JP5718172B2 - Horizontal conveying device for thin plate-like object in surface treatment device, and clamp of this horizontal conveying device - Google Patents

Description

  The present invention is used for a horizontal transfer device of an apparatus for transferring a thin plate-like object to be processed such as a printed wiring board in one direction in a horizontal state and performing a surface treatment on the object to be processed in the horizontal transfer process, and the horizontal transfer apparatus. Regarding clamps.

  As a processing apparatus for transporting a plate-like workpiece such as a circuit board in one direction in a horizontal state and performing electrolytic treatment on the surface of the plate-like workpiece in the carrying process, electrolytic treatment of a plate-like object of Patent Document 1 Devices are known. In this electrolytic treatment apparatus, a plate-like object is supplied to the electrolysis chamber in a horizontal state, continuously passes through the electrolysis chamber for a certain residence time, and is discharged again from the electrolysis chamber after the electrolysis treatment. A device for electrodeposition, a transport device for transporting a plate-like object through an electrolysis chamber, is driven to rotate endlessly, sandwiching the side edge of the plate-like object in the transport area and moving in the transport direction Configured as a row of individual clamps.

  That is, the apparatus of Patent Document 1 clamps and conveys a plate-like object only in an electrolysis chamber (that is, in an electrolytic treatment tank), and includes a carry-in means for supplying the plate-like object to the electrolysis chamber in a horizontal state, A separate unloading means for unloading the object from the electrolysis chamber in a horizontal state is required. However, the apparatus disclosed in Patent Document 1 does not disclose this carry-in means or carry-out means.

  As a means for carrying a plate-like object such as a circuit board into the surface treatment tank in a horizontal state and a means for carrying it out of the treatment tank, those by roller conveyance, whose outline is shown in FIG. 6, are known. In FIG. 6, L1 represents roller conveyance, L2 represents clamp conveyance, L3 represents a roller conveyance section, and T represents a treatment tank in which the treatment liquid F is placed. As shown in FIG. 6, a seal roller that also functions as a roller conveyor inside the corresponding processing tank T is provided at the carry-in port Ta and the carry-out port Tb of the processing tank T that loads and unloads the plate-like workpiece P in the horizontal state. S is provided to prevent the treatment liquid in the tank from flowing out.

  However, in the apparatus of FIG. 6, there is an adverse effect of scratching the substrate surface of the object to be processed in the roller conveyance. In addition, it is technically difficult to reliably transfer a horizontal substrate from the roller conveyance means to the clamp conveyance means, and in particular, clamp conveyance in which both side edges of the substrate are clamped by endlessly rotated clamps and the substrate is conveyed horizontally. It is technically difficult to ensure delivery to the means.

  In addition, the applicant of the present invention is an apparatus capable of surface processing while accurately holding both side edges of plate-like workpieces having different width sizes with clamps (clamping chucks) that rotate endlessly and continuously transporting them horizontally. It has been proposed (Patent Document 2).

Japanese Patent Laid-Open No. 63-76898 (Japanese Patent Publication No. 6-31476) JP 2011-38160 A

  In view of such a situation, the present invention clamps both side edges of a thin plate-like workpiece with a clamp that rotates endlessly and continuously conveys it horizontally in one direction, and is clamped by the clamp during this horizontal conveyance process. A thin plate-like object to be horizontally conveyed is carried into a treatment tank filled with a treatment liquid, passed through the treatment liquid in the treatment tank, and an apparatus for unloading from the treatment tank is provided. A processing tank partition structure (tank seal structure) suitable for carrying in and out of a thin plate-like object to be processed, clamped on both side edges with a clamp, in a horizontal state reliably and smoothly into a processing tank. ) And a clamp having a structure suitable for the surface treatment apparatus.

  In addition, the present invention is applicable to an apparatus that clamps both side edges of a plate-like workpiece having different width sizes with a clamp that rotates endlessly and performs surface treatment while continuously conveying in a horizontal state. Surface treatment with a processing tank partition structure (tank seal structure) suitable for loading and unloading a thin plate-shaped workpiece clamped in a processing tank filled with processing liquid reliably and smoothly in a horizontal state It is an object of the present invention to provide a horizontal transfer device for an apparatus.

  In order to solve the above-described problems, the present invention (invention of claim 1) is provided with a conveying device on both sides of a conveying path for a thin plate-like object, and each conveying device has the conveying path in between. Each of which has an endless horizontal drive means having inner linear drive path portions parallel to each other, and a plurality of clamps are attached to the horizontal transport drive means at equal intervals. A clamp group that moves in parallel linear drive path portions parallel to each other, clamps both side edges of the flexible thin plate-like workpiece from the vertical direction, and the plate surface of the thin plate-like workpiece is fixed up and down. A horizontal plate is continuously conveyed in one direction at a horizontal height level, and a thin plate-like workpiece to be horizontally conveyed while being held in the clamp in the horizontal conveyance process is carried into a treatment tank filled with a treatment liquid. In the treatment tank It is a horizontal transfer device that passes through the treatment liquid and is carried out of the processing tank, and is a thin plate that is clamped by the clamps and horizontally transferred to the tank partition plates on the carry-in side and the carry-out side of the treatment tank A workpiece passage notch that allows the workpiece to pass through is formed, and a clamp passage notch that opens the upper side that allows the movement of the clamp that clamps the thin plate workpiece is formed. A liquid ejection partition device is provided inside the processing tank on the carry-in side and the carry-out side of the processing tank corresponding to the workpiece passage notch, and the liquid jet partition device has the workpiece passage notch in the middle. Communicating with the upper liquid jet supply box and the lower liquid supply pipe in the form of a partition that communicates with the upper supply pipe of the jet liquid with an interval allowing passage of the thin plate-like object to be horizontally conveyed to the vertical position. Finished A lower-part liquid jet supply box having a slit-like shape, and each forming a liquid outlet having a slit-like opening extending in the lateral width direction of the thin plate-like workpiece to be horizontally conveyed on the opposite side of the upper and lower liquid jet supply boxes, The ejected liquid supplied from the ejected liquid upper supply pipe into the upper liquid jet supply box is ejected obliquely downward from the liquid outlet of the upper liquid jet supply box toward the processing liquid in the processing tank. The jetted liquid supplied from the jetted liquid lower supply pipe into the lower liquid jet supply box is ejected obliquely upward from the liquid jet outlet of the lower liquid jet supply box toward the processing liquid in the processing tank. And configured to prevent the processing liquid in the processing tank from flowing out of the processing object passage notch by the ejected liquid discharged from the upper and lower liquid jet supply boxes, and clamped at the corresponding position of the clamp passage notch And a clamp passage frame that opens the lower inner position where the side end of the thin plate-like object clamped by the clamp passes and is disposed is disposed on the clamp passage frame. A plurality of flexible sealing tongues are attached to open and close the clamp movement passage part of the clamp passage frame so that the sealing tongues are normally closed to prevent liquid outflow from the inside of the treatment tank. Provided is a horizontal conveyance device for a thin plate-like object to be processed in a surface treatment device, which is configured to be opened by a moving pressing force of the clamp when passing the clamp.

  According to the present invention (invention of claim 1), both side edges of the thin plate-like workpiece are clamped by the endlessly rotating clamp and continuously conveyed horizontally in one direction, and the clamp is clamped in the horizontal conveying process. Since the thin plate-like object to be horizontally transported is carried into a treatment tank filled with a treatment liquid, passes through the treatment liquid in the treatment tank, and is unloaded from the treatment tank. The product delivery by roller conveyance and clamp conveyance as in the conventional apparatus shown in FIG. 6 is not required, and the thin plate-like workpiece having both side edges clamped by the clamp is filled with the treatment liquid surely and smoothly in the horizontal state. Can be carried in and out of the treatment tank. Further, since the roller conveyance as in the conventional apparatus shown in FIG. 6 is not necessary, the substrate surface of the object to be processed is not damaged by the roller.

  Further, since the liquid ejection partition device of the present invention (the invention of claim 1) has a seal structure by liquid flow, the substrate surface of the object to be processed is damaged as compared with the seal structure by the seal roller of the conventional device shown in FIG. Absent. Moreover, the liquid ejection partition device of the present invention (invention of claim 1) ejects from the liquid ejection port of the upper liquid jet supply box obliquely downward toward the processing liquid in the processing tank, and lower liquid jet The processing liquid in the processing tank is ejected from the liquid outlet of the supply box obliquely upward toward the processing liquid in the processing tank, and is discharged from the upper and lower liquid jet supply boxes from the processing object passage notch portion. Therefore, particularly on the carry-in side of the treatment tank, there is a function to effectively guide the horizontal carry-in movement of the thin plate-like workpiece.

  In order to solve the above-described problems, the present invention (invention of claim 2) is provided with a transport device on both sides of the transport path of the thin plate-like workpiece, and each transport device has the transport path. Each of which is provided with horizontal conveying drive means which are endlessly rotated and having inner linear drive path portions parallel to each other, and a plurality of clamps are attached to the horizontal conveyance drive means at equal intervals, A clamp group that moves on the inner straight drive path part parallel to each other between the two sides of the flexible thin plate-like workpiece is clamped from above and below to raise and lower the plate surface of the thin plate-like workpiece. A thin plate-like workpiece to be horizontally transported held horizontally by the clamp in this horizontal transport process is transported into a processing tank filled with a processing liquid. , This process It is a horizontal transfer device that passes through the inside of the processing liquid and is carried out of the processing tank, and at least one of the transfer devices is transferred to the other transfer device with a transfer path in between. In the apparatus, wherein the width of the passages can be changed in the widthwise direction and the width of the clamp groups moving inside the linear drive path portions parallel to each other can be adjusted with the conveyance passage therebetween, the processing tank And forming a workpiece passage notch that allows the thin plate-like workpiece to be transported and passed horizontally by being clamped by the clamps to the carry-in and unload-side tank partition plates. Forming a clamp passage notch that allows the movement of the clamp to clamp and move the workpiece open, and processing on the loading side and unloading side of the processing tank corresponding to the workpiece passage notch A liquid ejection partition device is provided on each inner side, and the liquid ejection partition device opens an interval that allows the thin plate-like workpiece to be horizontally conveyed to a vertical position with the workpiece passage notch in between. A partition-shaped upper liquid jet supply box communicated with the jet liquid upper supply pipe and a partition-shaped lower liquid jet supply box communicated with the jet liquid lower supply pipe are provided, opposite to the upper and lower liquid jet supply boxes. Forming a liquid jet opening having a slit-like opening extending in the width direction of the thin plate-like object to be horizontally conveyed to the upper liquid jet supply box from the jet liquid upper supply pipe. The liquid jet outlet of the upper liquid jet supply box was ejected obliquely downward into the processing liquid in the treatment tank and was supplied into the lower liquid jet supply box from the lower liquid supply pipe. The workpiece is ejected from the liquid jet outlet of the lower liquid jet supply box in an obliquely upward direction toward the processing liquid in the processing tank and ejected from the upper and lower liquid jet supply boxes. An upper position where the clamp passes and moves to the corresponding position of the clamp passage notch and the side end of the thin plate-like object to be clamped by the clamp is configured to prevent the treatment liquid from flowing out of the treatment tank from the passage notch. Each of the clamp passage frames that open the lower inner position through which the part passes is disposed, and this clamp passage frame has a large number of flexibility to close the clamp movement passage part of the clamp passage frame so that it can be opened and closed. A seal tongue piece is attached, and this seal tongue piece is closed so as to prevent liquid outflow from the inside of the treatment tank in a normal state, and is configured to be opened by the moving pressing force of the clamp when passing through the clamp. The clamp passage notch corresponding to the clamp group that moves on the inner linear drive path portion in the conveying device configured to be movable in the width direction is notched to a width that allows the lateral movement of the clamp. The partition plates that selectively close the gaps of the wide clamp passage notches that cannot be covered by the clamp passage frames are respectively attached to the left and right sides of the clamp passage frames disposed in the wide clamp passage notches. The partition plate is attached to the clamp passage frame with a gap that allows passage of the corresponding side end of the thin plate-like workpiece to be horizontally conveyed, and the outer end of the gap is The clamp passage frame body and the partition plate attached to the clamp passage frame body are configured to be continuous with the opening portion at the lower inner position of the clamp passage frame body. And configured to move in the width direction in conjunction with the width direction movement of the movable conveying device in the lateral direction, to provide a horizontal conveyor unit lamellar object to be processed in the surface treatment apparatus.

  According to the present invention (invention of claim 2), in addition to the effects of the above-described invention (invention of claim 1), both side edges of plate-like workpieces having different width sizes are clamped with clamps that rotate endlessly. Therefore, the present invention can also be effectively applied to an apparatus that performs surface treatment while continuously conveying in a horizontal state.

  Further, the present invention (invention of claim 3) is a seal structure in which a large number of the sealing tongue pieces are arranged in a multi-stage shape in the movement passage direction of the clamp, and the sealing effect for preventing liquid outflow is enhanced.

  In order to solve the above-described problems, the present invention (the invention of claim 4) is attached to a horizontal conveyance driving means that is rotationally driven endlessly provided on both sides of the conveyance path of the thin plate-like workpiece. And clamped on both side edges of the flexible thin plate-like workpiece from above and below by a clamp group that is driven to rotate and moves inside the linear drive path portion parallel to each other with the conveyance path in between. The processing liquid is transferred to a thin plate-like object to be processed that is horizontally transported in a horizontal direction while being transported horizontally in one direction at a certain horizontal height level with the plate surface of the processed material up and down. It is a clamp of a horizontal transport device that is loaded into a filled processing tank, passes through the processing liquid in the processing tank and is transported out of the processing tank, and the clamp is connected to the horizontal transport driving means And this A clamp mounting body that is externally fitted so as to be moved while sliding along a fixed guide rail horizontally disposed below the linear drive path portion of the flat conveyance driving means, and held by the clamp mounting body The clamp body includes a clamp body, the lower part of the clamp body is disposed at a position where the lower part of the clamp body can move in the processing liquid of the processing tank, and the upper part of the clamp body is held by the clamp attachment body in the air. The clamp body is formed in a shape that is long in the vertical direction, and includes an upper clamp portion and a lower clamp portion that can clamp the side edge of the thin plate workpiece from the vertical direction at the lower end of the clamp body. A fixed clamp 長 い long in the vertical direction whose upper part is fixedly held on the mounting body, and a movable clamp long in the vertical direction held in the fixed clamp に so as to be movable up and down. The upper clamp portion is formed at the lower end portion of the movable clamp rod, the lower clamp portion receiving the upper clamp portion is formed at the lower end portion of the fixed clamp rod, and the movable clamp rod is compressed by a compression spring. The upper clamp portion of the movable clamp と and the lower clamp portion of the fixed clamp 杆 are controlled to be closed in the vertical direction in a normal state. A clamp opening / closing guide engaging member that moves the movable clamp rod up against the spring pressure of the compression spring and opens the upper and lower clamp portions in the vertical direction is provided. In the clamp movement direction with respect to the lower saddle of the movable clamp rod (the lower flange moves in the treatment liquid). A bent portion having a substantially U-shaped cross section is formed at the lower end of the same row portion of the fixed clamp rod, and opens on the conveyance path side. The movable portion is placed on the bent lower end piece of the bent portion. Provided is a clamp for a horizontal conveyance device for a thin plate-like workpiece in a surface treatment device, wherein the lower clamp portion that receives the upper clamp portion of a clamp rod is formed.

  In the clamp according to the present invention (invention of claim 4), the lower hooks of the fixed clamp rods are arranged in the same row direction as the front and rear positions in the clamp movement direction with respect to the corresponding lower hooks of the movable clamp rods. Therefore, it is possible to reduce the liquid resistance of the clamp part that moves forward in the processing liquid in the processing tank, and to pass the clamp passage part (the clamp passage notch part, the clamp part of the partition part on the carry-in side and the carry-out side of the treatment tank). The width of the passage frame) can be narrowed, and the outflow of the treatment liquid in the treatment tank can be easily prevented from this clamp passage portion.

  According to the present invention (invention of claim 5), an upper presser guide plate is attached to the lower end portion of the movable clamp rod, and a lower presser guide plate is attached to the lower end portion of the fixed clamp rod. Provided is a clamp in which a side edge portion of the thin plate-like object to be processed can be clamped in the vertical direction in cooperation with the clamp portion, and the vertical pressing guide plate has a shape extending in the clamp moving direction.

  According to the clamp of the present invention (the invention of claim 5), the side edge portion of the thin plate-like workpiece can be clamped in a relatively long range along the clamp movement direction by the upper and lower pressing guide plates. Therefore, it is possible to reliably clamp the side edge portion of the thin plate-like workpiece, and to increase the interval between the clamps attached to the horizontal conveyance drive means (drive belt) that is driven to rotate endlessly. As a result, the number of clamps to be attached Can be reduced.

  According to the present invention, it is possible to carry in and out a thin plate-like object to be processed, which is clamped on both side edges by a clamp, into a treatment tank filled with a treatment liquid reliably and smoothly in a horizontal state. Therefore, since it is not necessary to perform relay conveyance by clamp conveyance and roller conveyance, the thin plate-like workpiece can be horizontally conveyed accurately and smoothly, and adverse effects caused by roller conveyance (scratches and indentations on the substrate surface of the workpiece). And the occurrence of the object to be processed on the roller) can be eliminated.

1 is a schematic plan view of the present invention. It is a schematic plan view of the principal part of this invention. It is a schematic side view of the principal part of this invention. It is the schematic front view which expanded and showed the principal part of this invention. The clamp of this invention is shown, (A) is a side view, (B) is a front view, (C) is a cross-sectional plan view by the AA arrow line of (B). It is a schematic front view of a conventional apparatus.

  Embodiments of the present invention will be described with reference to the drawings. FIG. 1 schematically shows the entire apparatus, FIGS. 2 to 4 show an embodiment of the main part of the apparatus, and FIG. 5 shows a preferred embodiment of a clamp used in the conveying apparatus of the present invention.

  FIG. 1 shows that conveying devices 2a and 2b are provided on both sides of a thin plate-like object (printed wiring board or the like) P with a conveying path 1 therebetween, and the conveying path 1 is interposed between the conveying devices 2a and 2b. Are provided with horizontal conveying drive means 3 and 3 having endless linear drive path portions 3a and 3a that are parallel to each other and driven endlessly. A plurality of clamps 4 are arranged at equal intervals on the horizontal conveying drive means 3. The upper and lower edges of the flexible thin plate-like workpiece P are moved up and down by a clamp group 4... Which moves inside the linear drive path portions 3 a and 3 a parallel to each other with the conveyance path 1 in between. Clamping is performed from one direction, and the plate surface of the thin plate-like workpiece P is continuously conveyed horizontally in one direction (in the direction of arrow A) at a certain horizontal height level up and down. Held and transported horizontally The thin plate-like object P is carried into a treatment tank 5 (in this embodiment, as a plating treatment tank) filled with the treatment liquid F, and the treatment liquid F in the treatment tank 5 is allowed to pass horizontally, The horizontal conveyance apparatus of the thin plate-shaped to-be-processed object in the surface treatment apparatus made to carry out horizontally from the processing tank 5 is shown.

  In the illustrated embodiment, at least one of the transport devices 2a, 2b (movable transport device) 2b is in contrast to the other transport device (fixed transport device) 2a with the transport path 1 in between. The clamp group 4 is configured to be movable in the lateral direction in which the lateral width (W) of the transport path 1 can be varied, and to move the linear drive path portions 3a, 3a parallel to each other with the transport path 1 therebetween. The width width (W) of the head is adjustable.

  In FIG. 1, on the carry-in side and the carry-out side of the treatment tank 5, a liquid ejection partition device 12 corresponding to the workpiece passage part, and a clamp passage frame body in which a seal tongue piece 26 is attached at a position corresponding to the clamp passage part. 22 are arranged respectively. These configurations will be described in detail later with reference to FIGS.

  The flexible thin plate-like workpiece P is required to have both side edges parallel to each other, but in addition to the rectangular plate (printed wiring board, etc.) shown in the figure, a long strip-like object having both side edges parallel to each other. It may be. In this surface treatment tank, the plate-like workpiece is subjected to surface treatment such as plating or chemical treatment. INDUSTRIAL APPLICABILITY The present invention can be widely applied as a transfer device for a surface treatment apparatus for a flexible thin plate-like object to be processed, such as electrolytic treatment such as electroplating or electroless treatment.

  The horizontal conveyance drive means 3 that is rotationally driven by the endless is a drive belt (toothed belt) 7 that is wound around rollers 6 and 6 and is rotationally driven endlessly by a conveyance drive motor (not shown). One roller 6 is driven to rotate. The roller 6 is provided with teeth that match a drive belt (toothed belt) 7. In the case of the rectangular thin plate-shaped workpiece P, the clamp groups 4... Attached at equal intervals to the horizontal conveyance driving means 3 (drive belt 7) that is rotationally driven by the endless are at least a plurality of side edge portions. It is attached at an interval that can hold the part. In FIG. 1, the clamp groups 4... Are shown only in a part of the endless rotation drive path, but are attached at equal intervals over the entire range of the horizontal conveyance drive unit 3 (drive belt 7). . The horizontal transport driving means 3 and 3 are configured to be synchronously rotated at the same speed.

  A fixed guide rail 8 having a rectangular cross section extending in the horizontal direction along the linear drive path portions 3a and 3a is provided at a position below the linear drive path portions 3a and 3a inside the horizontal conveyance drive means 3 (drive belt 7). (Refer to FIGS. 3 to 5). The clamp attachment bodies 40 (described later) of the clamp groups 4... Moving along the inner linear drive path portions 3 a, 3 a are moved horizontally while sliding along the fixed guide rail 8. When the present invention is used as an electrolysis processing apparatus such as an electroplating processing apparatus, the fixed guide rail 8 is conveyed via a clamp body 42 (described later) attached to a clamp mounting body 40 (described later). It functions as a feed rail that feeds the cathode current to the workpiece.

  An object to be processed that allows the thin plate-like object P to be conveyed and passed horizontally by being clamped by the clamp 4 to the tank partition plate part 5a on the carry-in side of the treatment tank 5 and the tank partition plate part 5b on the carry-out side. A passage cutout portion 10 is formed, and a clamp passage cutout portion 20 is formed in which an upper portion that allows movement of the clamp 4 that clamps the thin plate-like workpiece P is opened.

  The inside of the processing tank 5 on the carry-in side and the carry-out side of the processing tank 5 corresponding to the workpiece passage notch 10 (the inside of the tank partition plate 5a on the carry-in side of the processing tank 5 and the tank partition plate 5b on the carry-out side) ) Are provided with liquid ejection partition devices 12 respectively.

  As shown in FIGS. 3 to 5, the liquid ejection partition device 12 allows the passage of the thin plate-like workpiece P that is horizontally conveyed to the vertical position with the workpiece passage notch 10 therebetween. The plastic upper liquid jet supply box 13 in the shape of a partition connected to the plastic jet liquid upper supply pipe 14 and the plastic in the shape of the partition connected to the plastic lower liquid supply pipe 16 are connected. Liquid jet outlets 13a, 15a having slit-like openings extending in the lateral width direction of the thin plate-like workpiece P conveyed horizontally on the opposite side of the upper and lower liquid jet supply boxes 13, 15. Are formed respectively.

  As shown in FIG. 4, the jet liquid supplied from the jet liquid upper supply pipe 14 into the upper liquid jet supply box 13 is transferred from the liquid jet outlet 13 a of the upper liquid jet supply box 13 into the processing tank 5. And the jet liquid supplied from the jet liquid lower supply pipe 16 into the lower liquid jet supply box 15 is discharged from the liquid jet outlet of the lower liquid jet supply box 15. 15a is ejected obliquely upward into the processing liquid in the processing tank 5, and the processing tank internal processing is performed from the processing object passage notch 10 by the jet liquid discharged from the upper and lower liquid jet supply boxes 13, 15. It is configured to prevent the outflow of liquid.

  Since the liquid ejection partition device 12 has a seal structure by a liquid flow, the substrate surface of the workpiece P is not damaged compared to the seal structure by the seal roller of the conventional apparatus shown in FIG. Moreover, the liquid ejection partition device 12 ejects the liquid in the lower liquid jet supply box 15 from the liquid jet outlet 13a of the upper liquid jet supply box 13 in the obliquely downward direction toward the processing liquid F in the processing tank 5. It is ejected obliquely upward from the jet outlet 15a into the processing liquid in the processing tank 5, and is ejected from the upper and lower liquid jet supply boxes 13 and 15 from the processing object passage notch 10 into the processing tank. Since it is configured to prevent the treatment liquid from flowing out, it has a function of effectively guiding the horizontal carry-in movement of the thin plate-like workpiece P particularly on the carry-in side of the treatment tank 5.

  2 and 3, the conveyance device 2 b on the right side of the drawing is movable in the horizontal width direction with respect to the conveyance device 2 a on the left side of the drawing, and the linear drive path portions on the inner side are parallel to each other with the conveyance path 1 therebetween. The lateral width (W) of the clamp groups 4... That move 3a, 3a is adjustable. In this case, the horizontal width of the liquid jet supply boxes 13 and 15 is set in accordance with the minimum horizontal width interval (W).

  As shown in FIGS. 2 and 4, plastic workpiece horizontal passage guides 17 a and 17 b are attached to the upper and lower liquid jet supply boxes 13 and 15, and the upper and lower liquid jet supply boxes 13 are mounted by the workpiece horizontal passage guides. , 15 is guided so that the thin plate-like workpiece P passing horizontally can be smoothly passed horizontally in the liquid.

  An upper position where the clamp 4 passes and moves to a corresponding position of the clamp passage notch portion 20 and a lower inner position where the side end portion of the thin plate-like workpiece P clamped by the clamp 4 passes and is opened (open passage). 22a) a plastic clamp passage frame body 22 is disposed, and the clamp passage frame body 22 is made of a rubber having a large number of flexibility for closing and closing the clamp movement passage portion of the clamp passage frame body. A seal tongue piece 26 is attached, and the seal tongue piece 26 is normally closed so as to prevent liquid outflow from the treatment tank 5 and is opened by the moving pressing force of the clamp 4 when the clamp 4 passes. As shown in FIG. 3, the sealing structure by the sealing tongue 26 has a large number of sealing tongues with slits in the left and right opposing frame portions of the clamp passage frame 22 spaced vertically. Installed and configured.

  As shown in FIG. 3, the clamp passage frame 22 is provided with an “l” -shaped inner frame member 23 on the conveyance path side and an “L” -shaped outer frame member 24 on the outer side thereof. The upper and lower frame members 23, 24 are combined into a vertically long “U” shape, and the lower end portion of the “L” -shaped inner frame member 23 and the “L” -shaped outer frame member 24. The corresponding end portions are separated from each other, and this separated portion serves as an open passage 22a through which the side end portion of the thin plate-like workpiece P clamped by the clamp 4 is conveyed. In order to fix both the frame members 23 and 24 in this combined state, the upper end portions of the both frame members 23 and 24 are connected to the fixed state by the connecting members 25, and the upper portions of the connecting members 25 are connected to the corresponding conveying devices (2a). , 2b) are fixed in a suspended state.

  As shown in FIG. 2, this sealing tongue piece 26 has the sealing tongue piece 26 arranged in a multi-stage shape (three stages in FIG. 2) in the moving passage direction of the clamp 4 to prevent liquid outflow. The sealing effect is enhanced. The clamp passage frame body 22 is laminated in a multi-stage shape in the direction in which the clamp moves and the seal tongue piece 26 is attached between the clamp passage frame bodies 22 laminated in a multi-stage shape.

  As shown in FIGS. 2 and 3, the clamp passage corresponding to the clamp group 4 moving on the linear drive path portion 3a on the inner side in the transport device (movable transport device) 2b configured to be movable in the lateral width direction. The notch 20 is formed in a notch with a width that allows the clamp 4 to move in the width. Resin that selectively closes the gaps of the wide clamp passage notches 20 that cannot be covered by the clamp passage frames 22 on both the left and right sides of the clamp passage frames 22 disposed in the wide clamp passage notches 20. Partition plates (inner partition plate 28, outer partition plate 29) are respectively attached, and these partition plates (inner partition plate 28, outer partition plate 29) correspond to corresponding side edges of the thin plate-like workpiece P to be horizontally transported. It is attached to the clamp passage frame 22 in a state where a gap allowing passage of the portion is opened, and the outer end of the gap is continuous with the open passage portion 22a at the lower inner position of the clamp passage frame 22. As a configuration.

  Specifically, a rectangular inner partition plate 28 is attached to the “l” -shaped inner frame member 23 of the clamp passage frame body 22, and the “L” -shaped outer frame member 24 of the clamp passage frame body 22 is attached. An outer partition plate 29 is attached. The outer partition plate 29 has a rectangular portion 29A disposed on the outer side of the outer frame member 24 and a laterally elongated portion 29B extending downward in the inner partition plate 28. A horizontal gap portion is formed between the lower end portion of the inner partition plate 28 and the upper end portion of the horizontally elongated portion 29B of the outer partition plate 29, and this gap portion is formed on the corresponding side end of the thin plate-like workpiece P. The part can pass horizontally.

  As described above, the upper end portions of both frame members (the inner frame member 23 and the outer frame member 24) of the clamp passage frame body 22 are fixedly connected by the connecting member 25, and the upper portion of the connecting member 25 is connected to the conveying device. It is fixed to the fixed part in a suspended state. The clamp passage frame 22 and the partition plates (the inner partition plate 28 and the outer partition plate 29) attached to the clamp passage frame are moved in the width direction in conjunction with the movement in the width direction of the transfer device 2b that can move in the width direction. It is configured to move. The lower part of the outer partition plate 29 is guided by a receiving guide 30 so as to be movable in the lateral width direction.

  As shown by solid lines in FIGS. 2 and 3, when the lateral width interval (W) of the clamp groups 4... Moving the inner linear drive path portions 3a, 3a is maximized, the inner partition plate 28 widens the width. As shown by the two-dot chain line in FIGS. 2 and 3, the width interval (W) of the clamp groups 4... Moving along the inner straight drive path portions 3a, 3a is closed. When it is set to the minimum, the outer partition plate 29 closes the gap between the wide clamp passage notches 20.

  Based on FIG. 5, embodiment of the clamp 4 used for the conveying apparatus of this invention is described. The clamp 4 is connected to the horizontal conveyance driving means 3 (drive belt 7) and has a rectangular cross section disposed horizontally below the linear drive path 3a of the horizontal conveyance drive means 3 (drive belt 7). A clamp attachment body 40 made of metal such as stainless steel that is fitted so as to be moved while sliding along the fixed guide rail 8, and a clamp made of metal such as stainless steel held by the clamp attachment body 40 A main body 42 is included. As a means for connecting the clamp attachment body 40 of the clamp 4 to the horizontal conveyance drive means 3 (drive belt 7), a method that allows easy attachment / detachment is adopted in the embodiment of FIG. A mounting projection 7a is integrally formed with the belt at a position corresponding to the clamp mounting of the drive belt 7, and a vertical insertion hole 7b is formed in the mounting projection 7a. On the clamp 4 side, a mounting bracket 43 is connected to the clamp mounting body 40, and an engagement shaft 44 having a vertical axis is attached to the mounting bracket 43. By inserting the engaging shaft 44 into the insertion hole 7b, the clamp 4 is connected so that it can be easily attached and detached. In addition, you may connect in a fixed state with the bolt fastening means via an attachment member.

  The clamp body 42 is disposed at a position where the lower portion of the clamp body 42 can move in the processing liquid of the processing tank 5, and the upper portion of the clamp body 42 is held by the clamp attachment body 40 in the air. The clamp body 42 is formed in a shape that is long in the vertical direction. An upper clamp portion 46b and a lower clamp portion 46a that can clamp the side edge portion of the thin plate-like workpiece from the vertical direction are provided at the lower end of the clamp body 42.

  The clamp main body 42 has a plate-like fixed clamp rod 50 that is long in the up-down direction, the upper portion of which is fixedly held by the clamp attachment body 40, and is long in the vertical direction, which is held up and down by the fixed clamp rod 50. A rod-shaped movable clamp rod 51 is included. The plate surface of the fixed clamp rod 50 is fixedly held on a vertical surface 40a on the outer side (conveyance path side) of the clamp attachment body 40. The movable clamp rod 51 is penetrated and held in a through hole of a holding guide 52 provided in the fixed clamp rod 50 so as to be slidable in the vertical direction. The upper clamp portion (upper contact) 46b is formed at the lower end portion of the movable clamp rod 51, and the lower clamp portion (lower contact) 46a that receives the upper clamp portion 46b is formed at the lower end portion of the fixed clamp rod 50. It is.

  A compression spring (compression coil spring) 55 is loosely fitted around the rod portion of the movable clamp rod 51 between the lower portion of the holding guide 52 provided on the fixed clamp rod 50 and the spring engaging member 54 provided on the movable clamp rod 51. The movable clamp rod 51 is moved downward by the spring pressure of the compression spring 55, and the upper clamp portion (upper contact) 46b of the movable clamp rod 51 and the lower clamp portion (lower contact) 46a of the fixed clamp rod 50 are provided. Is normally controlled to be closed in the vertical direction. On the upper part of the clamp body 42, a clamp opening / closing guide mechanism that moves the movable clamp 51 up against the spring pressure of the compression spring 55 and opens the upper and lower clamp portions (upper and lower contacts) 46 a and 46 b in the vertical direction. A joint member 60 is provided.

  A clamp opening / closing guide 61 indicated by a one-dot chain line in FIG. 5A is provided in the conveying devices 2a and 2b in FIG. 1 includes a position from the turning drive path on the start end side to the position immediately before the start end of the transfer path 1 in the rotational drive direction along the rotation drive path of the clamp groups 4. Also, clamp opening / closing guides 61 are disposed at positions from the terminal end of the conveyance path 1 to the turning drive path on the terminal end side in the rotational driving direction. The clamp opening / closing guide 61 has an intermediate portion in the rotational driving direction of the clamp 4 as a high-level guide upper surface portion, and both sides of the high-level guide upper surface portion as inclined guide upper surface portions that gradually become lower from the high-level guide upper surface portion. The lower surface of the clamp opening / closing guide 61 is a horizontal guide lower surface portion.

  The clamp opening / closing guide engaging member 60 attached to the upper part of the clamp body 42 is pivotably attached to the fixed clamp rod 50 side by a fulcrum shaft 63 with the bent portion of a substantially L-shaped reversing lever 62 as a fulcrum. Then, the tip of the lower arm portion 62b of the reversing lever 62 is rotatably connected to the upper portion of the movable clamp rod 51 via the pin shaft 64, and a rotating roller 65 is attached to the tip of the upper arm portion 62a of the reversing lever 62. In the engaged state where the rotating roller 65 rolls along the upper surface of the upper guide of the clamp opening / closing guide 61 provided along the rotation drive path, the upper arm 62a pivots on the fulcrum shaft 63. The movable clamp rod 51 is inverted upward as a center and is moved upward against the spring pressure of the compression spring 55 to move the movable clamp rod 51 connected to the lower arm portion 62b. 51 are configured to be on the control of the lower clamp portion 46a of the clamp portion 46b and the fixed clamp rod 50 to the open state of being spaced apart in the vertical direction.

  When the clamp 4 passes the position of the clamp opening / closing guide 61, the rotation roller 65 of the clamp opening / closing guide engaging member 60 of the clamp 4 is engaged with the upper surface portion (higher guide upper surface portion) of the clamp opening / closing guide 61, and at the same time. A horizontal upper surface portion 40a formed on the fixed side of the clamp 4 (the upper end portion of the plate on the conveying path side of the clamp mounting body 40 or the upper end portion of the fixed clamp rod 50) is engaged with the lower surface portion of the horizontal guide of the clamp opening / closing guide 61. As a result, the movable clamp rod 51 is moved upward against the spring pressure of the compression spring 55, and the upper clamp portion 46b of the movable clamp rod 51 and the lower clamp portion 46a of the fixed clamp rod 50 are separated in the vertical direction. It is configured to control to the open state. As a result, the clamps 4... Passing through the starting end of the conveyance path 1 for the workpiece P are controlled from the open state to the closed state where the side edges of the workpiece can be clamped. It is possible to control the clamps 4... Passing through the terminal end 1 from the closed state to the open state in which the side edge of the workpiece can be opened.

  The lower flange 51A of the movable clamp rod 51 corresponding to the lower flange 50A of the fixed clamp rod 50 (the portion below the lower flange moves in the processing liquid) (the portion below the lower hook moves in the processing liquid). ) With respect to each other in the clamp movement direction (in the embodiment of FIG. 5, in the clamp movement direction, the lower hook portion 51A of the movable clamp rod 51 is forward and the lower hook portion 50A of the fixed clamp rod 50 is rearward. And a bent portion 70 having a substantially U-shaped cross section that opens on the conveyance path 1 side is formed at the lower end of the same row portion of the fixed clamp rod 50. The lower clamp portion 46 a that receives the upper clamp portion 46 b of the movable clamp rod 51 is formed on the bent lower end piece 70 a of the bent portion 70. That is, as shown in FIG. 5A, the same row portion of the fixed clamp rod 50 is hidden by the rod-shaped lower flange portion 51 </ b> A of the corresponding movable clamp rod 51 as viewed from the traveling direction of the clamp 4.

  In the clamp of FIG. 5, the lower flange portion 50 </ b> A of the fixed clamp rod 50 is disposed in the same row direction as the front and rear positions in the clamp movement direction with respect to the corresponding lower flange portion 51 </ b> A of the movable clamp rod 51. The liquid resistance of the clamp portion that moves forward in the treatment liquid in the treatment tank 5 can be reduced, and the passage portion of the clamp on the carry-in side and the carry-out side partition portion of the treatment tank 5 (the clamp passage notch portion 20, the clamp) The lateral width of the passage frame 22) can be formed narrow, and the outflow of the treatment liquid in the treatment tank can be easily prevented from this clamp passage portion.

  The lower part of the clamp main body 42 to be put in the processing liquid is subjected to a sol coating process except for the upper and lower clamp parts (upper contact and lower contact) 46a and 46b, and an insulating coating process.

  A plastic upper presser guide plate 72b is attached to the lower end of the movable clamp rod 51, and a plastic lower presser guide plate 72a is attached to the lower end of the fixed clamp rod 50. The upper and lower presser guide plates 72a and 72b are attached to the upper and lower presser guide plates 72a and 72b, respectively. In cooperation with the clamp portions 46a and 46b, the side edge portion of the thin plate-like workpiece P can be sandwiched from above and below, and the upper and lower holding guide plates 72a and 72b have a shape extending in the clamp movement direction. .

  According to the clamp to which the upper and lower pressing guide plates 72a and 72b are attached, the side edge portion of the thin plate-like workpiece P can be clamped in a relatively long range along the clamp moving direction. Therefore, the side edge of the thin plate-like workpiece P can be reliably clamped, and the attachment interval of the clamp 4 attached to the horizontal conveyance drive means 3 (drive belt 7) that is rotationally driven endlessly can be increased. The number of clamps 4 can be reduced.

P thin plate-like workpiece 1 transport path 2a, 2b transport device 2a fixed transport device 2b movable transport device 3, 3 horizontal transport drive means 3a, 3a inner linear drive path 4 clamp 5 processing tank 5a carry-in side Tank partition plate part 5b tank partition plate part on the carry-out side F treatment liquid W width interval 7 drive belt (toothed belt)
DESCRIPTION OF SYMBOLS 8 Fixed guide rail 10 Cutout part 12 to-be-processed object 12 Liquid ejection partition device 13 Upper liquid jet supply box 13a Liquid jet of upper liquid jet supply box 15 Lower liquid jet supply box 15a Liquid jet 17a of lower liquid jet supply box 17b Workpiece horizontal passage guide 20 Clamp passage notch 22 Clamp passage frame 22a Open passage portion 23 Inner frame member 24 Outer frame member 25 Connection member 26 Seal tongue piece 28 Inner partition plate 29 Outer partition plate 29A Rectangle of outer partition plate Part 29B Horizontally extending part of outer partition plate 40 Clamp mounting body 42 Clamp body 46a Lower clamp part (lower contact)
46b Upper clamp part (upper contact)
DESCRIPTION OF SYMBOLS 50 Fixed clamp rod 50A Lower clamp part of fixed clamp rod 51 Movable clamp rod 51A Lower clamp part of movable clamp rod 55 Compression spring 60 Clamp opening / closing guide engaging member 61 Clamp opening / closing guide 70 Bending portion 72a Lower pressing guide plate 72b Upper pressing guide plate Board

Claims (5)

A transport device is provided on each side of the thin plate-shaped workpiece between the transport passages, and each transport device is horizontally driven endlessly with linear drive paths that are parallel to each other with the transport passage in between. A plurality of clamps are attached to the horizontal transport driving means at regular intervals, and each of the clamps moves in parallel with each other through the transport path, and is flexible in a group of clamps. This horizontal conveyance process is performed by clamping both side edges of the thin plate-like workpiece from the vertical direction and continuously carrying the plate surface of the thin plate-like workpiece vertically in one direction at a certain horizontal height level. The thin plate-like workpiece to be horizontally held while being held by the clamp is carried into a treatment tank filled with a treatment liquid, passed through the treatment liquid in the treatment tank, and carried out of the treatment tank. Horizontal A feeding device,
A processing object passage notch that allows the thin plate-like workpiece to be transported and passed horizontally by being clamped by the clamps is formed on the inlet and outlet tank partition plates of the processing tank. Forming a clamp passage notch that opens the upper part allowing movement of the clamp that clamps the workpiece to be processed, and processing on the loading side and unloading side of the processing tank corresponding to the workpiece passage notch A liquid ejection partition device is arranged inside the tank, and the liquid ejection partition device has an interval that allows the thin plate-like workpiece to be horizontally conveyed to a vertical position with the workpiece passage notch in between. A partition-shaped upper liquid jet supply box that opens and communicates with the upper part of the jet liquid supply pipe, and a lower liquid jet supply box that has the partition part shape that communicates with the lower part of the jet liquid supply pipe, and is opposed to the upper and lower liquid jet supply boxes. Forming a liquid jet opening having a slit-like opening extending in the width direction of the thin plate-like object to be horizontally conveyed to the upper liquid jet supply box from the jet liquid upper supply pipe. A jetting liquid which is ejected obliquely downward from the liquid jet outlet of the upper liquid jet supply box into the processing liquid in the processing tank, and is supplied from the lower jetting liquid supply pipe into the lower liquid jet supply box. Is ejected obliquely upward from the liquid jet outlet of the lower liquid jet supply box into the processing liquid in the processing tank, and the workpiece passage notch is cut by the jet liquid discharged from the upper and lower liquid jet supply boxes. The thin plate-like workpiece to be clamped by the upper position where the clamp passes and moves to the corresponding position of the clamp passage notch, and to prevent the treatment liquid from flowing out of the treatment tank from the section A plurality of flexible passages are provided, each of which has a clamp passage frame that opens the lower inner position through which the side end passes and is closed so that the clamp movement passage of the clamp passage frame can be opened and closed. The surface treatment device is configured to be attached with a sealing tongue piece having the property of being closed, so that the sealing tongue piece is normally closed so as to prevent the outflow of liquid from the inside of the treatment tank, and opened by the moving pressing force of the clamp when passing the clamp. Horizontal conveying apparatus for thin plate-like workpieces. A transport device is provided on each side of the thin plate-shaped workpiece between the transport passages, and each transport device is horizontally driven endlessly with linear drive paths that are parallel to each other with the transport passage in between. A plurality of clamps are attached to the horizontal transport driving means at regular intervals, and each of the clamps moves in parallel with each other through the transport path, and is flexible in a group of clamps. This horizontal conveyance process is performed by clamping both side edges of the thin plate-like workpiece from the vertical direction and continuously carrying the plate surface of the thin plate-like workpiece vertically in one direction at a certain horizontal height level. The thin plate-like workpiece to be horizontally held while being held by the clamp is carried into a treatment tank filled with a treatment liquid, passed through the treatment liquid in the treatment tank, and carried out of the treatment tank. Horizontal A transport device, wherein at least one of the transport devices is configured to be movable in a lateral width direction in which a lateral width of the transport passage can be varied with respect to the other transport device with the transport passage therebetween, In the device that enables adjustment of the lateral width of the clamp group that moves between the internal linear drive path portions parallel to each other,
A processing object passage notch that allows the thin plate-like workpiece to be transported and passed horizontally by being clamped by the clamps is formed on the inlet and outlet tank partition plates of the processing tank. Forming a clamp passage notch that opens the upper part allowing movement of the clamp that clamps the workpiece to be processed, and processing on the loading side and unloading side of the processing tank corresponding to the workpiece passage notch A liquid ejection partition device is arranged inside the tank, and the liquid ejection partition device has an interval that allows the thin plate-like workpiece to be horizontally conveyed to a vertical position with the workpiece passage notch in between. A partition-shaped upper liquid jet supply box that opens and communicates with the upper part of the jet liquid supply pipe, and a lower liquid jet supply box that has the partition part shape that communicates with the lower part of the jet liquid supply pipe, and is opposed to the upper and lower liquid jet supply boxes. Forming a liquid jet opening having a slit-like opening extending in the width direction of the thin plate-like object to be horizontally conveyed to the upper liquid jet supply box from the jet liquid upper supply pipe. A jetting liquid which is ejected obliquely downward from the liquid jet outlet of the upper liquid jet supply box into the processing liquid in the processing tank, and is supplied from the lower jetting liquid supply pipe into the lower liquid jet supply box. Is ejected obliquely upward from the liquid jet outlet of the lower liquid jet supply box into the processing liquid in the processing tank, and the workpiece passage notch is cut by the jet liquid discharged from the upper and lower liquid jet supply boxes. The thin plate-like workpiece to be clamped by the upper position where the clamp passes and moves to the corresponding position of the clamp passage notch, and to prevent the treatment liquid from flowing out of the treatment tank from the section A plurality of flexible passages are provided, each of which has a clamp passage frame that opens the lower inner position through which the side end passes and is closed so that the clamp movement passage of the clamp passage frame can be opened and closed. A sealing tongue having a property is attached, and this sealing tongue is normally closed so as to prevent liquid outflow from the treatment tank, and is configured to be opened by the moving pressing force of the clamp when passing the clamp.
The clamp passage notch corresponding to the clamp group that moves in the linear drive path inside the conveying device configured to be movable in the lateral width direction is notched to a width that allows the lateral movement of the clamp. The partition plates that close the gaps of the wide clamp passage notches that cannot be covered by the clamp passage frames are respectively attached to the left and right sides of the clamp passage frames disposed in the wide clamp passage notches. Is attached to the clamp passage frame with a gap allowing passage of the corresponding side end of the thin plate-like workpiece to be horizontally conveyed, and the outer end of the gap is the clamp passage frame. The clamp passage frame body and the partition plate attached to the clamp passage frame body are laterally wide. In conjunction with the width direction movement of the movable conveying device configured to move in the lateral direction, the horizontal conveying device of the sheet-like object to be processed in the surface treatment apparatus.   The horizontal conveying apparatus of the thin plate-shaped to-be-processed object in the surface treatment apparatus of Claim 1 or 2 which has arrange | positioned many said sealing tongue pieces in multistage shape in the movement passage direction of the said clamp.   Inner linear drive paths that are mounted on and rotated by endless horizontal transport driving means provided on both sides of the transport path of the thin plate-shaped workpiece and are parallel to each other with the transport path in between. Clamp group that moves the part, and clamps both side edges of the flexible thin plate workpiece from the vertical direction, and continuously in one direction at a certain horizontal height level with the plate surface of the thin plate workpiece up and down In this horizontal conveyance process, the thin plate-like workpiece to be horizontally conveyed while being held by the clamp is carried into a treatment tank filled with the treatment liquid, and allowed to pass through the treatment liquid in the treatment tank. A clamp for a horizontal transport device that is carried out of the processing tank, and the clamp is connected to the horizontal transport drive means and arranged in a horizontal direction at a position below a linear drive path of the horizontal transport drive means. A clamp mounting body that is externally fitted so as to be moved in sliding contact along a fixed guide rail, and a clamp body that is held by the clamp mounting body. It is arranged at a position where it can move in the processing liquid of the processing tank, and the upper part of the clamp body is formed in a vertically long shape held by the clamp mounting body in the air, and a thin plate is formed at the lower end of the clamp body The clamp body is provided with an upper clamp portion and a lower clamp portion that can clamp the side edge portion of the workpiece to be processed in the vertical direction, and the clamp body is a fixed clamp that is long in the vertical direction and whose upper portion is fixedly held by the clamp attachment body. And a vertically movable movable clamp さ れ る that is held by the fixed clamp に up and down, and the upper clamp portion is formed at the lower end of the movable clamp 形. The lower clamp portion that receives the upper clamp portion is formed at a lower end portion of the fixed clamp rod, and the movable clamp rod is moved downward by a spring pressure of a compression spring, and the upper clamp portion of the movable clamp rod and the The lower clamp portion of the fixed clamp 常 is normally controlled to be closed in the up-and-down direction, and the movable clamp 上 is moved upward against the spring pressure of the compression spring above the clamp body. A clamp opening / closing guide engaging member that opens the clamp portion in the vertical direction is provided, and the lower flange portion of the fixed clamp rod is in the front-rear position in the clamp movement direction with respect to the corresponding lower flange portion of the movable clamp rod. A bent portion having a substantially U-shaped cross section is formed at the lower end of the same row portion of the fixed clamp rod, and opens to the conveyance path side. The clamp of the horizontal conveyance apparatus of the thin plate-shaped to-be-processed object in a surface treatment apparatus which formed the said lower clamp part which receives the said upper clamp part of the said movable clamp rod on the top.   An upper presser guide plate is attached to the lower end portion of the movable clamp rod, and a lower presser guide plate is attached to the lower end portion of the fixed clamp rod, and the upper and lower presser guide plates cooperate with the upper and lower clamp portions to form the thin plate-like workpiece. 5. A horizontal conveying apparatus for a thin plate-like object to be processed in a surface treatment apparatus according to claim 4, wherein the side edge of the object can be sandwiched from above and below, and the upper and lower pressing guide plate has a shape extending in the clamp movement direction. Clamps.

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