JP3170766U - Horizontal continuous plating equipment for thin plate workpieces by clamp conveyance - Google Patents

Abstract

The present invention provides a horizontal continuous plating apparatus using clamp conveyance capable of reliably conveying a processing liquid horizontally while maintaining a horizontal state of a flexible thin substrate. A plating process is carried out by holding a side edge of a thin substrate P by a clamp jig 4 mounted at equal intervals on a conveyance drive belt 3 that is rotationally driven endlessly and continuously conveying the processing liquid horizontally. To do. The upper and lower clamp portions 10A and 10B of the clamp jig 4 for clamping the side edge of the thin substrate, the upper and lower clamp contact portions 11a and 11b for locally clamping the side edge of the thin substrate, and the side edge of the thin substrate. The upper and lower surface pressing guide portions 12a and 12b are sandwiched in the extended length range. In addition, the clamp jig 4 can be easily attached to the conveyance drive belt 3 by inserting the insertion engagement shaft 19 on the clamp jig side into the insertion engagement hole 17 of the attachment protrusion 16 of the conveyance drive belt 3. [Selection] Figure 2

Description

  The present invention clamps the side edges of a thin plate-like object to be processed such as a thin printed circuit board with a clamp and continuously conveys the processing liquid horizontally. During this transfer process, the surface of the thin plate-like object is electroplated. It is an apparatus for performing processing, and provides a clamp transporting means that can reliably transport the processing liquid horizontally while maintaining the horizontal state of a very thin flexible thin substrate.

  As a processing apparatus for sandwiching the side edge portion of the thin plate-like object to be processed by the clamp and continuously conveying the surface, and performing the electrolytic treatment on the surface of the thin plate-like object in this conveying process, the plate-like object of Patent Document 1 is used. Electrolytic processing apparatuses are known. In this electrolytic treatment apparatus, a plate-like object is supplied to the electrolysis chamber in a horizontal state, continuously passes through the electrolysis chamber for a certain residence time, and is discharged again from the electrolysis chamber after the electrolysis treatment. An electrodeposition apparatus, and a conveying device for conveying a plate-like object through an electrolysis chamber is constituted by clamps (bending members 17 and 18) attached to a conveyor belt (31) that rotates endlessly at intervals. The clamp is configured to sandwich and convey the side edge of the plate-like object.

  However, the embodiment of FIG. 1 of Patent Document 1 (when processing a very thin plate-like object, it is necessary to clamp both side edges of the plate-like object with clamps as in the embodiment of FIG. .) Shows a state in which the side edge of the plate-like object (circuit board) is partially clamped by two to three clamps (bending members 17 and 18) spaced apart from each other in the conveying direction of the plate-like object. It is illustrated that the end (especially the end on the front side) is not always clamped by the clamp.

  In addition, the applicant of the present invention has made it possible to reliably and smoothly perform automatic opening and closing of a clamping chuck (clamp) that clamps both side edges of a plate-like workpiece and horizontally conveys the plate-like workpiece. Has been proposed (Patent Document 2). However, also in this document, the clamping chuck 9 (clamp) is attached to the toothed belt (11) rotating endlessly at equal intervals, and the side edge portion of the plate-like object to be processed by each clamping chuck (clamp). The clamping is a partial part. Even in the transport apparatus of this document, the end portion (particularly, the end portion on the front side) in the transport direction of the plate-like workpiece is not always sandwiched by the sandwich chuck (clamp).

  Thus, each clamp is attached to the endless belt at an equal interval, and the clamping of the plate-like workpiece to the side edge by each clamp is a partial location. The endless belt is rotated at a constant speed. On the other hand, as shown in FIG. 1 of Patent Document 1 and FIG. 1 of Patent Document 2, the thin substrate is continuously transported through a narrow gap width between the end portions of each thin substrate. It is made to do. The substrate end portions of each thin substrate are transported via a narrow gap width through a narrow gap width, which is necessary to prevent excessive current from concentrating on the substrate end portions in the transport direction. .

  Therefore, as in the conventional apparatus shown in FIGS. 7 and 8 of the present application, the side edge portion of the end portion (particularly, the end portion on the leading side) in the transport direction of the loaded thin substrate P can be always held by the clamp C. In many cases, the side edges of the thin substrate P in the transport direction (particularly, the leading end) are horizontally transported in a free state in which they are not held by the clamps C over a relatively long range. 7 and 8, reference numeral Ca indicates a clamping contact portion of the clamp C that functions as a power supply contact to the thin substrate P, reference numeral B indicates an endless belt, and reference numeral F indicates a liquid level of the processing liquid. ing.

  Then, as shown in FIG. 8 of the present application, in particular, in a flexible thin substrate P in which the object to be processed is very thin, it is free that is not held by the clamp C in the process of passing the liquid in the processing tank horizontally. There is a problem in that the leading end (indicated by the alternate long and short dash line) is conveyed in a state bent vertically from the horizontal level due to the liquid resistance caused by the processing liquid and the liquid flow ejected from the jet pipe. If this is the case, an even plating process cannot be applied to the thin substrate P. In addition, bending wrinkles occur in the thin substrate P. Further, in a state where the front end side of the thin substrate P is bent as shown by a one-dot chain line in FIG. 8, the thin substrate unloaded from the horizontal conveyance device by clamp conveyance is supplied to the horizontal conveyance device by roller conveyance composed of upper and lower rollers, for example. In such a case, a trouble occurs in which the bent tip is caught in the roller, and the thin substrate cannot be supplied reliably.

Japanese Patent Laid-Open No. 63-76898 (Japanese Patent Publication No. 6-31476) JP 2011-68492 A

  The problem pointed out in the background art can be solved to some extent if the interval between the clamps attached to the endless belt (conveyance drive belt) is narrowed. However, when the mounting interval between the clamps is narrowed, the number of clamps to be mounted increases and the apparatus becomes expensive. Moreover, if the number of clamps increases, the work of attaching and removing clamps also increases, which is troublesome.

  In view of such circumstances, the main problem to be solved by the present invention (first problem) is that an emergency can be achieved without reducing the interval between the clamps attached to the transport drive belt (that is, without increasing the number of clamps attached). Another object of the present invention is to provide an apparatus capable of horizontally transporting the processing liquid while maintaining the horizontal level of the end portion (particularly, the end portion on the leading side) in the transport direction of the thin flexible substrate.

  Further, the present invention relates to a plurality of clamp mounting means to be attached to an endless belt (conveying drive belt), and the clamp mounting means that can easily perform the mounting and dismounting operation of each clamp is a solution problem (second problem). is there.

  In order to solve the above-described problem (first problem), the present invention (the invention of claim 1) includes a transport drive belt that is rotationally driven endlessly on both sides of the transport path of the thin plate-like workpiece. A plurality of clamping jigs are attached to the conveyance drive belt at equal intervals, and a plurality of linear drive path portions parallel to each other are moved across the conveyance path. Plating the electrolytic treatment tank in a horizontal state with the clamping jig holding both side edges of the flexible thin plate-like workpiece having parallel side edges from above and below, and with the plate surface of the thin plate-like workpiece up and down A horizontal continuous plating apparatus for thin plate-like workpieces by clamp conveyance in which the treatment liquid is continuously horizontally conveyed in one direction and the surface of the thin plate-like workpiece is subjected to electrolytic plating in the horizontal conveyance process. In the transport Each clamp jig attached to the belt at equal intervals is attached to the transport drive belt in the upper part of the clamp jig and the upper part of the clamp jig is fed with a cathode current in the air, The lower part of the clamp jig has a vertically long structure arranged at a position where it can move in the plating solution in the electrolytic treatment tank, and the lower end of the clamp jig has a thin plate-like object to be processed. An upper clamp comprising an upper clamp portion and a lower clamp portion that can be sandwiched and opened in the vertical direction, and the upper clamp portion is made of a current-carrying material capable of supplying a cathode current to the thin plate-shaped workpiece through a clamp jig. The upper clamp contact portion is formed of a non-energized material such as a resin material having a shape extending in the front-rear direction in the conveyance movement direction of the clamp jig with the contact portion and the upper clamp contact portion interposed therebetween, The clamp part extends through the clamp jig in the forward / backward direction in the transporting direction with the lower clamp contact part made of a current-carrying material capable of supplying a cathode current to the thin plate workpiece through the clamp jig. Formed by a lower surface pressing guide portion made of a non-energized material such as a resin material, and the upper and lower clamp contact portions locally sandwich the side edge of the thin plate-like workpiece from the vertical direction, and the upper and lower surfaces Liquid in a clamping jig made of a current-carrying material excluding the upper and lower clamp contact portions can be sandwiched from above and below in the length range in which the side edge of the thin plate-like workpiece is extended by a holding guide portion. Provided is a horizontal continuous plating apparatus for a thin plate-like object to be processed by clamp conveyance, wherein the contact portion is subjected to an insulating coating process. A large number of clamp jigs attached to the transport drive belt at equal intervals have an interval between the end portions of the upper and lower surface pressing guide portions of adjacent clamp jigs. It is attached so as to be disposed through a constant gap that is narrow enough to maintain the horizontal level of the end in the conveyance direction of the workpiece.

  Further, in order to solve the above-described problem (second problem), the present invention (the invention of claim 2) is directed to a transport drive belt that is rotationally driven endlessly on both sides of the transport path of the thin plate-like workpiece. And a plurality of clamping jigs are attached to the conveyance drive belt at equal intervals, and the inner linear drive path portions parallel to each other are moved across the conveyance path. A plurality of clamping jigs hold the side edges of a flexible thin plate-like workpiece having parallel side edges from above and below, and the plate surface of the thin plate-like workpiece is vertically placed in a horizontal state. In the horizontal continuous plating apparatus for a thin plate-like object to be processed by clamp conveyance in which the treatment liquid is continuously horizontally conveyed in one direction, and the thin plate-like object is subjected to surface treatment in this horizontal conveyance process, Evenly spaced on the conveyor belt The clamp jigs mounted on the conveyor drive belt are attached to the transport drive belt and are moved while being guided along a fixed guide rail disposed horizontally below the linear drive path portion of the transport drive belt. A clamp attachment body, and a clamp body attached to the clamp attachment body. The clamp body is disposed at a position where a lower portion of the clamp body is movable in the treatment liquid of the treatment tank. An upper clamp part that is formed in a vertically long shape that is attached to the clamp attachment body in the air in the air, and that can clamp and release the side edge of the thin plate workpiece in the vertical direction at the lower end of the clamp body And a lower clamp part, and as a means for attaching the clamp jig to the transport drive belt, a transport drive that is rotationally driven endlessly. A mounting protrusion is formed integrally with the transport drive belt at a position corresponding to the clamp mounting on the belt surface outside the belt, and a vertical insertion engagement hole is formed in the mounting protrusion, and the clamp mounting body is provided on the clamp jig side. A mounting jig is connected to the mounting jig, and the mounting jig includes an insertion engaging shaft having an axis in the vertical direction, and the insertion jig is inserted into the insertion engaging hole to be clamped. Is provided with an attachment structure that can be detachably attached to the conveyance drive belt. A horizontal continuous plating apparatus for a thin plate-like object to be processed by clamp conveyance is provided.

  According to the present invention (the invention of claim 1), the side edge portion of the thin plate workpiece can be locally sandwiched by the vertical clamp contact portion from the vertical direction, and the thin plate shape by the vertical surface pressing guide portion. It can be clamped from above and below in the length range in which the side edge of the workpiece is extended. Therefore, the end in the transport direction (especially the end on the top side) can be used even with a very thin flexible thin substrate without reducing the mounting interval of each clamp on the transport drive belt (that is, without increasing the number of clamps). Can be transported horizontally in the processing liquid while maintaining the horizontal level. Therefore, according to the present invention (invention of claim 1), even if the object to be processed is a very thin flexible substrate, both side edges of the thin substrate are extended over a long range by the upper and lower surface pressing guide portions. Since it can be sandwiched, it is possible to solve the problem that the leading end of the thin substrate is conveyed in a state bent vertically from the horizontal level due to the liquid resistance caused by the processing liquid or the liquid flow ejected from the jet pipe.

  Further, according to the present invention (the invention of claim 2), the clamp jig can be easily and quickly moved by inserting the insertion engagement shaft on the clamp jig side into the insertion engagement hole on the conveyance drive belt side. It can be mounted at a predetermined mounting position. In addition, since the clamp attachment body of the clamp jig is moved while being guided along the fixed guide rail in the process of horizontally transporting the thin substrate, the thin substrate can be transported horizontally in a stable holding state by the clamp. Therefore, according to the clamp attaching means of the present invention, it is possible to save the laborious work conventionally required for attaching a large number of clamps to the endless belt (conveying drive belt) by fastening bolts and nuts.

1 is a schematic plan view of the present invention. It is a front view of the principal part of this invention. It is a partial expanded longitudinal cross-sectional view of the principal part of this invention. It is a side view of the principal part of this invention. The other example of this invention was shown, (A) is a front view, (B) is a side view. The other example of the clamp of this invention was shown, (A) is a side view, (B) is a front view, (C) is a cross-sectional plan view by the AA arrow line of (B). It is a schematic plan view of a conventional apparatus. It is a schematic front view of a conventional apparatus.

  An embodiment of the present invention will be described with reference to the drawings. FIG. 1 schematically shows the entire apparatus, and FIGS. 2 to 4 show an embodiment of the main part of the apparatus. FIG. 5 shows another embodiment of the main part of the apparatus, and FIG. 6 shows another embodiment of a clamp used in the apparatus.

  FIG. 1 shows a transport drive belt 3, 3 that is rotationally driven endlessly on both sides of a transport path 1 of a thin plate-like object (hereinafter referred to as a thin substrate P) P such as a printed wiring board. A plurality of clamping jigs 4... Are mounted on the conveyance driving belt 3 at equal intervals, and the linear driving is performed parallel to each other with the conveyance path 1 in between. A plurality of clamping jigs 4 that move along the path portions 3a, 3a sandwich both side edges of a flexible thin plate-like workpiece P having parallel side edges from above and below, and the plate of the thin plate-like workpiece P In the horizontal state with the surface up and down, the inside of the plating solution F in the treatment tank 5 (in this embodiment, an electrolytic plating treatment tank) is continuously horizontally conveyed in one direction (arrow A direction), and this horizontal conveyance process Electrolytic plating on the surface of the thin plate workpiece P It shows a horizontal continuous plating apparatus of the lamellar object to be processed by the clamp conveyor which is adapted subjected to physical.

  The conveyance drive belt 3 is wound around rollers 6 and 6, and is rotated endlessly by rotating one roller 6 by a conveyance drive motor (not shown). The roller 6 is provided with teeth that match the drive belt (timing belt) 3. The clamp jigs 4... Attached at equal intervals to the transport drive belt 3 that is rotationally driven by the endless are a plurality of clamp jigs 4 as shown in FIG. It is attached at intervals that can hold the side edges of the. In FIG. 1, the clamp jigs 4... Are shown only in a partial range of the endless transport drive belt 3, but are attached at equal intervals over the entire range of the transport drive belt 3. The conveyance drive belts 3 and 3 provided on both sides with the conveyance path 1 in between are configured to be synchronously rotated at a constant speed.

  A configuration in which at least one of the transport drive belts 3 and 3 is movable in the lateral width direction in which the lateral width of the transport path 1 can be varied with respect to the other transport drive belt 3 with the transport path 1 in between. The lateral width interval of the clamp groups 4... That move through the inner linear drive path portions 3 a and 3 a that are parallel to each other with the transport path 1 in between is adjustable. As a result, it is possible to cope with thin substrates P having different width sizes.

  The clamp jig 4 shown in FIG. 1 includes upper and lower clamp contact portions (11a and 11b) and upper and lower pressing guides of upper and lower clamp portions (10A and 10B) that sandwich a side edge portion of the thin plate-like workpiece P from above and below. The parts (12a, 12b) are schematically shown. The upper and lower clamp contact portions (11a and 11b) and the upper and lower pressing guide portions (12a and 12b) constituting the upper and lower clamp portions (10A and 10B) will be described in detail later.

  As shown in FIGS. 2 to 4, each clamp jig 4 attached to the conveyance drive belt 3 at equal intervals is attached to the conveyance drive belt 3 in an upper portion of the clamp jig 4 in the air. At the same time, the upper portion of the clamp jig 4 is fed with a cathode current in the air, and the lower portion of the clamp jig 4 is moved to a position where it can move in the plating solution F of the treatment tank (electrolytic plating treatment tank) 5. The upper clamp portion 10A and the lower clamp portion 10B have a structure that is long in the vertical direction, and can clamp and release the side edge of the thin plate-like workpiece P in the vertical direction at the lower end of the clamp jig 4. It has. Note that the clamp jig 4 shown on the right side of FIG. 2 is open for the sake of convenience in order to facilitate understanding of the relationship between the upper and lower clamp portions 10A and 10B.

  A fixed guide rail 8 having a rectangular cross section extending in the horizontal direction along the linear drive path portions 3a, 3a is disposed at a position below the linear drive path portions 3a, 3a on the inner side of the transport drive belt 3 (see FIG. 2, see FIG. A clamp mounting body 14 (to be described later) of the clamp jig 4 that moves on the inner linear drive path portions 3a, 3a is moved while being guided horizontally while being in sliding contact with the fixed guide rail 8. In the present invention, the fixed guide rail 8 is caused to function as a power supply rail, and a cathode current is supplied from the fixed guide rail (power supply rail) 8 to the thin plate-shaped workpiece P through the clamp jig 4. Although not shown, an anode for depositing metal ions is disposed in the plating solution in the treatment tank (electrolytic plating tank) 5 (for example, a thin plate-like workpiece to be horizontally conveyed in the plating solution) A plate-like anode P is disposed at the upper and lower positions of P.), and the thin plate-like workpiece P to which the cathode current is fed through the clamp jig 4 is electrically applied to the surface in the process of being horizontally conveyed in the plating solution. A plating process is performed.

  As shown in FIGS. 2 to 4, the upper clamp portion 10 </ b> A includes an upper clamp contact portion 11 a made of a conductive material capable of supplying a cathode current to the thin plate-shaped workpiece P through the clamp jig 4, It is formed by an upper surface pressing guide portion 12a made of a non-energized material such as a resin material having a pressing plate surface extending in the front-rear direction in the conveyance movement direction of the clamp jig with the clamp contact portion 11a interposed therebetween. The lower clamp portion 10B is clamped with a lower clamp contact portion 11b made of a conductive material capable of supplying a cathode current to the thin plate-like workpiece P through the clamp jig 4 and the lower clamp contact portion 11b. It is formed by a lower surface pressing guide portion 12b made of a non-energized material such as a resin material having a pressing plate surface extending in the front-rear direction in the jig transfer movement direction. The upper and lower clamp contact portions 11a and 11b locally sandwich the side edge of the thin plate-like workpiece P from the vertical direction, and the upper and lower surface pressing guide portions 12a and 12b side the thin plate-like workpiece P. It can be clamped from above and below in the length range where the edge is extended. As can be seen from FIGS. 1 and 2, a large number of clamp jigs 4 that are attached to the transport drive belt 3 at equal intervals are arranged on the upper and lower surface pressing guide portions 12 a and 12 b of the adjacent clamp jigs 4. The gap between the end portions is attached so as to be disposed through a constant gap that is narrow enough to maintain the horizontal level of the end portion in the transport direction of the thin substrate P.

  According to the present invention, the upper and lower clamp contact portions 11a and 11b can locally hold the side edge portion of the thin plate-shaped workpiece P from the vertical direction, and the upper and lower surface pressing guide portions 12a and 12b can form the thin plate shape. It can be sandwiched from above and below in the length range in which the side edge of the workpiece P is extended. Therefore, an end portion in the transport direction (especially, an end on the leading side) can be formed even for a very thin flexible thin substrate P without narrowing the mounting interval of each clamp to the transport driving belt 3 (that is, without increasing the number of clamps mounted). Part) can be horizontally conveyed in the processing liquid while maintaining the horizontal level. Therefore, even if the object to be processed is a very thin flexible thin substrate, both side edges of the thin substrate P can be held over a long range by the upper and lower surface pressing guide portions 12a and 12b. It is possible to solve the adverse effect that the end portion is conveyed in a state bent upward and downward from the horizontal level due to the liquid resistance caused by the processing liquid and the liquid flow ejected from the jet pipe.

  As shown in FIG. 3, the liquid contact portion in the liquid of the clamp jig 4 made of a current-carrying material excluding the upper and lower clamp contact portions 11a and 11b is subjected to an insulation coating treatment (insulation coating treatment layer 13). This insulation coating process is performed by performing, for example, a vinyl chloride sol coating process.

  The structure of the clamping jig 4 will be described in more detail with reference to FIGS. The clamp jig 4 is slidably contacted along a fixed guide rail 8 having a rectangular cross section which is connected to the conveyance drive belt 3 and horizontally disposed at a position below the linear drive path portion 3a of the conveyance drive belt 3. However, a clamp attachment body 14 made of a metal such as stainless steel that is externally fitted so as to be guided and moved, and a clamp body 15 made of a metal such as stainless steel held by the clamp attachment body 14 are included.

  As the means for attaching the clamp jig 4 to the transport drive belt 3, the embodiment shown in FIGS. 2 and 4 employs a method that can be easily attached and detached (the embodiment shown in FIG. 6 is also the same means for attaching). ). A substantially rectangular parallelepiped mounting protrusion 16 is formed integrally with the transport driving belt 3 at a position corresponding to the clamp mounting on the outer belt surface of the transport driving belt 3 that is rotationally driven by the endless. The insertion engagement hole 17 is formed. The insertion engagement hole 17 is reinforced by a sleeve (not shown). On the side of the clamp jig 4, an attachment jig 18 is connected to the clamp attachment body 14, and an insertion engagement shaft 19 having a vertical axis is attached to the attachment jig 18. The clamp jig 4 can be detachably attached to the transport drive belt 3 by inserting the insertion engagement shaft 19 in a state of being fitted into the insertion engagement hole 17. In the attached state in which the insertion engagement shaft 19 is inserted into the insertion engagement hole 17, the attachment jig 18 is held in contact with the outer surface of the attachment protrusion 16 having a substantially rectangular parallelepiped shape. In addition, since the clamp attachment body 14 of the clamp jig 4 is moved while being guided along the fixed guide rail 8 in the process of transporting the thin plate-like object P, the thin plate-like object P is moved by the clamp jig. Can be transported horizontally in a stable holding state.

  The clamp body 15 is disposed at a position where the lower part of the clamp body 15 can move in the plating solution F of the treatment tank (electrolytic plating tank) 5, and the upper part of the clamp body 15 is in the air. The upper clamp portion 10A having a vertically long structure held by the clamp attachment body 14 and capable of sandwiching and releasing the side edge portion of the thin plate-like workpiece P in the vertical direction at the lower end portion of the clamp body 15; The lower clamp portion 10B is provided.

  The clamp body 15 has a plate-like fixed clamp rod 20 that is long in the up-down direction, the upper portion of which is fixedly held by the clamp attachment body 14, and is long in the vertical direction that is held by the fixed clamp rod 20 so as to be movable up and down. A rod-shaped movable clamp rod 21 is included. The plate surface of the fixed clamp rod 20 is fixed and held on a vertical surface outside (carrying path side) of the clamp attachment body 14.

  The upper clamp portion 10A is provided at the lower end portion of the movable clamp rod 21, and the lower clamp portion 10B that receives the upper clamp portion 10A is provided at the lower end portion of the fixed clamp rod 20. As shown in FIG. 3, the tip surface of the movable shaft portion 21a at the lower end of the rod-shaped movable clamp rod 21 is the upper clamp contact portion 11a, and the lower end portion of the fixed clamp rod 20 is L-shaped toward the conveyance path. The bent receiving plate portion 20a is formed in a bent shape, and the distal end surface of the fixed shaft portion 20b protruding upward from the bent receiving plate portion 20a is formed as the lower clamp contact portion 11b. As shown in FIG. 3, the lower part of the clamp body 15 put in the processing liquid is subjected to, for example, a vinyl chloride sol coating process except for the upper and lower clamp contact portions 11a and 11b, and an insulation coating process (insulation coating process layer 13). ) Is given. As shown in FIG. 3, the upper and lower surface pressing guide portions 12a and 12b are attached by means of the insulating coating layer 13 (for example, vinyl chloride sol coating) around the axis of the movable shaft portion 21a at the lower end of the movable clamp rod 21. The fitting hole 12ab at the intermediate position of the upper surface pressing guide portion 12a made of plastic is attached by being fitted and fixed via an adhesive. Further, a plastic is provided around the axis of the fixed shaft portion 20b projecting upward from the bent receiving plate portion 20a at the lower end portion of the fixed clamp rod 20 via the insulating coating layer 13 (for example, a polyvinyl sol coating layer). The fitting hole 12bb at the intermediate position of the made lower surface pressing guide portion 12b is fitted by being fitted and fixed via an adhesive.

  As shown in FIGS. 2 and 4, the movable clamp rod 21 is passed through and held in a through hole of a holding guide 22 provided in the fixed clamp rod 20 so as to be slidable in the vertical direction. A compression spring (compression coil spring) 25 is loosely fitted around the rod portion of the movable clamp rod 21 between the lower portion of the holding guide 22 provided on the fixed clamp rod 20 and the spring locking member 24 provided on the movable clamp rod 21. The movable clamp rod 21 is moved downward by the spring pressure of the compression spring 25, and the upper clamp portion 10A (the upper clamp contact portion 11a and the upper surface pressing guide portion 12a) of the movable clamp rod 21 and the fixed clamp rod 20 The lower clamp portion 10B (the lower clamp contact portion 11b and the lower surface pressing guide portion 12b) is normally controlled to be closed in the vertical direction. A clamp opening / closing guide engaging member 30 is attached to the upper portion of the clamp body 15 to move the movable clamp rod 21 upward against the spring pressure of the compression spring 25 to open the upper and lower clamp portions 10A and 10B in the vertical direction. is there.

  A clamp opening / closing guide 31 indicated by a one-dot chain line in FIG. 4 is disposed in the clamp movement path of the apparatus of FIG. The apparatus of FIG. 1 includes a position and a conveyance path from the turning drive path portion on the start end side to the position immediately before the start end portion of the conveyance path 1 in the rotation drive direction along the rotation drive path of the clamp jigs 4. The clamp opening / closing guides 31 are respectively arranged at positions from one end portion to the turning drive path portion on the end portion side in the rotational drive direction. The clamp opening / closing guide 31 has an intermediate portion in the rotational drive direction of the clamp 4 as a high-level guide upper surface portion, and both sides of the high-level guide upper surface portion as inclined guide upper surface portions that gradually lower from the high-level guide upper surface portion. The lower surface of the clamp opening / closing guide 31 is a horizontal guide lower surface portion.

  The clamp opening / closing guide engaging member 30 attached to the upper part of the clamp body 15 is pivotably attached to the fixed clamp rod 20 side by a fulcrum shaft 33 with a bent portion of a substantially L-shaped reversing lever 32 as a fulcrum. Then, the tip of the lower arm portion 32 b of the reversing lever 32 is rotatably connected to the upper portion of the movable clamp rod 21 via the pin shaft 34, and a rotating roller 35 is attached to the tip of the upper arm portion 32 a of the reversing lever 32. In the engaged state in which the rotating roller 35 rolls along the upper surface of the upper guide of the clamp opening / closing guide 31 provided along the rotation drive path, the upper arm 32a pivots on the fulcrum shaft 33. The movable clamp rod 21 is turned upward as a core and is moved upward against the spring pressure of the compression spring 25 to move the movable clamp rod 21 connected to the lower arm portion 32b. 21 The upper clamp part 10A (upper clamp contact part 11a and upper pressing guide part 12a) and the lower clamp part 10B (lower clamp contact part 11b and lower pressing guide part 12b) of the fixed clamp rod 20 are separated from each other in the vertical direction. It is configured to be controlled by the state.

  When the clamp jig 4 passes the position of the clamp opening / closing guide 31, the rotation roller 35 of the clamp opening / closing guide engaging member 30 of the clamp jig 4 is engaged with the upper surface portion (higher guide upper surface portion) of the clamp opening / closing guide 31. At the same time, the horizontal upper surface portion 14 a formed on the fixed side of the clamp jig 4 (the upper end portion of the plate on the conveyance path side of the clamp attachment body 14 or the upper end portion of the fixed clamp rod 20) is the horizontal of the clamp opening / closing guide 31. By engaging with the lower surface of the guide, the movable clamp rod 21 is moved upward against the spring pressure of the compression spring 25, and the upper clamp portion 10A of the movable clamp rod 21 (the upper clamp contact portion 11a and the upper surface pressing guide). Portion 12a) and the lower clamp portion 10B of the fixed clamp rod 20 (the lower clamp contact portion 11b and the lower surface pressing guide portion 12b) are separated from each other in the vertical direction. It is configured to control the state. As a result, the clamping jigs 4... Passing through the starting end of the conveyance path 1 of the workpiece P are controlled from the open state to the closed state in which the side edges of the workpiece can be clamped. The clamping jigs 4... Passing through the terminal end of the conveyance path 1 can be controlled from a closed state to an open state in which the side edge of the workpiece can be opened.

  FIG. 5 shows another embodiment of the main part of the apparatus. In FIG. 5, the description of the same reference numerals as those in FIGS. 1 to 4 is substantially the same as the description of FIGS. In the embodiment of FIG. 5, the main difference from the embodiment of FIGS. 1 to 4 is the means for attaching the upper and lower surface pressing guide portions 12a and 12b. In FIG. 5, a through hole of a plastic fixing block 40 is fitted into the lower end portion of the rod-shaped movable clamp rod 21, and the fixing block 40 is fixed to the lower end portion of the movable clamp rod 21 with a fixing screw (plastic fixing screw) 41. The upper surface pressing guide portion 12a made of plastic is attached to the fixed block 40. In addition to the fixed clamp rod 20, a plastic lower holding guide mounting rod 43 is attached to the lower portion of the fixed clamp rod 20, and a plastic lower surface pressing guide portion 12 b is attached to the lower end portion of the lower holding guide mounting rod 43. It is installed. In FIG. 5, the attachment of the clamp jig 4 to the transport drive belt 3 is performed by a normal bolt fastening means, but it may be an attachment means as in the embodiment of FIGS.

  FIG. 6 shows another embodiment of a clamp jig used in the present apparatus. 6, description of the same reference numerals as in FIGS. 1 to 4 is substantially the same as the description of FIGS. The clamp jig of FIG. 6 is characterized in that the lower flange portion 20A of the movable clamp rod 21 corresponding to the lower flange portion 20A of the fixed clamp rod 20 (the portion below this lower flange moves in the processing liquid) The portion below the collar moves in the processing liquid) and the front and rear positions in the clamp movement direction (in the embodiment of FIG. 5, the lower collar 21A of the movable clamp collar 21 is fixed to the front in the clamp movement direction. The lower flange portion 20A of the clamp rod 20 is disposed on the rear side.) Is arranged in the same row direction, and the lower end of the same row portion of the fixed clamp rod 20 is opened in the conveyance passage 1 side. A bent portion 45 is formed, and a lower clamp contact portion 11b of the lower clamp portion 10B is formed on a bent lower end piece 45a of the bent portion 45. That is, as shown in FIG. 5A, when viewed from the traveling direction of the clamp 4, the same row portion of the fixed clamp rod 20 is hidden by the corresponding rod-shaped lower flange portion 21A of the movable clamp rod 21. In the clamp of FIG. 5, the lower flange portion 20 </ b> A of the fixed clamp rod 20 is disposed in the same row direction as the front and rear positions in the clamp movement direction with respect to the corresponding lower flange portion 21 </ b> A of the movable clamp rod 21. And the liquid resistance of the clamp part which advances and moves in the process liquid in the process tank 5 can be reduced.

P Thin plate workpiece (thin substrate)
1 Conveyance path 3, 3 Conveyance drive belt 4 Clamp jig 5 Treatment tank (electroplating treatment tank)
F Treatment liquid (Plating treatment liquid)
8 Fixed guide rail (power supply rail)
10A Upper clamp part 10B Lower clamp part 11a Upper clamp contact part 11b Lower clamp contact part 12a Upper surface pressing guide part 12b Lower surface pressing guide part 13 Insulation coating layer 14 Clamp mounting body 15 Clamp body 16 Mounting protrusion 17 Insertion engagement hole 18 Installation Jig 19 Insertion engagement shaft 20 Fixed clamp rod 20b Fixed clamp rod fixed shaft portion 21 Movable clamp rod 21a Movable clamp rod movable shaft portion

Claims (2)

Conveying means provided with a conveying drive belt that is driven endlessly on both sides of the conveying path of the thin plate-shaped workpiece are disposed, and a number of clamping jigs are arranged at equal intervals on the conveying drive belt. A plurality of clamping jigs that are attached and move in parallel linear drive path portions that are parallel to each other with the conveyance path interposed therebetween, both side edges of a flexible thin plate-like workpiece having parallel side edges are vertically moved In the horizontal state in which the plate surface of the thin plate-like workpiece is vertically moved, the plating treatment liquid in the electrolytic treatment tank is continuously conveyed in one direction in the horizontal state. In the horizontal continuous plating apparatus for the thin plate-like object to be processed by clamp conveyance so as to perform electrolytic plating treatment on the surface of
Each clamp jig attached to the conveyance drive belt at equal intervals is attached to the conveyance drive belt in the upper part of the clamp jig, and has a cathode current in the upper part of the clamp jig in the air. The clamp jig has a vertically long structure in which the lower part of the clamp jig is disposed at a position where the lower part of the clamp jig can move in the plating solution. An upper clamp portion and a lower clamp portion that can be held and opened in a vertical direction by holding a side edge portion of the processed material, and the upper clamp portion is made of a current-carrying material capable of supplying a cathode current to the thin plate-shaped object to be processed through a clamp jig. Formed by an upper clamp contact portion composed of a non-energized material such as a resin material having a shape extending in the front-rear direction in the conveyance movement direction of the clamp jig with the upper clamp contact portion in between And the lower clamp contact portion made of a current-carrying material capable of supplying a cathode current to the thin plate-like workpiece through the clamp jig, and the lower clamp contact portion between the lower clamp contact portion in the conveying movement direction of the clamp jig. It is formed of a lower surface pressing guide portion made of a non-energized material such as a resin material extending in the front-rear direction, and the side edge portion of the thin plate-like workpiece is locally sandwiched from the vertical direction by the upper and lower clamp contact portions. A clamp jig liquid made of a current-carrying material excluding the upper and lower clamp contact portions can be sandwiched from above and below in a length range in which a side edge portion of the thin plate-like workpiece is extended by the upper and lower surface pressing guide portions. An apparatus for horizontal continuous plating of a thin plate-like object to be processed by clamp conveyance, wherein the liquid contact portion is subjected to insulation coating. Conveying means provided with a conveying drive belt that is driven endlessly on both sides of the conveying path of the thin plate-shaped workpiece are disposed, and a number of clamping jigs are arranged at equal intervals on the conveying drive belt. A plurality of clamping jigs that are attached and move in parallel linear drive path portions that are parallel to each other with the conveyance path interposed therebetween, both side edges of a flexible thin plate-like workpiece having parallel side edges are vertically moved In the horizontal state with the plate surface of the thin plate-like object being moved up and down, the treatment liquid in the treatment tank is continuously horizontally conveyed in one direction, and the surface of the thin plate-like object to be treated in this horizontal conveyance process In the horizontal continuous plating apparatus for thin plate-like objects to be processed by clamp conveyance,
Each clamp jig attached to the conveyance drive belt at equal intervals is attached to a fixed guide rail attached to the conveyance drive belt and disposed horizontally below the linear drive path portion of the conveyance drive belt. A clamp attachment body that is guided and moved along the clamp attachment body, and a clamp body that is attached to the clamp attachment body, wherein the lower portion of the clamp body is movable in the treatment liquid in the treatment tank. The upper portion of the clamp body is formed in a vertically long shape that is attached to the clamp attachment body in the air, and the side edge of the thin plate-like workpiece is formed in the vertical direction at the lower end of the clamp body. An upper clamp portion and a lower clamp portion that can be clamped and released are provided. A mounting projection is integrally formed with the conveyance driving belt at a position corresponding to the clamp mounting on the outer belt surface of the conveyance drive belt that is rotationally driven by the belt, and a vertical insertion engagement hole is formed in the attachment projection to form a clamp jig. On the side, an attachment jig is connected to the clamp attachment body, the attachment jig includes an insertion engagement shaft having a vertical axis, and the insertion engagement shaft is fitted into the insertion engagement hole. A horizontal continuous plating apparatus for thin plate-like objects to be processed by clamp conveyance, wherein the clamp jig is detachably attached to the conveyance drive belt by being inserted into a state.

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