JP3815687B1 - Clamp unit for substrate transfer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To transport a flexible substrate that is thin and easily bent and a glass substrate that is easily damaged by bending without being bent.
SOLUTION: At least four corners of a rectangular sheet-like substrate P are gripped by a plurality of clamp members 13 located in the same plane, and the clamp members 13 are arranged in a direction away from the center of the substrate P. While pulling evenly in the plane, the clamp members 13 are moved integrally to transport the substrate P. Accidents that the substrate is deformed or damaged due to its own weight or vibration during transportation can be prevented, especially when processing while transporting the substrate in the etching process etc. Even if the pressure of the processing liquid sprayed is received, the substrate is not bent or waved, and the substrate can be effectively prevented from being damaged or deformed during processing.
[Selection] Figure 3

Description

  The present invention relates to a clamp unit for transporting a substrate, which is attached to a carrier of a substrate transport apparatus that transports a flexible substrate such as a flexible substrate or a glass substrate used in an electronic device so as not to bend the substrate during transport. About.

2. Description of the Related Art Conventionally, as a substrate transfer device used for transferring a substrate in a process of etching a wiring pattern on a substrate, a substrate transfer device mounted on a transfer roller (see Patent Document 1), a substrate side A device that grips and conveys an end (see Patent Document 2) is used.
JP 2003-193271 A JP 2002-37431 A

As described in Patent Document 1 described above, the substrate that is transported while being supported by the transport roller is in contact with the portion of the substrate where the wiring pattern is formed. The supporting roller tends to be an obstacle, and the contact between the substrate surface and the processing liquid tends to be non-uniform, and the portion where the wiring pattern is formed may be damaged by the roller.
In particular, thin and flexible flexible substrates and the like are bent and waved by their own weight between the rollers, so that they are easily damaged and deformed, and are difficult to convey by the rollers.

  On the other hand, as described in Patent Document 2, in the case where the side edge of the substrate is gripped and conveyed, there is no roller or the like in the portion where the wiring pattern is formed, so that the processing liquid is evenly distributed on the surface of the substrate. However, thin and flexible glass substrates and flexible substrates tend to bend due to their own weight or vibration during transport, especially when processing while transporting the substrate in an etching process or the like, In addition to the bending of the substrate due to its own weight, the pressure of the processing liquid sprayed from the nozzle toward the substrate surface may cause the substrate to be greatly bent or undulated, causing damage or deformation.

  Therefore, the present invention solves the problems of the prior art described above, and can clamp a thin flexible substrate that can be bent and a glass substrate that is easily damaged by bending without being bent. The purpose is to provide.

  A clamp unit for transporting a substrate according to the first aspect of the present invention provided for the above purpose includes a fixed frame attached to a carrier of a substrate transport apparatus, and a retracted position and a gripping position with respect to the fixed frame. Clamp member holders that are slidable between each other, and gripping portions that are attached to the clamp member holders and that face each other with a gap into which a substrate can be inserted without external force acting are formed at each front end portion A clamp member provided with a chevron-shaped projecting portion projecting to the opposite side of the fixed piece side, which is composed of a rear slope and a front slope, on the middle part of the movable piece, and a fixed frame. On the other hand, between the retracted position and the forward restricting position, the slider provided slidably in the same direction as the clamp member holder, and the movable piece of the clamp member on the surface opposite to the fixed piece side. And an actuating member provided on the slider so as to abut.

  In the substrate transport clamp unit, when the slider is moved forward from the retreat restriction position, the operating member initially pushes the rear slope of the mountain-shaped protrusion of the movable piece from the rear, and the pair of gripping portions are opened. When the clamp member holding body is advanced from the retracted position together with the remaining clamp member, the clamp member holding body is advanced to the gripping position and stopped, and then the slider is further advanced, the operating member moves to the rear slope of the mountain-shaped protrusion of the movable piece. Is pushed and pressed, the movable piece is elastically deformed to close the pair of gripping portions, and the slider is further advanced so that the operating member moves over the top of the mountain-shaped protrusion and moves to the front slope side near the top. The slider is prevented from moving forward at the forward movement restricting position, and the clamping member is kept closed by the reaction force from the operating member generated by the elastic restoring force of the movable piece. To generate a biasing force of the backward direction with respect to the fixed frame.

  According to a second aspect of the present invention, in the substrate transport clamp unit according to the first aspect, the slider further includes a follower guided by a guide member arranged at a fixed position along the moving direction of the transport carrier. The slider is driven forward and backward through the follower by the movement of the carrier.

  According to the clamp unit for transporting a substrate according to the first aspect of the present invention, a flexible substrate that can hold the substrate during transport and simultaneously apply tension to prevent the substrate being transported from being bent and is easily deformed. In addition, when a glass substrate that is easily damaged by bending is transported, it is possible to prevent an accident that the substrate is deformed or damaged due to its own weight or vibration during transportation.

  In particular, when processing while transporting the substrate in an etching process or the like, the substrate does not bend or wave even when subjected to the pressure of the processing liquid sprayed from the nozzle toward the substrate surface. In addition, it is possible to effectively prevent the substrate from being damaged or deformed during processing.

  Furthermore, according to the clamp unit for transporting a substrate of the present invention, a series of operations for applying tension after gripping the substrate is performed purely mechanically, and no electrical sensor or control circuit is used. A reliable operation can be performed even in a corrosive atmosphere such as in an etchant.

  According to the clamp unit for transporting a substrate according to the second aspect of the present invention, the slider can be moved by moving the transport carrier, so that the gripping portion of the clamp member can be advanced and retracted and opened and closed. There is no need to provide a separate drive source, simplifying the structure of the entire substrate transfer apparatus and reducing the manufacturing cost.

  FIG. 1 is a schematic side view of a substrate transport apparatus having a substrate transport clamp unit as one embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA of FIG. As shown in FIG. 1, the substrate transport apparatus 1 has a structure in which a large number of endlessly connected carriers 2 are guided by guide rails 3 and circulate endlessly in a vertical plane.

  The substrate transfer device 1 is used in a flexible substrate etching process widely used as a circuit board of an electronic device, and each carrier 2 is illustrated from the previous process at a loading position EN shown in FIG. The substrate P that has been transported by the transport device that has not been received is received, and the substrate P is moved into the processing liquid in the dip development processing tank T1.

  In the dip development processing tank T1, nozzle units N1 are installed above and below the passage position of the substrate P, and a jet of processing liquid blown from nozzles (not shown) provided in these nozzle units N1 is applied to the substrate P. Then, development processing of the surface of the substrate P is performed.

  After performing the development processing, the substrate P is held by the carrier 2 and passes through the upper portions of the first water washing tank T2 and the second water washing tank T3, where the nozzle unit is installed above and below the passage position of the substrate P. Cleaning water adhering to the surface of the substrate P is cleaned by spraying cleaning water on the substrate P held by the carrier 2 from a cleaning nozzle (not shown) provided in N2 and N3.

  Thus, the substrate P whose surface has been cleaned is then held by the carrier 2 and moved downward, and passes through the pre-etching processing apparatus T4 during this time. Although not described in detail here, the pre-etching apparatus T4 has pre-etching nozzles that reciprocate in the width direction of the substrate P on both sides of the transport path of the substrate P so as to face the front and back surfaces of the passing substrate P. These pre-etching nozzles perform a pre-etching process by spraying a processing liquid onto both the front and back surfaces of the substrate P that moves downward while reciprocating.

  At this time, the treatment liquid falling from the surface of the substrate P is received and collected by a collection tank T5 installed below the pre-etching apparatus T4. Thus, the substrate P that has been processed in the pre-etching process enters the dip etching processing tank T6 as the carrier 2 moves, and is provided in the nozzle unit N4 while moving in the etching processing solution. Etching of the surface of the substrate P is performed by applying a jet of processing liquid blown from a nozzle (not shown) to the substrate P from above and below.

  The substrate P that has been subjected to the etching process sequentially passes above the third water rinsing tank T7 and the fourth water rinsing tank T8, and when passing above these tanks, the passage position of the substrate P held by the carrier 2 is measured. Cleaning water that is attached to the surface of the substrate P is cleaned by spraying cleaning water onto the substrate P held by the carrier 2 from cleaning nozzles (not shown) of the nozzle units N5 and N6 that are installed above and below. Thus, the substrate P whose surface has been cleaned is held by the carrier 2 and transported to the unloading position EX. Here, the substrate P is transferred from the carrier 2 to a transport device (not shown), and is transported to the next process by the transport device. The

Next, the detailed structure of the substrate transfer apparatus 1 will be described.
As shown in FIGS. 2 and 3, the carrier 2 is disposed so as to be opposed to both the left and right sides of the substrate transport path C that transports the substrate P, and a guide roller 4 is interposed between each of the pair of parallel guide rails 3. It is supported so that it can run freely.

  In the present embodiment, a guide surface G having a mountain cross section for guiding the guide roller 4 is formed at the upper and lower ends of each guide rail 3. On the other hand, as shown in FIG. 2, the guide roller 4 is composed of a pair of ball bearings 4A and 4B rotatably attached to a shaft projecting from the side surface of the carrier 2, and these ball bearings 4A. The peripheral surfaces of the 4B outer rings facing each other are chamfered at an inclination suitable for the guide surface G, and the guide surface G of the guide rail 3 is formed from both sides by a pair of these ball bearings 4A and 4B. By sandwiching, the carrier 2 can travel along the guide rail 3 smoothly and with less backlash.

  A pair of guide rollers 4 composed of a set of these ball bearings 4A and 4B are provided at two locations on the front and rear sides of one carrier 2 so as to face each other vertically with the guide rail 3 interposed therebetween. In the present embodiment, the guide roller 4 is configured by combining a pair of ball bearings 4A and 4B in order to reduce running resistance with respect to the guide rail 3 and improve followability. You may comprise as a single component which formed the outer peripheral surface in the outline suitable for G.

  As shown in FIG. 1, each carrier 2 has drive teeth formed on the outer periphery of a drive wheel 6 driven by a motor 5 when passing near the position EN where the substrate P is loaded into the substrate transport apparatus 1. An engaging portion (not shown) provided on the carrier 2 is engaged with 6A so as to be given a propulsive force.

  There are a pair of left and right drive wheels 6, and each drive tooth 6 </ b> A of each drive wheel 6 is always meshed with at least two adjacent front and rear of the carrier 2 connected endlessly. A state is maintained in which the carriers 2 on both the left and right sides are always facing each other.

  Also, as shown in FIGS. 2 and 3, each carrier 2 facing both sides of the substrate transport path C is a substrate transport clamp unit for gripping a rectangular substrate P at two locations before and after the traveling direction. 7 (hereinafter referred to as “clamp unit”), and the substrate P is conveyed by being gripped from both sides by four clamp units 7 at its four corners.

  As shown in FIG. 4, the clamp unit 7 has an L-shaped fixing frame 8, and the vertical portion 8 </ b> A thereof is a locking portion 2 </ b> A formed on the carrier 2 side and a fastening member (not shown). A fixing frame 8 is fixed to the carrier 2 by being sandwiched and held between the mounting plate 2B and the mounting plate 2B.

  The horizontal portion 8B of the fixed frame 8 is formed in a rectangular shape with a flat cross section as shown in FIGS. 5 and 6, and a long hole H1 is formed in a part thereof. A clamp member holder 9 is disposed on the lower surface of the horizontal portion 8B of the fixed frame 8. The clamp member holding body 9 is formed in a rectangular shape having a flat cross section having the same width as the horizontal portion 8B, and has a through-hole H2 penetrating vertically.

  A coupling bolt 11 having a rotatable stopper contact roller 10 mounted on the upper end portion is inserted into the through hole H2 from above via a hollow sleeve 12, and is disposed on the lower surface of the clamp member holding body 9. The clamp member holding body 9 and the clamp member 13 are sandwiched between the opposing end surfaces of the sleeve 14 and the nut 14 threaded through the through hole H3 formed in the member 13 and screwed into the lower end portion of the connecting bolt 11. The clamp member holding body 9 and the clamp member 13 are integrally fixed by tightening the nut 14.

The clamp member 13 is composed of a fixed piece 13A and a movable piece 13B. In this embodiment, the fixed piece 13A and the movable piece 13B are continuously integrated with each other with a curved portion 13C having a U-shaped rear end. It has become. The through hole H3 is be formed on the fixed piece 13 A side, this portion is integrally fixed and the clamp holder 9, as described above.

  In addition, a pair of gripping portions 13D and 13E are formed at the front end portions of the fixed piece 13A and the movable piece 13B so as to face each other with a gap into which the substrate P can be inserted in a state where no external force acts on the clamp member 13. Yes.

  Furthermore, a mountain-shaped projecting portion composed of a rear slope S1 and a front slope S2 is provided in the middle part of the movable piece and projects to the opposite side to the fixed piece 13A side. These slopes S1 and S2 are brought into contact with a working roller 15 as a working member described later and roll, whereby the movable piece 13B is elastically bent and the gripping portions 13D and 13E are opened and closed.

  As shown in FIGS. 4 and 6, the actuating roller 15 has a pair of left and right side plates 16A of a slider 16 slidably held on the horizontal portion 8B of the fixed frame 8 with roller shafts 15A protruding from both left and right ends thereof, respectively. It is inserted into the formed bearing hole H4 and is held rotatably. Further, these side plates 16A are fixed to the left and right end surfaces of the connecting block 16B with fastening members (not shown) and assembled together.

  Further, shallow guide grooves 16C having a width substantially equal to the dimension obtained by adding the thicknesses of the horizontal portion 8B of the fixed frame 8 and the clamp holder 9 are formed above the mutually opposing inner side surfaces of the side plates 16. The horizontal portion 8B and the clamp holding body 9 are held between the pair of guide grooves 16C so as to overlap each other, and the clamp holding body 9 and the slider are arranged along the longitudinal direction of the horizontal portion 8 of the fixed frame 8. 16 can slide individually.

  A screw hole H5 is formed through the connecting block 16B in the vertical direction, and a screw portion 17A of the roller follower shaft 17 is screwed and fixed thereto. A roller follower 18 is rotatably attached to the lower end portion of the roller follower shaft 17.

  Further, no screw is formed on the shaft portion 17B protruding upward from the connecting block 16B of the roller follower shaft 17, and the shaft portion 17B is formed on the slope S1 from the position near the rear end of the movable piece 13B of the clamp member 13. It penetrates through the long hole H6 formed through between the positions.

  As shown in FIG. 6, a ball plunger 19 is attached above the roller shaft 15A of one side plate 16A of the slider 16 and at a position facing the horizontal portion 8B of the fixed frame 8 in the guide groove 16C portion. .

  The ball plunger 19 is fixed with a lock nut 19B by screwing a male screw portion formed on the outer peripheral surface of the plunger housing 19A into a screw hole H7 formed through the side plate 16A. The compressed coil spring 19C presses the ball 19D against the side surface of the horizontal portion 8B of the fixed frame 8.

  Next, the operation of the clamp unit 7 configured as described above will be described with reference to the drawings. The clamp unit 7 attached to the carrier 2 on the opposite side across the conveyance path C has the same structure and operation as the one shown in FIG. To do.

  The clamp unit 7 attached to each carrier 2 does not hold the substrate P while moving from the carry-out position EX shown in FIG. 1 to the carry-in position EN, and holds the clamp member as shown in FIG. The rear end surface 9A of the body 9 is in a retracted position in contact with the front end surface of the locking portion 2A on the carrier 2 side, and the clamp member 13 attached to the clamp member holding body 9 is also retracted as shown in FIG. In position.

  Next, in FIG. 1, when the carrier 2 moves forward and reaches the carry-in position EN of the substrate P, the roller follower 18 is a guide member provided at a fixed position along the transport path C as shown in FIG. Of the cam plate 20. The cam plate 20 abuts on and guides the roller follower 18, and the cam surface is inclined toward the conveyance path C toward the traveling direction of the carrier 2, and as a result, as the carrier 2 travels, the cam plate 20 While pushing the roller follower 18, the roller follower 18 is pushed toward the conveyance path C and moved forward.

  Then, the slider 16 to which the roller follower 18 is attached slides forward from the retracted position along the horizontal portion 8B of the fixed frame 8, but at this time, the operating roller 15 is formed on the movable piece 13B of the clamp member 13. Since the inclined surface S1 is pushed, the clamp member 13 advances together with the clamp member holding body 9 while the pair of opposing gripping portions 13D and 13E are opened by the elasticity, and is not shown in the drawing. Both side edges in the width direction of the unprocessed substrate P that has been transported to the transport position EN (see FIG. 1) by the transport device and are waiting enter between the gripping portions 13D and 13E.

  Thus, when the clamp member holding body 9 moves forward together with the clamp member 13 to the gripping position, the stopper contact roller 10 attached to the clamp member holding body 9 side comes into contact with the stopper 21 at a fixed position near the loading position EN and stops. In the present embodiment, the position of the stopper 21 that determines the gripping position can be changed to, for example, the position indicated by the phantom line in FIG. 7 according to the width of the substrate P to be handled.

  Thus, even after the movement of the clamp member holder 9 and the clamp member 13 is stopped by the stopper 21, the cam plate 20 continues to push the roller follower 18. As a result, as shown in FIG. 8, the operating roller 15 rides on the rear slope S1 of the movable piece 13B and presses it upward, so that the movable piece 13B of the clamp member 13 is elastically deformed upward, The gripping part 13E grips the substrate P with the gripping part 13D at the tip on the fixed piece 13A side.

  Further, as shown in FIG. 9, when the operating roller 15 moves from the rear inclined surface S <b> 1 to the front inclined surface S <b> 2, the roller follower 18 is detached from the cam plate 20, but is elastically deformed by the operating roller 15. Since the clamp member 13 tries to displace the front slope S2 downward by the elastic restoring force, a force toward the front end side of the clamp member 13 acts on the operating roller 15 riding on the operating roller 15. At the same time, the slider 16 is also pulled forward.

  Then, as shown in FIG. 10, the ball 19D of the ball plunger 19 attached to one side plate 16A of the slider 16 is formed on the side surface of the horizontal portion 8B of the fixed frame 8 by the biasing force of the compression coil spring 19C. It falls into the shaped recess R, and further forward movement of the slider 16 is prevented.

  The position where the conical recess R is formed is a forward movement restricting position of the slider. When the position of the slider 16 and the operating roller 15 held by the slider 16 is fixed, the front slope of the clamp member 13 is fixed. S <b> 2 receives a reaction force in the backward direction from the operating roller 15.

  At this time, since the substrate P is gripped between the gripping portions 13D and 13E at the tip of the clamp member 13, the substrate P is pulled with a tension F equal to the reaction force in the width direction. Note that a plurality of conical recesses R that determine the forward restricting position of the slider 16 are provided on the side surface of the horizontal portion 8B of the fixed frame 8 in accordance with the change in the position of the stopper 21.

  Thus, while the carrier 2 moves from the carry-in position EN to the carry-out position EX of the substrate P shown in FIG. 1, the clamp unit 13 maintains the state shown in FIGS. 9 and 10, and the substrate P is pulled during this time. It is conveyed in the state.

  When the substrate P is thus transported to the unloading position EX, the cam surface of a cam plate (not shown) provided at a fixed position on the near side of the unloading position EX abuts on the roller follower 18 and moves it in the backward direction. Force move.

  At this time, as shown in FIG. 10, the ball 19D that has fallen into the conical recess R is released from the conical recess R against the urging force of the compression coil spring 19C, and together with the slider 16, the operating roller 15 is clamped. While the movable piece 13B of the member 13 is bent upward, the movable member 13B moves from the front slope S2 side to the rear slope S1 side, the clamp member 13 returns to the state of FIG. 7, the pair of gripping portions 13D and 13E open, and the substrate P is opened. To do.

  Thereafter, the cam plate further retracts the roller follower 18 to the position shown in FIG. 4. At this time, the rear end edge of the long hole H6 formed in the movable piece 13B of the clamp member 13 corresponds to the roller follower shaft 17. Abutting on the shaft portion 17B, the clamp member holding body 9 together with the clamp member 13 is also pulled back to the retracted position.

  In the above-described embodiment, the clamp member 13 is manufactured as a single component, but the fixed piece 9A and the movable piece 9B may be attached to the clamp member holding body 9 as separate members. Moreover, the mountain-shaped protrusion part which consists of the back slope S1 and the front slope S2 currently formed in the movable piece 9B is good also as a structure comprised by another member like a resin block, for example, and fixing it to a movable piece.

  Furthermore, although the follower operated by the cam plate 20 is the rotatable roller follower 18 in this embodiment, it may be replaced with a cam follower that is in sliding contact with the cam plate 20. Similarly, the actuating roller 15 and the stopper abutting roller 10 may be composed of non-rotating members.

  Further, as a guide member for operating the follower, a rail may be used instead of using a cam plate, and a slider is mounted by a pusher attached to an air cylinder device or the like installed in the vicinity of the board loading position or unloading position. May be driven forward and backward.

  Further, in the above-described embodiment, the position of the stopper 21 that defines the advance limit of the clamp member 13 is changed so that it can cope with the substrates P of various widths. By making it possible to change the mounting interval of the unit 7, it is possible to cope with various substrates having different lengths in the transport direction.

  Further, in the above-described embodiment, the substrate is pulled and transported in a direction orthogonal to the transport direction in a state where the four corners of the rectangular sheet-shaped substrate are held by the clamp member. 11 can be held in a state in which it does not bend during transportation. For example, in the embodiment shown in FIG. 11, the four clamp members 13 grip the vicinity of the four corners of the substrate P, and each clamp member 13 transports the substrate P. It is conveyed while pulling by applying tension F in the direction.

  In the embodiment shown in FIG. 12, the four corners of the substrate P are gripped by the four clamp members 13, and each clamp member 13 conveys the substrate P while pulling it by applying a tension F in the diagonal direction of the substrate P. .

  Furthermore, in the embodiment shown in FIG. 13, the substrate P is held by the clamp members 13 disposed at the four corners of the substrate P and the clamp members 13 ′ disposed at the intermediate positions on both side edges of the substrate P. By 13 and 13 ', the tension F is applied in the direction orthogonal to the transport direction of the substrate P and transported while pulling.

  The clamp unit for transporting a substrate according to the present invention is widely used as a component constituting a substrate transport device for transporting a substrate such as a thin flexible substrate that is easily bent and a glass substrate that is easily damaged by bending deformation in the field of substrate processing and the like. It can be done.

It is a schematic side view of the board | substrate conveyance apparatus which shows one Embodiment of the clamp unit for board | substrate conveyance of this invention. It is a cross-sectional view of the AA line position in FIG. FIG. 2 is a partial plan view of the substrate transfer apparatus shown in FIG. 1. It is a longitudinal cross-sectional view which shows the state which the clamp member of the clamp unit for board | substrate conveyance concerning this invention exists in a retracted position. It is a cross-sectional view which shows the XX cross section of FIG. It is a cross-sectional view which shows the YY cross section of FIG. It is a longitudinal cross-sectional view which shows the state which the clamp member of the clamp unit for board | substrate conveyance concerning this invention advanced to the holding position. It is a longitudinal cross-sectional view which shows the state which the clamp member of the clamp unit for board | substrate conveyance based on this invention hold | gripped the board | substrate in the holding position. It is a longitudinal cross-sectional view which shows the state which the slider of the clamp unit for board | substrate conveyance which concerns on this invention moves to the advance control position, and the clamp member is holding | gripping and pulling a board | substrate. FIG. 10 is a transverse sectional view showing a ZZ section in FIG. 9. It is a figure which shows other embodiment of this invention. It is a figure which shows other embodiment of this invention. It is a figure which shows other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate conveyance apparatus 2 Carrier 2A Locking part 2B Mounting plate 3 Guide rail 4 Guide roller 4A, 4B Ball bearing 5 Motor 6 Drive wheel 6A Drive tooth 7 Clamp unit 8 Fixing frame 8A Vertical part 8B Horizontal part 9 Clamp member holder 9A Rear end face 10 Stopper contact roller 11 Connection bolt 12 Sleeve 13, 13 'Clamp member 13A Fixed piece 13B Movable piece 13C Bending part 13D, 13E Gripping part 14 Nut 15 Actuating roller (operating member)
15A Roller shaft 16 Slider 16A Side plate 16B Connection block 16C Guide groove 17 Roller follower shaft 17A Screw portion 17B Shaft portion 18 Roller follower (follower)
19 ball plunger 19A plunger housing 19B lock nut 19C compression coil spring 19D ball 20 cam plate 21 stopper
H1 slot
H2 through hole
H3 through hole
H4 bearing hole
H5 screw hole
H6 long hole
H7 Screw hole S1, S2 Slope R Conical recess P Substrate
C Transport path

Claims (2)

A fixed frame attached to the carrier of the substrate transfer device;
A clamp member holder provided slidably between a retracted position and a gripping position with respect to the fixed frame;
A gripping part attached to the clamp member holding body and facing each other with a gap into which a substrate can be inserted in a state where no external force is applied is composed of a movable piece and a fixed piece formed at each front end, and the movable piece A clamp member provided with a mountain-shaped projecting portion projecting to the opposite side of the fixed piece side, comprising a rear slope and a front slope,
A slider that is slidable in the same direction as the clamp member holder between the retracted position and the forward restricting position with respect to the fixed frame;
An operating member provided on the slider so as to come into contact with the surface of the movable piece of the clamp member opposite to the fixed piece side;
When the slider is moved forward from the retreat restricting position, initially, the operating member pushes the rear slope of the mountain-shaped protrusion of the movable piece from the rear, and holds the clamp member together with the clamp member with the pair of gripping portions open. The body moves forward from the retracted position,
After the clamp member holding body has advanced to the gripping position and stopped, when the slider is further advanced, the operating member rides on the rear slope of the chevron protruding portion of the movable piece, presses it, and elastically deforms the movable piece to form a pair. Close the grip
Further, when the slider is moved forward and the operating member moves over the top of the mountain-shaped protrusion and moves to the front slope side near the top, the slider is controlled to move forward at the forward control position and is generated by the elastic restoring force of the movable piece. A substrate transporting clamp unit characterized in that an urging force in a backward direction is generated with respect to the fixed frame while the pair of gripping portions are closed on the clamp member by a reaction force from the substrate.   The slider has a follower guided by a guide member arranged at a fixed position along the moving direction of the transport carrier, and the slider is driven forward and backward through the follower by the movement of the transport carrier. The clamp unit for board | substrate conveyance of Claim 1.

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