JP2008156736A - Device for transporting object to be treated in surface treatment apparatus - Google Patents

Device for transporting object to be treated in surface treatment apparatus Download PDF

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JP2008156736A
JP2008156736A JP2006349657A JP2006349657A JP2008156736A JP 2008156736 A JP2008156736 A JP 2008156736A JP 2006349657 A JP2006349657 A JP 2006349657A JP 2006349657 A JP2006349657 A JP 2006349657A JP 2008156736 A JP2008156736 A JP 2008156736A
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carrier
rail
movement
transfer
holding member
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Masaji Nagakura
正次 長倉
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Marunaka Industrial Co Ltd
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Marunaka Industrial Co Ltd
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Priority to JP2006349657A priority Critical patent/JP2008156736A/en
Priority to CNU2007201462639U priority patent/CN201068342Y/en
Priority to TW96219955U priority patent/TWM338432U/en
Publication of JP2008156736A publication Critical patent/JP2008156736A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrier transportation device which can quickly perform the carry-out and carry-in processes of an object to be treated in selected surface treatment tanks, in a device for transporting the object to be treated in a surface treatment apparatus. <P>SOLUTION: The carrier transportation device 2 comprises: a carry-in carrier 21 which is arranged in a first exchanging and transporting device 1 side; and a carry-out carrier 22 which is arranged in a second exchanging and transporting device 3 side. With the use of the carry-in and carry-out carriers, the carry-out and carry-in processes of the object 9 in the selected surface treatment tanks 5, which is retained in a member 8 for retaining the object, can be simultaneously completed in one cycle. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、表面処理装置の被処理物搬送装置に関し、特に選択された表面処理槽における被処理物の搬出及び搬入行程を1サイクル内で迅速に行なえるようにしたものである。   The present invention relates to a workpiece transfer device of a surface treatment apparatus, and in particular, allows a workpiece to be carried out and loaded in a selected surface treatment tank quickly in one cycle.

例えば、電解又は無電解のメッキ処理装置においては、ハンガー治具などの被処理物保持部材に保持されたプリント基板などの被処理物を、複数の前処理槽を並べた前処理部で前処理した後、複数の表面処理槽が並べられたメッキ処理部で目的のメッキ時間処理がなされ、その後、メッキ処理された被処理物が後処理される。   For example, in an electrolytic or electroless plating apparatus, a pretreatment object such as a printed circuit board held on a treatment object holding member such as a hanger jig is pretreated by a pretreatment section in which a plurality of pretreatment tanks are arranged. After that, a target plating time treatment is performed in a plating processing section in which a plurality of surface treatment tanks are arranged, and then the workpiece to be plated is post-processed.

複数の表面処理槽は、メッキされる被処理物に応じて異なるメッキ厚さ等の異なるメッキ条件を有しており、被処理物はそのメッキ条件に応じた選択された表面処理槽にて目的のメッキ時間処理がなされた後、次工程へと搬送される。   The plurality of surface treatment tanks have different plating conditions such as different plating thickness depending on the object to be plated, and the object to be processed is selected in the surface treatment tank selected according to the plating condition. After the plating time treatment is performed, it is transferred to the next process.

係るメッキ処理装置の被処理物搬送装置として、被処理物を保持した被処理物保持部材を搬送用キャリアに保持し、この搬送用キャリアを介して被処理物保持部材(被処理物)を搬送するようにした単独キャリア型搬送装置が用いられている。この単独キャリア型搬送装置は、所定の表面処理槽内でメッキ処理された被処理物保持部材(被処理物)を単独の搬送用キャリアで搬出した後、同じ単独の搬送用キャリアを次に搬入される被処理物保持部材(被処理物)の搬入開始位置へ戻し、戻された単独の搬送用キャリアで被処理物保持部材(被処理物)を所定の表面処理槽(例えば直前に被処理物が搬出された表面処理槽)に搬入(投入)している。   As a processing object transport device of such a plating apparatus, a processing object holding member holding a processing object is held by a transporting carrier, and the processing object holding member (processing object) is transported through the transporting carrier. A single carrier type conveying device is used. This single carrier type transfer device carries out the object holding member (object to be processed) plated in a predetermined surface treatment tank with a single transfer carrier, and then loads the same single transfer carrier. The processed object holding member (processed object) is returned to the carry-in start position, and the processed object holding member (processed object) is processed into a predetermined surface treatment tank (e.g. It is loaded (injected) into the surface treatment tank from which the objects are unloaded.

しかし、この単独キャリア型搬送装置では、選択された表面処理槽における被処理物保持部材(被処理物)の搬出及び搬入行程に時間的なロスを生じる弊害があった。   However, this single carrier type conveying apparatus has a problem that a time loss is caused in the unloading and loading process of the object holding member (object to be processed) in the selected surface treatment tank.

係る実情に鑑み、本発明は、表面処理装置の被処理物搬送装置において、特に選択された表面処理槽における被処理物の搬出及び搬入行程を1サイクル内で迅速に行なえるキャリア搬送装置を提案するものである。   In view of the actual situation, the present invention proposes a carrier transfer device that can quickly carry out the unloading and loading process of a workpiece in a selected surface treatment tank within one cycle in the workpiece transfer device of the surface treatment apparatus. To do.

上記の目的を達成するため、本発明は、上部に搬送用キャリアに支持されるキャリア係止部を設け、このキャリア係止部よりも下方に装架係止部を設け、下方に表面処理されるプリント基板などの被処理物を着脱自在に保持する保持部を設けた被処理物保持部材と、前記被処理物保持部材に保持された被処理物を投入可能な複数の前処理槽、複数の表面処理槽、複数の次処理槽を順に配置して構成した処理槽と、前処理槽に対応する上方位置に昇降自在な第1レールを配設すると共に、この第1レールに横移動自在に支持された被処理物保持部材を該第1レールの上昇位置において次位の前処理槽側に順次移送し、搬入乗せ換え位置に配置した前処理槽すなわち搬入乗せ換え前処理槽に対応する上方位置まで移送し得る第1移送手段(押送手段)をもつ第1乗せ換え搬送装置と、次処理槽に対応する上方位置に昇降自在な第2レールを配設すると共に、この第2レールに横移動自在に支持された被処理物保持部材を該第2レールの上昇位置において搬出乗せ換え位置に配置した次処理槽すなわち搬出乗せ換え次処理槽に対応する上方位置から次位の処理槽側に順次移送し得る第2移送手段(押送手段)をもつ第2乗せ換え搬送装置と、前記搬入乗せ換え前処理槽、複数の表面処理槽、及び前記搬出乗せ換え次処理槽にそれぞれ設けられ、被処理物保持部材の装架係止部を介して被処理物保持部材を該処理槽に装架可能とし、装架された被処理物保持部材に保持された被処理物を該処理槽内に投入可能に構成した装架台と、前記搬出乗せ換え次処理槽から表面処理槽を経て前記搬出乗せ換え次処理槽に至る横長さ範囲に対応する処理槽の上方位置に前記第1レール及び第2レールの昇降動と共に昇降動される昇降自在なキャリア用レールを配設すると共に、このキャリア用レールに横移動自在に装架された搬送用キャリアを設け、この搬送用キャリアは、キャリア用レールの下降位置において前記装架台に装架された被処理物保持部材に対して横移動がフリーな構造を有し、前記被処理物保持部材のキャリア係止部を下方から支持可能な支持部を有し、この搬送用キャリアを第1乗せ換え搬送装置側に配設した搬入用キャリアと第2乗せ換え搬送装置側に配設した搬出用キャリアとで構成したキャリア搬送装置を設け、前記搬入用キャリアは、前記キャリア用レールの下降位置において選択された表面処理槽への搬入位置(投入完了位置)から前記第1乗せ換え搬送装置の横方向の送り終点位置(搬入開始位置)までの戻り移動、この戻り位置で前記キャリア用レールの上昇移動に伴う上昇位置への上昇移動、前記キャリア用レールの上昇位置において選択された搬入位置の上方までの送り移動、この送り位置で前記キャリア用レールの下降移動に伴う下降位置への下降移動の各移動行程を1サイクルとして作動されるように構成され、前記搬出用キャリアは、前記キャリア用レールの下降位置において前記第2乗せ換え搬送装置の横方向の送り始点位置(搬出完了位置)から選択された表面処理槽への搬出位置(搬出開始位置)までの送り移動、この送り位置で前記キャリア用レールの上昇移動に伴う上昇位置への上昇移動、前記キャリア用レールの上昇位置において前記第2乗せ換え搬送装置の横方向の送り始点位置(搬出完了位置の上方位置)までの戻り移動、この戻り位置で前記キャリア用レールの下降移動に伴う下降位置への下降移動の各移動行程を1サイクルとして作動されるように構成され、前記搬入用キャリアの戻り移動と前記搬出用キャリアの送り移動を1サイクル作動における時間的に同じ移動行程とし、前記搬入用キャリアの送り移動と前記搬出用キャリアの戻り移動を1サイクル作動における時間的に同じ移動行程としたことを特徴とする表面処理装置の被処理物搬送装置を提供する。   In order to achieve the above object, according to the present invention, a carrier locking portion supported by a carrier for transportation is provided at the top, a mounting locking portion is provided below the carrier locking portion, and a surface treatment is performed below. A workpiece holding member provided with a holding part for detachably holding a workpiece such as a printed circuit board, a plurality of pretreatment tanks capable of feeding the workpiece held by the workpiece holding member, The surface treatment tank, a treatment tank constructed by sequentially arranging a plurality of next treatment tanks, and a first rail that can be raised and lowered at an upper position corresponding to the pretreatment tank are disposed, and the first rail can be moved laterally. The workpiece holding member supported on the first rail is sequentially transferred to the next pretreatment tank side at the ascending position of the first rail, and corresponds to the pretreatment tank arranged at the loading / replacement position, that is, the loading / replacement pretreatment tank. 1st transfer means (pushing hand) which can be transferred to an upper position ) And a second rail that can be raised and lowered at an upper position corresponding to the next processing tank, and a workpiece holding member that is supported by the second rail so as to move laterally. Second transfer means (pushing means) capable of sequentially transferring from the upper position corresponding to the next processing tank disposed at the unloading / changing position at the elevated position of the second rail to the next processing tank side. Are provided in a second transfer transfer device, a pre-transfer transfer pretreatment tank, a plurality of surface treatment tanks, and a carry-out transfer next treatment tank, respectively, via a mounting locking portion of a workpiece holding member. A worktable holding member that can be mounted on the treatment tank, and a worktable that can be loaded into the treatment tank. The carry-on / off from the next-treatment tank through the surface-treatment tank A carrier rail that can be moved up and down along with the up and down movement of the first rail and the second rail is disposed above the processing tank corresponding to the lateral length range leading to the replacement next processing tank. A carrier for transportation mounted horizontally is provided on the carrier carrier, and the carrier for transportation is free to move laterally with respect to the workpiece holding member mounted on the mounting table at the lowered position of the carrier rail. And a carrier for supporting the carrier holding portion of the workpiece holding member from below, and a carrier for loading and a second carrier placed on the side of the first transfer carrier device. A carrier transport device configured with a carrier for unloading disposed on the side of the replacement transport device is provided, and the carrier for loading is loaded into the surface treatment tank selected at the lowered position of the rail for carrier (loading). Return movement from the first transfer transfer position to the lateral transfer end position (loading start position) of the first transfer transport device, and the lift movement to the lift position accompanying the lift movement of the carrier rail at the return position, Each cycle of feeding movement up to the selected loading position at the raising position of the carrier rail and lowering movement to the lowering position accompanying the lowering movement of the carrier rail at this feeding position is operated as one cycle. The unloading carrier is unloaded to the surface treatment tank selected from the lateral transfer start point (unloading completion position) of the second transfer transfer device at the lowered position of the carrier rail. Feed movement to the start position), the lift movement to the lift position accompanying the lift movement of the carrier rail at this feed position, and the lift position of the carrier rail. Each return movement of the second transfer transport device to the lateral feed start point position (above the unloading completion position), and the downward movement to the lowered position accompanying the downward movement of the carrier rail at this return position The stroke is configured to be operated as one cycle, and the return movement of the carry-in carrier and the feed movement of the carry-out carrier are the same movement stroke in time in one cycle operation, and the feed movement of the carry-in carrier and the Provided is a workpiece transfer apparatus for a surface treatment apparatus, characterized in that the return movement of the carry-out carrier is the same movement process in time in one cycle operation.

本発明は、キャリア搬送装置の搬送用キャリアを第1乗せ換え搬送装置側に配設した搬入用キャリアと第2乗せ換え搬送装置側に配設した搬出用キャリアとで構成し、この搬入用キャリアと搬出用キャリアによって、選択された表面処理槽における被処理物の搬出及び搬入行程を1サイクル内で同時に完了できる。したがって、本発明によれば、選択された表面処理槽における被処理物の搬出及び搬入作業の大幅なスピードアップを達成できる。   The present invention comprises a carrier for transportation of a carrier transportation device comprising a carrier for loading disposed on the first transfer transportation device side and a carrier for unloading disposed on the second transportation transportation device side. The unloading carrier and the unloading carrier can simultaneously complete the unloading and loading process of the object to be processed in the selected surface treatment tank. Therefore, according to the present invention, it is possible to achieve a significant speed-up of unloading and loading work of the workpiece in the selected surface treatment tank.

本発明の好ましい実施形態を示した図面に基づいて説明する。   A preferred embodiment of the present invention will be described with reference to the drawings.

図1は本発明の表面処理装置の被処理物搬送装置の全体概略正面図を、図2は全体概略拡大側面図を示している。この被処理物搬送装置は、図1において右側から第1乗せ換え搬送装置1、キャリア搬送装置2、第2乗せ換え搬送装置3の順に構成してある。   FIG. 1 is an overall schematic front view of a workpiece transfer apparatus of a surface treatment apparatus of the present invention, and FIG. 2 is an overall schematic enlarged side view. The workpiece transfer apparatus is configured in the order of a first transfer transfer apparatus 1, a carrier transfer apparatus 2, and a second transfer transfer apparatus 3 from the right side in FIG.

また、これらの搬送装置1,2,3の下方には、複数の前処理槽4、複数の表面処理槽5、複数の次処理槽6を一方向に順に並べて配置してある。図1の左側に配置した最後部の前処理槽(搬入乗せ換え前処理槽)4(4b)、複数の表面処理槽5、及び図1の右側に配置した最前部の次処理槽(搬出乗せ換え次処理槽)6(6a)には、V字状の装架台7をそれぞれ設けている。この装架台7に被処理物保持部材の装架係止部を介して被処理物保持部材を該処理槽に装架し、装架された被処理物保持部材に保持された被処理物を該処理槽内に投入可能に構成している。   A plurality of pretreatment tanks 4, a plurality of surface treatment tanks 5, and a plurality of next treatment tanks 6 are sequentially arranged in one direction below these transfer apparatuses 1, 2, and 3. The last pretreatment tank (loading / replacement pretreatment tank) 4 (4b), a plurality of surface treatment tanks 5 arranged on the left side of FIG. 1, and the frontmost next treatment tank (carrying on and off) arranged on the right side of FIG. A V-shaped mounting base 7 is provided in each of the replacement processing tanks 6 (6a). A workpiece holding member is mounted on the processing tank via the mounting locking portion of the workpiece holding member on the mounting table 7, and the workpiece held by the mounted workpiece holding member is loaded. It is configured to be able to be charged into the processing tank.

符号8は表面処理(メッキ処理)されるプリント基板などの被処理物9を着脱自在に保持する被処理物保持部材を示している。この被処理物保持部材8は、上部に搬送用キャリアに支持されるキャリア係止部10を設け、このキャリア係止部10よりも下方に装架係止部11を設け、下方に表面処理(メッキ処理)されるプリント基板などの被処理物9を着脱自在に保持する製品保持部12を設けてある。前記装架係止部11はV字状の装架台7に上方から安定して装架されるように逆台形に形成され、この装架係止部11と装架台7によって被処理物保持部材8を処理槽上に跨った状態に装架できるようにしている。また、被処理物保持部材8には、前記装架係止部11よりも上方に形成されたレール摺動部13と、前記キャリア係止部10の上部に突設された押送体用係止片14とを有している。   Reference numeral 8 denotes a workpiece holding member that detachably holds a workpiece 9 such as a printed board to be surface-treated (plated). The workpiece holding member 8 is provided with a carrier locking portion 10 supported by a carrier for transportation at the top, a mounting locking portion 11 below the carrier locking portion 10, and a surface treatment ( There is provided a product holding part 12 for detachably holding an object 9 such as a printed circuit board to be plated. The mounting lock portion 11 is formed in an inverted trapezoidal shape so that it can be stably mounted on the V-shaped mounting base 7 from above, and the workpiece holding member is formed by the mounting locking portion 11 and the mounting base 7. 8 can be mounted in a state straddling the processing tank. Further, the workpiece holding member 8 includes a rail sliding portion 13 formed above the mounting locking portion 11, and a pusher locking protruding from the upper portion of the carrier locking portion 10. And a piece 14.

前記キャリア係止部10はキャリア搬送装置2の搬送用キャリアの支持部によって支持されるよう構成されている。また前記レール摺動部13は第1及び第2乗せ換え搬送装置1,3のレール上(第1レール又は第2レール)に装架されこのレールに沿って摺動するように構成されている。また前記押送体用係止片14は第1及び第2乗せ換え搬送装置1,3の押送体の押送具と係合されるように構成されている。   The carrier locking portion 10 is configured to be supported by a carrier support portion of the carrier carrier device 2. The rail sliding portion 13 is mounted on the rails (first rail or second rail) of the first and second transfer transfer devices 1 and 3 and is configured to slide along the rails. . In addition, the pusher locking piece 14 is configured to be engaged with the pusher of the pusher of the first and second transfer transfer devices 1 and 3.

前記第1乗せ換え搬送装置1は、被処理物保持部材8(被処理物9)をキャリア搬送装置の始端部(すなわち、搬入開始位置で搬入用キャリアの戻り限界位置)まで移送する機能と、この移送過程で被処理物9を前処理槽4内に浸漬する機能を備えている。この第1搬送装置1は、前処理槽4に対応する上方位置に横方向に配設された昇降動する第1レール15と、この第1レール15に沿ってレール摺動部13を介して移動する被処理物保持部材8を搬入乗せ換え位置に配置した前処理槽(図1の左側に配置した前処理槽)すなわち搬入乗せ換え前処理槽4(4b)に対応する上方位置まで左方向に押送する押送手段16とから構成されている。この押送手段16は、水平方向に移動可能にされた押送杆17と、この押送杆17に垂設された押送具18とを有していて、前記押送杆17が図1において左方向に水平移動した場合、押送具18と第1レール15に装架された被処理物保持部材8の押送体用係止片14とが係合し、前記被処理物保持部材8を左方向に移動するように構成されている。   The first transfer transport device 1 has a function of transferring the workpiece holding member 8 (target workpiece 9) to the start end of the carrier transport device (that is, the return limit position of the loading carrier at the loading start position); A function of immersing the workpiece 9 in the pretreatment tank 4 during the transfer process is provided. The first transfer device 1 includes a first rail 15 that moves up and down in a lateral direction at an upper position corresponding to the pretreatment tank 4, and a rail sliding portion 13 along the first rail 15. Leftward to an upper position corresponding to a pretreatment tank (a pretreatment tank arranged on the left side in FIG. 1) in which the moving workpiece holding member 8 is placed at the carry-in and transfer position, that is, a carry-in and transfer pretreatment tank 4 (4b). It is comprised from the pushing means 16 which pushes to. The pushing means 16 has a pushing rod 17 that is movable in the horizontal direction, and a pushing tool 18 that is suspended from the pushing rod 17, and the pushing rod 17 is horizontal in the left direction in FIG. When moved, the pusher 18 engages with the pusher locking piece 14 of the workpiece holding member 8 mounted on the first rail 15, and moves the workpiece holding member 8 leftward. It is configured as follows.

また、前記第1乗せ換え搬送装置1を構成する第1レール15と押送手段16とは共に昇降動するように構成されていて、図1の下方に示す下降位置においては、被処理物9を前処理槽4内に浸漬し、図1の上方に示す上昇位置においては、被処理物保持部材8(被処理物9)を第1レール15に沿って移送しえるように構成されている。なお、第1レール15と押送手段16とは共に昇降動するように構成しても良く、また被処理物保持部材8(被処理物9)を支持した第1レール15のみ昇降動するように構成しても良い。   Further, both the first rail 15 and the pushing means 16 constituting the first transfer transport device 1 are configured to move up and down, and in the lowered position shown in the lower part of FIG. It is configured to be immersed in the pretreatment tank 4 and to move the workpiece holding member 8 (the workpiece 9) along the first rail 15 at the raised position shown in the upper part of FIG. The first rail 15 and the pushing means 16 may both be moved up and down, and only the first rail 15 that supports the workpiece holding member 8 (the workpiece 9) is raised and lowered. It may be configured.

前記キャリア搬送装置2は、前記搬入乗せ換え前処理槽4(4b)から複数の表面処理槽5を経て前記搬出乗せ換え次処理槽6(6a)に至る横長さ範囲に対応する処理槽の上方位置に配設されたキャリア用レール20と、このキャリア用レール20に横移動自在に装架された搬送用キャリア(搬入用キャリアと搬出用キャリア)を有している。前記キャリア用レール20は、前記第1レール15及び第2レール(後述する)の昇降動と共に一体に昇降動されるように構成されている。前記搬送用キャリアは、第1乗せ換え搬送装置1側に配設した搬入用キャリア21と第2乗せ換え搬送装置3側に配設した搬出用キャリア22の合計2台で構成されている。搬送用キャリア(搬入用キャリア21と搬出用キャリア22)は、キャリア用レール20の下降位置において前記装架台7に装架された被処理物保持部材8に対して横移動がフリーな構造を有している(図2のレール下降位置を参照)。また搬送用キャリア(搬入用キャリア21と搬出用キャリア22)は、前記被処理物保持部材8のキャリア係止部10を下方から支持可能な支持部23を有している。   The carrier transfer device 2 is located above the processing tank corresponding to a lateral length range from the carry-in / replacement pretreatment tank 4 (4b) through the plurality of surface treatment tanks 5 to the carry-out / transfer next treatment tank 6 (6a). It has a carrier rail 20 disposed at a position, and a carrier for transportation (loading carrier and carrier for unloading) mounted on the carrier rail 20 so as to be laterally movable. The carrier rail 20 is configured to move up and down integrally with the up and down movement of the first rail 15 and the second rail (described later). The carrier for transportation is composed of a total of two carriers, namely, a carry-in carrier 21 disposed on the first transfer conveyance device 1 side and a carry-out carrier 22 disposed on the second transfer conveyance device 3 side. The transport carriers (the carry-in carrier 21 and the carry-out carrier 22) have a structure in which lateral movement is free with respect to the workpiece holding member 8 mounted on the mounting table 7 at the lowered position of the carrier rail 20. (Refer to the rail lowered position in FIG. 2). Moreover, the carrier for conveyance (the carrier 21 for carrying in and the carrier 22 for carrying out) has the support part 23 which can support the carrier latching | locking part 10 of the said to-be-processed object holding member 8 from the downward direction.

前記搬入用キャリア21は、前記キャリア用レール20の下降位置において選択された表面処理槽5への搬入位置(投入完了位置)から前記第1乗せ換え搬送装置1の横方向の送り終点位置(搬入開始位置)までの戻り移動、この戻り位置で前記キャリア用レール20の上昇移動に伴う上昇位置への上昇移動、前記キャリア用レール20の上昇位置において選択された搬入位置の上方までの送り移動、この送り位置で前記キャリア用レール20の下降移動に伴う下降位置への下降移動の各移動行程を1サイクル(戻り移動、上昇移動、送り移動及び下降移動)として作動されるように構成されている。   The carry-in carrier 21 moves from the carry-in position (loading completion position) to the surface treatment tank 5 selected at the lowered position of the carrier rail 20 to the lateral feed end point position (carry-in) of the first transfer transfer device 1. A return movement to the start position), a lift movement to the lift position associated with the lift movement of the carrier rail 20 at the return position, a feed movement to a position above the loading position selected at the lift position of the carrier rail 20, Each moving stroke of the downward movement to the lowering position accompanying the lowering movement of the carrier rail 20 at this feeding position is configured to be operated as one cycle (return movement, ascent movement, feeding movement and lowering movement). .

また前記搬出用キャリア22は、前記キャリア用レール20の下降位置において前記第2乗せ換え搬送装置3の横方向の送り始点位置(搬出完了位置)から選択された表面処理槽5への搬出位置(搬出開始位置)までの送り移動、この送り位置で前記キャリア用レール20の上昇移動に伴う上昇位置への上昇移動、前記キャリア用レール20の上昇位置において前記第2乗せ換え搬送装置3の横方向の送り始点位置(搬出完了位置の上方位置)までの戻り移動、この戻り位置で前記キャリア用レール20の下降移動に伴う下降位置への下降移動の各移動行程を1サイクル(送り移動、上昇移動、戻り移動及び下降移動)として作動されるように構成されている。   Further, the carry-out carrier 22 is carried out to the surface treatment tank 5 selected from the lateral feed start point position (unload completion position) of the second transfer transport device 3 at the lowered position of the carrier rail 20 ( Feed movement to the unloading start position), the lift movement to the lift position accompanying the lift movement of the carrier rail 20 at this feed position, and the lateral direction of the second transfer transport device 3 at the lift position of the carrier rail 20 1 cycle (feeding movement, ascending movement) each return stroke to the feed start point position (above the unloading completion position), and at this return position, the lowering movement to the lowering position accompanying the lowering movement of the carrier rail 20 , Return movement and downward movement).

前記搬入用キャリア21の戻り移動と前記搬出用キャリア22の送り移動を1サイクル作動における時間的に同じ移動行程とし、前記搬入用キャリア21の送り移動と前記搬出用キャリア22の戻り移動を1サイクル作動における時間的に同じ移動行程としている。   The return movement of the carry-in carrier 21 and the feed movement of the carry-out carrier 22 are set to the same time in one cycle operation, and the feed movement of the carry-in carrier 21 and the return movement of the carry-out carrier 22 are performed in one cycle. The movement process is the same in time in operation.

前記搬入用キャリア21と前記搬出用キャリア22は、図2に示すように、前記キャリア用レール20に回転コロ24などを介して横移動自在に装架される。前記前記搬入用キャリア21と前記搬出用キャリア22の前記キャリア用レール20に沿う送り移動及び戻り移動の作動は、この実施形態においては、これらのキャリア21,22に個別に設置したサーボモータ25の正逆回転力を、キャリア用レールを架設した昇降架設台26に固定したラックギア27で送り又は戻し方向の直線運動に変換して行なっている。   As shown in FIG. 2, the carry-in carrier 21 and the carry-out carrier 22 are mounted on the carrier rail 20 through a rotating roller 24 and the like so as to be laterally movable. In this embodiment, the operations of the feed movement and the return movement of the carry-in carrier 21 and the carry-out carrier 22 along the carrier rail 20 are performed by servo motors 25 individually installed on these carriers 21 and 22. The forward / reverse rotational force is converted into a linear motion in the feed or return direction by a rack gear 27 fixed to an elevating mount 26 on which a carrier rail is mounted.

前記第2乗せ換え搬送装置3は、被処理物保持部材8(被処理物9)をキャリア搬送装置2の後端部(すなわち、搬出完了位置で搬出用キャリア22の戻り限界位置)から次処理工程へと移送する機能と、この移送過程で被処理物9を次処理工程にある次処理槽6内に浸漬する機能を備えている。この第2乗せ換え搬送装置3は、次処理槽6に対応する上方位置に横方向に配設された昇降動する第2レール30と、搬出用キャリア22に保持されて移送された被処理物保持部材8を搬出乗せ換え位置に配置した次処理槽(図1の右側に配置した次処理槽)すなわち搬出乗せ換え次処理槽6(6a)に対応する上方位置(すなわち搬出用キャリア22の戻り限界位置)から次工程まで押送する押送手段16とから構成されている。この押送手段16は、前記第1乗せ換え搬送装置1の押送手段16と同様に、水平方向に移動可能にされた押送杆17と、この押送杆17に垂設された押送具18とを有していて、前記押送杆17が図1において左方向に水平移動した場合、押送具18と第2レール30に装架された被処理物保持部材8の押送体用係止片14とが係合し、前記被処理物保持部材8を左方向に移動するように構成されている。   The second transfer transport device 3 performs the next processing of the workpiece holding member 8 (the workpiece 9) from the rear end of the carrier transport device 2 (that is, the return limit position of the unloading carrier 22 at the unloading completion position). It has a function of transferring to the process and a function of immersing the workpiece 9 in the next processing tank 6 in the next processing process in this transfer process. The second transfer transfer device 3 includes a second rail 30 that moves in the horizontal direction at an upper position corresponding to the next processing tank 6, and an object to be processed that is held and transferred by the carry-out carrier 22. The next processing tank (the next processing tank arranged on the right side in FIG. 1) in which the holding member 8 is disposed at the unloading / changing position, that is, the upper position corresponding to the unloading / changing next processing tank 6 (6a) (that is, the return of the unloading carrier 22). The feeding means 16 feeds from the limit position to the next process. Similar to the pushing means 16 of the first transfer transfer device 1, the pushing means 16 has a pushing rod 17 that is movable in the horizontal direction and a pushing tool 18 that is suspended from the pushing rod 17. When the feed rod 17 is moved horizontally in the left direction in FIG. 1, the pusher 18 and the feed member locking piece 14 of the workpiece holding member 8 mounted on the second rail 30 are engaged. In addition, the workpiece holding member 8 is configured to move leftward.

また、前記第2乗せ換え搬送装置3を構成する第2レール30と押送手段16とは共に昇降動するように構成されていて、図1の下方に示す下降位置においては、被処理物9を次処理槽6内に浸漬し、図1の上方に示す上昇位置においては、被処理物保持部材8(被処理物9)を第2レール30に沿って移送しえるように構成されている。なお、第2レール30と押送手段16とは共に昇降動するように構成しても良く、また被処理物保持部材8(被処理物9)を支持した第2レール30のみ昇降動するように構成しても良いことは第1移送装置1の場合と同様である。   Further, both the second rail 30 and the pushing means 16 constituting the second transfer transfer device 3 are configured to move up and down, and at the lowered position shown in the lower part of FIG. In the raised position shown in the upper part of FIG. 1, the workpiece holding member 8 (the workpiece 9) is configured to be transferred along the second rail 30 in the next treatment tank 6. The second rail 30 and the pushing means 16 may both be configured to move up and down, and only the second rail 30 that supports the workpiece holding member 8 (the workpiece 9) is raised and lowered. The configuration may be the same as in the case of the first transfer device 1.

前記第1乗せ換え搬送装置1の第1レール15から搬入用キャリア21への被処理物保持部材8の乗せ換えは、下降される第1レール15に支持されていた被処理物保持部材8はレール下降位置で装架台7に装架され、第1レール15からの支持を外される。レール下降位置で戻り限界位置に戻された搬入用キャリア21は、図2のレール下降位置に示すように、装架された被処理物保持部材8のキャリア係止部10に対する搬入用キャリア21の支持部23の上下間隔を、装架された被処理物保持部材8のレール摺動部13に対する第1レール15の支持部(レール上端部)の上下間隔よりも短く構成することによって、レール上昇過程で搬入用キャリア21の支持部23が被処理物保持部材8のキャリア係止部10を先に支持することになり、装架された被処理物保持部材8を搬入用キャリア21に乗せ換えできるようにしている。   When the workpiece holding member 8 is transferred from the first rail 15 to the carry-in carrier 21 of the first transfer transport device 1, the workpiece holding member 8 supported by the first rail 15 lowered is: It is mounted on the mounting table 7 at the rail lowered position, and the support from the first rail 15 is removed. The carry-in carrier 21 returned to the return limit position at the rail lowered position is, as shown in the rail lowered position in FIG. 2, the carry-in carrier 21 with respect to the carrier locking portion 10 of the mounted workpiece holding member 8. By configuring the vertical distance of the support portion 23 to be shorter than the vertical distance of the support portion (rail upper end portion) of the first rail 15 with respect to the rail sliding portion 13 of the mounted workpiece holding member 8, the rail rises. In the process, the support portion 23 of the carry-in carrier 21 first supports the carrier locking portion 10 of the workpiece holding member 8, and the loaded workpiece holding member 8 is transferred to the carry-in carrier 21. I can do it.

また、搬出用キャリア22から第2レール30への被処理物保持部材8の乗せ換えは、戻り限界位置にある搬出用キャリア22に支持されていた被処理物保持部材8はレール下降位置で装架台7に装架され、搬出用キャリア22からの支持を外され、搬出完了位置に置かれる。レール下降位置で搬出用キャリア22は戻り限界位置から送り位置へ送り移動され、次のレール上昇過程では送り位置にあるため、搬出完了位置に装架された被処理物保持部材8は上昇される第2レール30でそのレール摺動部13を支持され、第2レール30に乗せ換えられる。   In addition, when the workpiece holding member 8 is transferred from the carry-out carrier 22 to the second rail 30, the workpiece holding member 8 supported by the carry-out carrier 22 at the return limit position is mounted at the rail lowered position. Mounted on the gantry 7, the support from the unloading carrier 22 is removed, and the unloading position is placed. The unloading carrier 22 is moved from the return limit position to the feeding position at the rail lowering position and is at the feeding position in the next rail raising process, so that the workpiece holding member 8 mounted at the unloading completion position is raised. The rail sliding portion 13 is supported by the second rail 30 and is transferred to the second rail 30.

本発明に係る被処理物搬送装置は以上のように構成されており、以下その動作状態の一例について説明する。前記搬入乗せ換え前処理槽4(4b)及び複数の表面処理槽5の装架台7に装架係止部11を介して被処理物保持材8(被処理物9)がそれぞれ装架されている。図1の各レール(15,20,30)の下降位置において、左側に示した搬出用キャリア22は搬出完了位置(搬出用キャリア22の戻り限界位置)から選択された次に表面処理槽5から搬出される被処理物保持材8(被処理物9)を支持可能な下方位置へキャリア用レール20に沿って右方向に移動され、これと同時に右側に示した搬入用キャリア21は搬入完了位置(投入完了位置)から搬入開始位置(この搬入開始位置には前記搬入乗せ換え前処理槽4bの装架台7に被処理物保持材8が装架されている。)で待機している次に搬入される被処理物保持材8を支持可能な下方位置までキャリア用レール20に沿って右方向に戻される。   The workpiece transfer apparatus according to the present invention is configured as described above, and an example of the operation state will be described below. The workpiece holding material 8 (the workpiece 9) is mounted on the mounting bases 7 of the pre-loading / replacement pretreatment bath 4 (4b) and the plurality of surface treatment baths 5 via the rack engaging portions 11, respectively. Yes. In the lowered position of each rail (15, 20, 30) in FIG. 1, the unloading carrier 22 shown on the left side is selected from the unloading completion position (the return limit position of the unloading carrier 22) and then from the surface treatment tank 5. It is moved rightward along the carrier rail 20 to a lower position capable of supporting the workpiece holding material 8 (the workpiece 9) to be carried out, and at the same time, the loading carrier 21 shown on the right side is the loading completion position. Next, it is waiting from the (loading completion position) to the loading start position (the workpiece holding material 8 is mounted on the mounting table 7 of the loading / unloading pretreatment tank 4b at this loading start position). It returns to the right direction along the rail 20 for carriers to the lower position which can support the workpiece holding material 8 to be carried in.

この状態で各レール(15,20,30)は下降位置から上昇位置へ上昇される。このレール上昇過程において、搬出される被処理物保持材8は搬出用キャリア22の支持部23に支持され、表面処理槽5の装架台7から搬出用キャリア22に乗せ換えられ、これと同時に搬入される被処理物保持材8は搬入用キャリア21の支持部23に支持され、前記搬入乗せ換え前処理槽4bの装架台7から搬入用キャリア21に乗せ換えられる。   In this state, each rail (15, 20, 30) is raised from the lowered position to the raised position. In this rail ascending process, the workpiece holding material 8 to be carried out is supported by the support portion 23 of the carrying carrier 22 and is transferred from the mounting table 7 of the surface treatment tank 5 to the carrying carrier 22 and is carried in at the same time. The workpiece holding material 8 to be processed is supported by the support portion 23 of the carry-in carrier 21 and is transferred to the carry-in carrier 21 from the mounting table 7 of the pre-load-and-transfer pretreatment tank 4b.

この上昇位置において、搬出用キャリア22は搬出完了位置の上方位置までキャリア用レール20に沿って左方向に戻され(この上昇位置において直前に搬出完了位置にあった被処理物保持部材8は第2レール30に乗せ換えており、押送手段16によって左方向に送られている。)、これと同時に搬入用キャリア21は搬出用キャリア22で直前に搬出された表面処理槽5の上方位置までキャリア用レール20に沿って左方向に送られる。   In this raised position, the carry-out carrier 22 is returned to the left along the carrier rail 20 to a position above the carry-out completion position (the workpiece holding member 8 that was in the carry-out completion position immediately before in the raised position is the first position). The carrier 21 for loading is transferred to the left rail 30 by the pushing means 16.) At the same time, the carrier 21 for carrying in is carried to the upper position of the surface treatment tank 5 carried out immediately before by the carrier 22 for carrying out. It is sent along the rail 20 in the left direction.

この状態で各レール(15,20,30)が下降され下降位置へおかれると、搬出用キャリア22に装架されていた被処理物保持材8は該保持材の装架係止部11を介して前記搬出乗せ換え次処理槽6aに装架され、被処理物保持材8は搬出用キャリア22の支持部23から外され(図2の下降位置を参照)、表面処理槽5からの搬出を完了される。これと同時に、搬入用キャリア21に装架されていた被処理物保持材8は該保持材の装架係止部11が空いている選択された目的の表面処理槽5に装架され、被処理物保持材8は搬入用キャリア21の支持部23から外され(図2の下降位置を参照)、選択された表面処理槽5への搬入(投入)を完了される。搬出完了位置で搬出用キャリア22から外され被処理物保持材8は、各レール(15,20,30)の次の上昇時に第2乗せ換え搬送装置3の第2レール30に乗り換えられ、上昇位置で第2乗せ換え搬送装置3の押送手段16によって左方向の次工程側へ順次移送される。   When the rails (15, 20, 30) are lowered and placed in the lowered position in this state, the workpiece holding material 8 mounted on the unloading carrier 22 moves the mounting locking portion 11 of the holding material. The workpiece holding material 8 is removed from the support portion 23 of the carry-out carrier 22 (see the lowered position in FIG. 2) and carried out from the surface treatment bath 5. To be completed. At the same time, the workpiece holding material 8 mounted on the carry-in carrier 21 is mounted in the selected target surface treatment tank 5 in which the holding locking portion 11 of the holding material is vacant, The workpiece holding material 8 is removed from the support portion 23 of the carrier 21 for loading (see the lowered position in FIG. 2), and loading (injection) into the selected surface treatment tank 5 is completed. The workpiece holding material 8 removed from the carrier 22 for unloading at the unloading completion position is transferred to the second rail 30 of the second transfer transfer device 3 when the rail (15, 20, 30) is next lifted and lifted. It is sequentially transferred to the next process side in the left direction by the pushing means 16 of the second transfer transfer device 3 at the position.

このようにして、搬出用キャリア22で被処理物保持材8(被処理物9)を搬出された表面処理槽5に搬入用キャリア21で次に処理される被処理物保持材8(被処理物9)を搬入(投入)し、これらの動作が繰り返される。   In this way, the workpiece holding material 8 (processed) to be processed next by the carry-in carrier 21 into the surface treatment tank 5 in which the workpiece holding material 8 (processed material 9) is carried out by the carry-out carrier 22. The object 9) is carried in (input), and these operations are repeated.

本発明の全体概略正面図である。1 is an overall schematic front view of the present invention. 本発明の全体概略拡大側面図である。1 is an overall schematic enlarged side view of the present invention.

符号の説明Explanation of symbols

1 第1乗せ換え搬送装置
2 キャリア搬送装置
3 第2乗せ換え搬送装置
4 前処理槽
4b 搬入乗せ換え前処理槽
5 表面処理槽
6 次処理槽
6a 搬出乗せ換え次処理槽
7 装架台
8 被処理物保持部材
9 被処理物
10 キャリア係止部
11 装架係止部
13 レール摺動部
14 押送体用係止片
15 第1レール
16 押送手段
20 キャリア用レール
21 搬入用キャリア
22 搬出用キャリア
23 支持部
25 サーボモータ
30 第2レール
DESCRIPTION OF SYMBOLS 1 1st transfer conveyance apparatus 2 Carrier transfer apparatus 3 2nd transfer conveyance apparatus 4 Pretreatment tank 4b Pre-loading / changing pretreatment tank 5 Surface treatment tank 6 Subsequent treatment tank 6a Unloading / changing next treatment tank 7 Mounting base 8 To-be-processed Object holding member 9 Object to be processed 10 Carrier locking portion 11 Mounting locking portion 13 Rail sliding portion 14 Pushing piece locking piece 15 First rail 16 Feeding means 20 Carrier rail 21 Loading carrier 22 Unloading carrier 23 Support section 25 Servo motor 30 Second rail

Claims (1)

上部に搬送用キャリアに支持されるキャリア係止部を設け、このキャリア係止部よりも下方に装架係止部を設け、下方に表面処理されるプリント基板などの被処理物を着脱自在に保持する保持部を設けた被処理物保持部材と、前記被処理物保持部材に保持された被処理物を投入可能な複数の前処理槽、複数の表面処理槽、複数の次処理槽を順に配置して構成した処理槽と、前処理槽に対応する上方位置に昇降自在な第1レールを配設すると共に、この第1レールに横移動自在に支持された被処理物保持部材を該第1レールの上昇位置において次位の前処理槽側に順次移送し、搬入乗せ換え位置に配置した前処理槽すなわち搬入乗せ換え前処理槽に対応する上方位置まで移送し得る第1移送手段をもつ第1乗せ換え搬送装置と、次処理槽に対応する上方位置に昇降自在な第2レールを配設すると共に、この第2レールに横移動自在に支持された被処理物保持部材を該第2レールの上昇位置において搬出乗せ換え位置に配置した次処理槽すなわち搬出乗せ換え次処理槽に対応する上方位置から次位の処理槽側に順次移送し得る第2移送手段をもつ第2乗せ換え搬送装置と、前記搬入乗せ換え前処理槽、複数の表面処理槽、及び前記搬出乗せ換え次処理槽にそれぞれ設けられ、被処理物保持部材の装架係止部を介して被処理物保持部材を該処理槽に装架可能とし、装架された被処理物保持部材に保持された被処理物を該処理槽内に投入可能に構成した装架台と、前記搬出乗せ換え次処理槽から表面処理槽を経て前記搬出乗せ換え次処理槽に至る横長さ範囲に対応する処理槽の上方位置に前記第1レール及び第2レールの昇降動と共に昇降動される昇降自在なキャリア用レールを配設すると共に、このキャリア用レールに横移動自在に装架された搬送用キャリアを設け、この搬送用キャリアは、キャリア用レールの下降位置において前記装架台に装架された被処理物保持部材に対して横移動がフリーな構造を有し、前記被処理物保持部材のキャリア係止部を下方から支持可能な支持部を有し、この搬送用キャリアを第1乗せ換え搬送装置側に配設した搬入用キャリアと第2乗せ換え搬送装置側に配設した搬出用キャリアとで構成したキャリア搬送装置を設け、前記搬入用キャリアは、前記キャリア用レールの下降位置において選択された表面処理槽への搬入位置から前記第1乗せ換え搬送装置の横方向の送り終点位置までの戻り移動、この戻り位置で前記キャリア用レールの上昇移動に伴う上昇位置への上昇移動、前記キャリア用レールの上昇位置において選択された搬入位置の上方までの送り移動、この送り位置で前記キャリア用レールの下降移動に伴う下降位置への下降移動の各移動行程を1サイクルとして作動されるように構成され、前記搬出用キャリアは、前記キャリア用レールの下降位置において前記第2乗せ換え搬送装置の横方向の送り始点位置から選択された表面処理槽への搬出位置までの送り移動、この送り位置で前記キャリア用レールの上昇移動に伴う上昇位置への上昇移動、前記キャリア用レールの上昇位置において前記第2乗せ換え搬送装置の横方向の送り始点位置までの戻り移動、この戻り位置で前記キャリア用レールの下降移動に伴う下降位置への下降移動の各移動行程を1サイクルとして作動されるように構成され、前記搬入用キャリアの戻り移動と前記搬出用キャリアの送り移動を1サイクル作動における時間的に同じ移動行程とし、前記搬入用キャリアの送り移動と前記搬出用キャリアの戻り移動を1サイクル作動における時間的に同じ移動行程としたことを特徴とする表面処理装置の被処理物搬送装置。   A carrier locking part supported by the carrier for transportation is provided on the upper part, a mounting locking part is provided below the carrier locking part, and the object to be processed such as a printed circuit board surface-treated below can be freely attached and detached. A workpiece holding member provided with a holding unit for holding, a plurality of pretreatment tanks, a plurality of surface treatment tanks, and a plurality of next treatment tanks that can be charged with the workpieces held by the workpiece holding member. A treatment tank arranged and configured, and a first rail that can be raised and lowered at an upper position corresponding to the pretreatment tank, and a workpiece holding member that is supported by the first rail so as to be laterally movable are provided in the first rail. It has a first transfer means capable of sequentially transferring to the next pretreatment tank side at the ascending position of one rail and transferring it to a pretreatment tank disposed at the loading / replacement position, that is, an upper position corresponding to the loading / replacement pretreatment tank. Corresponds to the first transfer transfer device and the next processing tank A second rail that is movable up and down at an upper position, and a workpiece holding member that is supported by the second rail so as to be laterally movable is disposed at the loading / replacement position at the raised position of the second rail. A second transfer transfer device having a second transfer means capable of sequentially transferring from the upper position corresponding to the processing tank, i.e., the unloading / replacement next processing tank, to the next processing tank side; Provided in each of the surface treatment tank and the next transfer / replacement treatment tank, the workpiece holding member can be mounted on the treatment tank via the mounting locking portion of the workpiece holding member, and mounted. A mounting base configured to allow the workpiece held by the workpiece holding member to be put into the treatment tank, and a horizontally long from the carry-out / replacement next treatment tank to the carry-out / replacement next treatment tank through the surface treatment tank In front of the processing tank corresponding to the range A carrier rail that can be moved up and down along with the up and down movement of the first rail and the second rail is provided, and a carrier for transportation mounted on the carrier rail so as to be laterally movable is provided. Has a structure that is free to move laterally with respect to the workpiece holding member mounted on the mounting base at the lowered position of the carrier rail, and supports the carrier locking portion of the workpiece holding member from below. A carrier transport device having a support portion that is configured by a carry-in carrier disposed on the first transfer transport device side and a carry-out carrier disposed on the second transfer transport device side. The carrier for loading is returned from the loading position to the surface treatment tank selected at the lowered position of the carrier rail to the lateral feed end position of the first transfer transfer device. In this return position, ascending movement to the ascending position accompanying the ascending movement of the carrier rail, feeding movement up to the loading position selected in the ascending position of the carrier rail, the carrier rail in the feeding position It is configured to operate with each moving stroke of the downward movement to the downward position accompanying the downward movement as one cycle, and the unloading carrier is in the lateral direction of the second transfer transport device at the downward position of the carrier rail. The feed movement from the feed start point position to the selected carry-out position to the surface treatment tank, the lift movement to the lift position accompanying the lift movement of the carrier rail at the feed position, and the first position at the lift position of the carrier rail Return movement to the lateral feed start point position of the two-way transfer transport device, and the lowering position accompanying the downward movement of the carrier rail at this return position Each moving stroke of the lowering movement is operated as one cycle, and the return movement of the carrying-in carrier and the feeding movement of the carrying-out carrier are made the same moving stroke in one cycle operation, and A workpiece transfer device for a surface treatment apparatus, wherein the carrier feed movement and the return movement of the unloading carrier are made to have the same time movement in one cycle operation.
JP2006349657A 2006-12-26 2006-12-26 Device for transporting object to be treated in surface treatment apparatus Pending JP2008156736A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006349657A JP2008156736A (en) 2006-12-26 2006-12-26 Device for transporting object to be treated in surface treatment apparatus
CNU2007201462639U CN201068342Y (en) 2006-12-26 2007-08-01 Treated object conveying appliance for surface treatment device
TW96219955U TWM338432U (en) 2006-12-26 2007-11-26 Processed-object moving apparatus of surface-treatment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006349657A JP2008156736A (en) 2006-12-26 2006-12-26 Device for transporting object to be treated in surface treatment apparatus

Publications (1)

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CN (1) CN201068342Y (en)
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CN102267623A (en) * 2010-06-02 2011-12-07 张家港永峰泰环保科技有限公司 Circulating system for overhead hanging tool
DE102012012990B4 (en) * 2011-06-30 2014-09-04 Almex Pe Inc. Surface treatment system and workpiece support support
CN109051796A (en) * 2018-08-22 2018-12-21 重庆大学 A kind of firing head automatic dipping medicine device

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Publication number Priority date Publication date Assignee Title
WO2014040224A1 (en) * 2012-09-11 2014-03-20 Apple Inc. Rack plating
CN115044956A (en) * 2022-08-17 2022-09-13 保德汇智科技(深圳)有限公司 Electroplating equipment and electroplating method based on intelligent hanger
CN115044956B (en) * 2022-08-17 2022-12-02 保德汇智科技(深圳)有限公司 Electroplating equipment and electroplating method based on intelligent hanger

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TWM338432U (en) 2008-08-11

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