KR20150138526A - Transferring belt for scribe apparatus and scribe apparatus having the same - Google Patents

Abstract

The present invention provides a transfer belt for a scribe apparatus, comprising: a transfer belt body which transfers a substrate; and a repetitive accommodating unit which is formed on the transfer belt body, and positions a whole lower surface of the substrate on the transfer belt body by accommodating a transfer unit which transfers through picking the substrate. In addition, the present invention provides a scribe apparatus having the transfer belt.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a feed belt for a scribe device, and a scribe device having the same.

The present invention relates to a scribing apparatus, and more particularly, to a scribing apparatus for a scribe apparatus capable of reducing interference between a chuck and a transfer belt for gripping and transferring a substrate, and a scribe apparatus having the transfer belt.

Generally, an LCD, an organic EL panel, an inorganic EL panel, a transmissive projector substrate, a reflective projector substrate, and the like, which are used as a flat panel display, are made of a glass substrate, such as a moth glass panel (MOTHER GLASS PANEL) Panel.

The cutting of the unitary glass panel includes a scribing step of forming a scribe line by pressing a scribe wheel made of diamond like material along the line to be cut on the surface of the panel and a breaking step of separating the unit glass panel from the scribe line Lt; / RTI >

Thus, the substrate, which is a glass panel, is divided into individual cells through a breaking process, and the dummies, which are the areas surrounding the cells, are discharged to the outside after the cell pickup.

The apparatus for scribing the glass panel (hereinafter referred to as " substrate ") as described above mainly uses a belt-type scribing apparatus.

A conventional belt-type strike apparatus has a belt for conveying a substrate for each subsequent process when a subsequent process is performed on a scribed substrate, and for carrying out the process.

For example, when the scribed substrate is transported through one of the belts and the braking process is performed and the braking process is carried out on another belt, the pickup process is performed, and a space is formed between the belts.

When the substrate is moved in the spaced-apart space, the dummy surrounding the cell falls downward through the spacing space between the belts.

In other words, conventionally, in the case of each subsequent process, independently operated belts are used. Therefore, it is difficult to maintain the flatness when the substrate is transferred for each process, and it is difficult to maintain alignment of the glass when moving between belts.

In addition, there is also a problem that an impact is generated when the substrate moves between the belts, and the substrate itself is damaged.

In addition, it is important that the bottom surface of the substrate is stably seated in total on the upper surface of the belt on which a plurality of unit processes are performed.

That is, the substrate gripped by the fork at the front end of the belt and transported is seated sequentially on the belt by the movement of the fork. However, the grip is released before the rear end of the substrate as much as the fork is gripped is lifted onto the belt.

Therefore, there is a problem that the dummy formed at the rear end of the substrate can not be stably positioned in the belt.

A prior art related to the present invention is Korean Patent Laid-Open No. 10-2009-0128081 (published on December 15, 2009), which discloses a method of simultaneously performing the scribing process on the upper and lower surfaces of the mother substrate Disclosed is a scribe device for spraying air onto a mother substrate such that both sides of a point where scribers contact the mother substrate are in a horizontal state.

An object of the present invention is to provide a feed belt for a scribe device capable of reducing interference between a chuck and a feed belt that grips and feeds a substrate and a scribe device having the feed belt.

It is another object of the present invention to stably mount the entire bottom surface of a substrate on a transfer belt for transferring a substrate so that a plurality of unit processes including a scribing process are successively carried out, And a scribe device having the transfer belt for a scribe device.

In one aspect, the present invention provides a transfer belt comprising: a transfer belt body for transferring a substrate; And a repeat receiving portion formed on the conveying belt body for receiving the conveying portion for picking up and transporting the substrate and placing the entire lower surface of the substrate on the conveying belt body.

Preferably, the repeat receiving portion is a receiving groove formed at an interval in the conveying belt body to receive the conveying portion.

The transfer unit has a fork for holding an end of the substrate.

The receiving groove preferably receives the fork.

Preferably, the interval in which the receiving groove is formed is set to be proportional to an operation distance of the transfer section for transferring the substrate.

In another aspect, the present invention provides a substrate processing apparatus comprising: a transfer section having a fork holding a substrate, the transfer section being moved to transfer the substrate along a transfer path; And a feed belt disposed in the feed path and configured to repeatedly receive the fork and to seat and transport the entire lower surface of the substrate to be fed.

The conveyance belt includes a conveyance belt body for receiving and conveying the substrate; And a repetition accommodating portion formed on the conveying belt body and repeatedly accommodating the fork to seat the entire lower surface of the substrate on the conveying belt body.

It is preferable that the repetition accommodating portion is a receiving recess formed at the transfer belt body so as to accommodate the fork.

Preferably, the interval in which the receiving groove is formed is set to be proportional to an operation distance of the transfer section for transferring the substrate.

The scribing device includes a process control unit for continuously advancing a scribing process and a subsequent process on the substrates by controlling the movement of the feed belt by releasing the pressing or pressing of the feed belt at at least one position of the feed belt, .

The subsequent process is preferably a braking process for braking the substrate, or a pick-up process for picking up the substrate.

The process control unit includes a first weight roller for applying a first pressure to the conveyance belt on the basis of the conveyance belt, and a second conveyance belt that is rotated by an external force for driving along a vertical axis or a horizontal axis with respect to the conveyance belt, A second weight roller for controlling the moving direction of the conveyance belt by pressing or releasing the first weight roller or the second weight roller by pressing or releasing the first weight roller or the second weight roller, And a belt clamp for gripping the conveyance belt.

Preferably, the first weight roller is driven by an external forced driving force.

The first weight roller preferably flows along the vertical axis or the horizontal axis.

The second pressure is preferably greater than the first pressure.

The process control unit preferably includes a drive roller for forcibly moving the feed belt.

The external forced driving force is preferably at least one of a linear driving force and an elastic force.

The movement path of the first weight roller and the second weight roller is preferably guided by the guide along the vertical axis or the horizontal axis.

INDUSTRIAL APPLICABILITY The present invention has an effect of reducing the interference between a chuck and a feed belt that grips and feeds a substrate.

Further, the present invention stably seals the entire bottom surface of the substrate on a conveying belt for conveying the substrate so that a plurality of unit processes including a scribing process are sequentially performed, thereby stably holding the substrate until the dummy formed at the rear end of the substrate It has an effect that can be transmitted.

In addition, the present invention provides a method of manufacturing a semiconductor device, including: scribing a substrate by using a single transfer belt and continuously performing a subsequent process such as braking or pickup to maintain flatness between processes, .

Further, according to the present invention, any one of the first and second weight rollers used as a weight is forced to flow along the horizontal axis by using a forced driving force, thereby reducing the size of the apparatus main body.

Further, according to the present invention, any one of the first and second weight rollers used as the weights is forcibly forced along the horizontal axis by using the forced driving force, thereby controlling the moving direction of the feeding belt and controlling the tension of the feeding belt itself It is possible to solve the problem of a device such as a belt being kept constantly maintained.

Further, according to the present invention, when the first and second weight rollers are forcibly driven along the horizontal axis, the operation of the first and second belt clamps can be interlocked with each other. Therefore, even in this case, the tension force of the belt can be maintained constant .

Further, since the lifting and lowering of the weight rollers is guided by using a separate guide and the lifting and lowering is guided by using the rack-pinion gear connection, it is possible to prevent the deformation of the both ends of the first and second weight rollers So that the conveying belt can be stably squeezed.

Further, according to the present invention, the lifting and lowering of the weight rollers causing the conveyance belt to sag through the external driving force is forcibly lifted and lowered, and the lifting and lowering position is controlled to be controlled so as to effectively prevent slip from occurring during the movement of the feeding belt .

1 is a plan view showing a scribing apparatus of the present invention.
2 is a perspective view showing a delivery belt for a scribe device of the present invention.
3 is a view showing an embodiment of the scribing apparatus of the present invention.
4 is a view showing an example of a guide according to the present invention.
5 is a view showing another example of the guide according to the present invention.
6 is a view showing the process of starting the braking process and the pick-up process with respect to the substrate to be transferred.
7 is a view illustrating a process of scribing and picking up the substrate to be transferred.
8 is a view showing a process in which the dummy is discharged
9 is a view showing a process in which a substrate is transferred to a pickup process region.
10 to 14 are views showing another embodiment of the scribing apparatus of the present invention.
FIG. 15 is a view showing a process of starting a braking process and a pickup process for a transported substrate according to another embodiment of the present invention.
16 is a view showing a process of scribing and picking up the substrate to be transported.
17 is a view showing a process of discharging the dummy.
18 is a view showing a process of transferring a substrate to a pickup process region.
19 is a view showing an example in which the first and second weight rollers according to the present invention are driven by an external driving force.

Hereinafter, the configuration of a scribe apparatus will be described with reference to the accompanying drawings.

FIG. 1 is a plan view showing a scribing apparatus of the present invention, FIG. 2 is a perspective view showing a transfer belt for a scribing apparatus of the present invention, and FIG. 3 is a side view showing a scribing apparatus of the present invention.

1 to 3, a conveying belt and a scribing apparatus having the conveying belt of the present invention will be described.

Referring to FIG. 1, the scribing apparatus of the present invention mainly includes a main body 100, a transfer unit 50, a transfer belt 200, and a process control unit 300.

In the main body 100,

The transfer unit 50 and the transfer belt 200 are installed in the main body 100.

The conveying unit 50 includes a conveyor belt 51 and a chuck 60.

The conveyor belts 51 are formed as a plurality of belts along the conveying direction of the substrate 10 and having a plurality of spaces spaced equally from each other.

The chuck 60 is reciprocated along the conveying direction of the substrate 10 by a conveyor not shown.

The chuck 60 has a plurality of forks 61 that grip or release a plurality of portions of the end of the substrate 10, preferably the rear end of the substrate 10.

The plurality of forks 61 are moved along the spaces between the conveyor belts 51 as the chucks 60 move.

Meanwhile, the conveyance belt 200 according to the present invention is installed in the main body 100 so as to be disposed in parallel with the conveyance portion 50 along the conveyance direction of the substrate 10.

In the main body 100 according to the present invention, one conveying belt 200 is installed.

The feed belt 200 is installed on the body 100 so as to be rotatable on an endless track.

Both ends of the conveyance belt 200 are rotatably supported by a pair of guide rollers.

The pair of guide rollers is constituted by left first and second guide rollers 210 and right first and second guide rollers 220.

The left first and second guide rollers 210 are disposed to be spaced apart from each other at the left end of the conveying belt 200 so as to rotate and support the left end of the conveying belt 200.

The right first and second guide rollers 220 are vertically spaced from the right end of the conveying belt 200 to rotate and support the right end of the conveying belt 200.

Accordingly, two movement paths (?,?) Horizontally connecting the left end and the right end are formed in the transfer belt 200.

The two movement paths? May be a first movement path (?) Along the right end in the left end and a second movement path (?) Along the left end in the right end.

The path through which the substrate is substantially moved is moved along the first movement path? Formed by the transport belt 200 being moved.

Here, the front side conveying belt 20 is disposed in front of the conveying belt 200.

The front side transfer belt 20 is also mounted so as to rotate on an endless track, thereby continuously transferring the substrate.

The front transfer belt 20 and the transfer belt 200 are arranged horizontally and side by side so that the substrate can be moved horizontally.

A scribing unit 110 is provided at the front end of the conveying belt 200 according to the present invention, which can scribe the substrate conveyed by the forward conveying belt 20 along the XY direction.

Although not shown in the figure, the scribe unit 110 is provided with a scribe wheel that can be scribed along the X and Y directions on the substrate, and the head on which the scribe wheel is installed can be moved along the X and Y directions.

A region where a subsequent process is performed is formed on the transfer belt 200.

In the region where the subsequent process is performed, a unit in which the process is performed is installed.

In the present invention, the subsequent process may be a braking process for braking the substrate for each cell or a pick-up process for picking up the braked cell.

Further, the braking process and the pick-up process can be sequentially performed.

That is, the braking unit 120 is disposed on the conveying belt 200 behind the scribing unit 110, and the pick-up unit 130 is disposed behind the braking unit 120.

The breaking unit 120 serves to cut cells scribed in the substrate.

The pick-up unit 120 picks up only the braked cells and loads them at the unloading position.

Next, the configuration of the above-described conveyance belt will be described in detail.

1 and 2, the conveyance belt 200 according to the present invention is disposed in parallel with the conveyor belt 51, and is arranged to have a constant distance.

Here, the conveying belt 200 is formed of a flat belt.

The transfer belt 200 is a device for transferring the substrate 10 so that the substrate 10 moved by the movement of the chuck 60 is seated and progressed in a predetermined process sequence.

Particularly, the feed belt 200 repeatedly receives the forks 61 and seals and transports the entire lower surface of the substrate 10 to be fed.

2, the conveyance belt 200 according to the present invention includes a conveyance belt body 201 disposed in parallel with a conveyor belt 51 so as to follow the conveyance path of the substrate 100, and a plurality of forks And a repeating accommodating portion 290 for accommodating the repeating accommodating portion 61.

The repeated receiving portion 290 is formed as a plurality of receiving grooves 291 formed in the conveying belt body 201.

The repeat receiving portion 290 may be formed at a plurality of positions along the longitudinal direction of the conveying belt body 201.

For example, the plurality of receiving grooves 291 constituting the repetition receiving portion 290 are spaced apart from each other by a distance corresponding to the interval of the forks 61 along the width direction of the conveying belt body 201 at the first position and the second position Respectively.

The gap between the first position and the second position may be formed differently depending on the reciprocating feed of the chuck 60 or may be controlled by changing the rotational speed of the feed belt body 201 itself.

The plurality of receiving grooves 291 are formed to accommodate the plurality of forks 61 described above. The receiving grooves 291 may be larger than the width of the fork 61.

When the chuck 60 gripping the rear end of the substrate 10 by the plurality of forks 61 is moved in accordance with the movement of the conveyor belt 51, And can be seated sequentially on top. Here, the conveying belt body 201 is also rotated at an established rotation speed.

A plurality of forks 61 advancing along the conveying direction are formed by moving the front end of the conveying belt body 201 and the plurality of receiving grooves 291 formed at the first position of the conveying belt body 201 are conveyed And is positioned so as to accommodate the plurality of forks 61 by the rotation of the belt body 201.

Therefore, the plurality of forks 61 are accommodated in the plurality of forks 10 while gripping the rear end of the substrate 10, and at the same time, the grips at the rear end of the substrate 10 are released.

At this time, the entire bottom surface of the substrate 10 may be seated on the upper end of the conveying belt body 201.

In the present invention, a plurality of forks 61 for conveying the substrate 10 are accommodated in the plurality of receiving grooves 290 formed in the conveying belt body 201, Interference between the belt bodies 201 can be avoided.

The process control unit (300)

3, the process control unit 300 of the present invention controls the movement of the conveyance belt 200 by releasing the pressing or pressing of the conveyance belt 200 at at least one position of the conveyance belt 200, Such as a scribing process and a braking process or a pick-up process, for the substrates to be transferred.

Its configuration will be described in detail.

The process control unit 300 mainly includes a first weight roller 310, a second weight roller 320, a drive roller 330, and a belt clamp 340.

The first weight roller 310 is disposed on the first movement path? And moves downward by its own weight to release the pressing and pressing of the conveying belt 200 to the first pressure, Control the direction of movement.

The first weight roller 310 is disposed between the front end of the conveying belt 200 and a region where a subsequent process is performed.

The first weight roller 310 is disposed so as to be movable up and down along a vertical axis orthogonal to the first movement path? Of the conveyance belt 200 at the disposition position.

The vertical axis may be an axis perpendicular to the conveying belt 200.

The first weight roller 310 can be guided up and down by a guide 400. The structure of the guide 400 will be described later.

Here, the front end of the conveying belt 200 is a scribe area, and the area where the subsequent process is performed is a breaking process area.

The second weight roller 320 is disposed between the front end of the conveying belt 200 and the rear end of the area where the subsequent process is performed, and is movable along a horizontal axis that is parallel to the second movement path?

In particular, the second weight roller 320 is disposed inside the conveying belt 200 and is arranged to be able to flow along the horizontal axis. Therefore, the vertical size of the conveyance belt 200 can be reduced to reduce the size of the entire apparatus.

The second weight roller 320 is disposed on the second movement path? And moves along the horizontal axis to press the feed belt 200 to the second pressure to control the moving direction of the feed belt 200.

The second weight roller 320 may be forcedly driven by an external driving force.

The second weight roller 320 is pressed to the conveying belt 200 by the second pressure, and the second pressure is formed to be larger than the first pressure.

The apparatus for generating an external driving force may generate a linear driving force or an elastic force by using a cylinder 500 having an axis 510 that can be stretched along a horizontal axis, or an elastic spring (not shown).

Therefore, when the cylinder 500 is used, the second weight roller 320 is rotatably installed at the end of the shaft 510. [

The driving roller 330 is disposed between the front end of the feeding belt 200 and the second weight roller 320 and forcibly rotates or drives the feeding belt 200.

The belt clamp 340 is installed on both sides of the first weight roller 310 and grips the conveyance belt 200 at a corresponding position so as to prevent the conveyance belt 200 from moving at each grip position.

The belt clamp 340 is constituted by a first belt clamp 341 and a second belt clamp 342 which are respectively arranged before and after the first weight roller 310 along a first conveying path?

The first belt clamp 341 and the second belt clamp 342 are arranged to be movable up and down.

The first belt clamp 341 is disposed at a first grip position between the scribe area and the first weight roller 310.

The second belt clamp 342 is disposed at a second grip position between the first weight roller 310 and the pickup area.

Although not shown in the drawings, the belt clamp 340 is a device for forcibly stopping or releasing the movement of the conveyance belt 200 by being lifted or lowered to grip or release the gripping belt 200 at the grip position by the lifting device to be.

In addition, the first weight roller 310 according to the present invention can be guided by the guide 400 in a linear flow upward and downward.

4 is a view showing an example of a guide according to the present invention.

Referring to FIG. 4, the guide 400 according to the present invention is a device for guiding the lifting and lowering of the first and second weight rollers 310 along the vertical axis.

The first weight roller 310 has a hollow first weight roller body 311 and a second weight roller body 311 both ends of which are rotatably inserted in the hollow of the first weight roller body 311, And a first rotating shaft 312 protruding from both ends of the first rotating shaft 312.

The guide 400 has a pair of guide bodies 410 positioned at both ends of the first weight roller body 311 and the pair of guide bodies 410 are installed in the main body 100.

The pair of guide bodies 410 are formed with a guide hole 420 having a predetermined length along the vertical direction and guiding the vertical movement along the vertical direction in a state where both ends of the first rotation shaft 312 are fitted.

Therefore, the first weight roller 310 in the present invention is guided along the guide 400.

Although not shown in the drawing, the guide shown in Fig. 2 may be configured to be horizontal so that the second weight roller 320 can guide the second weight roller 320 when it flows along the horizontal axis.

In this case, the guide for guiding the flow of the second weight roller 320 is preferably disposed inside the conveying belt 200.

In addition, as shown in FIG. 5, a guide 400 'in which a pair of pinion gears 430 are installed at both ends of the first rotation shaft 312 may be used.

Of course, although not shown in the drawings, the guide may be horizontally configured to guide the flow of the second weight roller 320. [

The pair of guide bodies 410 are provided with a pair of racks 440 to which the pair of pinion gears 430 are gear-connected.

Therefore, when the first weight roller 310 is lifted and lowered, since the pinion 430 is gear-connected to the rack 440, it is possible to solve the problem that both ends of the first rotation shaft 312 are twisted at the time of ascending and descending.

Further, when the second weight roller 320 is moved along the horizontal axis, since the pinion 430 is gear-connected to the rack 440, the second rotation axis (not shown) of the second weight roller 320, It is possible to solve such a problem that the both ends of the endoscope are twisted.

Next, a scribe method using the scribe apparatus having the above-described structure will be described with reference to Figs. 6 to 9. Fig.

FIG. 6 shows a scribing process for a substrate to be transferred and a process of starting a pickup process, which is a subsequent process.

Referring to FIG. 6, the feed belt 200 is rotated in an endless track as the drive roller 330 is driven.

Here, a first movement path? And a second movement path? Are formed in the conveyance belt 200.

The first substrate 11 is scribed by the scribing unit 110 (see Fig. 1) at the front end of the conveying belt 200, and is moved along the first movement path?.

At this time, the first weight roller 310 does not press the feed belt 200, and the second belt clamp 342 is in a state of releasing the grip state of the feed belt 200 at the second grip position And the first weight roller 310 is in an elevated state.

That is, the first weight roller 310 does not press the feed belt 200 to the first pressure.

At the same time, on the second movement path (?), The second weight roller 320 is rotatably installed on the end of the shaft 510, and the axis 510 of the cylinder 500 is inserted in the horizontal direction As shown in FIG.

Here, the cylinder 500 receives a control signal from a controller (not shown) and can insert and protrude the shaft 510.

Thus, the second weight roller 320 is in a state of being pressurized to the second pressure while the conveyance belt 200 is flowing.

That is, the second weight roller 320 functions to pull the conveying belt 200 to the second pressure and pull the conveying belt 200 to a certain length in a state where the second weight roller 320 is disposed inside the conveying belt 200.

Here, the second pressure, which is an external driving force, is formed to be larger than the first pressure so that when the conveying belt 200 is rotated to convey the substrates 11 and 12 to each processing region, the tension of the conveying belt 200 It has an advantage that it can be made uniform.

The scribed first substrate 11 is already transferred to the pick-up process area, which is the area where the subsequent process is performed.

The second belt clamp 342 then grips the conveying belt 200 at the second grip position and grips the conveying belt 200 on the first substrate 11 conveyed to the pickup process area using the pick up unit 120 Allow pickup to proceed.

On the other hand, before the scribing process is performed, the second substrate 12 is transferred to the scribing unit 100 side by driving the front side transfer belt 20.

7 shows the process of scribing and picking up the substrate to be transported.

7, after the pickup process is started, the lowered second weight roller 320 is moved along the horizontal axis while the feed belt 200 is continuously rotated and the shaft 510 of the cylinder 500 protrudes It can be returned to the home position.

At the same time, the first weight roller 310 is lowered to pressurize the conveyor belt 200 to the first pressure at the corresponding position to vary the movement direction of the conveyor belt 200 to bypass.

Here, the first belt clamp 341 does not grip the feed belt 200.

At this time, the second substrate 12 conveyed from the front side conveyance belt 20 is continuously moved along the first movement path? Along the conveyance belt 200 while being scribed in the scribe area.

In addition, each cell can be picked up in the pickup process region of the first substrate 11 in FIG.

8 is a view showing a process in which the dummy is discharged

8, when the second substrate 12 is scribed along the first movement path? And is moved to the first weight roller 310 side, the first belt clamp 341 moves from the first grip position to the second belt position? (Not shown).

Then, the second belt clamp 342 releases the grip state of the transfer belt 200 at the second grip position.

At the same time, the second weight roller 320 on the second movement path? Is linearly moved along the horizontal axis due to the insertion of the shaft 510 of the cylinder 500, whereby the conveyance belt 200 Is supplied with the second pressure by the second weight roller 320 and is varied so as to bypass the moving direction.

Accordingly, the first substrate 11 on which the pick-up process of the cells proceeds is moved in accordance with the movement of the conveyance belt 200, and the dummy except for the picked-up cells drops to the rear of the conveyance belt 200 and is removed.

9 is a view showing a process in which a substrate is transferred to a pickup process region.

Referring to FIG. 9, in the state as shown in FIG. 6, the first belt clamp 341 releases the grip state of the transfer belt 200 at the first grip position.

Therefore, the first and second belt clamps release the grip state of the transfer belt at the grip position.

Then, the drive roller rotates the conveyance belt.

Accordingly, the scribed second substrate 12 is continuously moved to the braking area or pickup area, which is a subsequent process area, so that the scribing process and the subsequent process as shown in Figs. 4, 5, and 6 are continuously performed .

In the above description, the first weight roller 310 is lowered along its vertical axis by its own weight, is pushed up by the lifting and lowering of the conveyance belt 200, and the second weight roller 320 is lifted up by the cylinder 500, For example, an apparatus such as a conveyor belt 200, for example, as shown in FIG.

In the above description, the case where the subsequent process is a pick-up process is described as a representative example.

The subsequent process may be a braking process capable of breaking the substrate to be scribed.

Other Embodiments

10 to 14 are views showing another example of the scribing apparatus according to the present invention.

Referring to Fig. 10, both the first and second weight rollers may be driven by an external driving force.

When the shafts 551 and 510 of the cylinders 550 and 500 are forced to flow by the expansion and contraction of the first and second weight rollers 310 and 320, the first and second weight rollers 310 and 320 independently move, The first and second pressures are applied to the corresponding positions of the first and second pressure chambers 200.

In particular, the cylinder 550 for lifting the first weight roller 310 along the vertical axis may be installed on the upper side of the conveyance belt 200 or may be installed inside the conveyance belt 200.

11, the shaft 551 of the cylinder 550 is connected to both ends of the rotation axis of the first weight roller 310 to move the first weight roller 310 up and down to thereby rotate the shaft 551 of the cylinder 550 May not interfere with the conveying belt 200.

Here, the first pressure may be formed to be larger than the second pressure, or the second pressure may be formed to be larger than the first pressure.

In the former case, each of the cylinders 550 and 500 for performing the forced flow of the first and second weight rollers 310 and 320 is controlled such that the first pressure is formed to be larger than the second pressure by a control signal from a controller (not shown) It is good.

Conversely, in the latter case, each of the cylinders 550 and 500 may be controlled such that the second pressure is greater than the first pressure by a control signal from the controller.

That is, the weight roller having a relatively small pressure applied to the conveying belt 200 is used as a pressure for maintaining the tension of the conveying belt 200.

10 and Fig. 12 to Fig. 14 are substantially the same as those described with reference to Figs. 6 to 9, and therefore the description thereof will be omitted.

On the other hand, although not shown in the drawing, when the first and second weight rollers are all raised and lowered along the vertical axis to press the conveyance belt, any one of the first and second weight rollers provides an external driving force And may be lifted and lowered by the apparatus.

For example, when the second weight roller positioned downstream of the conveyance belt is moved up and down by an external driving force, the second pressure for pressing the conveyance belt due to the elevation is larger than the first pressure at which the first weight roller presses the conveyance belt .

It is also preferable that the second weight roller on the downstream side of the conveyance belt is disposed inside the conveyance belt to reduce the size of the apparatus.

In another embodiment

On the other hand, the first and second weight rollers according to the present invention can be moved along the vertical axis, but can be disposed inside the conveyance belt.

FIG. 15 is a view showing the process of starting the braking process and the pick-up process with respect to the substrate to be transferred, FIG. 16 is a view showing a process of scribing and picking up the substrate to be transferred, FIG. 18 is a view showing a process of transferring a substrate to a pickup process region.

In describing the substrate transfer apparatus according to another embodiment, description of the same constitution as in the above embodiment will be omitted.

Referring to Fig. 15, the first weight roller 310 is disposed inside the upstream-side transport belt 200, and is disposed so as to be vertically movable along a vertical axis.

The first weight roller 310 is rotatably connected to the end of the shaft 610 of the cylinder 600.

The cylinder 600 receives a control signal from a controller (not shown) to extend and retract the shaft 610. The first weight roller 310 is lifted and lowered along a vertical axis according to the expansion and contraction of the shaft 610, The belt 200 is pressed to the first pressure.

16, the second weight roller 320 is disposed inside the conveying belt 200, and flows by its own weight along the vertical axis to press the conveying belt 200 to the second pressure .

Here, the first pressure is set to be larger than the second pressure.

That is, the first weight roller 310 generates a driving force for moving the conveyance belt 200 by pressing the conveyance belt 200 with the first pressure.

The second weight roller 320 presses the feed belt 200 to a second pressure smaller than the first pressure to uniformly tension the feed belt 200.

Next, a scribe method using the scribe apparatus according to the third embodiment will be described with reference to Figs. 15 to 19. Fig.

15, the first weight roller 310 is placed in a lower portion of the upstream-side transfer belt 200, and the second belt clamp 342 is in a state in which the transfer belt 200 is not pressed, And grips the feed belt 200 at the second grip position.

That is, the first weight roller 310 does not press the feed belt 200 to the first pressure.

At the same time, on the second movement path (?), The second weight roller 320 flows downward from the upper portion of the downstream-side transfer belt 200 by its own weight to press the transfer belt 200 to the second pressure Respectively.

Accordingly, the conveying belt 200 maintains uniform tension by the second pressure by the second weight roller 320, and the first substrate 11 is conveyed from the upstream conveying belt 200 to the succeeding processing region.

16 shows the process of scribing and picking up the substrate to be transported.

16, the second belt clamp 342 grips the conveyor belt 200 and the shaft 610 of the cylinder 600 extends upwardly, The disposed first weight rollers 310 flow upward to press the feed belt 200 to the first pressure.

At the same time, the second weight roller 320 is moved to the upper side of the downstream-side transport belt 200 and positioned.

The second substrate 12 is conveyed from the front side conveying belt 20 and conveyed while being scribed by the scribing unit 110. The conveying belt 200 is moved along the first movement path? And is transported by the belt 200.

On the other hand, the subsequent process, for example, the first substrate 11 on which the braking process has been completed, may be located in the pickup process region.

17, when the second substrate 12 is scribed along the first movement path? And is moved to the first weight roller 310 side, the first belt clamp 341 moves from the first grip position to the second belt position (Not shown).

Then, the second belt clamp 342 releases the grip state of the transfer belt 200 at the second grip position.

At the same time, the first weight roller 310 is lowered along the vertical axis as the shaft 610 of the cylinder 600 flows downward, and is positioned inside the conveying belt 200.

Then, the first substrate 11 is transferred according to the feeding of the feeding belt 200 so that each cell can be picked up, and the remaining dummies can be dropped to the outside of the wake of the feeding belt 200 and removed.

Further, the second weight roller 320 moves downward by its own weight along the vertical axis, and presses the downstream-side conveying belt 200 to the second pressure.

18 is a view showing a process of transferring a substrate to a pickup process region.

Referring to FIG. 18, in a state as shown in FIG. 15, the first belt clamp 341 releases the grip state of the transfer belt 200 at the first grip position.

Here, the first and second belt clamps 341 and 342 are in a state of releasing the grip state of the transfer belt 200 at the corresponding grip position.

The scribed first substrate 11 may then be moved to a subsequent process zone along the transport belt 200 moved by the drive of the drive roller 330.

19, the second weight roller 320 is moved up and down along a vertical axis by using an external driving force through a separate cylinder 700 to pressurize the feed belt 200 with a second pressure, .

Reference numeral 710 denotes a shaft 710 which is expanded and contracted from the cylinder 700 and connected to a second weight roller 320 at an end thereof.

In this case as well, the first and second weight rollers 310 and 320 are disposed inside the conveying belt 200.

The first and second weight rollers 310 and 320 can move up and down along the vertical axis through the driving of the cylinders 600 and 700.

However, in the case of such a configuration, it is preferable to use the controller to control the driving of each cylinder so that the first pressure is greater than the second pressure.

By arranging the first weight roller 310 and the second weight roller inside the conveyance belt 200 through the constitution and action thereof, the pass line of the entire apparatus, which is the upper and lower width of the conveyance belt 200, is efficiently lowered .

Further, the first weight roller 310 can be used as a main drive for moving the conveyance belt 200 by pressurizing the conveyance belt 200 to the first pressure by using an external driving force.

Further, by pressing the downstream conveying belt 200 through the flow of the second weight roller 320 at a second pressure smaller than the first pressure, the overall tension of the conveying belt 200 can be uniformly maintained.

Through the construction and operation of the above apparatus, the embodiment according to the present invention can perform a scribing process by using a single transfer belt and a subsequent process such as braking or picking up to maintain the flatness between the processes This can increase the texture time.

Further, the embodiment according to the present invention can reduce the substrate pass line of the apparatus main body by allowing any one of the first and second weight rollers used as the weights to forcedly flow along the horizontal axis using the external driving force.

Further, the embodiment of the present invention controls the moving direction of the conveyance belt by allowing any one of the first and second weight rollers used as the weights to forcedly flow along the horizontal axis by using the external driving force, It is possible to solve the problem of the apparatus such as the belt being stretched by keeping the tension of itself constant.

Further, in the embodiment of the present invention, when the first and second weight rollers are forcibly driven along the horizontal axis, the operation of the first and second belt clamps can be interlocked with each other. Therefore, even in this case, .

Further, in the embodiment of the present invention, since the lifting and lowering of the weight roller is guided by using a separate guide and the lifting and lowering is guided by using the rack-pinion gear connection, The feeding belt can be stably stood.

Further, in the embodiment of the present invention, the lifting and lowering of the weight rollers causing the conveyance belt to sag through the external driving force is elevated and lowered and the elevation position is controlled so as to be controlled so that the slip is generated efficiently during the movement of the conveyance belt. Can be prevented.

Although a specific embodiment of the scribing apparatus of the present invention has been described above, it is apparent that various modifications are possible within the scope of the present invention.

Therefore, the scope of the present invention should not be limited to the above-described embodiments, but should be determined by the scope of the appended claims and equivalents thereof.

It is to be understood that the foregoing embodiments are illustrative and not restrictive in all respects and that the scope of the present invention is indicated by the appended claims rather than the foregoing description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

11: first substrate 12: second substrate
50: conveying section 51: conveyor belt
60: Chuck 61: Fork
20: forward side feed belt 100:
110: scribe unit 120: breaking unit
200: Feed belt 210: First left guide roller
220: second left guide roller 300: process control unit
310: first weight roller 320: second weight roller
330: drive roller 340: belt clamp
341: first belt clamp 342: second belt clamp
400, 400 ': guide 500, 600, 700: cylinder

Claims (17)

A transfer belt body for transferring the substrate; And
And a repeat receiving part formed on the conveying belt body for receiving the conveying part for picking up and transporting the substrate and placing the entire lower surface of the substrate on the conveying belt body.
The method according to claim 1,
The above-
And a receiving groove formed at an interval in the conveying belt body to receive the conveying portion.
3. The method of claim 2,
Wherein the transfer unit includes a fork for holding an end of the substrate,
And the receiving groove accommodates the fork.
3. The method of claim 2,
Wherein the interval in which the receiving groove is formed is set to be proportional to an operation distance of the transfer section for transferring the substrate.
A transferring portion having a fork holding the substrate, the transferring portion being moved to transfer the substrate along a transfer path; And
And a transfer belt which is disposed in the transfer path and continuously transfers the substrate so as to be located in the scribing process region and the succeeding process region so as to repeatedly accommodate the fork and to seat and transfer the entire lower surface of the substrate to be transferred Characterized in that the scribe device comprises:
6. The method of claim 5,
The conveying belt
A conveyance belt body for receiving and conveying the substrate; And
And a repetition accommodating portion formed on the conveying belt body for repeatedly accommodating the fork and seating the entire lower surface of the substrate on the conveying belt body.
6. The method of claim 5,
The above-
Wherein the receiving groove is formed at an interval in the conveying belt body so as to receive the fork.
8. The method of claim 7,
Wherein the interval in which the receiving groove is formed is set to be proportional to an operation distance of the conveyance unit for conveying the substrate.
6. The method of claim 5,
The scribing device comprises:
And a process control unit for continuously advancing the scribing process and the subsequent process on the substrates by controlling the movement of the feed belt by releasing the pressing or pressing of the feed belt at at least one position of the feed belt .
10. The method of claim 9,
The subsequent process may comprise:
A braking step of braking the substrate, or a pick-up step of picking up the substrate.
10. The method of claim 9,
Wherein the process control unit comprises:
A first weight roller for applying a first pressure to the conveyance belt on the basis of the conveyance belt,
A second weight roller which is moved by an external driving force along a vertical axis or a horizontal axis with reference to the conveying belt and controls the conveying belt in a moving direction by pressing or releasing the conveying belt to a second pressure,
A driving unit that drives at least one of the first weight roller and the second weight roller to move the feeding belt,
And a belt clamp for gripping the conveyance belt.
12. The method of claim 11,
Wherein the first weight roller is caused to flow by an external driving force.
13. The method according to claim 11 or 12,
Wherein the first weight roller comprises:
Wherein the scribing device is adapted to move along a vertical axis or a horizontal axis.
The method of claim 3,
Wherein the process control unit comprises a drive roller for moving the conveyance belt.
10. The method of claim 9,
The external driving force
Wherein the scribing device is at least one of a linear driving force and an elastic force.
10. The method of claim 9,
Wherein the movement path of the first weight roller and the second weight roller is guided by the guide along the vertical axis or the horizontal axis.
16. The method of claim 15,
A first belt clamp disposed on each of front and rear sides of the first weight roller, and a second belt clamp,
In a state in which the grip of the first belt clamp is released and the conveyance belt is gripped by the second belt clamp, the first weight roller is moved by the external driving force to pressurize or release the conveyance belt to the first pressure The scribing process of the substrates and the subsequent process are performed by moving the transfer belt in the scribing process area,
The first weight roller is moved in the direction to release the pressure by the external driving force in a state in which the grip of the second belt clamp is released and the conveyance belt is gripped by the first belt clamp, The roller presses the feed belt to the second pressure to move the feed belt in the subsequent process area so that the pile of substrates subjected to the subsequent process is discharged to the outside,
The grips of the first belt clamp and the second belt clamp are released from the transfer belt and the drive roller moves the transfer belt so that the scribe process completed substrate is transferred to the subsequent process area Scribe device
18. The method according to any one of claims 11 to 17,
Wherein the second pressure is greater than the first pressure.

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