JP2015003813A - Transport jig - Google Patents

Transport jig Download PDF

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JP2015003813A
JP2015003813A JP2013131007A JP2013131007A JP2015003813A JP 2015003813 A JP2015003813 A JP 2015003813A JP 2013131007 A JP2013131007 A JP 2013131007A JP 2013131007 A JP2013131007 A JP 2013131007A JP 2015003813 A JP2015003813 A JP 2015003813A
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moving member
frame body
gripping
frame
moving
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剛 野本
Go Nomoto
剛 野本
龍太 中島
Ryuta Nakajima
龍太 中島
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a transport jig capable of suppressing the bending of a matter to be transported.SOLUTION: Provided is a transport jig 1 used for transporting a substrate S. The transport jig 1 comprises: a rectangular frame body 2; first and second moving members 3, 4 disposed along the outer periphery of the frame body 2 so as to face each other sandwiching the frame body 2, and are configured to move forward and backward to the frame body 2; a first elastic member 7 disposed between the frame body 2 and the first moving member 3, and urging the first moving member 3 in a direction separated from the frame body 2; a second elastic member 8 disposed between the frame body 2 and the second moving member 4, and urging the second moving member 4 in a direction separated from the frame body 2; a first grip part 5 disposed on the first moving member 3 for gripping the substrate S; and a second grip part 6 disposed on the second moving member 4 for gripping the substrate S in a manner to face the first grip part 5.

Description

本発明は、板状の被搬送物を搬送するための搬送治具に関する。   The present invention relates to a conveying jig for conveying a plate-shaped object to be conveyed.

従来、ガラス基板やプラスチック基板などの搬送に関する技術文献として、例えば特開2011−73875号公報が知られている。この公報には、被搬送物である基板をトレーに戴せ、このトレーをチャックにより把持した状態でロボットアームを用いて搬送することが示されている。   Conventionally, for example, Japanese Patent Application Laid-Open No. 2011-73875 is known as a technical document related to conveyance of a glass substrate, a plastic substrate, or the like. In this publication, it is shown that a substrate, which is an object to be transported, is placed on a tray and transported using a robot arm while the tray is held by a chuck.

特開2011−73875号公報JP 2011-73875 A

ところで、下層に成膜材料が配置された真空チャンバー内で基板の表面に成膜を行う場合などには、基板の表面を下に露出した状態で搬送する必要がある。このような場合、単純に基板の端部をチャックで把持する搬送方法では、自重によって基板に撓みが生じ、チャックにより把持された部位に曲げ応力が集中して破損が生じるおそれがあった。   By the way, when a film is formed on the surface of the substrate in a vacuum chamber in which a film forming material is disposed in the lower layer, it is necessary to transport the substrate with the surface exposed below. In such a case, in the transport method in which the end portion of the substrate is simply gripped by the chuck, the substrate is bent by its own weight, and there is a possibility that bending stress concentrates on the portion gripped by the chuck and breaks.

そこで、本発明は、被搬送物の撓みを抑制することができる搬送治具を提供することを目的とする。   Then, an object of this invention is to provide the conveyance jig which can suppress the bending of a to-be-conveyed object.

上記課題を解決するため、本発明は、板状の被搬送物の搬送に用いられる搬送治具であって、平面形状の枠体と、枠体の外周に沿って設けられ、枠体を挟んで対向するように配置されると共に、枠体に対して進退可能に構成された第1の移動部材及び第2の移動部材と、枠体と第1の移動部材の間に設けられ、枠体から離れる方向に第1の移動部材を付勢する第1の弾性部材と、枠体と第2の移動部材の間に設けられ、枠体から離れる方向に第2の移動部材を付勢する第2の弾性部材と、第1の移動部材に設けられ、被搬送物を把持する第1の把持部と、第2の移動部材に設けられ、第1の把持部と対向するように被搬送物を把持する第2の把持部と、を備えることを特徴とする。   In order to solve the above problems, the present invention is a transport jig used for transporting a plate-shaped object to be transported, which is provided along a planar frame body and an outer periphery of the frame body, and sandwiches the frame body The first moving member and the second moving member which are arranged so as to face each other and are configured to be able to advance and retreat with respect to the frame, and the frame is provided between the frame and the first moving member. A first elastic member that biases the first moving member in a direction away from the first moving member, and a second elastic member that is provided between the frame and the second moving member and biases the second moving member in a direction away from the frame. 2 elastic members, a first gripping part provided on the first moving member and gripping the transported object, and a transported object provided on the second moving member and facing the first gripping part. And a second grip part for gripping the head.

本発明に係る搬送治具によれば、対向して配置された第1及び第2の移動部材がそれぞれ枠体から離れる方向に付勢されることにより、板状の被搬送物は第1及び第2の把持部により両側に引っ張られた状態で把持され、板状の被搬送物に撓みが生じることを抑制することができる。また、この搬送治具によれば、両側に引っ張るように被搬送物を把持することで、各把持部に把持された部位に曲げ応力が集中することを低減でき、応力集中による破損の発生も抑えることができる。しかも、この搬送治具によれば、ベースとなる枠体を備えているので、枠体を支持又は保持することにより被搬送物を容易に取り扱うことができる。これにより、搬送治具に被搬送物を取り付けたまま、各種の処理装置(例えば複数の成膜装置)間を移動して工程を進めることができ、装置ごとに搬送治具を交換して被搬送物の取り付け及び取り外しを行う場合と比べて、処理時間を大幅に短縮することができる。   According to the conveying jig according to the present invention, the first and second moving members arranged opposite to each other are urged in the direction away from the frame body, so that the plate-shaped object to be conveyed is the first and second objects. It can be held in a state where it is pulled to both sides by the second gripping portion, and it is possible to prevent the plate-like transported object from being bent. Further, according to this transport jig, by gripping the object to be transported so as to be pulled to both sides, it is possible to reduce the concentration of bending stress on the part gripped by each gripping part, and the occurrence of breakage due to the stress concentration is also possible. Can be suppressed. In addition, according to the transport jig, since the base frame is provided, the object to be transported can be easily handled by supporting or holding the frame. Thus, the process can be advanced by moving between various processing apparatuses (for example, a plurality of film forming apparatuses) with the object to be transported attached to the transport jig. The processing time can be greatly shortened as compared with the case of attaching and removing the conveyed product.

また、本発明に係る搬送治具において、第1の把持部は、第1の移動部材に沿って複数設けられており、第2の把持部は、第2の移動部材に沿って複数設けられていてもよい。
この搬送治具によれば、各移動部材に複数の把持部が設けられているので、一つの移動部材に一つの把持部のみが設けられている場合と比べて、構成を簡素化することができる。しかも、この構成によれば、把持部の数に対して移動部材の数を少なくすることができる上、移動部材の数と共に弾性部材の数も減らすことが可能なため、搬送治具の低コスト化に非常に有利である。
In the conveying jig according to the present invention, a plurality of first gripping portions are provided along the first moving member, and a plurality of second gripping portions are provided along the second moving member. It may be.
According to this conveying jig, since each moving member is provided with a plurality of gripping portions, the configuration can be simplified compared to a case where only one gripping portion is provided on one moving member. it can. In addition, according to this configuration, the number of moving members can be reduced with respect to the number of gripping portions, and the number of elastic members can be reduced together with the number of moving members. It is very advantageous for conversion.

また、本発明に係る搬送治具において、枠体の外周には、第1の移動部材を進退方向に案内する第1のガイド部材と、第2の移動部材を進退方向に案内する第2のガイド部材と、が設けられており、第1のガイド部材及び第2のガイド部材には、それぞれ第1の移動部材又は第2の移動部材の脱落を防止する抜け止め部が形成されていてもよい。
この搬送治具によれば、ガイド部材により各移動部材の進退方向の移動を高い精度で案内させることができるので、第1の把持部と第2の把持部における被搬送物の引っ張り方向を精度良く一致させることができ、より安定性の高い被搬送物の保持を実現することができる。しかも、この搬送治具によれば、ガイド部材に抜け止め部が形成されているので、搬送治具の扱い中に移動部材がガイド部材から脱落することが防止でき、搬送治具を一層取り扱いやすくすることができる。
In the conveying jig according to the present invention, a first guide member for guiding the first moving member in the advancing / retreating direction and a second guide for guiding the second moving member in the advancing / retreating direction are provided on the outer periphery of the frame body. A guide member, and the first guide member and the second guide member each have a retaining portion for preventing the first moving member or the second moving member from falling off. Good.
According to this conveyance jig, since the movement of each moving member in the advancing / retreating direction can be guided with high accuracy by the guide member, the pulling direction of the object to be conveyed in the first gripping portion and the second gripping portion can be accurately determined. It is possible to achieve a good match, and it is possible to realize a more stable holding of the conveyed object. Moreover, according to this transport jig, since the guide member is formed with a retaining portion, it is possible to prevent the moving member from falling off the guide member during handling of the transport jig, and it is easier to handle the transport jig. can do.

本発明に係る搬送治具によれば、被搬送物の撓みを抑制することができる。   According to the conveyance jig which concerns on this invention, the bending of a to-be-conveyed object can be suppressed.

本実施形態に係る搬送治具を示す平面図である。It is a top view which shows the conveyance jig which concerns on this embodiment. 本実施形態に係る搬送治具を示す側面図である。It is a side view which shows the conveyance jig which concerns on this embodiment. 第1の移動部材を示す拡大平面図である。It is an enlarged plan view which shows a 1st moving member. 第1の移動部材を示す斜視図である。It is a perspective view which shows a 1st moving member. 開放状態の第1の把持部を説明するための斜視図である。It is a perspective view for demonstrating the 1st holding part of an open state. 退避位置の第1の移動部材を示す拡大平面図である。It is an enlarged plan view which shows the 1st moving member of a retracted position.

以下、本発明の好適な実施形態について、図面を参照して詳細に説明する。   DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

図1及び図2に示す搬送治具1は、被搬送物である基板Sの搬送に用いられる治具である。搬送治具1は、例えば基板Sの下面に膜を形成する成膜処理において利用される。基板Sとしては、例えばガラス基板やプラスチック基板が挙げられる。特に、撓みが生じやすい薄厚の基板に対して搬送治具1は有用である。   A transport jig 1 shown in FIGS. 1 and 2 is a jig used to transport a substrate S that is a transported object. The transport jig 1 is used in a film forming process for forming a film on the lower surface of the substrate S, for example. Examples of the substrate S include a glass substrate and a plastic substrate. In particular, the conveyance jig 1 is useful for a thin substrate that is easily bent.

搬送治具1は、長方形状の枠体2と、枠体2を挟むように配置された第1の移動部材3及び第2の移動部材4と、移動部材3,4にそれぞれ設けられた第1の把持部5及び第2の把持部6と、第1の移動部材3と枠体2の間に設けられた第1の弾性部材7と、第2の移動部材4と枠体2の間に設けられた第2の弾性部材8と、を備えている。   The conveying jig 1 includes a rectangular frame 2, a first moving member 3 and a second moving member 4 arranged so as to sandwich the frame 2, and moving members 3 and 4, respectively. 1 gripping part 5 and second gripping part 6, a first elastic member 7 provided between the first moving member 3 and the frame body 2, and between the second moving member 4 and the frame body 2. And a second elastic member 8 provided at.

枠体2は、搬送治具1のベースとなる部材である。枠体2は、一対の短辺2a、2bと一対の長辺2c,2dを有する長方形状をなしている。枠体2は、基板Sを保持するために十分な剛性を備えていれば素材は限定されず、ステンレスやアルミなどの金属や樹脂の何れであってもよい。搬送治具1では、この枠体2が搬送ローラなどの搬送装置に支持された状態で搬送が行われる。短辺2a、2bの外側には、搬送装置側に支持又は係止するための凸部2e,2fが形成されている。   The frame body 2 is a member that serves as a base of the conveying jig 1. The frame 2 has a rectangular shape having a pair of short sides 2a and 2b and a pair of long sides 2c and 2d. The material of the frame 2 is not limited as long as the frame 2 has sufficient rigidity to hold the substrate S, and may be any metal such as stainless steel or aluminum, or resin. In the conveyance jig 1, conveyance is performed in a state where the frame body 2 is supported by a conveyance device such as a conveyance roller. On the outer side of the short sides 2a and 2b, convex portions 2e and 2f for supporting or locking on the conveying device side are formed.

枠体2の外側には、第1の移動部材3及び第2の移動部材4がそれぞれ配置されている。第1の移動部材3及び第2の移動部材4は、枠体2の外周に沿って延在する棒状の部材である。第1の移動部材3及び第2の移動部材4は、枠体2を挟んで対向するように設けられている。   A first moving member 3 and a second moving member 4 are respectively arranged outside the frame body 2. The first moving member 3 and the second moving member 4 are rod-shaped members that extend along the outer periphery of the frame body 2. The first moving member 3 and the second moving member 4 are provided so as to face each other with the frame body 2 interposed therebetween.

以下、第1の移動部材3及びその周囲の部材について詳細に説明する。図1に示されるように、第1の移動部材3は、枠体2の長辺2cに沿って延在するように配置されており、枠体2の長手方向(すなわち長辺2cの延在方向)に並んで二つ配置されている。これらの第1の移動部材3は、枠体2に対して進退可能(矢印Aの方向に往復可能)に構成されている。   Hereinafter, the first moving member 3 and the surrounding members will be described in detail. As shown in FIG. 1, the first moving member 3 is arranged so as to extend along the long side 2 c of the frame body 2, and the longitudinal direction of the frame body 2 (that is, the extension of the long side 2 c). Two are arranged side by side. These first moving members 3 are configured to be movable back and forth with respect to the frame body 2 (reciprocating in the direction of arrow A).

ここで、図3は、第1の移動部材3を示す拡大平面図であり、図4は、第1の移動部材3を示す斜視図である。図3及び図4に示されるように、第1の移動部材3は、枠体2の外周に設けられた第1のガイド部材10によって支持されている。第1のガイド部材10は、枠体2の長辺2cから枠体2の短手方向(長手方向に直交する方向、矢印Aの方向)に突出する棒状の部材である。   Here, FIG. 3 is an enlarged plan view showing the first moving member 3, and FIG. 4 is a perspective view showing the first moving member 3. As shown in FIGS. 3 and 4, the first moving member 3 is supported by a first guide member 10 provided on the outer periphery of the frame body 2. The first guide member 10 is a rod-shaped member that protrudes from the long side 2 c of the frame body 2 in the short direction of the frame body 2 (direction orthogonal to the longitudinal direction, direction of arrow A).

第1の移動部材3は、四本の第1のガイド部材10によって支持している。これらの第1のガイド部材10の先端側は、第1の移動部材3を貫いて外側へ突出しており、第1の移動部材3は第1のガイド部材10に沿って移動可能とされている。すなわち、第1の移動部材3は、枠体2に対して矢印Aの方向に進退可能に支持されている。第1のガイド部材10は、第1の移動部材3を支持すると共に、第1の移動部材3の移動を矢印Aの方向に案内している。   The first moving member 3 is supported by four first guide members 10. The distal end sides of these first guide members 10 protrude outward through the first moving member 3, and the first moving member 3 is movable along the first guide member 10. . That is, the first moving member 3 is supported so as to be able to advance and retreat in the direction of arrow A with respect to the frame 2. The first guide member 10 supports the first moving member 3 and guides the movement of the first moving member 3 in the direction of the arrow A.

また、第1のガイド部材10の先端には、抜け止め部10aが形成されている。抜け止め部10aは、第1の移動部材3に形成された貫通孔(第1のガイド部材10が通り抜ける貫通孔)より大きな径を有する部位である。この抜け止め部10aにより、第1の移動部材3が第1のガイド部材10の先端から脱落することが防止される。   Further, a retaining portion 10 a is formed at the tip of the first guide member 10. The retaining portion 10 a is a portion having a larger diameter than a through hole (a through hole through which the first guide member 10 passes) formed in the first moving member 3. The retaining portion 10 a prevents the first moving member 3 from dropping from the tip of the first guide member 10.

第1の移動部材3と枠体2の間には、第1の弾性部材7が設けられている。第1の弾性部材7は、第1の移動部材3を枠体2から離れる方向に付勢するための部材である。第1の弾性部材7としては、適切な弾性を有するものであれば特に限定されない。第1の弾性部材7としては、例えばコイルバネや板バネ、ゴムその他の弾性体を用いることができる。   A first elastic member 7 is provided between the first moving member 3 and the frame body 2. The first elastic member 7 is a member for urging the first moving member 3 in a direction away from the frame body 2. The first elastic member 7 is not particularly limited as long as it has appropriate elasticity. As the first elastic member 7, for example, a coil spring, a leaf spring, rubber, or other elastic body can be used.

第1の弾性部材7は、矢印A方向に延在しており、その一端は枠体2の長辺2cに固定されている。第1の弾性部材7の他端は、第1の伸び量規制部材12の可動部12Aに接続されている。第1の伸び量規制部材12は、第1の弾性部材7の伸び量を所定の範囲内に規制するための部材である。第1の伸び量規制部材12は、第1の弾性部材7に固定された可動部12Aと、枠体2の長辺2cに固定された固定部12Bと、を有している。   The first elastic member 7 extends in the direction of arrow A, and one end thereof is fixed to the long side 2 c of the frame 2. The other end of the first elastic member 7 is connected to the movable portion 12 </ b> A of the first elongation amount regulating member 12. The first elongation amount regulating member 12 is a member for regulating the elongation amount of the first elastic member 7 within a predetermined range. The first elongation amount regulating member 12 has a movable portion 12A fixed to the first elastic member 7 and a fixed portion 12B fixed to the long side 2c of the frame body 2.

可動部12Aは、第1の弾性部材7の他端を中心として左右両側(枠体2の長手方向における両側)に延びる板状の部材である。可動部12Aは、第1の弾性部材7の伸縮により移動する。可動部12Aの両端には、枠体2側に近づく段差部が形成されている。   The movable portion 12A is a plate-like member that extends to the left and right sides (both sides in the longitudinal direction of the frame body 2) with the other end of the first elastic member 7 as the center. The movable portion 12 </ b> A moves due to the expansion and contraction of the first elastic member 7. At both ends of the movable portion 12A, stepped portions approaching the frame body 2 side are formed.

固定部12Bは、可動部12Aを両側から挟むように門型に設けられた一対の板部材である。固定部12Bの基端側は、枠体2の長辺2cに固定されており、固定部12Bの先端側は、可動部12Aの外側に被さるように折り曲げられている。   The fixed portion 12B is a pair of plate members provided in a gate shape so as to sandwich the movable portion 12A from both sides. The proximal end side of the fixed portion 12B is fixed to the long side 2c of the frame body 2, and the distal end side of the fixed portion 12B is bent so as to cover the outside of the movable portion 12A.

第1の伸び量規制部材12では、第1の弾性部材7が伸びることで可動部12Aが外側(第1の移動部材3側)に移動すると、可動部12Aの両端の段差部が固定部12Bの先端に当たることで可動部12Aの移動が制限され、これにより第1の弾性部材7の伸び量が規制される。この搬送治具1では、第1の伸び量規制部材12により第1の弾性部材7の伸び量を所定の範囲に規制することで、基板Sの取り付け又は取り外しにおいて第1の移動部材3を枠体2から離して退避させたとしても、第1の弾性部材7が追従して伸びる必要がなくなる(図6参照)。このため、第1の弾性部材7を伸び量の少ない安価なものとすることができ、搬送治具の低コスト化に有利である。また、第1の弾性部材7の伸び量を小さくすることにより、第1の弾性部材7の長寿命化すなわちメンテナンスコストの低減も図られる。更に、バネ定数が高い部材を選んで強制力を高くすることが可能となる。   In the first elongation regulating member 12, when the movable portion 12A moves outward (first moving member 3 side) due to the extension of the first elastic member 7, the stepped portions at both ends of the movable portion 12A are fixed portions 12B. The movement of the movable portion 12A is restricted by hitting the tip of the first, and thereby the extension amount of the first elastic member 7 is regulated. In the transport jig 1, the first elastic member 7 is restricted to a predetermined range by the first elongation regulating member 12, so that the first moving member 3 can be attached to the frame when the substrate S is attached or detached. Even if the first elastic member 7 is retracted away from the body 2, it is not necessary for the first elastic member 7 to follow and extend (see FIG. 6). For this reason, the 1st elastic member 7 can be made into the cheap thing with little elongation amount, and it is advantageous to the cost reduction of a conveyance jig. Further, by reducing the amount of extension of the first elastic member 7, the life of the first elastic member 7 can be extended, that is, the maintenance cost can be reduced. Furthermore, it becomes possible to increase the forcing force by selecting a member having a high spring constant.

第1の伸び量規制部材12の可動部12Aの外側には、第1の弾性部材7の延長線上に位置する第1の当接部14が設けられている。この第1の当接部14が第1の移動部材3に対して突き当てられることで、第1の弾性部材7の弾性力(付勢力)が第1の移動部材3に伝達され、第1の移動部材3が枠体2から離れる方向に付勢される。第1の当接部14としては、例えば樹脂製のものを用いることができる。   A first abutting portion 14 located on the extension line of the first elastic member 7 is provided outside the movable portion 12 </ b> A of the first elongation amount regulating member 12. When the first contact portion 14 is abutted against the first moving member 3, the elastic force (biasing force) of the first elastic member 7 is transmitted to the first moving member 3, and the first The moving member 3 is biased in a direction away from the frame 2. As the 1st contact part 14, the thing made from resin can be used, for example.

また、第1の移動部材3には、基板Sを把持するための第1の把持部5が四つずつ設けられている。ここで、図5は開放状態の第1の把持部5を説明するための斜視図である。図4及び図5に示されるように、第1の把持部5は、第1の移動部材3上で開閉可能な可動部5aと、第1の移動部材3に対して固定された固定部5bと、を備えている。第1の把持部5は、可動部5aと固定部5bとの間で基板Sを挟み込むことにより基板Sを把持する。   The first moving member 3 is provided with four first grip portions 5 for gripping the substrate S. Here, FIG. 5 is a perspective view for explaining the first holding part 5 in the opened state. As shown in FIGS. 4 and 5, the first gripping part 5 includes a movable part 5 a that can be opened and closed on the first moving member 3, and a fixed part 5 b that is fixed to the first moving member 3. And. The first gripping part 5 grips the substrate S by sandwiching the substrate S between the movable part 5a and the fixed part 5b.

図6は、退避位置の第1の移動部材3を示す拡大平面図である。図6に示されるように、第1の把持部5を図5に示す開放状態とし、かつ、第1の移動部材3を枠体2から離れた退避位置に移動させることで、第1の把持部5などに干渉することなく基板Sの取り付けや取り外しを行うことができる。   FIG. 6 is an enlarged plan view showing the first moving member 3 in the retracted position. As shown in FIG. 6, the first gripping portion 5 is in the open state shown in FIG. 5 and the first moving member 3 is moved to the retracted position away from the frame body 2, thereby The substrate S can be attached or detached without interfering with the part 5 or the like.

図6に示す退避位置では、第1の移動部材3の外側面が第1のガイド部材10の抜け止め部10aに突き当たった状態となり、第1の移動部材3と第1の当接部14の間に隙間Nが形成される。このとき、第1の弾性部材7は、第1の伸び量規制部材12によって伸び量が規制された状態となる。なお、図6に示す退避位置は一例であり、枠体2から更に離れた位置まで退避してもよい。また、第1の移動部材3の移動や第1の把持部5の開閉については、手動で可能としてもよいが、専用の電動器具を用いる構成としてもよい。   In the retracted position shown in FIG. 6, the outer surface of the first moving member 3 comes into contact with the retaining portion 10 a of the first guide member 10, and the first moving member 3 and the first contact portion 14 are in contact with each other. A gap N is formed between them. At this time, the first elastic member 7 is in a state in which the elongation amount is regulated by the first elongation regulating member 12. Note that the retracted position shown in FIG. 6 is an example, and the retracted position may be further away from the frame 2. In addition, the movement of the first moving member 3 and the opening and closing of the first gripping portion 5 may be manually performed, or a dedicated electric appliance may be used.

次に、第2の移動部材4及びその周囲の部材について説明する。第2の移動部材4は、枠体2を中心として第1の移動部材3と略対称な構成を有している。同様に、第2の把持部6、第2の弾性部材8、第2のガイド部材11、第2の伸び量規制部材13、及び第2の当接部15は、それぞれ第1の把持部5、第1の弾性部材7、第1のガイド部材10、第1の伸び量規制部材12、及び第1の当接部14と略対称な構成を有している。   Next, the second moving member 4 and surrounding members will be described. The second moving member 4 has a configuration that is substantially symmetrical with the first moving member 3 with the frame body 2 as the center. Similarly, the second gripping portion 6, the second elastic member 8, the second guide member 11, the second elongation amount regulating member 13, and the second contact portion 15 are respectively connected to the first gripping portion 5. The first elastic member 7, the first guide member 10, the first extension amount regulating member 12, and the first contact portion 14 are substantially symmetrical.

図1に示されるように、第2の移動部材4は、枠体2の長辺2dに沿って延在するように配置されており、枠体2の長手方向に並んで二つ配置されている。いずれの第2の移動部材4も枠体2の短手方向で第1の移動部材3と対向するように配置されている。   As shown in FIG. 1, the second moving member 4 is arranged so as to extend along the long side 2 d of the frame body 2, and two second moving members 4 are arranged side by side in the longitudinal direction of the frame body 2. Yes. Any of the second moving members 4 is arranged so as to face the first moving member 3 in the short direction of the frame 2.

これらの第2の移動部材4は、四本の第2のガイド部材11によってそれぞれ支持されている。枠体2の長辺2dから外側へ突出する第2のガイド部材11は、第2の移動部材4の移動を進退方向(図3の矢印Aの方向に相当)に案内する役割を有している。また、第2のガイド部材11の先端には、抜け止め部11aが形成されている。   These second moving members 4 are respectively supported by four second guide members 11. The second guide member 11 protruding outward from the long side 2d of the frame 2 has a role of guiding the movement of the second moving member 4 in the forward / backward direction (corresponding to the direction of arrow A in FIG. 3). Yes. Further, a retaining portion 11 a is formed at the tip of the second guide member 11.

第2の移動部材4と枠体2の間には、第2の弾性部材8が設けられている。第2の弾性部材8は、第2の移動部材4を枠体2から離れる方向に付勢するための部材である。この第2の弾性部材8の伸び量は、第2の伸び量規制部材13によって所定の範囲内に規制されている。第2の伸び量規制部材13の外側には、第2の弾性部材8の延長線上に位置する第2の当接部15が設けられている。この第2の当接部15が第2の移動部材4に対して突き当てられることで、第2の弾性部材8の弾性力が第2の移動部材4に伝達され、第2の移動部材4が枠体2から離れる方向に付勢される。   A second elastic member 8 is provided between the second moving member 4 and the frame body 2. The second elastic member 8 is a member for urging the second moving member 4 in a direction away from the frame body 2. The extension amount of the second elastic member 8 is regulated within a predetermined range by the second elongation regulating member 13. A second abutting portion 15 located on the extension line of the second elastic member 8 is provided outside the second elongation amount regulating member 13. When the second contact portion 15 is abutted against the second moving member 4, the elastic force of the second elastic member 8 is transmitted to the second moving member 4, and the second moving member 4. Is urged away from the frame 2.

また、第2の移動部材4には、基板Sを把持するための第2の把持部6が四つずつ設けられている。これらの第2の把持部6において、基板Sを挟み込むことにより基板Sが把持される。   In addition, the second moving member 4 is provided with four second grip portions 6 for gripping the substrate S. In these second gripping portions 6, the substrate S is gripped by sandwiching the substrate S therebetween.

以上説明した本実施形態に係る搬送治具1によれば、第1の移動部材3及び第2の移動部材4がそれぞれ枠体2から離れる方向に付勢されることにより、基板Sが第1の把持部5及び第2の把持部6によって両側に引っ張られた状態で把持されるので、基板Sに撓みが生じることを抑制することができる。このため、例えば、基板Sの成膜面にマスクを被せる場合など、基板Sに対するマスクの位置合わせが容易になり、アライメント精度を向上させることができる。このことは、基板Sとマスクの位置合わせに掛かる作業時間の短縮にも繋がる。   According to the transport jig 1 according to the present embodiment described above, the first moving member 3 and the second moving member 4 are each biased in the direction away from the frame body 2, whereby the substrate S is moved to the first position. Since the gripping portion 5 and the second gripping portion 6 are gripped while being pulled on both sides, it is possible to suppress the substrate S from being bent. For this reason, for example, when the mask is placed on the film formation surface of the substrate S, the alignment of the mask with respect to the substrate S becomes easy, and the alignment accuracy can be improved. This also leads to a reduction in work time required for alignment between the substrate S and the mask.

また、この搬送治具1によれば、両側に引っ張るように基板Sを把持することで、第1及び第2の把持部5,6に把持された部位の曲げ応力の集中が低減することができ、応力集中による破損の発生も抑えることができる。しかも、この搬送治具1によれば、ベースとなる枠体2を有しているので、搬送ローラなどの搬送装置が枠体2を支持又は保持することにより、搬送治具1ごと基板Sを容易に取り扱うことができる。これにより、搬送治具1に基板Sを取り付けたまま、各種の処理装置(例えば複数の成膜装置)間を移動して工程を進めることができ、装置ごとに搬送治具を交換する場合と比べて、処理時間を大幅に短縮することができる。   Further, according to the transport jig 1, the concentration of the bending stress at the portion gripped by the first and second gripping portions 5 and 6 can be reduced by gripping the substrate S so as to be pulled to both sides. And the occurrence of breakage due to stress concentration can be suppressed. Moreover, according to the transport jig 1, since the base frame body 2 is provided, the transport device such as a transport roller supports or holds the frame body 2, so that the substrate S together with the transport jig 1 is held. It can be handled easily. Accordingly, the process can be advanced by moving between various processing apparatuses (for example, a plurality of film forming apparatuses) while the substrate S is attached to the transfer jig 1, and the transfer jig is replaced for each apparatus. In comparison, the processing time can be greatly shortened.

また、この搬送治具1によれば、移動部材3,4のそれぞれに複数の把持部5,6が設けられているので、一つの移動部材に一つの把持部のみが設けられている場合と比べて、構成を簡素化することができる。しかも、この構成によれば、把持部の数に対して移動部材の数を少なくすることができる上、移動部材の数と共に弾性部材の数も減らすことが可能なため、搬送治具の低コスト化に非常に有利である。   Moreover, according to this conveyance jig 1, since the several holding parts 5 and 6 are provided in each of the moving members 3 and 4, when only one holding part is provided in one moving member, In comparison, the configuration can be simplified. In addition, according to this configuration, the number of moving members can be reduced with respect to the number of gripping portions, and the number of elastic members can be reduced together with the number of moving members. It is very advantageous for conversion.

また、この搬送治具1によれば、ガイド部材10,11により各移動部材3,4の進退方向の移動を高い精度で案内させることができるので、第1の把持部5と第2の把持部6における基板Sの引っ張り方向を精度良く一致させることができ、より安定性の高い基板Sの保持を実現することができる。しかも、この搬送治具1によれば、ガイド部材10,11に抜け止め部10a,11aが形成されているので、搬送治具1の扱い中に移動部材3,4がガイド部材10,11から脱落することが防止でき、搬送治具1を一層取り扱いやすくすることができる。   Further, according to the transport jig 1, the guide members 10 and 11 can guide the movement of the moving members 3 and 4 in the advancing and retracting directions with high accuracy, so that the first grip portion 5 and the second grip The pulling direction of the substrate S in the portion 6 can be made to coincide with each other with high accuracy, and the holding of the substrate S with higher stability can be realized. Moreover, according to the transport jig 1, the retaining members 10 a and 11 a are formed on the guide members 10 and 11, so that the moving members 3 and 4 are moved from the guide members 10 and 11 while the transport jig 1 is being handled. It can be prevented from falling off and the handling jig 1 can be made easier to handle.

以上、本発明の好適な実施形態について説明したが、本発明は上述した実施形態に限定されるものではない。   As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to embodiment mentioned above.

例えば、基板の引っ張り方向は、上述した短手方向に限られず、長手方向に引っ張る構成であってもよい。また、長方形状の枠体の四隅に把持部を設けて、対角線上に基板を引っ張る構成であってもよい。更に、把持部の数や把持構造、形状、大きさは、上述したものに限られない。   For example, the pulling direction of the substrate is not limited to the short direction described above, and the substrate may be pulled in the longitudinal direction. Moreover, the structure which provides a holding part in the four corners of a rectangular frame and pulls a board | substrate on a diagonal may be sufficient. Further, the number of gripping portions, the gripping structure, the shape, and the size are not limited to those described above.

また、枠体の形状は、平面形状であれば良く、長方形状に限られない。枠体の形状は、正四角形や平行四辺形その他の多角形や曲線を含む形状であってもよい。枠体の形状は、被搬送物の形状に応じた適切な形が採用される。   Moreover, the shape of a frame should just be a planar shape, and is not restricted to a rectangular shape. The shape of the frame may be a regular rectangle, a parallelogram, other polygons, or a shape including a curve. As the shape of the frame, an appropriate shape according to the shape of the conveyed object is employed.

更に、弾性部材の構成も上述したものに限られず、伸び量規制部材や当接部は必ずしも備える必要はない。また、ガイド部材の形状や数も上述したものに限られない。   Further, the configuration of the elastic member is not limited to the above-described one, and the elongation amount regulating member and the contact portion are not necessarily provided. Further, the shape and number of the guide members are not limited to those described above.

1…搬送治具 2…枠体 2c,2d…長辺 2e,2f…凸部 3…第1の移動部材 4…第2の移動部材 5…第1の把持部 5a…可動部 5b…固定部 6…第2の把持部 7…第1の弾性部材 8…第2の弾性部材 10…第1のガイド部材 10a,11a…抜け止め部 11…第2のガイド部材 12…第1の伸び量規制部材 12A…可動部 12B…固定部 13…第2の伸び量規制部材 14…第1の当接部 15…第2の当接部 S…基板(被搬送物)   DESCRIPTION OF SYMBOLS 1 ... Conveyance jig | tool 2 ... Frame 2c, 2d ... Long side 2e, 2f ... Convex part 3 ... 1st moving member 4 ... 2nd moving member 5 ... 1st holding part 5a ... Movable part 5b ... Fixed part DESCRIPTION OF SYMBOLS 6 ... 2nd holding part 7 ... 1st elastic member 8 ... 2nd elastic member 10 ... 1st guide member 10a, 11a ... Detachment part 11 ... 2nd guide member 12 ... 1st extension amount regulation Member 12A ... Movable part 12B ... Fixed part 13 ... Second elongation amount regulating member 14 ... First contact part 15 ... Second contact part S ... Substrate (conveyed object)

Claims (3)

板状の被搬送物の搬送に用いられる搬送治具であって、
平面形状の枠体と、
前記枠体の外周に沿って設けられ、前記枠体を挟んで対向するように配置されると共に、前記枠体に対して進退可能に構成された第1の移動部材及び第2の移動部材と、
前記枠体と前記第1の移動部材の間に設けられ、前記枠体から離れる方向に前記第1の移動部材を付勢する第1の弾性部材と、
前記枠体と前記第2の移動部材の間に設けられ、前記枠体から離れる方向に前記第2の移動部材を付勢する第2の弾性部材と、
前記第1の移動部材に設けられ、前記被搬送物を把持する第1の把持部と、
前記第2の移動部材に設けられ、前記第1の把持部と対向するように前記被搬送物を把持する第2の把持部と、
を備える、搬送治具。
A conveying jig used for conveying a plate-shaped object to be conveyed,
A planar frame;
A first moving member and a second moving member which are provided along an outer periphery of the frame body, are arranged so as to face each other with the frame body interposed therebetween, and are configured to be movable back and forth with respect to the frame body; ,
A first elastic member that is provided between the frame and the first moving member and biases the first moving member in a direction away from the frame;
A second elastic member that is provided between the frame and the second moving member and biases the second moving member in a direction away from the frame;
A first gripping portion provided on the first moving member for gripping the object to be transported;
A second gripping part provided on the second moving member and gripping the object to be conveyed so as to face the first gripping part;
A transport jig.
前記第1の把持部は、前記第1の移動部材に沿って複数設けられており、
前記第2の把持部は、前記第2の移動部材に沿って複数設けられている、請求項1に記載の搬送治具。
A plurality of the first gripping portions are provided along the first moving member,
The conveyance jig according to claim 1, wherein a plurality of the second gripping portions are provided along the second moving member.
前記枠体の外周には、前記第1の移動部材を進退方向に案内する第1のガイド部材と、前記第2の移動部材を進退方向に案内する第2のガイド部材と、が設けられており、
前記第1のガイド部材及び前記第2のガイド部材には、それぞれ前記第1の移動部材又は前記第2の移動部材の脱落を防止する抜け止め部が形成されている、請求項1又は2に記載の搬送治具。
A first guide member for guiding the first moving member in the advancing / retreating direction and a second guide member for guiding the second moving member in the advancing / retreating direction are provided on the outer periphery of the frame body. And
The first guide member and the second guide member each have a retaining portion for preventing the first moving member or the second moving member from falling off. The transfer jig described.
JP2013131007A 2013-06-21 2013-06-21 Transport jig Pending JP2015003813A (en)

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Country Link
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017508887A (en) * 2014-03-24 2017-03-30 アイクストロン、エスイー Substrate carrier for mounting each substrate on two opposite main surfaces
KR102095446B1 (en) * 2019-02-20 2020-03-31 (주)디아이비 Hanger for transporting substrate
WO2022234651A1 (en) * 2021-05-07 2022-11-10 株式会社Fuji Work device
WO2022234649A1 (en) * 2021-05-07 2022-11-10 株式会社Fuji Conveyance jig, support member, and work device
WO2022234650A1 (en) * 2021-05-07 2022-11-10 株式会社Fuji Transfer jig and work device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017508887A (en) * 2014-03-24 2017-03-30 アイクストロン、エスイー Substrate carrier for mounting each substrate on two opposite main surfaces
KR102095446B1 (en) * 2019-02-20 2020-03-31 (주)디아이비 Hanger for transporting substrate
WO2022234651A1 (en) * 2021-05-07 2022-11-10 株式会社Fuji Work device
WO2022234649A1 (en) * 2021-05-07 2022-11-10 株式会社Fuji Conveyance jig, support member, and work device
WO2022234650A1 (en) * 2021-05-07 2022-11-10 株式会社Fuji Transfer jig and work device

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