difference is disposed in the clamp movement path at the start end portion 2a position and the terminal end portion 2b position of the conveyance path 2, and when the clamp 5 passes the clamp opening / closing guide position, A clamp opening / closing guide engaging member (not shown) provided in the upper portion is engaged with a high-order guide surface portion of the clamp opening / closing guide, and resists against the spring pressure of the compression spring 11 and the upper clamp contact of the movable side clamp rod 10. And the clamp contact portion 7 is controlled to be in an open state in which the clamp contact portion 7 is separated in the vertical direction. Accordingly, the clamp 5 passing through the starting end 2a of the conveyance path 2 for the workpiece P is controlled from the open state to the closed state where the side edge of the workpiece can be clamped, and the conveyance path 2 of the conveyance path 2 for the workpiece P is controlled. The clamp 5 passing through the end portion 2b can be controlled from a closed state to an open state in which the side edge of the workpiece can be opened.

図2に示した断面矩形状の導電金属材からなる固定ガイドレール(給電レール)8は、前記搬送駆動ベルト4の内側の直線駆動経路部の下方位置に該直線駆動経路部と平行に配置してある。この固定ガイドレール(給電レール)8は搬送通路2の範囲にわたって延ばされている。内側の直線駆動経路部を移動するクランプ5は、この固定ガイドレール(給電レール)8に摺動接触されガイドされながら移動される。本考案では前記固定ガイドレール8を給電レールとして機能させ、この固定ガイドレール(給電レール)8から導電性のクランプ5を通じて薄板状被処理物Pに陰極電流を給電するようにしてある。   A fixed guide rail (feeding rail) 8 made of a conductive metal material having a rectangular cross section shown in FIG. 2 is arranged at a position below the linear drive path inside the transport drive belt 4 in parallel with the linear drive path. It is. The fixed guide rail (power supply rail) 8 extends over the range of the conveyance path 2. The clamp 5 that moves on the inner linear drive path is slidably contacted and guided by the fixed guide rail (feeding rail) 8. In the present invention, the fixed guide rail 8 is made to function as a power supply rail, and a cathode current is supplied from the fixed guide rail (power supply rail) 8 to the thin plate-shaped workpiece P through the conductive clamp 5.

前記陽極15(上部陽極15A、下部陽極15B)として、この実施例では、プレート状に形成した陽極を用いている。このプレート状の陽極15(上部陽極15A、下部陽極15B)を、メッキ処理液W中を水平搬送される板状被処理物Pの搬送通路2の上下位置に該板状被処理物Pの板面と平行に配設し、かつ該板状被処理物Pの搬送方向に一定の空間部をおいて複数配設してある。前記電解メッキ処理槽1のメッキ処理液W中に金属イオンを析出する上下の陽極15の間を前記クランプ5を通じて陰極電流を給電された前記板状被処理物Pが水平に通過される過程でその表面に電気メッキ処理が施される。   As the anode 15 (upper anode 15A, lower anode 15B), in this embodiment, an anode formed in a plate shape is used. The plate-like anode 15 (upper anode 15A, lower anode 15B) is placed on the plate-like workpiece P in the vertical position of the conveyance path 2 of the plate-like workpiece P that is horizontally conveyed in the plating treatment liquid W. A plurality of them are arranged in parallel to the surface and with a certain space in the conveying direction of the plate-like workpiece P. In the process of horizontally passing the plate-like workpiece P fed with a cathode current through the clamp 5 between the upper and lower anodes 15 for depositing metal ions in the plating solution W of the electrolytic plating bath 1. The surface is electroplated.

背景技術で述べたように、このような電解処理装置では、陽極15として特に不溶性陽極を用いた場合、この陽極15の所から大量の酸素ガスが発生し、この酸素ガスは電解浴中で大量の酸素ガス泡となって電解浴W中を上昇する。大量発生した酸素ガス泡は水平姿勢で水平方向に搬送させながら電解メッキ処理される板状被処理物Pの板面に滞留し付着され易く、特に水平搬送される板状被処理物Pの下面部は酸素ガス泡の上昇現象で大量の酸素ガス泡が溜まり易い。水平搬送される板状被処理物Pの板面(特に下面部)に付着した大量の酸素ガス泡は、メッキされる板面と電解浴の接触を妨げ、板状被処理物の板面に均一なメッキ被膜を形成するのに大きな妨げとなっている。   As described in the background art, in such an electrolytic processing apparatus, when an insoluble anode is used as the anode 15, a large amount of oxygen gas is generated from the anode 15, and this oxygen gas is generated in a large amount in the electrolytic bath. The oxygen gas bubbles are raised in the electrolytic bath W. Oxygen gas bubbles generated in large quantities are likely to stay and adhere to the plate surface of the plate-like object P to be electroplated while being conveyed in a horizontal position in a horizontal posture. In particular, the lower surface of the plate-like object P to be horizontally conveyed The part tends to accumulate a large amount of oxygen gas bubbles due to the rising phenomenon of oxygen gas bubbles. A large amount of oxygen gas bubbles adhering to the plate surface (particularly the lower surface portion) of the plate-like object P to be horizontally conveyed obstructs the contact between the plate surface to be plated and the electrolytic bath, and the plate surface of the plate-like object to be treated. This is a great hindrance to the formation of a uniform plating film.

この問題を解決するため、本考案は、搬送通路2の左右の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した斜め噴流吐出管20(上部斜め噴流吐出管20Aと下部斜め噴流吐出管20B)と、搬送通路2を間にした電解メッキ処理槽1の左右両側にオーバーフロー口26を設けたオーバーフロー槽25,25を配設させている。   In order to solve this problem, the present invention provides an oblique jet discharge pipe 20 (an upper oblique jet discharge pipe 20A and a lower oblique jet discharge formed with discharge nozzles for discharging an oblique jet directed toward the left and right sides of the transport passage 2. Pipes 20B) and overflow tanks 25, 25 provided with overflow ports 26 are provided on both the left and right sides of the electrolytic plating treatment tank 1 with the conveyance passage 2 therebetween.

前記斜め噴流吐出管20は、前記電解メッキ処理槽1の処理液W中であって、前記板状被処理物Pの搬送通路2を間にした上下位置に上部斜め噴流吐出管20Aと下部斜め噴流吐出管20Bを配設してある。この上下部の斜め噴流吐出管20A,20Bは、前記板状被処理物Pの搬送方向に対してほぼ直交する方向にそれぞれ樹脂製の丸パイプ状の管路を延ばし、この管路には前記被処理物の搬送方向と直交する方向に一定の間隔をおいて多数の吐出ノズル(図示せず)をそれぞれ形成してある。この上下部の斜め噴流吐出管20A,20Bの吐出ノズルは、図2及び図3のイロに示したように、搬送通路2を水平に通過する前記板状被処理物Pの相対する上下板面に向けてそれぞれ処理液を吐出すると共に、該搬送通路2の左右いずれか一方の同じ側部方向に向け斜めに処理液Wを吐出する斜め噴流Gを吐出するように形成してある。この上下部の斜め噴流吐出管20A,20Bを搬送通路2の搬送方向に間隔をおいた複数位置に、図3のイロに示したように、搬送通路2の左側の側部方向に向けた斜め噴流Gを吐出する吐出ノズルを形成した上下部の斜め噴流吐出管20A,20Bと、搬送通路の右側の側部方向に向けた斜め噴流Gを吐出する吐出ノズルを形成した上下部の斜め噴流吐出管20A,20Bとしてそれぞれ配設している。   The oblique jet discharge pipe 20 is in the processing liquid W of the electrolytic plating treatment tank 1 and is arranged at an upper and lower position with the conveying passage 2 for the plate-like workpiece P interposed therebetween, and an upper oblique jet discharge pipe 20A and a lower oblique jet pipe. A jet discharge pipe 20B is provided. The upper and lower oblique jet discharge pipes 20A and 20B extend a resin-made round pipe-like pipe line in a direction substantially orthogonal to the conveying direction of the plate-like workpiece P, A large number of discharge nozzles (not shown) are formed at regular intervals in a direction orthogonal to the conveyance direction of the workpiece. The discharge nozzles of the upper and lower oblique jet discharge pipes 20A and 20B are opposed to the upper and lower plate surfaces of the plate-like workpiece P that horizontally pass through the transport passage 2 as shown in FIG. 2 and FIG. Each of the processing liquids is discharged toward the surface, and an oblique jet G that discharges the processing liquid W obliquely toward the same side of either one of the left and right sides of the transport passage 2 is formed. The upper and lower oblique jet discharge pipes 20A and 20B are obliquely directed toward the left side of the transport passage 2 at a plurality of positions spaced in the transport direction of the transport passage 2 as shown in FIG. The upper and lower oblique jet discharge pipes 20A and 20B in which the discharge nozzle for discharging the jet G is formed, and the upper and lower oblique jet discharge in which the discharge nozzle for discharging the oblique jet G directed toward the right side of the transport passage is formed. It arrange | positions as pipe | tube 20A, 20B, respectively.

図1及び図2に示したように、上部斜め噴流吐出管20Aは板状被処理物Pの搬送通路2と上部陽極15Aの間に配設し、下部斜め噴流吐出管20Bは板状被処理物Pの搬送通路2と下部陽極15Bの間に配設してある。なお、この実施例に限定されずに、上下のプレート状の陽極15A,15Bを被処理物の搬送方向に一定の空間部をおいて複数配設し、この空間部に上下の斜め噴流吐出管を配設するようにしても良い。   As shown in FIGS. 1 and 2, the upper oblique jet discharge pipe 20A is disposed between the conveying path 2 of the plate-like object P and the upper anode 15A, and the lower oblique jet discharge pipe 20B is a plate-like treatment. It is disposed between the conveyance path 2 for the object P and the lower anode 15B. The upper and lower plate-like anodes 15A and 15B are not limited to this embodiment, and a plurality of upper and lower plate-like anodes 15A and 15B are arranged with a certain space in the conveying direction of the object to be processed. May be arranged.

前記オーバーフロー槽25,25は、電解メッキ処理槽1の左右両側に設けたオーバーフロー口26から溢れたメッキ処理槽1内の処理液をオーバーフロー液としてオーバーフロー槽25へ流出するようにしてある。この実施例ではオーバーフロー口26を電解メッキ処理槽1の側部に沿って長く形成してある。   The overflow tanks 25, 25 are configured to allow the processing liquid in the plating tank 1 overflowing from the overflow ports 26 provided on the left and right sides of the electrolytic plating tank 1 to flow into the overflow tank 25 as an overflow liquid. In this embodiment, the overflow port 26 is formed long along the side portion of the electrolytic plating tank 1.

図2に示したように、前記オーバーフロー槽25,25から液排出管27を介して排出される処理液を受ける液管理槽28(この液管理槽28で液の濃度等が調整される。)がオーバーフロー槽25,25より低位置に配設されている。この液管理槽28と上下部の斜め噴流吐出管20A,20Bが液供給管21(符号21Aは上部斜め噴流吐出管20Aに噴流液を供給する液供給管、符号21Bは下部斜め噴流吐出管20Bに噴流液を供給する液供給管をそれぞれ示している。)を介してそれぞれ接続され、この液供給管21の途中に循環ポンプ29を介設してある。この循環ポンプ29の作動で前記液管理槽28内の処理液が前記液供給管21(21A,21B)を介して上下部の斜め噴流吐出管20A,20Bに送給され、斜め噴流吐出管20の吐出ノズルから斜め噴流として吐出される、液循環式にしてある。   As shown in FIG. 2, a liquid management tank 28 that receives the processing liquid discharged from the overflow tanks 25 and 25 via the liquid discharge pipe 27 (the liquid concentration and the like are adjusted in the liquid management tank 28). Is disposed at a position lower than the overflow tanks 25, 25. The liquid management tank 28 and upper and lower oblique jet discharge pipes 20A and 20B are liquid supply pipes 21 (reference numeral 21A is a liquid supply pipe for supplying jet liquid to the upper oblique jet discharge pipe 20A, and reference numeral 21B is a lower oblique jet discharge pipe 20B. The liquid supply pipes for supplying the jet liquid are respectively shown in FIG. 2, and a circulation pump 29 is provided in the middle of the liquid supply pipe 21. By the operation of the circulation pump 29, the processing liquid in the liquid management tank 28 is fed to the upper and lower oblique jet discharge pipes 20A and 20B via the liquid supply pipe 21 (21A and 21B), and the oblique jet discharge pipe 20 A liquid circulation type is discharged from the discharge nozzle as an oblique jet.

図2から理解できるように、板状被処理物Pの板面に付着した酸素ガス泡Bは斜め噴流吐出管20の吐出ノズルから吐出する斜め噴流Gで板面から搬送通路の側部方向に噴き飛ばされて強制移動され、強制移動された酸素ガス泡Bはその上昇現象によって移動先で電解浴W中を上昇し、電解浴W中を上昇した酸素ガス泡Bは矢印Fのように前記オーバーフロー口26から溢れオーバーフローする処理液の流れに誘導されてオーバーフロー口26からオーバーフロー槽25に流出する。なお、図2では、図面の繁雑さを避けるため、一方の側部方向へ向けた斜め噴流Gのみ示し、反対方向への斜め噴流Gの図示は省略してある。このように、本考案は、搬送通路の左右の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した斜め噴流吐出管20と搬送通路を間にした電解メッキ処理槽の左右両側に配設したオーバーフロー槽25の働きによって、板面に付着した酸素ガス泡を効果的に除去できると共に、除去した酸素ガス泡をオーバーフローする液に誘導されてオーバーフロー槽に流出できる。したがって、考案によれば、板状被処理物の板面に付着した酸素ガス泡に起因するメッキ被膜のばらつきを解消でき、板状被処理物の板面に均一なメッキ被膜を形成できる。   As can be understood from FIG. 2, the oxygen gas bubbles B adhering to the plate surface of the plate-like workpiece P are oblique jets G discharged from the discharge nozzles of the oblique jet discharge pipes 20 from the plate surface toward the side of the transport passage. The oxygen gas bubbles B that are blown off and forcibly moved, and are forcibly moved, rise in the electrolytic bath W at the moving destination due to the rising phenomenon, and the oxygen gas bubbles B that have risen in the electrolytic bath W are It is guided by the flow of the processing liquid overflowing and overflowing from the overflow port 26 and flows out from the overflow port 26 to the overflow tank 25. In FIG. 2, only the oblique jet G directed in one side direction is shown, and the oblique jet G directed in the opposite direction is omitted in order to avoid the complexity of the drawing. As described above, the present invention is arranged on both the left and right sides of the electrolytic plating tank between the oblique jet discharge pipe 20 and the conveyance passage formed with the discharge nozzle for discharging the oblique jet directed toward the left and right sides of the conveyance passage. Oxygen gas bubbles adhering to the plate surface can be effectively removed by the action of the overflow tank 25 provided, and the removed oxygen gas bubbles can be guided to a liquid overflowing and discharged to the overflow tank. Therefore, according to the invention, variations in the plating film due to oxygen gas bubbles adhering to the plate surface of the plate-like workpiece can be eliminated, and a uniform plating film can be formed on the plate surface of the plate-like workpiece.

図1及び図3に示したように、搬送通路2を間にして上下の相対位置に配設した上下の噴流吐出管20A,20Bは同じ側部方向に向けて斜めに処理液を吐出する斜め噴流を吐出する多数の吐出ノズルを形成し、搬送通路2の左側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下の斜め噴流吐出管20A,20Bと、搬送通路2の右側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下の斜め噴流吐出管20A,20Bを搬送通路2の搬送方向に一定の間隔をおいた複数位置に交互に配設してある。図1において斜め噴流吐出管20に沿って示した矢印の方向は斜め噴流による酸素ガス泡の移動方向(噴き飛ばし方向)を示している。   As shown in FIGS. 1 and 3, the upper and lower jet discharge pipes 20 </ b> A and 20 </ b> B disposed at the upper and lower relative positions with the conveyance passage 2 in between are oblique to discharge the processing liquid obliquely toward the same side direction. Upper and lower oblique jet discharge pipes 20A and 20B formed with a plurality of discharge nozzles for discharging jets and forming discharge nozzles for discharging oblique jets directed toward the left side of the transport passage 2, and the right side of the transport passage 2 The upper and lower oblique jet discharge pipes 20A and 20B formed with discharge nozzles that discharge oblique jets directed in the direction of the side are alternately arranged at a plurality of positions at regular intervals in the transport direction of the transport passage 2. . In FIG. 1, the direction of the arrow shown along the oblique jet discharge pipe 20 indicates the moving direction (spraying direction) of oxygen gas bubbles by the oblique jet.

左右の側部方向に向けた斜め噴流を吐出する上下の斜め噴流吐出管20A,20Bを搬送方向に交互に配設した図1の実施例によれば、搬送通路2を水平に通過する板状被処理物Pはその板面に左右方向の斜め噴流を交互に受けることになるため、板面に付着した酸素ガス泡を左右方向に交互に噴き飛ばし強制移動でき、酸素ガス泡をより効率的に板面から離脱でき除去できる。さらに、搬送通路2を水平に通過する板状被処理物Pの板面付近の処理液Wを均等に撹拌混合でき、板面付近の処理液Wの停滞よどみを効果的に解消できる。   According to the embodiment of FIG. 1 in which the upper and lower oblique jet discharge pipes 20A and 20B for discharging the oblique jet directed toward the left and right side portions are alternately arranged in the transport direction, a plate shape passing horizontally through the transport path 2 Since the workpiece P is alternately subjected to the right and left oblique jets on the plate surface, the oxygen gas bubbles adhering to the plate surface are alternately blown off in the left and right directions and can be forcibly moved, thereby making the oxygen gas bubbles more efficient. Can be removed from the plate surface and removed. Furthermore, the processing liquid W in the vicinity of the plate surface of the plate-like object P passing through the transport passage 2 can be evenly stirred and mixed, and the stagnation of the processing liquid W in the vicinity of the plate surface can be effectively eliminated.

図1の実施例は同本数(図1では各6本)の上下の斜め噴流吐出管20A,20Bが搬送通路を間にした上下の相対位置(図4に示したように)に配設されている。上下の相対位置(図4に示したように)に配設した上下の斜め噴流吐出管20A,20Bの前記搬送通路2の搬送方向における配設間隔を図1の実施例より狭く設定(例えば100mmピッチ前後)し、上下の斜め噴流吐出管20A,20Bの配設本数を図1の実施例の配設本数より数多く配設するのが好ましい。前記した如く、水平搬送される板状被処理物Pの下面部は酸素ガス泡の上昇現象で大量の酸素ガス泡が溜まり易い。このように、上下の斜め噴流吐出管20A,20Bの配設本数を数多く配設すれば、水平搬送される板状被処理物の下面部に付着した大量の酸素ガス泡をより効果的に除去できる。   In the embodiment of FIG. 1, the same number (six in FIG. 1) of upper and lower oblique jet discharge pipes 20A and 20B are arranged at the upper and lower relative positions (as shown in FIG. 4) with the conveying passage in between. ing. The arrangement interval of the upper and lower oblique jet discharge pipes 20A and 20B arranged in the upper and lower relative positions (as shown in FIG. 4) in the conveyance direction of the conveyance passage 2 is set narrower than the embodiment of FIG. It is preferable that the number of the upper and lower oblique jet discharge pipes 20A and 20B be larger than the number of the embodiment in FIG. As described above, a large amount of oxygen gas bubbles easily accumulate on the lower surface portion of the plate-like workpiece P that is horizontally conveyed due to the rising phenomenon of oxygen gas bubbles. Thus, if a large number of upper and lower oblique jet discharge pipes 20A and 20B are arranged, a large amount of oxygen gas bubbles adhering to the lower surface portion of the plate-like object to be horizontally conveyed can be more effectively removed. it can.

また、図1,図2の実施例では、下部斜め噴流吐出管20Bの管長さを板状被処理物Pの搬送通路2の横幅より長く形成し、下部斜め噴流吐出管20Bに形成した多数の吐出ノズルの形成範囲を、板状被処理物Pの搬送通路2の横幅より広い範囲としてある。前記した如く、水平搬送される板状被処理物の下面部は酸素ガス泡の上昇現象で大量の酸素ガス泡が溜まり易い。このように、下部斜め噴流吐出管20Bに形成した多数の吐出ノズルの形成範囲を、板状被処理物Pの搬送通路2の横幅より広い範囲とすれば、水平搬送される板状被処理物Pの下面部に付着した大量の酸素ガス泡を特に効果的に除去できる。   1 and 2, the length of the lower oblique jet discharge pipe 20B is made longer than the width of the conveying passage 2 of the plate-like workpiece P, and a number of the lower oblique jet discharge pipes 20B are formed. The formation range of the discharge nozzle is set to a range wider than the lateral width of the conveyance path 2 of the plate-like workpiece P. As described above, a large amount of oxygen gas bubbles easily accumulate on the lower surface portion of the plate-like workpiece to be horizontally conveyed due to the rising phenomenon of oxygen gas bubbles. Thus, if the formation range of many discharge nozzles formed in the lower oblique jet discharge pipe 20B is a range wider than the lateral width of the conveyance path 2 of the plate-like object P, the plate-like object to be horizontally conveyed A large amount of oxygen gas bubbles adhering to the lower surface portion of P can be particularly effectively removed.

1 電解メッキ処理槽
W 処理液(電解メッキ処理液)
P 板状被処理物
2 搬送通路
3 搬送装置
4 搬送駆動ベルト
5 クランプ
7 クランプ接点部
8 固定ガイドレール(給電レール)
15 陽極
15A 上部陽極
15B 下部陽極
20 斜め噴流吐出管
20A 上部斜め噴流吐出管
20B 下部斜め噴流吐出管
G 斜め噴流
21(21A,21B) 液供給管
25 オーバーフロー槽
26 オーバーフロー口
27 液排出管
28 液管理槽
29 循環ポンプ
1 Electrolytic plating tank W Treatment liquid (Electroplating treatment liquid)
P plate-like object 2 conveyance path 3 conveyance device 4 conveyance drive belt 5 clamp 7 clamp contact portion 8 fixed guide rail (power supply rail)
DESCRIPTION OF SYMBOLS 15 Anode 15A Upper anode 15B Lower anode 20 Oblique jet discharge pipe 20A Upper oblique jet discharge pipe 20B Lower oblique jet discharge pipe G Oblique jet 21 (21A, 21B) Liquid supply pipe 25 Overflow tank 26 Overflow port 27 Liquid discharge pipe 28 Liquid management Tank 29 Circulation pump

Claims (5)

平行な両側縁部をもつ板状被処理物の両側縁部をエンドレスに回転駆動される複数のクランプで保持し、電解メッキ処理槽の処理液中を板状被処理物の板面が上下になる水平姿勢で水平方向に連続搬送する搬送装置と、前記電解メッキ処理槽の処理液中に配設され、前記搬送装置で水平搬送される板状被処理物の搬送通路の上下位置に配設された上部陽極と下部陽極を備え、この上部陽極と下部陽極の間を搬送及び給電手段としての前記クランプを通じて陰極電流を給電された前記板状被処理物が水平に通過されることによって、前記板状被処理物の表面にメッキ被膜を形成する水平電解メッキ装置において、
前記電解メッキ処理槽の処理液中であって、前記板状被処理物の搬送通路を間にした上下位置に上部斜め噴流吐出管と下部斜め噴流吐出管を配設し、この上下部の斜め噴流吐出管は前記被処理物の搬送方向と交差する方向に間隔をおいて多数の吐出ノズルをそれぞれ形成し、この上下部の斜め噴流吐出管の吐出ノズルは搬送通路を水平に通過する前記板状被処理物の相対する上下板面に向けてそれぞれ処理液を吐出すると共に該搬送通路の左右いずれか一方の同じ側部方向に向け斜めに処理液を吐出する斜め噴流を吐出するように形成し、この上下部の斜め噴流吐出管を搬送通路の搬送方向に間隔をおいた複数位置に、搬送通路の左側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管と、搬送通路の右側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管としてそれぞれ配設し、且つ、前記搬送通路を間にした電解メッキ処理槽の左右両側にオーバーフロー口を設けたオーバーフロー槽を配設し、電解メッキ処理槽の左右両側に設けたオーバーフロー口から溢れたメッキ処理槽内の処理液をオーバーフロー槽へ流出するようにしたことを特徴とする板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置。
Hold both side edges of plate-like workpieces with parallel side edges by multiple endlessly driven clamps, and the plate surface of the plate-like workpieces moves up and down in the treatment solution of the electroplating bath. A horizontal conveying device in a horizontal posture and a vertical position of a conveying path of a plate-like workpiece to be horizontally conveyed by the conveying device, disposed in the treatment liquid of the electrolytic plating tank. The plate-like workpiece to which a cathode current is fed through the clamp as a feeding and feeding means is horizontally passed between the upper anode and the lower anode, In a horizontal electroplating apparatus that forms a plating film on the surface of a plate-like workpiece,
An upper oblique jet discharge pipe and a lower oblique jet discharge pipe are disposed in a treatment liquid of the electrolytic plating treatment tank at a vertical position with the conveyance path of the plate-like workpiece interposed therebetween. The jet discharge pipe forms a large number of discharge nozzles at intervals in a direction intersecting the transport direction of the workpiece, and the discharge nozzles of the upper and lower oblique jet discharge pipes horizontally pass through the transport passage. It is formed so that a processing liquid is discharged toward the opposite upper and lower plate surfaces of the object to be processed and an oblique jet is discharged that discharges the processing liquid obliquely toward the same side portion on either the left or right side of the transfer path. The upper and lower oblique jet discharge pipes are formed at a plurality of positions spaced in the conveying direction of the conveying passage, and the upper and lower oblique portions are formed with discharge nozzles for discharging oblique jets directed toward the left side of the conveying passage. Jet discharge pipe and right side of conveyance path Disposed as upper and lower oblique jet discharge pipes having discharge nozzles for discharging oblique jets directed in the lateral direction, and provided with overflow ports on both the left and right sides of the electrolytic plating tank with the conveyance passage in between. A plate-like object to be processed is characterized in that a treatment liquid in the plating tank overflowing from overflow ports provided on the left and right sides of the electrolytic plating tank is discharged to the overflow tank. A horizontal electrolytic plating apparatus provided with means for removing adhering oxygen gas bubbles.
前記搬送通路の左側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管と、搬送通路の右側の側部方向に向けた斜め噴流を吐出する吐出ノズルを形成した上下部の斜め噴流吐出管を搬送通路の搬送方向に一定の間隔をおいた複数位置に交互に配設したことを特徴とする、請求項1に記載の板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置。   An upper and lower oblique jet discharge pipe formed with a discharge nozzle that discharges an oblique jet directed toward the left side of the transport passage, and a discharge nozzle that ejects an oblique jet directed toward the right side of the transport passage. The formed upper and lower oblique jet discharge pipes are alternately disposed at a plurality of positions at a predetermined interval in the transport direction of the transport passage, and adhere to the plate-like object to be processed according to claim 1. A horizontal electrolytic plating apparatus provided with means for removing oxygen gas bubbles. 下部斜め噴流吐出管に形成した多数の吐出ノズルの形成範囲は、板状被処理物の搬送通路の横幅より広い範囲としたことを特徴とする、請求項1に記載の板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置。   The plate-shaped workpiece according to claim 1, wherein the formation range of the plurality of discharge nozzles formed in the lower oblique jet discharge pipe is wider than the width of the conveyance path of the plate-shaped workpiece. A horizontal electrolytic plating apparatus provided with means for removing adhering oxygen gas bubbles. 上部斜め噴流吐出管は板状被処理物の搬送通路と上部陽極の間に配設し、下部斜め噴流吐出管は板状被処理物の搬送通路と下部陽極の間に配設した請求項1に記載の板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置。   2. The upper oblique jet discharge pipe is disposed between the transport path of the plate-shaped workpiece and the upper anode, and the lower oblique jet discharge pipe is disposed between the transport path of the plate-shaped workpiece and the lower anode. A horizontal electrolytic plating apparatus provided with a means for removing oxygen gas bubbles adhering to the plate-like object to be treated as described in 1. 前記オーバーフロー槽から液排出管を介して排出される処理液を受ける液管理槽を備え、この液管理槽と上下部の斜め噴流吐出管が液供給管を介してそれぞれ接続され、この液供給管の途中に循環ポンプを介設し、この循環ポンプの作動で前記液管理槽内の処理液が前記液供給管を介して上下部の斜め噴流吐出管に送給される液循環式とした請求項1に記載の板状被処理物に付着する酸素ガス泡の除去手段を備えた水平電解メッキ装置。   A liquid management tank for receiving a processing liquid discharged from the overflow tank through a liquid discharge pipe is provided, and the liquid management tank and upper and lower oblique jet discharge pipes are respectively connected via a liquid supply pipe. A circulation pump is provided in the middle of the operation, and the processing liquid in the liquid management tank is supplied to the upper and lower oblique jet discharge pipes via the liquid supply pipe by the operation of the circulation pump. A horizontal electrolytic plating apparatus provided with a means for removing oxygen gas bubbles adhering to the plate-like object to be treated according to Item 1.
JP2011007312U 2011-12-10 2011-12-10 Horizontal electrolytic plating apparatus provided with means for removing oxygen gas bubbles adhering to a plate-like workpiece Expired - Fee Related JP3173836U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013249527A (en) * 2012-06-04 2013-12-12 Marunaka Kogyo Kk Horizontal continuous plating treatment apparatus with clamp conveyance
JP2014105339A (en) * 2012-11-24 2014-06-09 Marunaka Kogyo Kk Horizontal transporting type electrolytic plating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013249527A (en) * 2012-06-04 2013-12-12 Marunaka Kogyo Kk Horizontal continuous plating treatment apparatus with clamp conveyance
JP2014105339A (en) * 2012-11-24 2014-06-09 Marunaka Kogyo Kk Horizontal transporting type electrolytic plating apparatus

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