WO2018221395A1

WO2018221395A1 - Surface treatment device and transport jig

Info

Publication number: WO2018221395A1
Application number: PCT/JP2018/020119
Authority: WO
Inventors: 勝己石井; 重幸渡邉
Original assignee: アルメックスＰｅ株式会社
Priority date: 2017-05-30
Filing date: 2018-05-25
Publication date: 2018-12-06
Also published as: JP6793991B2; TW201907768A; CN113930834A; KR20200014262A; JP6779545B2; MY193456A; JP2020186471A; CN110709538B; JPWO2018221395A1; PH12019502108A1; CN110709538A

Abstract

A surface treatment device 10 is provided with: a surface treatment tank 200 which contains a treatment liquid Q, and has an upper opening 200A; a transport jig 30 which includes a workpiece holding part 340 which holds a workpiece 20 in a manner which allows the workpiece 20 to hang vertically from the upper opening of the surface treatment tank and dip into the treatment liquid, and transports the workpiece 20 in a transport direction A; an electricity-feeding part 260 which is brought into contact with the transport jig to feed electricity to the workpiece; a drive part 270 which applies drive force to the transport jig to drive and transport the transport jig; and a guide part 280 which is brought into contact with the transport jig to guide and transport the transport jig, wherein, as viewed from above, the distance L1 between the guide part and the workpiece holding part is shorter than the distance L2 between the drive part and the workpiece holding part and is also shorter than the distance L3 between the electricity feeding part and the workpiece holding part.

Description

Surface treatment apparatus and transfer jig

The present invention relates to a surface treatment apparatus that performs plating or the like on the surface of a workpiece and a conveyance jig that conveys the workpiece.

Patent Document 1 discloses a surface treatment apparatus for performing a plating process or the like on the surface of a workpiece and a conveyance jig for conveying the workpiece. In this surface treatment apparatus, a power supply rail that feeds power to a workpiece via a transport jig and a guide rail that transports and guides the transport jig are combined, and a part of the transport jig is in surface contact with the power supply / transport rail. Yes.

On the other hand, Patent Document 2 discloses a so-called cathode division type surface treatment apparatus that enables current control for each work set as a cathode, and Patent Document 3 discloses a structure of a cathode division type surface treatment apparatus and a conveying jig. Is disclosed.

As disclosed in Patent Document 1, the surface treatment apparatus includes an area for continuously conveying a conveyance jig holding a workpiece and an area for intermittent conveyance. As disclosed in Patent Document 1, for example, the intermittent conveyance employs a method in which a conveyance jig is pushed from behind by a pusher. On the other hand, in continuous conveyance, as disclosed in Patent Document 1, a chain to which a toothed block engaged with a claw provided on a conveyance jig is fixed is continuously moved. In addition, as disclosed in Patent Document 4, by alternately driving two pushers provided for each section obtained by dividing the straight conveyance path into a plurality of sections, the conveyance jig is pushed out from the rear to continuously convey the conveyance jig. You can also

JP 2012-046782 A JP 2009-132999 A JP 2013-011009 A Japanese Patent No. 6117789

For example, unlike the above-described cathode splitting method, a power supply / conveyance rail is not used as in Patent Document 1, but as shown in Patent Document 3, a power supply rail that supplies power to a work via a conveyance jig, and a conveyance treatment are disclosed. And a guide rail for conveying and guiding the tool.

In this case, as shown in Patent Document 3, the surface treatment apparatus has guide rails on both sides of the surface treatment tank in plan view, and the conveying jig has both ends of the horizontal arm portion on both sides of the work holding unit in plan view. Is supported by the guide rail. For this reason, the width dimension of a conveyance jig is large and a jig becomes large. The width dimension of the surface treatment apparatus is also large and the apparatus becomes large.

Moreover, the guide rail which does not have a power feeding function like patent document 3 was increased with the surface contact like patent document 1, when the top surface was rolled and contacted with the roller provided in the conveyance jig. Frictional force is reduced. Although the conveyance jig is continuously or intermittently conveyed, it is necessary to maintain the accuracy of the stop position after the completion of the conveyance drive. This is because troubles occur in conveyance in the next process.

An object of some aspects of the present invention is to provide a surface treatment apparatus and a conveying jig that can stably convey a conveying jig while reducing the size by reducing the width dimension.
In some other aspects of the present invention, after the continuous conveyance or the intermittent conveyance is completed, the top surface of the guide rail having no power feeding function is brought into contact with a roller provided on the conveyance jig to reduce the frictional force. An object of the present invention is to provide a surface treatment apparatus and a transport jig that can ensure the stop position accuracy of the transport jig.

(1) One aspect of the present invention is
A surface treatment tank containing a treatment liquid and having an upper opening;
A transport jig that transports the work along the transport direction, including a work holding unit that holds the work so as to be suspended in the processing liquid from the upper opening of the surface treatment tank;
A power supply unit that contacts the transfer jig and supplies power to the workpiece;
A driving unit that applies driving force to the transport jig to drive the transport jig;
A guide section for contacting and conveying the conveying jig in contact with the conveying jig;
Have
In plan view, the distance between the guide part and the work holding part is shorter than the distance between the driving part and the work holding part, and is shorter than the distance between the power feeding part and the work holding part. Relates to the device.

According to one aspect of the present invention, the conveyance jig for holding the workpiece can be stably and continuously conveyed intermittently. Here, in the conveyance jig, the weight of the work holding unit is larger than that of the power-supplied unit that is in contact with the power supply unit or the driven unit that is driven by the driving unit. Since the distance between the workpiece holding portion and the guide portion, which are heavy, is shortened and a useless moment acting on the workpiece holding portion is reduced, the conveyance jig can be stably conveyed. In addition, since a useless moment acting on the workpiece holding unit is reduced, it is possible to reduce the driving force applied from the driving unit to the conveying jig. Moreover, since the width dimension of a conveyance jig becomes short compared with what guides the to-be-guided part of the both ends of a conveyance jig like patent document 3, the width dimension of a surface treatment apparatus also becomes short, and the apparatus Miniaturization is achieved.

Here, in one aspect of the present invention, in a plan view, guide portions may be provided on both sides of the work holding portion as in the structure of Patent Document 3 (both-supported beam structure), or the structure of Patent Document 1 is used. Thus, a guide part may be provided only on one side of the work holding part (cantilever structure). If a double-supported beam structure is used, the useless moment acting on the workpiece holding portion is significantly reduced. Even in the cantilever structure, since the distance between the workpiece holding portion and the guide portion is short, useless moment acting on the workpiece holding portion is reduced. At this time, in a plan view, the guide unit, the drive unit, and the power supply unit may be provided on one side of the work holding unit, or the drive unit and the power supply unit are provided on one side of the work holding unit. You may provide a guide part in the other one side. The former has a cantilever structure, but for the latter, one side of the work holding part is supported by the drive part and the power feeding part and the other side is supported by the guide part in plan view. It becomes. In this manner, the conveyance jig can be more stably conveyed and guided, and a useless moment acting on the work holding unit can be reduced, thereby reducing the driving force applied from the drive unit to the conveyance jig. It becomes possible.

(2) In one aspect of the present invention,
The transport jig includes a horizontal arm part that supports the work holding part by hanging down,
The work holding part includes a chuck part for chucking at least an upper end part of the work,
The horizontal arm portion is
A guided portion guided by the guiding portion;
A driven part driven by the driving part;
A power-supplied part in contact with the power-feeding part;
Can be included.

Thus, the work holding part includes a chuck part that checks at least the upper end part of the work, and if necessary, the upper end part and the lower end part of the work, and is heavier than the guided part, the driven part, or the powered part, The conveyance jig is stably conveyed and guided by the action of the guide unit described above.

(3) In one mode of the present invention, the guide part is arranged above the upper opening of the surface treatment tank, and the drive part and the power feeding part are detached from above the upper opening of the surface treatment tank. Can be placed at different positions.

Since the contact with the guide part and the guided part can be a rolling contact of the roller, dust due to sliding hardly occurs. Therefore, even if the guide portion is arranged above the upper opening of the surface treatment tank and dust caused by sliding falls into the treatment liquid, the treatment liquid is not contaminated to such an extent that the quality of the surface treatment is deteriorated. Thereby, the distance of a guide part and a workpiece | work holding | maintenance part can be shortened compared with the case where a guide part is arrange | positioned in the position remove | deviated from the upper direction of the upper opening of a surface treatment tank. In addition, when the power-supplied portion of the conveying jig and the power supply / guide rail are in surface contact as in Patent Document 1, grease is applied to the power supply / guide rail to reduce frictional resistance and the like. It was. Therefore, since the grease splashed from the power supply / guide rail falls into the surface treatment tank, the power supply / guide rail has to be disposed at a position off the upper opening of the surface treatment tank. Grease is not necessary for the guide part to which the roller rolls.

(4) In one aspect of the present invention, the surface treatment tank may have a cover that reduces the area of the upper opening. By providing the cover, it is possible to prevent dust or the like generated by the rolling contact of the roller from falling into the processing liquid by the cover.

(5) Another aspect of the present invention is:
In the transfer jig that holds the workpiece supplied to the surface treatment device and transfers the workpiece along the transfer direction,
A horizontal arm part, and a work holding part hanging from the horizontal arm part,
The work holding part includes a chuck part for chucking at least an upper end part of the work,
The horizontal arm portion is
A guided portion guided by a guide portion provided in the surface treatment apparatus;
A driven part driven by a driving part provided in the surface treatment apparatus;
A power-supplied part in contact with a power-feeding part provided in the surface treatment apparatus;
Including
The present invention relates to a conveying jig in which the guided portion is disposed at a position closer to the work holding portion than the driven portion and the power supplied portion in plan view.

According to the transport jig according to another aspect of the present invention, it is possible to stably transport and guide the transport jig in the same manner as in one aspect of the present invention.

(6) Still another aspect of the present invention provides:
A surface treatment tank containing a treatment liquid and having an upper opening;
A transport jig for transporting a workpiece to be processed by the surface treatment tank;
A continuous drive unit that applies a continuous conveyance force to the conveyance jig that holds the workpiece disposed in the surface treatment tank and continuously conveys the conveyance jig;
An intermittent drive unit that intermittently drives the conveyance jig by applying an intermittent conveyance force that pushes forward the conveyance jig that holds the workpiece disposed outside the surface treatment tank;
A guide for conveying and guiding the conveying jig;
Have
The transport jig includes a guided portion guided by the guide portion,
The guided portion is
A roller in rolling contact with the top surface of the guide part;
A brake mechanism that brakes the roller when the conveyance jig stops at least after intermittent conveyance driving and after continuous conveyance driving;
The present invention relates to a surface treatment apparatus comprising:

According to the surface treatment apparatus according to still another aspect of the present invention, the conveyance jig is stopped by the braking force of the brake mechanism at least when the conveyance jig is stopped after the intermittent conveyance drive and after the continuous conveyance drive, and the inertial force is applied. It is prevented from continuing to move forward and stopping at a position other than the predetermined stop position. Even when continuous conveyance driving is realized by engagement of a driving member (for example, a toothed block) and a driven member (for example, a claw member), a conveying jig is used to release the engagement between the driving member and the driven member. For example, the conveying jig is stopped after pushing forward with a pusher. Alternatively, for example, as in Patent Document 4, even when continuous transport driving is performed by alternately driving two pushers without engagement, the transport jig is stopped after being pushed forward by the pusher. Therefore, even after the end of continuous conveyance driving, an inertial force is applied to the conveyance jig in the same manner as after completion of intermittent conveyance driving. Therefore, at least when the conveyance jig is stopped after the intermittent conveyance drive and after the continuous conveyance drive, the conveyance jig is stopped by the braking force of the brake mechanism. Accordingly, it is possible to prevent the conveyance jig from being stopped at a position other than the predetermined stop position by continuing to move forward with the inertial force.

(7) In still another aspect of the present invention, the brake mechanism can constantly brake the roller by a braking force that reduces the inertial force acting on the roller by the intermittent conveyance driving or the continuous conveyance driving. In this way, the conveying jig can be stopped at a predetermined stop position by the braking force of the brake mechanism at the end of the continuous conveying drive and the intermittent conveying drive while enabling the conveying jig to perform continuous conveying driving and intermittent conveying driving.

(8) In still another aspect of the present invention,
The roller is rotatably supported via a rolling bearing on a shaft fixed to the conveyance jig,
The rolling bearing includes an inner ring fixed to the shaft, an outer ring fixed to the roller, and a rolling element held between the inner ring and the outer ring,
The brake mechanism can elastically press the outer ring.

Thus, the brake mechanism can always brake the roller by elastically pressing the outer ring of the rolling bearing.

(9) Still another aspect of the present invention provides:
In the transfer jig that holds the workpiece supplied to the surface treatment device and transfers the workpiece along the transfer direction,
A horizontal arm part, and a work holding part hanging from the horizontal arm part,
The horizontal arm portion is
A guided portion guided by a guide portion provided in the surface treatment apparatus;
A driven part driven by a driving part provided in the surface treatment apparatus;
A power-supplied part in contact with a power-feeding part provided in the surface treatment apparatus;
Including
The guided portion is
A roller in rolling contact with the top surface of the guide part;
A brake mechanism for braking the roller;
It is related with the conveyance jig provided with.

Since the conveyance jig according to still another aspect of the present invention is equipped with a brake mechanism that brakes the roller, the conveyance jig can be stopped at a predetermined stop position by the brake mechanism when the conveyance jig is stopped. it can. In addition, it is not necessary to install brake mechanisms at all the stop positions present at a plurality of locations of the surface treatment apparatus.

1 is a schematic plan view of a continuous plating apparatus to which the present invention is applied. It is a longitudinal cross-sectional view of the surface treatment apparatus which concerns on embodiment of this invention. FIG. 3 is a partially enlarged view of FIG. 2. It is a perspective view of a conveyance jig. It is a figure which shows the to-be-powered part of a conveyance jig. It is a figure which shows the positional relationship of the workpiece holding part of a conveyance jig, and another member. It is a figure which shows the modification of the positional relationship of the workpiece holding part of a conveyance jig, and another member. It is a figure which shows the further another modification about the positional relationship of the workpiece holding part and other member of a conveyance jig. It is a figure which shows an example of the brake mechanism of a roller.

Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the contents of the present invention described in the claims, and all the configurations described in the present embodiment are indispensable as means for solving the present invention. Is not limited.

1. Overview of Surface Treatment Apparatus First, the entire surface treatment apparatus will be described with reference to FIG. FIG. 1 is a plan view of a surface treatment apparatus, for example, a continuous plating treatment apparatus. Note that the present invention is not necessarily applied to workpieces that are continuously conveyed, but can be applied to those that are plated on workpieces that are intermittently conveyed. The continuous plating apparatus 10 includes a circulation conveyance path 100 in which a plurality of conveyance jigs 30 that respectively hold workpieces 20 such as circuit boards are circulated and conveyed along, for example, a clockwise circulation conveyance direction A in FIG. In FIG. 1, some of the workpieces 20 and some of the conveying jigs 30 are not shown.

In the circulation conveyance path 100, a plating tank (surface treatment tank in a broad sense) 200 for surface-treating, for example, plating the work 20 held on each of the plurality of conveyance jigs 30, and the circulation conveyance path 100 than the plating tank 200. An unprocessed workpiece 20 provided upstream of the workpiece 20 and a carry-in portion 210 for carrying in the plurality of conveyance jigs 30, and a plurality of conveyance treatments of the processed workpiece 20 provided downstream of the circulation conveyance path 100 with respect to the plating tank 200. An unloading section 220 for unloading from the tool 30 is provided.

The circulation conveyance path 100 is configured such that at least one of the plurality of conveyance jigs 30 is horizontally disposed on the first straight conveyance path 110 and the second straight conveyance path 120 which are parallel to each other and from the first straight conveyance path 110 to the second straight conveyance path 120. A first turning device 130 that turns and delivers, and a second turning device 140 that horizontally turns and delivers at least one of the plurality of conveyance jigs 30 from the second straight conveyance path 120 to the first straight conveyance path 110. Have.

In this embodiment, the plating tank 200 is provided along the second straight conveyance path 120, and the carry-in part 210 and the carry-out part 220 are provided in the first straight conveyance path 110. The circulation conveyance path 100 may further include a pretreatment tank group 230 disposed on the upstream side of the plating tank 200 and a posttreatment tank group 240 disposed on the downstream side of the plating tank 200.

The pretreatment tank group 230 is configured by arranging, for example, a degreasing tank 230A, a hot water washing tank 230B, a water washing tank 230C, a shower tank 230D, and a pickling tank 230E in order from the upstream side. The post-treatment tank 240 is configured by arranging, for example, a shower tank 240A and a water washing tank 240B in order from the upstream side. Note that the number and type of the pretreatment tank group 230 and the posttreatment tank group 240 can be changed as appropriate.

The conveyance jig 30 is intermittently conveyed except for the

shower tanks

230D and 240A in the pretreatment tank group 230 and the posttreatment tank group 240. For this purpose, the pretreatment tank group 230 and the post-treatment tank group 240 are provided with two types of guide rails that convey and guide the conveyance jig 30. One is fixed

rails

232, 234, 235, 242, and 243 for intermittently transporting the transport jig 30 in the same processing tank. The other one is elevating

rails

231, 233, 236, and 241 that can intermittently convey the conveyance jig 30 across the partition walls between different treatment tanks.

In the first and second

straight conveyance paths

110 and 120 other than the

shower tanks

230D and 240A of the pretreatment tank group 230 and the posttreatment tank group 240, one or a plurality of conveyances are performed along the two types of guide rails and the guide rails. The conveying jig 30 is intermittently conveyed by a pusher (intermittent drive unit) that moves the jig 30 by a unit distance.

In the

shower tanks

230D and 240A in the pre-treatment tank group 230 and the post-treatment tank group 240, the conveyance jig 30 is intermittently conveyed by the first and

second turning devices

130 and 140. For this purpose, the first turning device 130 includes two turning

rails

131 and 132 that are integrally driven to rotate, and the second turning device 140 includes two turning

rails

141 and 142 that are integrally driven to rotate. Have

The plating tank 200 is provided with a power supply / guide rail 201 that extends parallel to the longitudinal direction of the plating tank 200 in the plan view of FIG. However, the power supply rail and the guide rail are different from each other in the embodiment device as described later. The plurality of conveying jigs 30 supported by the rails 201 are arranged in the plating tank 200 and hold the workpieces 20 respectively. Further, a continuous conveyance unit 400 that continuously conveys the plurality of conveyance jigs 30 along the rail 201 is provided along the rail 201. The continuous transport operation is also performed in the same manner as in Patent Document 1.

The circulation conveyance path 100 further includes a jig return conveyance path 150 extending from the carry-out section 220 to the carry-in section 210 of the first straight conveyance path 110. The jig return conveyance path 150 includes, for example, two

endless chains

151 and 152. The jig return conveyance path 150 has a function of returning and conveying the empty conveyance jig 30 from the carry-out unit 222 to the carry-in unit 210 and a function of waiting the empty conveyance jig 30 on the upstream side of the carry-in unit 210. .

2. Structure Attached to Surface Treatment Tank FIG. 2 is a schematic sectional view of FIG. 1 in a region having a plating tank 200 having an upper opening 200A. The conveying jig 30 holds the workpiece 20 so as to be suspended in the plating solution Q from the upper opening 200 </ b> A of the plating tank 200.

As shown in FIG. 3 which is an enlarged view of a part of FIG. 2, the continuous plating apparatus 10 includes a power feeding unit 260, a driving unit 270 and a guide unit 280 adjacent to the plating tank 200. The power feeding unit 260 feeds power to the workpiece 20 in contact with the conveying jig 30. The driving unit 270 applies a driving force to the transport jig 30 to drive the transport jig 30 continuously in the plating tank 200. The guide unit 280 comes into contact with the transport jig 30 and guides the transport jig 30 continuously.

When the cathode division method shown in Patent Documents 2 and 3 is adopted, the power feeding unit 260 can include a plurality of, for example, four power feeding rails 260A to 260D. In addition, the power feeding unit 260 can be configured by one power feeding rail when the cathode division method is not adopted. These power supply rails 260A to 260D extend along a first direction A (see FIG. 1) parallel to the longitudinal direction of the plating tank 200.

The drive unit 270 includes, for example, a rotational drive member such as a sprocket 271, an endless drive member 272 such as a chain driven by the sprocket 271, and a toothed block 273 that is fixed to the endless drive member 272, as in Patent Document 1. Can be included. The endless drive member 272 extends along a first direction A (see FIG. 1) parallel to the longitudinal direction of the plating tank 200. Instead, as shown in Patent Document 4, the drive unit 270 may include two pushers that are arranged in each divided region and are alternately driven, and other continuous drive methods are adopted. Can do.

The guide portion 280 can be formed of a guide rail having a flat top surface, for example, a rectangular cross section. The guide rail 280 extends along a first direction A (see FIG. 1) parallel to the longitudinal direction of the plating tank 200.

3. Next, the conveyance jig 30 will be described with reference to FIG. As shown in FIGS. 2 to 4, the transfer jig 30 includes a horizontal arm unit 300 and a work holding unit 340 that is supported and suspended from the horizontal arm unit 300 via the vertical arm unit 301. The work holding part 340 includes an upper chuck part 341 that chucks the upper end part of the work 20. The work holding part 340 can further include a lower chuck part 342 for chucking the lower end part of the work 20 as necessary. In addition, although the conveyance jig | tool 30 shown in FIG. 4 can change a width | variety and length according to the size of the workpiece | work 20, it is not limited to this.

As shown in FIG. 4, the horizontal arm unit 300 extends along a second direction B that is orthogonal (crossed in a broad sense) to the first direction (conveying direction) A. The horizontal arm unit 300 is provided with a power supply unit 310, a driven unit 320, and a guided unit 330.

The power-supplied part 310 is a part to which power is supplied from a power supply part 260 provided in the plating apparatus 10. The power-supplied part 310 of this embodiment is in contact with one of the plurality of power supply rails 260A to 260D. In the present embodiment, a plurality of types of conveyance jigs 30 are prepared in which the power-supplied unit 310 is attached to each of a plurality of locations whose positions differ in the second direction B with respect to the horizontal arm unit 300. Each one of the plurality of types of conveying jigs 30 contacts one of the plurality of power supply rails 260A to 260D.

In the present embodiment, a structure is adopted in which the parts of the conveying jig 30 are made in common and contact with any one of the plurality of power supply rails 260A to 260D. For this purpose, as shown in FIG. 4, in the conveying jig 30, a support portion 311 that supports the power-supplied portion 310 is arranged orthogonal to the horizontal arm portion 300. The horizontal arm portion 300 has a plurality of attachment portions (for example, screw holes) provided at different positions in the second direction B. The support portion 311 is attached to one of the plurality of attachment portions.

As shown in FIG. 4, the support 311 is provided with at least one, for example, two contact portions 312 that come into contact with the power supply rail 260 (power supply rails 260A to 260D). FIG. 5 shows a support structure for the contact portion 312. The power-supplied unit 310 includes a parallel link mechanism 313 of a four-node rotation chain that connects the support unit 311 and the contact unit 312 with, for example, two

parallel links

313A and 313B. The two

links

313A and 313B are constantly urged to move in the clockwise direction by torsion coil springs 314 and 314 which are urging members. As a result, the contact portion 312 can be brought into contact with the power supply rail 260 with an appropriate contact pressure.

The driven part 320 is driven by a driving force from a driving part 270 provided in the plating apparatus 10 and continuously drives the conveying jig 30. As shown in FIG. 4, the driven portion 320 has a plurality of, for example, four claw members 321 to 324 that are engaged with a toothed block 273 (FIG. 3) fixed to the chain 272. In order to mesh any one of the four claw members 321 to 324 with the teeth of the toothed block 273, the meshing tip positions of the four claw members 321 to 324 are shifted in the A direction. In this way, any one of the four claw members 321 to 324 is engaged with the toothed block 273 fixed to the chain 272, so that the conveying jig 30 is continuously conveyed.

The guided portion 330 includes a roller 331 that contacts the top surface of the guide rail 280 shown in FIG. Accordingly, the conveyance jig 30 that is continuously conveyed and driven by the driving unit 270 is conveyed and guided with a reduced frictional resistance. The guided portion 330 further includes

additional rollers

334 and 335 that are in rolling contact with, for example, both side surfaces of the guide rail 280 in order to restrict movement of the conveying jig 30 in the second direction B shown in FIGS. 3 and 4. be able to. The movement restriction of the conveying jig 30 in the second direction B may be performed in a region different from the guide rail 280. Note that the roller 331 has an appropriate diameter that is less susceptible to the impact of the gap generated at the joint between the power supply rails having a finite length. In addition, the roller 331 is formed of a material that can withstand an environment such as acid or alkali peculiar to plating equipment, for example, polypropylene.

4). FIG. 3 and FIG. 6A, which is a plan view of the region shown in FIG. 3 as viewed from above, are shown in FIG. 3 and the workpiece holding portion 340 of the conveyance jig 30. The positional relationship with other members is shown. As shown in FIGS. 3 and 6, the distance L1 between the guide part 280 and the work holding part 340 (center-to-center distance, hereinafter the same) L1 is shorter than the distance L2 between the drive part 270 and the work holding part 340, and It is shorter than the distance L3 between the power supply unit 260 (power supply rail 260A in the example of FIG. 3) and the work holding unit 340. Similarly, the distance L1 between the guided part 330 (331) and the work holding part 340 is shorter than the distance L2 between the driven part 320 and the work holding part 340, and the power supplied part 310 and the work holding part 340 Shorter than the distance L3.

According to such a positional relationship of L1 <L2 and L1 <L3, the conveyance jig 30 holding the workpiece 20 can be stably conveyed. As is clear from FIG. 4, the weight of the work holder 340 is maximized in the conveying jig 30. This is because the distance between the work holding unit 340 which is the heaviest part and the guide unit 280 is shortened, and a useless moment acting on the work holding unit 340 is reduced. Therefore, the conveyance jig 30 can be more stably conveyed and guided, and the driving force applied to the conveyance jig 30 from the drive unit 270 can be reduced. Moreover, since the width dimension of the conveyance jig 30 becomes short compared with what guides the guided part of the both ends of the conveyance jig 30 like patent document 3, the width dimension of the plating apparatus 10 also becomes short, The apparatus can be reduced in size.

In FIG. 7 which is a modified example of FIG. 3 and FIG. 6 having a cantilever structure, a total of two guide units, one set on each side in the second direction B of the work holding unit 340 as in the structure of Patent Document 3. 280 and a guided portion 330 are provided. Even in this case, the positional relationship of L1 <L2 and L1 <L3 is established. If it carries out like this, the workpiece | work holding | maintenance part 340 becomes a double-supported beam structure supported by the guide part 280 and the to-be-guided part 330 of the both sides. If a double-supported beam structure is used, a useless moment acting on the workpiece holding portion 340 is significantly reduced.

In FIG. 8, which is still another modified example, the power feeding unit 260 and the driving unit 270 are provided on one side of the work holding unit 340 in the second direction B, and the guide unit 280 is provided on the other side of the work holding unit 340. Yes. In FIG. 8, in the second direction B, one side of the work holding unit 340 is supported by the power feeding unit 260 and the driving unit 270, and the other side is supported by the guide unit 280. Even in such a double-supported beam structure, the useless moment acting on the work holding portion 340 is significantly reduced.

6 to 8, in order to shorten the distance L1 between the work holding part 340 and the guide part 280 or the guided part 330, the guide part 280 and the guided part 330 are arranged at the upper part of the plating tank 200 shown in FIG. You may arrange | position above 200 A of opening. However, the power feeding unit 260 and the driving unit 270 are disposed off the upper opening 200A of the plating tank 200 shown in FIG. This is because, in particular, it is necessary to prevent dust that may be generated by the engagement between the driving unit 270 and the driven unit 320 from falling into the plating solution Q through the upper opening 200A of the plating tank 200.

Since the contact with the guide part 280 and the guided part 330 is the rolling contact of the roller 331, dust due to sliding does not occur. However, in this embodiment, when the guide part 280 and the guided part 330 are disposed above the upper opening 200A of the plating tank 200 shown in FIG. 2, the upper part of the pretreatment tank 230A shown on the right side of FIG.

Covers

202 and 203 that reduce the area of the upper opening can be provided on the upper part of the plating tank 200 (the

covers

202 and 203 on the upper part of the plating tank 200 are omitted in FIG. 2). In this way, while it is possible to reduce the distance L1 between the work holding part 340 and the guide part 280, dust or the like generated by rolling contact between the guide part 280 and the roller 331 is removed by the

covers

202 and 203 by the plating solution Q. It is prevented from falling inside.

6 to 8, the relationship between the distance L2 and the distance L3 is L2 <L3. This is because the driving efficiency increases as the distance L2 from the driving unit 270 or the driven unit 320 to the work holding unit 340 is shorter. However, it is good also as L2> L3 or L2 = L3. For example, if the drive unit 270 is provided below the horizontal arm unit 300 and the power supply unit 260 is provided above the horizontal arm unit 300, L2 <L3, L2 = L3 or L2> L3 for the plurality of power supply rails 260A to 260D. Any of these relationships may be established.

5). Brake Mechanism of Roller 331 As described with reference to FIG. 1, the plating apparatus 10 applies a continuous conveyance force to the conveyance jig 30 that holds the workpiece 20 arranged in the plating tank 200 and continuously drives the drive unit ( (Continuous drive unit) 270 and an intermittent drive unit (pusher or the like) that intermittently drives the conveyance jig 30 by applying an intermittent conveyance force that pushes forward the conveyance jig 30 that holds the workpiece 20 disposed outside the plating tank 200. ) And. In this case, the conveyance jig 30 preferably has a brake mechanism that brakes the roller 331 that is in rolling contact with the top surface of the guide portion 280.

FIG. 9 shows a brake mechanism 350 incorporated in the roller 331, for example. As shown in FIG. 9, the roller 331 is rotatably supported by a shaft 332 fixed to the vertical arm portion 301 of the conveying jig 30 via a rolling bearing 333. The rolling bearing 333 includes an inner ring 333A fixed to the shaft 332, an outer ring 333B fixed to the roller 331, and a rolling element 333C held between the inner ring 333A and the outer ring 333B. The brake mechanism 350 includes an elastic member such as a torsion coil spring 351. The torsion coil spring 351 is disposed around the shaft 332 between the collar 334 disposed on the rolling bearing 333 side and the collar 335 disposed on the vertical arm portion 301 side, and the collar 334 is interposed therebetween. The outer ring 333B is elastically pressed. Thus, the brake mechanism 350 can constantly brake the roller 331 by elastically pressing the outer ring 333B of the rolling bearing 333. The brake mechanism 350 may be provided on the

other rollers

334, 335, or may be provided on any one of the

rollers

331, 334, 335.

The brake mechanism 350 that constantly applies a braking force can brake the roller 331 with a braking force that reduces the inertial force acting on the roller 331 after the end of continuous conveyance driving or intermittent conveyance driving. In this way, while the conveyance jig 30 can be continuously or intermittently driven, the conveyance jig 30 is predetermined by the braking force of the brake mechanism 350 when the conveyance jig 30 is stopped after the intermittent conveyance drive and after the continuous conveyance drive. It can be stopped at the stop position.

Thus, it is possible to prevent the conveyance jig 30 from continuing to move forward by the inertia force even after the end of the intermittent conveyance driving and stopping at a position other than the predetermined stop position. On the other hand, even when the continuous conveyance drive by the drive unit 270 is realized by the engagement of the drive part (toothed block) 273 and the driven parts (claw members) 321 to 324, the engagement between the drive member and the driven member After the conveying jig is pushed forward by a pusher, for example, the conveying jig is stopped. Alternatively, for example, as in Patent Document 4, even when continuous transport driving is performed by alternately driving two pushers without engagement, the transport jig is stopped after being pushed forward by the pusher. Therefore, even after the end of the continuous transport drive, the inertial force acts on the transport jig 30 in the same manner as after the completion of the intermittent transport drive. Therefore, at least when the conveyance jig 30 is stopped after intermittent conveyance driving and after continuous conveyance driving, the conveyance jig 30 is stopped by the braking force of the brake mechanism 350. Thereby, it is prevented that the conveying jig 30 continues to move forward by the inertia force and is stopped at a position other than the predetermined stop position.

Although the present embodiment has been described in detail as described above, it will be readily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention. For example, a term described at least once together with a different term having a broader meaning or the same meaning in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. All combinations of the present embodiment and the modified examples are also included in the scope of the present invention.

For example, the brake mechanism 350 always applies a braking force to the roller 331 or the like, but is not limited thereto. For example, a brake mechanism that applies a braking force to the roller 331 or the like only when the conveyance jig 30 is stopped after intermittent conveyance driving and after continuous conveyance driving may be used. For this purpose, it is only necessary to detect that the conveying jig 30 has arrived immediately before the stop position and to operate the brake mechanism mechanically or electrically. Alternatively, a brake mechanism may be provided at the stop position of the transport jig 30 and a braking force may be applied to the roller 331 of the transport jig 30 that has reached the stop position.

10 surface treatment device (continuous plating treatment device), 20 workpiece, 30 transport jig, 200
Surface treatment tank (plating tank), 200A upper opening, 202, 203 cover, 260 power feeding section, 260A-260B power feeding rail, 270 driving section (continuous driving section), 271 sprocket, 272 chain, 273 toothed block, 280 guide section (Guide rail), 300 horizontal arm part, 301 vertical arm part, 310 powered part, 320 driven part, 321 to 324 claw member, 330 guided part, 331 roller, 333 rolling bearing, 333C outer ring, 350 brake mechanism, 351 Torsion coil spring, A 1st direction (conveying direction), B 2nd direction, Q treatment liquid (plating liquid)

Claims

A surface treatment tank containing a treatment liquid and having an upper opening;
A transport jig that transports the work along the transport direction, including a work holding unit that holds the work so as to be suspended in the processing liquid from the upper opening of the surface treatment tank;
A power supply unit that contacts the transfer jig and supplies power to the workpiece;
A driving unit that applies driving force to the transport jig to drive the transport jig;
A guide section for contacting and conveying the conveying jig in contact with the conveying jig;
Have
In plan view, the distance between the guide part and the work holding part is shorter than the distance between the driving part and the work holding part, and shorter than the distance between the power feeding part and the work holding part. A featured surface treatment apparatus.
In claim 1,
The transport jig is
Including a horizontal arm portion that supports the work holding portion by hanging down,
The work holding part includes a chuck part for chucking at least an upper end part of the work,
The horizontal arm portion is
A guided portion guided by the guiding portion;
A driven part driven by the driving part;
A power-supplied part in contact with the power-feeding part;
A surface treatment apparatus comprising:
In claim 2,
The guide portion is disposed above the upper opening of the surface treatment tank,
The surface treatment apparatus, wherein the drive unit and the power supply unit are disposed at positions deviated from above the upper opening of the surface treatment tank.
In claim 3,
The surface treatment apparatus, wherein the surface treatment tank includes a cover for reducing an area of the upper opening.
In the transfer jig that holds the workpiece supplied to the surface treatment device and transfers the workpiece along the transfer direction,
A horizontal arm part, and a work holding part hanging from the horizontal arm part,
The work holding part includes a chuck part for chucking at least an upper end part of the work,
The horizontal arm portion is
A guided portion guided by a guide portion provided in the surface treatment apparatus;
A driven part driven by a driving part provided in the surface treatment apparatus;
A power-supplied part in contact with a power-feeding part provided in the surface treatment apparatus;
Including
In a plan view, a distance between the guided portion and the work holding portion is shorter than a distance between the driven portion and the work holding portion, and more than a distance between the power supplied portion and the work holding portion. A conveying jig characterized by being short.
A surface treatment tank containing a treatment liquid and having an upper opening;
A transport jig for transporting a workpiece to be processed by the surface treatment tank;
A continuous drive unit that applies a continuous conveyance force to the conveyance jig that holds the workpiece disposed in the surface treatment tank and continuously conveys the conveyance jig;
An intermittent drive unit that intermittently drives the transfer jig by applying an intermittent transfer force to the transfer jig that holds the workpiece disposed outside the surface treatment tank;
A guide for conveying and guiding the conveying jig;
Have
The transport jig includes a guided portion guided by the guide portion,
The guided portion is
A roller in rolling contact with the top surface of the guide part;
A brake mechanism that brakes the roller when the conveyance jig stops at least after intermittent conveyance driving and after continuous conveyance driving;
A surface treatment apparatus comprising:
In claim 6,
The surface treatment apparatus characterized in that the brake mechanism constantly brakes the roller by a braking force that reduces an inertial force acting on the roller by the intermittent conveyance driving or the continuous conveyance driving.
In claim 7,
The roller is rotatably supported via a rolling bearing on a shaft fixed to the conveyance jig,
The rolling bearing includes an inner ring fixed to the shaft, an outer ring fixed to the roller, and a rolling element held between the inner ring and the outer ring,
The surface treatment apparatus, wherein the brake mechanism elastically presses the outer ring.
In the transfer jig that holds the workpiece supplied to the surface treatment device and transfers the workpiece along the transfer direction,
A horizontal arm part, and a work holding part hanging from the horizontal arm part,
The horizontal arm portion is
A guided portion guided by a guide portion provided in the surface treatment apparatus;
A driven part driven by a driving part provided in the surface treatment apparatus;
A power-supplied part in contact with a power-feeding part provided in the surface treatment apparatus;
Including
The guided portion is
A roller in rolling contact with the top surface of the guide part;
A brake mechanism for braking the roller;
The conveyance jig characterized by comprising.