JP2012097345A - Device for conveying sheet-like material to be processed in surface processing device, and clamp for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for conveying that clamps both sides of a sheet-like material to be processed with a clamp in a conveying and driving path for laterally passing a surface processing tank and for passing a clamp in a return driving path through a clamp cleaning and processing tank so that the clamp in the return driving path can smoothly pass a partition plate between the processing tanks and the clamp can be effectively cleaned in the return driving path.SOLUTION: The clamp 3 includes: a clamp fixing body 20 which is coupled with a laterally conveying and driving means 2 rotated and driven endlessly and moved laterally along a fixing guiderail 13 disposed in a straight line driving path; and a clamp body 22 which is held to the clamp fixing body in a vertically movable manner. The clamp 3 includes a vertically moving guide means 40 which guides the clamp body to a lifting position where the clamp body can jump over the partition plate 8 between the processing tanks 5, 6 and to a lowering position where the clamp body passes horizontally in each processing tank while engaging with an engagement part 25 for vertically moving guide provided on the clamp body.

Description

  The present invention relates to a transport device of an apparatus that transports a thin plate-shaped workpiece in one direction in a horizontal state and performs surface treatment on the workpiece in the horizontal transport process, and a clamp used in the transport device.

  As a processing apparatus for transporting a plate-shaped object to be processed in one direction in a horizontal state and performing electrolytic treatment on the surface of the plate-shaped object to be processed in this conveying process, an electrolytic processing apparatus for a plate-shaped object in Patent Document 1 is known. is there. In this electrolytic treatment apparatus, a plate-like object is supplied to the electrolysis chamber in a horizontal state, continuously passes through the electrolysis chamber for a certain residence time, and is discharged again from the electrolysis chamber after the electrolysis treatment. A device for electrodeposition, a transport device for transporting a plate-like object through an electrolysis chamber, is driven to rotate endlessly, sandwiching the side edge of the plate-like object in the transport area and moving in the transport direction The device is configured as a row of individual clamps, and is provided with a device for causing clamping and opening of the plate-like object by the clamps at the start and end of the conveyance path of the plate-like object in the electrolytic chamber.

  Although not clarified in the electrolytic treatment apparatus of Patent Document 1, in this type of surface treatment apparatus, a plurality of post-treatment tanks in which plate-like objects to be carried out from the electrolytic treatment tank are arranged in series in the same direction are disclosed. Post-treatment such as water washing treatment, rust prevention treatment, draining drying treatment, etc. on plate-like workpieces that are conveyed horizontally in the inside (water washing treatment tank, rust prevention treatment tank, draining drying treatment tank, etc.) and electrolytically treated in this conveyance process Is given.

  As this horizontal conveyance means, a plate-like workpiece to be passed through the electrolytic treatment tank by clamp conveyance (clamp conveyance means that clamps both side ends of the plate-like treatment object and horizontally conveys) as in Patent Document 1 is used. For example, it is performed that the water washing treatment tank or the rust prevention treatment tank is passed by roller conveyor conveyance, and the draining and drying treatment tank is again passed by clamp conveyance.

  However, when a plate-like workpiece is relayed by different conveyance means such as clamp conveyance, roller conveyor conveyance, and clamp conveyance, the plate-like treatment object is accurately and smoothly transferred by a conveyance relay between clamp conveyance and roller conveyance. It was technically difficult to hand it over. In particular, in a transport relay from roller transport to clamp transport, it has been technically difficult to accurately and smoothly deliver a plate-shaped workpiece. Moreover, in the roller conveyor conveyance, scratches and indentations on the plate surface of the plate-like object to be processed are generated, and there is also a problem that the plate-like object to be processed is wound around the roller.

  In Patent Document 1, individual clamps that are driven to rotate endlessly are passed through a metal removal tank through a return path of the clamps to remove metal adhering to the clamps. However, since the partition plate between the electrolytic treatment tank and the metal removal tank is interposed between the transport path and the return path of the clamp that is rotated and driven endlessly, the clamp that is driven endlessly is electrolytically treated. It was technically difficult to pass between the tank and the metal removal tank.

Japanese Patent Publication No. 6-31476

  In view of such circumstances, the present invention is a clamp conveying means that clamps both side ends of a thin plate-like workpiece and horizontally conveys the plate-like workpiece passing through each treatment tank between a plurality of treatment tanks. An object of the present invention is to provide a transport apparatus for a thin plate-like object to be processed that reliably and smoothly passes through a transport path in which a partition plate higher than the horizontal transport surface of the processed object is interposed.

  In addition, the endlessly driven clamp is passed through a clamp cleaning treatment tank including a separation treatment tank for removing adhesion components such as metal adhering to the clamp in the return path of the clamp, and adhesion of metal adhering to the clamp is performed. Even when the components are peeled off and cleaned, a transfer device is provided that allows the clamp to pass smoothly through the drive path where the partition plate between the tanks of the clamp cleaning processing tank including the electrolytic processing tank and the peeling processing tank is interposed. It is.

  It is another object of the present invention to provide a suitable clamp for use in this conveying apparatus, that is, a clamp that can increase the vertical operation stroke and has high power supply efficiency to a thin plate-like workpiece such as a thin printed board that is horizontally conveyed.

  In order to solve the above-described problems, the present invention (invention of claim 1) is provided with horizontal transport driving means which are rotationally driven endlessly on both sides of a transport path of a thin plate-like object, and each horizontal transport. A large number of clamps are attached at intervals to the drive means, and both sides of the flexible thin plate workpiece are moved up and down by a clamp group in the linear drive path portion of the inner transport drive path parallel to each other with the transport path in between. An apparatus that clamps from one direction and conveys the object to be processed in one direction in a substantially horizontal state with the plate surface of the object being moved up and down, and passes the plurality of treatment tanks in this conveyance process and performs surface treatment on the object to be treated in each treatment tank The clamp is connected to the horizontal transport driving means and is moved while sliding in contact with a fixed guide rail horizontally disposed at a position below the linear drive path portion of the drive path of the horizontal transport driving means. A clamp mounting body that is externally fitted, and a clamp body that is slidably held in a vertical direction on a fixed guide portion provided on the clamp mounting body, and a lower limit control stopper is provided on the upper portion of the clamp body. The lower limit position where the lower limit control stopper is locked to the upper surface of the clamp mounting body due to the downward movement of the clamp body due to its own weight is the lowering position of the clamp body, and the lower end of the clamp body is on the side of the plate-like workpiece. A clamp portion that can clamp the edge portion from above and below is positioned, the clamp portion is positioned below the clamp mounting body, and an engaging portion for a vertical operation guide for vertically moving the clamp body to the clamp body The vertical movement position of the clamp body by engaging with the engaging portion for the vertical movement guide provided on the clamp body Up and down operation guide means for guiding to the rising position where the partition plate between the processing tanks can be jumped over and the lowering position passing through the inside of the processing tank horizontally, at least along the drive path of the clamp at the jumping position of the partition plate between the processing tanks Provided is a device for conveying a thin plate-like object to be processed in a surface treatment apparatus.

  Further, in order to solve the above-described problems, the present invention (invention of claim 2) is provided with horizontal conveyance drive means that are rotationally driven endlessly on both sides of the conveyance path of the thin plate-like object, A plurality of clamps are attached to the horizontal conveyance drive means at intervals, and both sides of the flexible thin plate-like workpiece are clamped in the linear drive path portion of the inner conveyance drive path parallel to each other with the conveyance path in between. Is a device that clamps the workpiece from above and below and conveys it in one direction in a substantially horizontal state with the plate surface of the workpiece up and down, and passes the surface treatment tank in this conveyance process to perform surface treatment on the workpiece. In addition, a clamp cleaning treatment tank including a peeling treatment tank that peels off adhesion components such as metal attached to the clamps is arranged in parallel on both sides of the surface treatment tank, and is in the linear drive path portion of the outer return drive path. Clan The apparatus is configured to allow a group to pass through the clamp cleaning treatment tank, and the clamp is connected to the horizontal conveyance driving means and each linear driving path of the conveyance driving path and the return driving path of the horizontal conveyance driving means. A clamp mounting body that is externally fitted so as to be moved while sliding and sliding along a fixed guide rail disposed horizontally at a lower position of the section, and a vertical sliding movement to a fixed guide section provided on the clamp mounting body It includes a clamp body that is freely held, and a lower limit control stopper is provided on the upper portion of the clamp body, and the lower limit position where the lower limit control stopper is locked to the upper surface of the clamp mounting body is clamped by the downward movement of the clamp body due to its own weight. This is the lowering position of the main body, and the side edge of the plate-like workpiece can be clamped from the vertical direction to the lower end of the clamp main body. A clamp portion is positioned, the clamp portion is positioned below the clamp mounting body, and an engaging portion for a vertical operation guide for vertically moving the clamp body is provided on the clamp body. A vertical position where the clamp main body is moved up and down by engaging with the provided vertical engaging guide engaging portion, a rising position where the partition plate between the surface treatment tank and the clamp cleaning treatment tank can jump over, and a surface treatment tank Surface treatment in which the vertical movement guide means for guiding the inside and the clamp cleaning treatment tank to the descending position passing horizontally is disposed along at least the linear drive path portion of the return drive path of the jumping position of the partition plate between the treatment tanks Provided is a device for transporting a thin plate-like object in the apparatus.

  According to the present invention (invention of claim 3), the clamp group in the turning drive path portion of the return drive path passes through the surface treatment tank, and the clamp in the linear drive path portion of the return drive path. The group is configured to pass through the clamp cleaning treatment tank, the jumping position between the treatment tanks is arranged in the linear drive path part of the return drive path, and the vertical operation guide means is arranged along the linear drive path part of the return drive path. A thin plate-like workpiece transfer apparatus in a surface treatment apparatus is provided. According to the present invention, since the vertical movement guide means is arranged along the linear drive path portion of the return drive path, the jumping movement between the processing tanks of the clamps moved along the vertical movement guide means can be smoothly performed. .

  Further, according to the present invention (invention of claim 4), the vertical operation guide means is a guide rail which supports and engages the vertical operation guide engaging portion, and the jumping position of the partition plate between the processing tanks is determined. A guide rail disposed along the direction of the linear drive path portion. The guide rail has an upper guide rail portion having a horizontal receiving surface disposed above the partition plate between the processing tanks, and the upper guide rail. The up-and-down inclined guide rail portion and the downward inclined guide rail portion arranged with the portions interposed therebetween, each of the inclined guide rail portions for the vertical operation guide of the clamp body in which the lower end portion of each inclined guide rail portion is in the lowered position Provided is a transport device for a thin plate-like object to be processed in a surface processing apparatus, which is at a height position capable of engaging with an engaging portion.

  Further, the present invention (invention of claim 5) is a vertical height variation rail in which the vertical operation guide means is continuously arranged along the direction of the linear drive path portion. A horizontal upper guide rail portion disposed at an upper position capable of jumping over the partition plate between the treatment tanks, a horizontal lower guide rail portion disposed in the treatment tank, and the upper guide rail portion and the lower guide rail portion An apparatus for conveying a thin plate-like object to be processed in a surface treatment apparatus is provided.

  Further, the present invention (invention of claim 6) is a guide rail in which the vertical operation guide means supports and engages the engagement portion for the vertical operation guide, and the jumping position of the partition plate between the processing tanks The guide rail is arranged along the direction of the linear drive path portion, and the guide rail has an upper receiving rail having a horizontal receiving surface arranged above the partition plate between the processing tanks, and the upper receiving rail. An up-tilt rail and a down-tilt rail arranged in a substantially C shape between them, each of which can support a plurality of clamps that clamp the side edges of a single flexible thin plate workpiece. Each of the inclined rails has a lowered position that is a height position at which the lower end portion of each inclined rail can engage with the engaging portion for the vertical operation guide of the clamp body, and each of the inclined rails. Slanted The upper end of the upper receiving rail is configured to move up and down in an inclined form to an ascending position that is the same height as the receiving surface of the upper receiving rail. Provided is a thin plate-like workpiece conveyance device in a surface treatment apparatus configured to move forward and backward between an advanceable position that can be engaged and a retracted position that can avoid the engagement between the vertical operation guide engaging portions. According to this invention, the vertical movement stroke of the clamp body can be set large, and even when the vertical movement stroke is set large, the degree of curvature of the flexible thin plate-like object to be conveyed that jumps over the partition plate between the treatment tanks is small. As a result, a large load is not applied to the thin plate workpiece.

  Further, the present invention (invention of claim 7) is directed to conveying a thin plate-like workpiece in a surface treatment apparatus in which the engaging portion for the vertical operation guide is a rolling roller for the vertical operation guide rotating in the direction of the drive path. Providing equipment.

  Further, according to the present invention (invention of claim 8), the plate-like object to be processed in a surface treatment apparatus in which the engagement member for up-and-down operation is an engagement protrusion for up-and-down operation with the bottom surface being a rounded surface along the direction of the drive path An object transport device is provided.

  In order to solve the above-mentioned problems, the present invention (invention of claim 9) is attached to horizontal transport driving means which is rotationally driven endlessly provided on both sides of the transport path of the thin plate-like workpiece. And clamped on both sides of the flexible thin plate-like workpiece from above and below with clamp groups in the linear drive path portion of the inner transport drive path parallel to each other with the transport path in between. It is a clamp of a transport device that transports a workpiece in one direction in a substantially horizontal state with the plate surface up and down, and the clamp is connected to the horizontal transport drive means and below the linear drive path of the horizontal transport drive means A clamp mounting body that is externally fitted so as to be moved while sliding along a fixed guide rail that is horizontally disposed at a position, and a fixed guide portion provided on the clamp mounting body in a vertical direction. A clamp body that is movably held by a ride, and a clamp portion that can clamp a side edge portion of a flexible thin plate-like workpiece from above and below is positioned at a lower end portion of the clamp body. Located below the clamp mounting body, the clamp body is held by the fixed guide portion so as to be slidable in the vertical direction, and is held by the holding clamp 杆 so as to be vertically movable. It includes a movable clamp that is long in the vertical direction, an upper clamp is formed at the lower end of the movable clamp, and a lower clamp that receives the upper clamp is formed at the lower end of the holding clamp. The upper clamp part of the movable clamp と and the lower clamp part of the holding clamp 杆 are closed in the vertical direction under normal conditions. A clamp opening / closing guide engaging member that moves the movable clamp rod upward against the spring pressure and opens the vertical clamp portion in the vertical direction is attached to the upper portion of the clamp body, A lower limit control stopper is provided at the upper part of the clamp rod, and the lower limit position where the lower limit control stopper is locked to the upper surface of the clamp mounting body by the downward movement of the clamp body due to its own weight is the lowered position of the clamp body. Of the apparatus for conveying a thin plate-like object in the surface treatment apparatus, wherein the vertical movement guide engaging portion is provided on the surface treatment apparatus, and the vertical movement guide engagement portion is moved up and down to move the clamp body up and down. Provide a clamp.

  Further, the present invention (invention of claim 10) provides a clamp of a conveying device in which the vertical operation guide engaging portion is a vertical operation guide rolling roller that rotates in the direction of the drive path.

  Further, the present invention (invention of claim 11) provides a clamp for a conveying device in which the vertical operation guide engagement portion is a vertical operation engagement protrusion whose bottom surface is a rounded surface along the direction of the drive path. .

  Further, according to the present invention (invention of claim 12), a metal leaf spring such as phosphor bronze provided with elasticity to warp toward the sliding contact surface of the holding clamp rod on the vertical guide surface outside the clamp mounting body. Provided is a clamp for a conveying device.

  According to the present invention, clamp conveying means that clamps and horizontally conveys both end portions of a thin plate-like workpiece, and horizontally conveys the plate-like workpiece that passes through each treatment tank between a plurality of treatment tanks. It is possible to reliably and smoothly pass through the conveyance path where the partition plate higher than the surface is interposed. Therefore, since it is not necessary to perform relay conveyance by clamp conveyance and roller conveyance, the thin plate-like workpiece can be conveyed horizontally and accurately, and the adverse effects caused by roller conveyance (scratches and indentations on the plate surface of the workpiece) And the occurrence of the object to be processed on the roller) can be eliminated.

  According to the present invention, a clamp cleaning treatment tank including a peeling treatment tank that peels off adhered components such as metal attached to the clamp is passed through the return path of the clamp, and the attached components such as metal attached to the clamp are removed and washed. Even when it is performed, the clamp can smoothly pass through the partition plate interposed between the tanks of the clamp cleaning treatment tank including the electrolytic treatment tank and the peeling treatment tank, so that the clamp is effectively peeled and cleaned by the return path of the clamp. be able to. Therefore, the clamp contact of the clamp can always be maintained in a good state with good power feeding efficiency.

It is the schematic plan view which showed embodiment of the conveying apparatus of this invention. It is the front view which expanded and showed the principal part of the conveying apparatus of FIG. It is the schematic plan view which showed other embodiment of the conveying apparatus of this invention. It is the top view which expanded and showed the principal part of the conveying apparatus of FIG. It is the front view which expanded and showed the principal part of the conveying apparatus of FIG. It is a side view of the clamp used for the conveyance apparatus of this invention, (a) is a lowered position, (b) has shown the raised position. FIG. 7 is a front view of the clamp of FIG. 6, (a) shows a lowered position, and (b) shows an elevated position. The principal part of the clamp of FIG.6 and FIG.7 was expanded and shown, (a) is a side view, (b) is a front view. It is the schematic front view which showed the other up-down action guide means of the conveying apparatus of this invention. It is the schematic front view which showed the other up-down action guide means of the conveying apparatus of this invention. FIG. 11 is a schematic side view of the embodiment of FIG. 10.

  Embodiments of the present invention will be described with reference to the drawings. 1 to 2 show an embodiment of a conveying apparatus for a thin plate-like object in a surface treatment apparatus, FIGS. 3 to 5 show other embodiments of the conveying apparatus, and FIGS. 6 to 8 show a conveying apparatus of the present invention. The embodiment of the clamp used for is shown.

  The embodiment of FIGS. 1 to 2 is provided with horizontal conveyance driving means 2 and 2 that are rotationally driven endlessly on both sides of the conveyance path 1 of the thin plate-shaped workpiece P, respectively. A large number of clamps 3 are attached at intervals, and the clamp group 3 in the inner transport drive paths (inner linear drive path sections) 4a and 4a parallel to each other with the transport path 1 in between is a flexible thin plate shape. A plurality of treatment tanks arranged in series in this conveyance process, wherein both sides of the workpiece P are clamped from above and below, and are continuously conveyed in one direction in a substantially horizontal state where the plate surface of the workpiece is up and down. (For example, the apparatus which passes the several post-processing tank 7 arrange | positioned after the electrolytic treatment tank 5) and performs a surface treatment to a to-be-processed object in each processing tank is shown.

  In the embodiment of FIG. 1, the electrolytic treatment tank 5, the water washing treatment tank 7a, the rust prevention treatment tank 7b, and the draining and drying treatment tank 7c are arranged in one direction in order from the left side of the figure. The flexible thin plate-like object P to be carried in from the left side of the figure is first subjected to electrolytic treatment in the electrolytic treatment tank 5 and then post-treated after passing through the water washing treatment tank 7a, the rust prevention treatment tank 7b, and the draining and drying treatment tank 7c. , Unloaded from the right side of the figure. These processing tanks are separated by a partition plate 8 higher than the liquid level W in the processing tank.

  The flexible thin plate-shaped workpiece P is required to have both side edges parallel to each other. However, in addition to the rectangular (printed circuit board) shown in the figure, it is a long strip-like object having both side edges parallel to each other. May be. In this surface treatment tank, the plate-like workpiece is subjected to surface treatment such as plating or chemical treatment. INDUSTRIAL APPLICABILITY The present invention can be widely applied as a transfer device for a surface treatment apparatus for a flexible thin plate-like object to be processed, such as electrolytic treatment such as electroplating or electroless treatment.

  The horizontal conveyance driving means 2 that is rotationally driven by the endless is a driving belt (toothed belt) 10 that is wound around rollers 9 and 9 and is rotationally driven endlessly by a conveyance driving motor (not shown). One roller 9 is driven to rotate. The roller 9 is provided with teeth that match a drive belt (toothed belt) 10.

  In the case of the rectangular thin plate-shaped workpiece P, the clamp groups 3... Attached at equal intervals to the horizontal conveyance driving means 2 (drive belt 10) that is rotationally driven by the endless are at least a plurality of side edges. It is attached at an interval that can hold the part. In FIG. 1, the clamp groups 3... Are shown only in a part of the endless rotation drive path, but are attached at equal intervals over the entire range of the horizontal conveyance drive unit 2 (drive belt 10). . Each of the horizontal conveyance driving means 2 and 2 is configured to be synchronously rotated at the same speed.

  A horizontal position along the transport drive paths (inner linear drive path portions) 4a and 4a is positioned below the transport drive paths (inner linear drive path sections) 4a and 4a of the horizontal transport drive means 2 (drive belt 10). A fixed guide rail (inner fixed guide rail) 12 having a rectangular cross section extending in the direction is arranged. Further, a horizontal direction along the return drive path (outer linear drive path portion) also below the return drive path (outer linear drive path portion) 4b, 4b of the horizontal transport drive means 2 (drive belt 10). A fixed guide rail (outer fixed guide rail) 13 having a rectangular cross section extending in the direction is arranged.

  A clamp mounting body 20 (to be described later) of the clamp group 3 that moves along the conveyance drive paths (inner linear drive path portions) 4a and 4a is moved horizontally along the inner fixed guide rail 12 while sliding. Further, a clamp mounting body 20 (to be described later) of the clamp group 3 that moves in the return drive path (outer linear drive path portion) 4b, 4b is moved horizontally while being in sliding contact along the outer fixed guide rail 13. .

  When the present invention is used as an electrolysis apparatus such as an electroplating apparatus, the inner fixed guide rail 12 is conveyed via a clamp body 22 (described later) attached to a clamp mounting body 20 (described later). It functions as a power supply rail that supplies the cathode current to the object to be processed.

  The clamp 3 is connected to the horizontal conveyance drive means 2 (drive belt 10) and is disposed in a horizontal direction below the linear drive path portions 4a and 4b of the drive path of the horizontal conveyance drive means 2 (drive belt 10). The clamp mounting body 20 that is externally fitted so as to be moved while sliding along the fixed guide rails 12 and 13 having a rectangular cross section, and the fixed guide portion provided on the clamp mounting body 20 slides in the vertical direction. A lower limit control stopper 23 is provided on the upper portion of the clamp body 22, and the lower limit control stopper 23 is locked to the upper surface of the clamp mounting body 20 by a downward movement due to its own weight. The lower limit position to be used is the lowered position of the clamp body 22.

  A clamp portion 24 that can clamp the side edge portion of the plate-like workpiece P from above and below is positioned at the lower end portion of the clamp body 22, and the clamp portion 24 is positioned below the clamp attachment body 20. The main body 22 is provided with a vertical operation guide engaging portion 25 for the vertical movement of the clamp main body guided by a vertical operation guide means 40 (described later). In the illustrated embodiment, the vertical operation guide engaging portion 25 is a vertical operation guide rolling roller that rotates in the direction of the drive path. This clamp will be further described later.

  As described above, the clamp main body 22 held by the clamp attachment body 20 so as to be movable up and down is in a lower limit position where it cannot naturally jump over the partition plate 8 between the processing tanks by its own weight. It moves in each processing tank.

  The clamp body 22 is engaged with the vertical operation guide engaging portion 25 provided in the clamp main body 22 so that the vertical movement position of the clamp main body can jump over the partition plate 8 between the processing tanks and pass through the processing tank horizontally. The vertical movement guide means 40 for guiding to the lowering position (lower limit position) is disposed at least along the clamp drive path at the position where the partition plate 8 jumps between the processing tanks.

  The vertical motion guide means 40 is a guide rail that supports and engages the vertical motion guide engagement portion (vertical motion guide rolling roller) 25 on the top and bottom surfaces, and the jumping position of the partition plate 8 between the processing tanks. The guide rail is disposed along the direction of the drive path of the clamp, and the guide rail includes an upper receiving rail portion 41 having a horizontal receiving surface disposed above the partition plate between the processing tanks, The upper inclined rail portion 42 and the downward inclined rail portion 43 are arranged in a substantially C shape with the upper receiving rail portion 41 in between, and the lower end portion of each inclined rail portion is in a lowered position ( The vertical position of the clamp body 22 at the lower limit position is a height position that can be engaged with the engaging portion (vertical operation guide rolling roller) 25 of the vertical operation guide.

  In the embodiment of FIG. 2, the vertical operation guide engaging portion 25 is a vertical operation guide rolling roller, and the vertical operation guide means 40 is a guide rail that supports and engages a rolling row on the upper and lower surfaces. . However, the configuration of the guide rails of the vertical operation guide engaging portion 25 and the vertical operation guide means 40 is not limited to the illustrated embodiment. The vertical operation guide engaging portion 25 may be a pair of rolling rollers for supporting the guide rail from the vertical direction. Further, the vertical operation guide engaging portion 25 may be an engaging protrusion whose bottom surface is a rounded surface along the direction of the driving path, and the engaging protrusion is supported from below and engaged as a guide rail.

  The embodiment of FIGS. 3 to 5 is provided with horizontal conveyance driving means 2 and 2 that are rotationally driven endlessly on both sides of the conveyance path 1 of the thin plate-shaped workpiece P, respectively. A plurality of clamps 3 are attached at intervals to 2 and a thin plate-like object is processed by the clamp group 3 in the inner transport drive paths (inner linear drive path sections) 4a and 4a parallel to each other with the transport path 1 in between. The both sides of the object P are clamped from above and below, and the plate surface of the object to be processed is transported continuously in one direction in a substantially horizontal state. In this transport process, the surface treatment tank (electrolytic treatment tank) 5 is Clamp cleaning that is a device that passes the surface of the object to be processed and includes a peeling treatment tank 6a that peels off adhered components such as metal attached to the clamp on both sides of the surface treatment tank (electrolytic treatment tank) 5. The processing tanks 6 are arranged in parallel and returned outside Linear drive path portion 4b of the dynamic path, clamp group 3 in 4b shows a device which is adapted to pass through the clamp cleaning tank 6.

  3 and 4, the surface treatment tank (electrolytic treatment tank) 5 and the clamp cleaning treatment tank 6 are arranged such that the clamp group 3 in the turning drive path portion 4 c of the return drive path is the surface treatment tank. (Electrolytic treatment tank) 5 is configured to pass through, and the clamp 3 group in the linear drive path portion 4b of the return drive path is configured to pass through the clamp cleaning process tank 6, and the linear drive of the return drive path. The path portion 4 b is a jumping position between the surface treatment tank (electrolytic treatment tank) 5 and the clamp cleaning treatment tank 6.

  In the embodiment of FIG. 3, a group of clamps 3 in the linear drive path portion 4 b of the outer return drive path constitutes the clamp cleaning processing tank 6, a peeling processing tank 6 a, a water washing processing tank 6 b (in the peeling processing tank 6 a). The clamp 3 from which the adherent component such as metal is peeled is washed with water), and the draining and drying treatment tank 6c (the water-washed clamp 3 is drained and dried) is sequentially passed. The clamp group cleaned by the return drive path is moved to the transport drive path (inner linear drive path) 4a. The surface treatment tank (electrolytic treatment tank) 5 and the clamp cleaning treatment tank 6 are separated by a partition plate 8. Further, the treatment tanks of the peeling treatment tank 6a, the water washing treatment tank 6b, and the draining and drying treatment tank 6c constituting the clamp washing treatment tank 6 are also separated by a partition plate.

  A clamp mounting body 20 (to be described later) of the third group of clamps moving along the conveyance drive path (inner linear drive path portion) 4a is moved horizontally while being in sliding contact with the inner fixed guide rail 12. In addition, the clamp mounting body 20 (described later) of the group of clamps 3 that moves along the linear drive path portion 4b of the return drive path is moved horizontally while sliding along the outer fixed guide rail 13.

  When the present invention is used as an electrolysis apparatus such as an electroplating apparatus, the inner fixed guide rail 12 is conveyed via a clamp body 22 (described later) attached to a clamp mounting body 20 (described later). It functions as a power supply rail that supplies the cathode current to the workpiece P to be processed. In addition, an anode current is passed through the outer fixed guide rail 13 to promote peeling of adhesion components such as metal adhering to a clamp portion 24 of a clamp body 22 (described later) attached to a clamp mounting body 20 (described later). It is like that.

  The clamp 3 of the conveying apparatus of FIGS. 3 to 5 has the same configuration as the clamp 3 of the conveying apparatus of FIGS. That is, the clamp 3 of the transport device of FIGS. 3 to 5 is also connected to the horizontal transport drive means 2 (drive belt 10) and the transport drive path and return drive path of the horizontal transport drive means 2 (drive belt 10). A clamp mounting body 20 that is externally fitted so as to be moved while sliding and sliding along fixed guide rails 12 and 13 having a rectangular cross section arranged in a horizontal direction below the respective linear drive path portions 4a and 4b; A clamp guide 22 provided on the clamp mounting body 20 includes a clamp main body 22 that is slidably held in the vertical direction. A lower limit control stopper 23 is provided on the upper portion of the clamp main body 22, and the clamp body 22 is lowered by its own weight. The lower limit position where the lower limit control stopper 23 is locked to the upper surface of the clamp mounting body 20 by the movement is the lowered position of the clamp body 22. A. The clamp 3 of the conveying device of FIGS. 3 to 5 also engages in the vertical operation guide for the vertical movement of the clamp body guided by the vertical movement guide means 40 (described later) on the clamp body 22. In the illustrated embodiment, the vertical operation guide engaging portion 25 is used as a vertical operation guide rolling roller that rotates in the direction of the drive path.

  As described above, the clamp body 22 held by the clamp mounting body 20 so as to be movable up and down as well as the clamp 3 of the transfer device of FIGS. Is in a lower limit position where it cannot jump over, and the inside of each processing tank is moved at this lower limit position.

  The vertical movement position of the clamp body 22 is set between the surface treatment tank (electrolytic treatment tank) 5 and the clamp cleaning treatment tank 6 by engaging with the vertical movement guide engaging portion 25 provided on the clamp body 22. Up and down operation guide means 40 that guides to an ascending position where the partition plate 8 can be jumped over and a descending position (lower limit position) horizontally passing through the surface treatment tank (electrolytic treatment tank) 5 and the clamp cleaning treatment tank 6. It arrange | positions along the linear drive path | route part 4b of the return drive path | route of the jump position of the partition plate 8 between process tanks. Further, the vertical operation guide means 40 is a return drive path of the jumping position of the partition plate 8 between the treatment tanks of the peeling treatment tank 6a, the water washing treatment tank 6b and the draining and drying treatment tank 6c constituting the clamp washing treatment tank 6. It arrange | positions along the linear drive path | route part 4b.

  As described above, in the embodiment of FIGS. 3 and 4, the arrangement of the surface treatment tank (electrolytic treatment tank) 5 and the clamp cleaning treatment tank 6 is made up of a group of clamps 3 in the turning drive path portion 4 c of the return drive path. It passes through the surface treatment tank (electrolytic treatment tank) 5, and the group of clamps 3 in the linear drive path portion 4 b of the return drive path are configured to pass through the clamp cleaning process tank 6, and return drive is performed. The linear drive path portion 4 b of the path is a jumping position between the surface treatment tank (electrolytic treatment tank) 5 and the clamp cleaning treatment tank 6. For this reason, the vertical operation guide means 40 can be disposed along the linear drive path portion 4b of the return drive path, and the jumping movement between the processing tanks of the clamp 3 moved along the vertical operation guide means 40 can be performed smoothly.

  The up / down operation guide means 40 of the transport apparatus of FIGS. 3 to 5 has the same configuration as the up / down operation guide means 40 of the transport apparatus of FIGS. That is, the vertical operation guide means 40 of the conveying device of FIGS. 3 to 5 is also a guide rail that supports and engages the vertical operation guide engaging portion (vertical operation guide rolling roller) 25 on the vertical surface. The guide rail is disposed along the direction of the drive path of the clamp at the position where the partition plate 8 jumps between the processing tanks, and the guide rail is disposed horizontally above the partition plate 8 between the processing tanks. An upper receiving rail portion 41 having a receiving surface, and an upward inclined rail portion 42 and a downward inclined rail portion 43 that are arranged in a substantially C shape with the upper receiving rail portion 41 therebetween, and each inclined rail portion 42, 43 is a height position at which the lower end portion of each inclined rail portion can be engaged with the engaging portion for vertical operation guide (rolling roller for vertical operation guide) 25 of the clamp body 22 in the lowered position (lower limit position). As .

  In the embodiment shown in FIGS. 4 and 5, the vertical operation guide engaging portion 25 is used as a vertical operation guide rolling roller, and the vertical operation guide means 40 supports and engages the rolling row on the upper and lower surfaces. It is. However, the configuration of the guide rails of the vertical operation guide engaging portion 25 and the vertical operation guide means 40 is not limited to the illustrated embodiment. The vertical operation guide engaging portion 25 may be a pair of rolling rollers for supporting the guide rail from the vertical direction. Further, the vertical operation guide engaging portion 25 may be an engaging protrusion whose bottom surface is a rounded surface along the direction of the driving path, and the engaging protrusion is supported from below and engaged as a guide rail.

  Based on FIGS. 6-8, embodiment of the clamp 3 used for the conveying apparatus of this invention is described. As described above, the clamp 3 is connected to the horizontal conveyance driving means 2 (drive belt 10) in a fixed state by a bolt fastening means via a mounting member 27, and the horizontal conveyance drive means 2 (drive belt 10). Made of a metal such as stainless steel that is externally fitted so as to move while sliding along the fixed guide rails 12 and 13 having a rectangular cross section disposed horizontally in the lower direction of the drive path (linear drive path portion). And a clamp body 22 made of stainless steel or the like which is slidably held in a vertical direction on a fixed guide portion 21 made of metal such as stainless steel provided on the clamp mount 20. Yes.

  The clamp body 22 has a plate-like holding clamp rod 30 that is long in the vertical direction and is held by the fixed guide portion 21 so as to be slidable in the vertical direction, and a vertical direction that is held by the holding clamp rod 30 so as to be movable up and down. A long rod-shaped movable clamp rod 31 is included. The holding clamp rod 30 is held so as to be movable up and down so that its plate surface is slidably contacted with the vertical guide surface 20b on the outer side of the clamp mounting body 20 (outside on the conveyance path side). A lower limit control stopper 23 made of metal (copper or the like) made of a locking step is provided on the upper part of the holding clamp rod 30, and the lower limit control stopper 23 is attached to the clamp mounting body 20 by the downward movement due to its own weight. The lower limit position locked to the upper surface 20 a is set as the lowered position of the clamp body 22. The movable clamp rod 31 is passed through and held in the through holes of the upper holding guide 32 and the lower holding guide 33 provided in the holding clamp rod 30 so as to be slidable in the vertical direction. The through hole of the upper holding guide 32 is formed long in the vertical direction. The upper holding guide 32 is substantially at the same position as the height position of the fixed guide portion 21 at the lower limit position. The lower end portion of the holding clamp rod 30 is bent in an L shape, and a lower clamp portion (lower contact) 24a is formed on the upper surface of the bent portion. An upper clamp portion (upper contact) 24 b is formed at the lower end portion of the movable clamp rod 31. The upper clamp portion (upper contact) 24b of the movable clamp rod 31 is received by the lower clamp portion (lower contact) 24a of the holding clamp rod 30.

  A compression spring (compression coil spring) 35 is loosely fitted around the rod portion of the movable clamp rod 31 between the lower portion of the upper holding guide 32 provided on the holding clamp rod 30 and the spring locking body 34 provided on the movable clamp rod 31. The movable clamp rod 31 is moved downward by the spring pressure of the compression spring 35, and the upper clamp portion (upper contact) 24b of the movable clamp rod 31 and the lower clamp portion (lower contact) 24a of the holding clamp rod 30 are provided. Is normally controlled to be closed in the vertical direction. A clamp opening / closing guide engaging member 50 that opens the upper and lower clamp portions (upper and lower contacts) in the vertical direction by moving the movable clamp rod 31 upward against the spring pressure of the compression spring 35 above the clamp body 22. Is attached.

  The upper holding guide 32 of the holding clamp rod 30 is provided with an up / down operation guide engaging portion 25, and the up / down operation guide engaging portion 25 is engaged with the up / down operation guide means 50 to move up and down. The main body 22 is configured to be operated up and down (up and down operation from the lower limit position to the ascending position and from the ascending position to the lower limit position). In the illustrated embodiment, the vertical operation guide engaging portion 25 is a vertical operation guide rolling roller that rotates in the direction of the drive path. Note that the vertical operation guide engaging portion 25 is not limited to the illustrated rolling roller, and as described above, the guide rail may be a pair of rolling rollers for supporting the guide rail from the vertical direction, and the lower surface is the above-described rolling roller. It is good also as the engagement protrusion made into the round surface along the direction of a drive path | route.

  As shown in FIG. 8, phosphor blue imparting elasticity to warp toward the slide contact surface of the holding clamp rod 30 on the vertical guide surface 20 b outside the clamp attachment body 20 (outside on the conveyance path side). It is preferable to attach a copper plate spring 37 made of copper. The phosphor bronze leaf spring 37 is bent in a substantially “<” shape in cross section toward the slide contact surface of the holding clamp rod 30 as shown in FIG. By attaching the leaf spring 37, the power supply efficiency from the clamp mounting body 20 to the holding clamp rod 30 can be significantly increased.

  A clamp opening / closing guide 51 indicated by a one-dot chain line in FIG. 6A is disposed in the conveying device of FIGS. 1 and 3 reaches the position immediately before the start end of the transfer path 1 in the rotation drive direction from the turning drive path 4c on the start end side along the rotation drive path of the clamp group 3. Clamp opening / closing guides 51 (shown by a one-dot chain line in FIGS. 1 and 3) are arranged at positions and positions from the terminal end of the conveyance path 1 to the turning drive path 4c on the terminal end side in the rotational driving direction. is there. The clamp opening / closing guide 51 has an intermediate portion in the rotational drive direction of the clamp 3 as a high-level guide upper surface portion, and both sides of the high-level guide upper surface portion as inclined guide upper surface portions that gradually lower from the high-level guide upper surface portion. The lower surface of the clamp opening / closing guide 51 is a horizontal guide lower surface portion.

  The clamp opening / closing guide engaging member 50 attached to the upper portion of the clamp body 22 is pivotably attached to the holding clamp rod 30 side by a fulcrum shaft 53 with a bent portion of a substantially L-shaped reversing lever 52 as a fulcrum portion. Then, the tip of the lower arm portion 52b of the reversing lever 52 is rotatably connected to the upper portion of the movable clamp rod 31 via the pin shaft 54, and a rotating roller 55 is attached to the tip of the upper arm portion 52a of the reversing lever 52. In the engaged state in which the rotating roller 55 rolls along the upper surface of the upper guide of the clamp opening / closing guide 51 provided along the rotation drive path, the upper arm portion 52a pivots on the fulcrum shaft 53. Inverted upward as a center, the movable clamp rod 31 connected to the lower arm portion 52b is moved upward, and the upper clamp portion 24b of the movable clamp rod 31 and The lower clamp portion 24a of the lifting clamp rod 30 are configured to be controlled to the open state of being spaced apart in the vertical direction.

  When the clamp 3 passes the position of the clamp opening / closing guide 51, the rotation roller 55 of the clamp opening / closing guide engaging member 50 of the clamp is engaged with the upper surface portion (higher guide upper surface portion) of the chuck opening / closing guide 51, and at the same time the clamp When the horizontal upper surface portion 30a of the holding clamp rod 30 is engaged with the horizontal guide lower surface portion of the chuck opening / closing guide 51, the movable clamp rod 31 is moved up against the spring pressure of the compression spring 35 to be movable. The upper clamp portion 24b of the clamp rod 31 and the lower clamp portion 24a of the holding clamp rod 30 are configured to be controlled to be opened in the vertical direction. As a result, the clamps 3... Passing through the starting end of the conveyance path 1 for the workpiece P are controlled from the open state to the closed state in which the side edge of the workpiece can be clamped. The clamps 3... Passing through the terminal end 1 can be controlled from a closed state to an open state in which the side edge of the workpiece can be opened.

  FIG. 9 shows another embodiment of the vertical movement guide means. The vertical operation guide means 40 of this embodiment is a vertical height variation rail 45 continuously arranged along the direction of the linear drive path portion, and this vertical height variation rail is a partition plate between the processing tanks. A horizontal upper guide rail portion 45a disposed at an upper position where it can jump over, a horizontal lower guide rail portion 45b disposed in the processing tank, and the upper guide rail portion 45a and the lower guide rail portion 45b are continuously provided. It is characterized by the fact that the inclined guide rail part 45c is connected.

  In the embodiment of FIG. 9, the vertical operation guide engaging portion 25 is a pair of rolling rollers for supporting the guide rail from the vertical direction. However, the configuration of the guide rails of the vertical operation guide engaging portion 25 and the vertical operation guide means 40 is not limited to the illustrated embodiment. As shown in FIGS. 2 and 5, the vertical operation guide engaging portion 25 may be a rolling roller, and the vertical operation guide means 40 may be a guide rail that supports and engages the rolling roller on the upper and lower surfaces. Further, the vertical operation guide engaging portion 25 may be an engaging protrusion whose bottom surface is a rounded surface along the direction of the driving path, and the engaging protrusion is supported from below and engaged as a guide rail. In addition, since the other structure in embodiment of FIG. 9 is substantially the same as embodiment shown in FIGS. 1-2, FIGS. 3-5, the overlapping description is abbreviate | omitted.

  10 and 11 show another embodiment of the up-and-down operation guide means 40. FIG. The vertical motion guide means 40 of this embodiment is a guide rail that supports and engages the vertical motion guide engagement portion 25 in the direction of the linear drive path portion at the position where the partition plate 8 jumps between the processing tanks. The guide rails are arranged along the upper and lower rails 46 having a horizontal receiving surface arranged at a position above the partition plate between the processing tanks, and the upper receiving rail. Ascending and descending inclined rails 47 and 48 are arranged in a shape, and each of the inclined rails 47 and 48 is provided with a plurality of clamps (9 in the illustrated embodiment) that clamp side edges of a single flexible thin plate-like workpiece. Each of the inclined rails 47 and 48 is connected to the upper and lower sides of the clamp body 22 where the lower end portions 47a and 48a of the inclined rails are in the lowered position. A lowered position (shown by a one-dot chain line in FIG. 10) that is a height position that can be engaged with the moving guide engaging portion 25, and upper ends 47b, 48b of the inclined rails 47, 48 are the upper receiving rail 46. The upper and lower operation guide engaging portions are configured to move up and down in an inclined form to an ascending position (shown by a solid line in FIG. 10) that is equivalent to the height of the receiving surface. 25 is configured to move forward and backward between an advance position that can be engaged with 25 and a retracted position that can avoid engagement with the vertical operation guide engaging portion 25.

  In the up-tilt rail 47, the up-tilt rail moved from the retracted position to the advanced position at the lowered position is moved up to the raised position, and a plurality of flexible thin plate workpieces P are clamped at the raised position. After passing through the third group of clamps, it is retracted and moved downward to the lowered position at this retracted position, and this movement is repeated. In the downward inclined rail 48, the downward inclined rail 48 moved from the retracted position to the advanced position at the raised position is moved downward to the lowered position, moved backward at the lowered position, and moved upward to the raised position at the retracted position. repeat.

  In FIG. 11, reference numeral 49a denotes an advancing / retracting drive cylinder for moving the inclined rail back and forth, and reference numeral 49b denotes a lifting / lowering driving cylinder for moving the inclined rail up and down.

  10 and 11 is configured such that the drive belt 10 is not driven while the inclined rails 47 and 48 are moved up and down.

  In the embodiment shown in FIGS. 10 and 11, the vertical operation guide engaging portion 25 is an engagement protrusion whose bottom surface is a rounded surface along the direction of the drive path, and the vertical operation guide means has the engagement protrusion from the lower side. It is a guide rail that supports and engages. However, the configuration of the guide rails of the vertical operation guide engaging portion 25 and the vertical operation guide means 40 is not limited to the illustrated embodiment. The vertical operation guide engagement portion 25 may be a rolling roller, and the vertical operation guide means 40 may be a guide rail that supports and engages the rolling row on the upper and lower surfaces. The vertical operation guide engaging portion 25 may be a pair of rolling rollers for supporting the guide rail from the vertical direction.

  According to the present invention, the vertical operation stroke of the clamp body 22 can be set large, and even if the vertical operation stroke is set large, the bending of the flexible thin plate-like workpiece P that is transported over the partition plate 8 between the processing tanks. The degree is small and a large load is not applied to the thin plate workpiece.

P Thin plate-like workpiece 1 Transport path 2, 2 Horizontal transport drive means 3 Clamp 4a, 4a Transport drive path (inner linear drive path)
4b, 4b Return drive path linear drive path (outer linear drive path)
4c Turning drive path part of return drive path 5 Surface treatment tank (electrolytic treatment tank)
6 Clamp cleaning tank 6a Peeling tank 7 Treatment tank (post-treatment tank)
8 Partition plate 10 Drive belt (toothed belt)
12 Fixed guide rail (inner fixed guide rail)
13 Fixed guide rail (outside fixed guide rail)
20 Clamp mounting body 21 Fixed guide portion 21
22 Clamp body 23 Lower limit control stopper 24 Clamp part 25 Vertical action guide engaging part (Rolling roller for vertical action guide)
30 Holding clamp ３１ 31 Movable clamp ２４ 24a Lower clamp part (lower contact)
24b Upper clamp (upper contact)
32 Upper holding guide 33 Lower holding guide 35 Compression spring (compression coil spring)
37 Leaf spring 40 Vertical movement guide means 41 Upper receiving rail portion 42 Upward inclined rail portion 43 Downward inclined rail portion 45 Vertical height variation rail 45a Upper guide rail portion 45b Lower guide rail portion 45c Inclined guide rail portion 46 Upper receiving rail 47 Upward Inclined rail 48 Downward inclined rail 49a Advancing / retracting drive cylinder 49b Elevating drive cylinder 50 Clamp opening / closing guide engaging member 51 Clamp opening / closing guide

Claims (12)

Horizontal transport drive means that are rotationally driven endlessly are provided on both sides of the transport path of the thin plate-shaped workpiece, and a number of clamps are attached to each horizontal transport drive means at intervals, with the transport path in between. The clamp group in the linear drive path portion of the inner conveyance drive path parallel to each other clamps both sides of the flexible thin plate-like workpiece from above and below to make the plate surface of the workpiece up and down substantially horizontal It is a device that is transported in one direction, and passes a plurality of treatment tanks in this transport process, and performs surface treatment on the object to be treated in each treatment tank,
The clamp is connected to the horizontal conveyance driving means and is moved while being in sliding contact along a fixed guide rail horizontally disposed at a position below the linear drive path portion of the drive path of the horizontal conveyance driving means. A clamp mounting body that is externally fitted, and a clamp body that is slidably held in a vertical direction on a fixed guide provided on the clamp mounting body. A lower limit control stopper is provided on the upper portion of the clamp body, The lower limit position where the lower limit control stopper is locked to the upper surface of the clamp mounting body due to the downward movement due to its own weight is the lowered position of the clamp body, and the side edge of the plate-like workpiece is moved up and down at the lower end of the clamp body. A clamp portion that can be clamped from the direction is positioned, and the clamp portion is positioned below the clamp mounting body. A vertical movement guide engaging portion for vertically moving the clamp main body is provided on the main body, and the vertical movement position of the clamp main body is engaged with the vertical movement guide engaging portion provided on the clamp main body. Up and down operation guide means that guides to a rising position where the partition between the processing tanks can be jumped over and a descending position where it passes horizontally through the processing tank along at least the clamp drive path at the jumping position of the partition between the processing tanks A thin plate-like workpiece conveying apparatus in a surface treatment apparatus. Horizontal transport drive means that are rotationally driven endlessly are provided on both sides of the transport path of the thin plate-shaped workpiece, and a number of clamps are attached to each horizontal transport drive means at intervals, with the transport path in between. The clamp group in the linear drive path portion of the inner conveyance drive path parallel to each other clamps both sides of the flexible thin plate-like workpiece from above and below to make the plate surface of the workpiece up and down substantially horizontal In this transport process, the surface treatment tank is passed through the surface treatment tank and the object to be treated is subjected to surface treatment, and the adhered components such as metal attached to the clamp are peeled off on both sides of the surface treatment tank. A clamp cleaning treatment tank including a peeling treatment tank is arranged in parallel, and the clamp group in the linear drive path portion of the outer return drive path passes through the clamp cleaning process tank,
The clamp is slidably contacted along a fixed guide rail which is connected to the horizontal conveyance driving means and is disposed horizontally below the linear drive path portion of the conveyance drive path and the return drive path of the horizontal conveyance drive means. A clamp mounting body that is externally fitted so as to be moved, and a clamp body that is slidably held in a vertical direction on a fixed guide portion provided on the clamp mounting body, and a lower limit control is provided above the clamp body. A stopper is provided, and the lower limit position where the lower limit control stopper is locked to the upper surface of the clamp mounting body by the downward movement of the clamp body due to its own weight is the lowered position of the clamp body. Position the clamp that can clamp the side edge of the object from above and below. The clamp body is provided with an up / down operation guide engaging portion for vertically moving the clamp body, and is engaged with the up / down operation guide engaging portion provided on the clamp body. A vertically moving position of the clamp body, a rising position capable of jumping over a partition plate between the surface treatment tank and the clamp cleaning treatment tank, and a lowered position horizontally passing through the surface treatment tank and the clamp cleaning treatment tank. The apparatus for transporting a thin plate-like object in the surface treatment apparatus is provided with a vertical movement guide means for guiding to the surface of the surface treatment apparatus along at least a linear drive path portion of a return drive path at a position where the partition plate between the processing tanks jumps.   A clamp group in the turning drive path portion of the return drive path passes through the surface treatment tank, and a clamp group in the linear drive path section of the return drive path passes through the clamp cleaning process tank. The surface treatment apparatus according to claim 2, wherein the surface treatment apparatus is configured such that a jumping position between the processing tanks is disposed in the linear drive path portion of the return drive path, and the vertical operation guide means is disposed along the linear drive path portion of the return drive path. The apparatus for transporting thin plate-like workpieces.   A guide rail in which the vertical operation guide means supports and engages with the vertical operation guide engaging portion, and is arranged along the direction of the linear drive path portion at the jumping position of the partition plate between the processing tanks. An upper guide rail portion having a horizontal receiving surface disposed above the partition plate between the processing tanks, and an upward inclined guide rail portion disposed with the upper guide rail portion interposed therebetween. Each of the inclined guide rail portions has a height position at which the lower end portion of each inclined guide rail portion can engage with the engaging portion for the vertical operation guide of the clamp body in the lowered position. The apparatus for conveying a thin plate-like object in the surface treatment apparatus according to claim 1, 2 or 3.   The vertical movement guide means is a vertical height variation rail arranged continuously along the direction of the linear drive path portion, and the vertical height variation rail can jump over the partition plate between the processing tanks. A horizontal upper guide rail portion disposed in an upper position, a horizontal lower guide rail portion disposed in the treatment tank, and an inclined guide rail portion continuously connecting the upper guide rail portion and the lower guide rail portion, The apparatus for conveying a thin plate-like workpiece in the surface treatment apparatus according to claim 1, 2 or 3.   A guide rail in which the vertical operation guide means supports and engages with the vertical operation guide engaging portion, and is arranged along the direction of the linear drive path portion at the jumping position of the partition plate between the processing tanks. An upper inclined rail having a horizontal receiving surface disposed above the partition plate between the processing tanks, and an upward inclined rail arranged in a substantially C shape with the upper receiving rail interposed therebetween. Each of the inclined rails has a rail length that can support a plurality of clamps that clamp the side edges of a single flexible thin plate-like workpiece. The lower end of the inclined rail is in the lowered position. The lower end of the clamp body is at a height position that can be engaged with the engaging portion for the vertical operation guide, and the upper end of each inclined rail is received by the upper receiving rail. It is configured to move up and down in an inclined form to an ascending position that is the same height as the surface, and each of the inclined rails can be engaged with the engaging portion for the up and down operation guide and the up and down operation. The apparatus for conveying a thin plate-like object in the surface treatment apparatus according to claim 1, wherein the apparatus is configured to move back and forth between a retracted position where engagement with the guide engaging portion can be avoided.   4. The apparatus for conveying a thin plate-like object in the surface treatment apparatus according to claim 1, wherein the vertical operation guide engaging portion is a vertical operation guide rolling roller that rotates in the direction of the drive path.   4. The conveyance of a thin plate-like workpiece in the surface treatment apparatus according to claim 1, wherein the vertical operation engagement portion is a vertical operation engagement protrusion having a lower surface that is a rounded surface along the direction of the drive path. apparatus.   Inner transport drive paths parallel to each other with the transport path interposed between the transport paths, which are mounted on and rotated by endless horizontal transport driving means provided on both sides of the transport path of the thin plate-shaped workpiece. Of a conveying apparatus that clamps both sides of a flexible thin plate-like workpiece from above and below by a clamp group in the linear drive path portion and conveys the plate surface of the workpiece in one direction in a substantially horizontal state. A clamp, which is connected to the horizontal transport driving means and is moved while being in sliding contact along a fixed guide rail horizontally disposed at a position below the linear drive path of the horizontal transport driving means. A clamp mounting body that is externally fitted to the clamp mounting body, and a clamp body that is slidably held in a vertical direction on a fixed guide portion provided on the clamp mounting body. A clamp portion that can clamp the side edge portion of the flexible thin plate-shaped workpiece from above and below is positioned at the lower end of the clamp, and the clamp portion is positioned below the clamp mounting body. The fixed guide part includes a vertically long holding clamp さ れ る that is slidably movable in the up and down direction, and a vertically long movable clamp さ れ る that is held movably up and down by the holding clamp 、. An upper clamp portion is formed at the lower end portion, and a lower clamp portion that receives the upper clamp portion is formed at the lower end portion of the holding clamp rod. The movable clamp rod is moved down by the spring pressure of the compression spring, and The clamp part and the lower clamp part of the holding clamp 杆 are controlled to be closed in the normal state in the vertical direction. A clamp opening / closing guide engagement member that opens the upper and lower clamps in the vertical direction by moving them upward against the spring pressure is provided, and a lower limit control stopper is provided on the upper part of the holding clamp 杆, and the clamp body is moved downward by its own weight. The lower limit position at which the lower limit control stopper is locked to the upper surface of the clamp mounting body is defined as the lowering position of the clamp body, and the holding clamp rod is provided with an up / down operation guide engaging portion. The clamp of the conveyance apparatus of the thin plate-shaped to-be-processed object in a surface treatment apparatus comprised so that a clamp main body could be moved up and down by moving a part up and down.   The clamp of the conveying apparatus of the thin plate-shaped to-be-processed object in the surface treatment apparatus of Claim 9 with which the said engaging part for an up-and-down action guide is a rolling roller for an up-and-down action guide rotating in the direction of a drive path.   The clamp of the conveying apparatus of the thin-plate-shaped to-be-processed object in the surface treatment apparatus of Claim 9 with which the said engaging part for an up-and-down action guide is an up-and-down action engagement protrusion which made the lower surface the round surface along the direction of a drive path. .   10. The surface treatment apparatus according to claim 9, wherein a metal plate spring such as phosphor bronze is provided on the vertical guide surface outside the clamp attachment body to give elasticity to warp toward the slide contact surface of the holding clamp rod. The clamp of the conveyance apparatus of the thin plate-shaped processed material in.

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