M338432 (1) 八、新型說明 【新型所屬之技術領域】 本創作涉及表面處理裝置的被處理物搬運裝置，尤其 是涉及可在一個循環內迅速地進行所選擇的表面處理槽中 的被處理物的搬出以及搬入行程的裝置。 . 【先前技術】 | 在例如電解或無電解的電鍍處理裝置中，在排列了多 個前處理槽的前處理部中，對被保持在懸吊夾具等的被處 理物保持構件上的印刷電路板等的被處理物進行前處理， 然後，在排列了多個表面處理槽的電鍍處理部進行目標的 電鍍時間處理，之後，對經過了電鍍處理的被處理物進行 後處理。 多個表面處理槽根據所電鍍的被處理物具有不同的電 鍍厚度等的不同的電鍍條件，被處理物在根據其電鍍條件 I 而選擇的表面處理槽中進行目標的電鍍時間處理，然後， 被搬運到下一個工序。 作爲該電鍍處理裝置的被處理物搬運裝置，使用獨立 托架型搬運裝置，即，將保持被處理物的被處理物保持構 件保持在搬運用托架上，通過該搬運用托架搬運被處理物 保持構件（被處理物）。該獨立托架型搬運裝置，利用獨立 的搬運用托架將在規定的表面處理槽內經過電鍍處理的被 處理物保持構件（被處理物）搬出，然後，使該獨立搬運用 托架返回下一個要被搬入的被處理物保持構件（被處理物） -4- M338432 (2) 的搬入開始位置，利用返回的獨立搬運用托架將被處理物 保持構件（被處理物）搬入（放入）規定的表面處理槽（例如， 剛將被處理物搬出的表面處理槽）。 但是，在該獨立托架型搬運裝置中，具有在被選擇的 表面處理槽中的被處理物保持構件（被處理物）的搬出和搬 * 入行程上產生時間浪費的弊病。 * 鑒於該情況，本創作提出了一種托架搬運裝置，該托 > 架搬運裝置在表面處理裝置的被處理物搬運裝置中、尤其 可在一個循環內迅速進行所選擇的表面處理槽中的被處理 物的搬出和搬入行程。 【新型內容】 爲了實現上述目的，本創作提供一種表面處理裝置的 被處理物搬運裝置，其特徵在於， 設置有：被處理物保持構件、處理槽、第一轉換搬運 I 裝置、第二轉換搬運裝置、裝架台以及可自由升降的托架 用軌道， 在上述被處理物保持構件中，將支承在搬運用托架上 的托架卡止部設置在上部，將裝架卡止部設置在該托架上 定部的下方，將可自由裝拆地保持要進行表面處理的印制 電路板等的被處理物的保持部設置在下方； 上述處理槽依次設置多個前處理槽、多個表面處理槽 以及多個下一個處理槽而構成，上述表面處理槽可放入被 保持在上述被處理物保持構件上的被處理物； M338432 (3) 上述第一轉換搬運裝置在對應於前處理槽的上方位置 設置有自由升降的第一軌道，同時，具有第一移送機構（ 推送機構），該第一移送機構將可自由橫向移動地支承在 該第一軌道上的被處理物保持構件在該第一軌道的上升位 置依次向下一個前處理槽側移送，可移送到對應於設置在 - 搬入轉換位置的前處理槽、即搬入轉換前處理槽的上方位 . 置； | 上述第二轉換搬運裝置在對應於下一個處理槽的上方 位置設置有可自由升降的第二軌道，同時，具有第二移送 機構（推送機構），該第二移送機構將可自由橫向移動地支 承在該第二軌道上的被處理物保持構件在該第二軌道的上 升位置，從對應於設置在搬出轉換位置的下一個處理槽 ，即搬出轉換下一個處理槽的上方位置起依次移送到下一 個處理槽側； 上述裝架台分別設置在上述搬入轉換前處理槽、多個 I^ 表面處理槽以及上述搬出轉換下一個處理槽下，通過被處 理物保持構件的裝架卡止部可將被處理物保持構件裝架在 該處理槽上，可將保持於被裝架的被處理物保持構件上的 被處理物放入該處理槽內； 上述可自由升降的托架用軌道在對應於從上述搬出轉 換下一個處理槽起經過表面處理槽到達上述搬出轉換下一 個處理槽的橫長範圍的處理槽的上方位置，與上述第一軌 道和第二軌道的升降移動一起進行升降移動， 同時，在該托架用軌道上設置可自由橫向移動地被裝 -6 - M338432 (4) 架的搬運用托架， 該搬運用托架具有在托架用軌道的下降位置，相對於 裝架在上述裝架台上的被處理物保持構件可自由橫向移動 的結構，具有可從下方支承上述被處理物保持構件的托架 卡止部的支承部，並設置有托架搬運裝置，該托架搬運裝 • 置由將該搬運用托架設置在第一轉換搬運裝置側的搬入用 * 托架和設置在第二轉換搬運裝置側的搬出用托架構成， I 上述搬入用托架將以下的各移動行程作爲一個循環進 行動作，即，在上述托架用軌道的下降位置，從向所選擇 的表面處理槽的搬入位置（放入結束位置）開始到上述第一 轉換搬運裝置的橫向的搬運終點位置（搬入開始位置）爲止 的返回移動；在該返回位置，隨著上述托架用軌道的上升 移動而朝向上升位置的上升移動；在上述托架用軌道的上 升位置，直到所選擇的搬入位置的上方爲止的搬運移動； 該搬運位置，隨著上述托架用軌道的下降移動而朝向下降 > 位置進行的下降移動， 上述搬出用托架將以下的各移動行程作爲一個循環進 行動作，即，在上述托架用軌道的下降位置，從上述第二 轉換搬運裝置的橫向的搬運起點位置（搬出結束位置）開始 到向所選擇的表面處理槽的搬出位置（搬出開始位置）爲止 的搬運移動；在該搬運位置，隨著上述托架用軌道的上升 移動而朝向上升位置的上升移動；在上述托架用軌道的上 升位置直到上述第二轉換搬運裝置的橫向的搬運起點位置 (搬出結束位置的上升位置）爲止進行的返回移動；在該返 M338432 (5) 回位置，隨著上述托架用軌道的下降移動而朝向下降位置 進行的下降移動， 將上述搬入用托架的返回移動和上述搬出用托架的搬 運移動作爲一循環動作中的時間上相同的移動行程，將上 述搬入用托架的搬運移動和上述搬出用托架的返回移動作 • 爲一個循環動作中的時間上相同的移動行程。 ♦ 在本創作中，托架搬運裝置的搬運用托架通過配置在 I 第一轉換搬運裝置側的搬入用托架和配置在第二轉換搬運 裝置側的搬出用托架構成，通過該搬入用托架和搬出用托 架可在一個循環內同時完成所選擇的表面處理槽中的被處 理物的搬出以及搬入行程。因此，根據本創作，可實現所 選擇的表面處理槽中的被處理物的搬出以及搬入操作的大 幅的提速。 【實施方式】 根據所示的附圖就本創作的理想實施方式進行說明。 圖1是本創作的表面處理裝置的被處理物搬運裝置的 整體槪略正視圖，圖2是整體槪略放大側視圖。該被處理 物搬運裝置從圖1的右側起以第一轉換搬運裝置1、托架 搬運裝置2以及第二轉換搬運裝置3的順序構成。 並且’在追些搬運裝置1、2、3的下方，將多個前處 理槽4、多個表面處理槽5以及多個下一個處理槽6單向 地按順序排列設置。在設置於圖1左側的最後部的前處理 槽（搬入轉換前處理槽）4 (4b)、多個表面處理槽5以及設置 M338432 (6) 在圖1右側的最前部的下一個處理槽（搬出轉換下一個處 理槽）6(6 a)上分別設置V字形的裝架台7。在該裝架台7 上，通過被處理物保持構件的裝架卡止部、將被處理物保 持構件裝架在該處理槽上，可將保持在經過裝架的被處理 物保持構件上的被處理物放入該處理槽內。 • 符號8表示被處理物保持構件，該被處理物保持構件 • 可自由裝拆地保持要進行表面處理（電鍍處理）的印制電路 | 板等的被處理物9。該被處理物保持構件8將支承在搬運 用托架上的托架卡止部1 0設置在上部，將裝架卡止部i i 設置在該托架卡止部10的下方，將可自由裝拆地保持要 進行表面處理（電鍍處理）的印制電路板等被處理物9的產 品保持部1 2設置在下方。上述裝架卡止部1 1形成倒梯形 ，以便可從上方穩定地裝架到V字形的裝架台7上，通 過該裝架卡止部1 1和裝架台7可將被處理物保持構件8 裝架成跨在處理槽上的狀態。並且，在被處理物保持構件 • 8上具有形成在上述裝架卡止部11的更上方的軌道滑動 部1 3、和突出設置在上述托架卡止部1 〇的上部的推送體 用卡止片1 4。 上述托架卡止部10通過托架搬運裝置2的搬運用托 架的支承部進行支承。並且，上述軌道滑動部13裝架在 第一和第二轉換搬運裝置1、3的軌道上（第一軌道或第二 軌道）’沿著該軌道進行滑動。並且上述推送體用卡止片 14與第一和第二轉換搬運裝置丨、3的推送體的推送件進 行卡合。 M338432 (7) 上述第一轉換搬運裝置丨具有將被處理物保持構件 8 (被處理物9)移送到托架搬運裝置的起端部（g卩，在搬入 開始位置上搬入用托架的返回界限位置）的功能、和在該 移送過程中將被處理物9浸漬在前處理槽4內的功能。該 第一轉換搬運裝置1由第一軌道15和推送機構16構成， * 上述第一軌道1 5在對應於前處理槽4的上方位置橫向設 • 置’進行反降移動；上述推送機構1 6將沿著該第一軌道 > 1 5經由軌道滑動部1 3進行移動的被處理物保持構件8向 左側方向推送到設置於搬入轉換位置上的前處理槽（設置 在圖1左側的前處理槽），即對應於搬入轉換前處理槽 4(4b)的上方位置。該推送機構16具有可在水平方向移動 的推送杆17和垂直設置在該推送杆17上的推送件18, 在上述推送杆1 7在圖1中向左側方向水平移動的情況下 ，推送件1 8和裝架在第一軌道1 5上的被處理物保持構件 8的推送體用卡止片1 4進行卡合，使被處理物保持構件8 I 向左方移動。 並且，構成上述第一轉換搬運裝置1的第一軌道15 和推送機構16同時升降移動，在圖1的下方上述的下降 位置，將被處理物9浸漬在前處理槽4內，在圖1的上方 上述的上升位置，可沿著第一軌道1 5移送被處理物保持 構件8 (被處理物9)。另外，也可以構成爲第一軌道1 5和 推送機構 16同時升降移動，並且，也可以構成爲只有支 承被處理物保持構件8(被處理物9)的第一軌道15進行升 降移動。 -10- M338432 (8) 上托架搬運裝置2具有托架用軌道20和搬運用托架（ 搬入用托架和搬出用托架），上述托架用軌道20設置在處 理槽的上方位置，該處理槽對應於從上述搬入轉換前處理 槽4(4b)經過多個表面處理槽5到上述搬出轉換下一個處 理槽6(6a)的橫長範圍；上述搬運用托架可以自由橫向移 * 動地裝架在該托架用軌道20上。上述托架用軌道20與上 '' 述第一軌道15以及第二軌道（後述）的升降移動一起一體 > 地升降移動。上述搬運用托架由設置在第一轉換搬運裝置 1側的搬入用托架2 1和設置在第二轉換搬運裝置3側的 搬出用托架22共兩台構成。搬運用托架（搬入用托架21 和搬出用托架2 2)，具有在托架用軌道20的下降位置、 相對於裝架在上述裝架台7上的被處理物保持構件8自由 橫向移動的結構（參照圖2的軌道下降位置）。並且，搬運 用托架（搬入用托架21和搬出用托架22)具有可從下方支 承上述被處理物保持構件8的托架卡止部1 〇的支承部2 3 上述搬入用托架21將以下的各移動行程作爲一個循 環（返回移動、上升移動、搬運移動以及下降移動）進行動 作，即，在上述托架用軌道20的下降位置、從向所選擇 的表面處理槽5的搬入位置（放入結束位置）起到上述第一 轉換搬運裝置1的橫向的搬運終點位置（搬入開始位置）爲 止的返回移動；在該返回位置、隨著上述托架用軌道20 的上升移動向上升位置進行上升移動；在上述托架用軌道 20的上升位置、直到被選擇的搬入位置的上方爲止的搬 -11 - M338432 (9) 運移動；在該搬運位置、隨著上述托架用軌道20的下降 移動向下降位置進行的下降移動。 上述搬出用托架22將以下的各移動行程作爲一個循 環（搬運移動、上升移動、返回移動以及下降移動）進行動 作，即，在上述托架用軌道20的下降位置，從上述第二 • 轉換搬運裝置3的橫向搬運起點位置（搬出結束位置）起到 • 向所選擇的表面處理槽5的搬出位置（搬出開始位置）爲止 > 的搬運移動；在該搬運位置，隨著上述托架用軌道20的 上升移動，向上升位置移動的上升移動；在上述托架用軌 道20的上升位置，直到上述第二轉換搬運裝置3的橫向 搬運起點位置（搬出結束位置的上方位置）爲止的返回移動 ;在該返回位置，隨著上述托架用軌道20的下降移動， 向下降位置移動的下降移動。 將上述搬入用托架21的返回移動和上述搬出用托架 22的搬運移動作爲一個循環動作中的時間上相同的移動 I 行程，將上述搬入用托架21的搬運移動和上述搬出用托 架22的返回移動作爲一個循環動作中的時間上相同的移 動行程。 如圖2所示，上述搬入用托架21和上述搬出用托架 22通過旋轉滾柱24等可自由橫向移動地裝架在上述托架 用軌道20上。沿著上述搬入用托架21和上述搬出用托架 22的上述托架用軌道20的搬運移動和返回移動的動作在 本實施方式中是以如下方式進行的，即，將分別設置在托 架2 1、22上的伺服電動機25的正反轉動力矩利用齒條傳 -12- M338432 (10) 動裝置27轉換成搬運或返回方向的直線運動，上述齒條 傳動裝置固定在架設有托架用軌道的升降架設台26上。 上述第二轉換搬運裝置3，具有將被處理物保持構件 8(被處理物9)從托架搬運裝置2的後端部（β卩，在搬出結 束位置、搬出用托架22的返回界限位置）起移送到下一個 • 處理工序的功能、和在該移送過程中將被處理物9浸漬在 • 下一個處理工序的下一個處理槽6內的功能。該第二轉換 > 搬運裝置3由第二軌道30和推送機構16構成，上述第二 軌道30在對應於下一個處理槽6的上方位置橫向設置、 進行升降移動；上述推送機構16將被保持在搬出用托架 22上，進行移送的被處理物保持構件8，從與設置在搬出 轉換位置上的下一個處理槽（設置在圖1的右側的下一個 處理槽），即搬出轉換下一個處理槽6(6a)相對應的上方位 置（即，搬出用托架22的返回界限位置）開始推送到下一 個工序。該推送機構16與第一轉換搬運裝置1的推送機 > 構16 —樣，具有可向水平方向移動的推送杆17和垂直設 置在該推送杆17上的推送件18，在上述推送杆17在圖1 中向左水平移動的情況下，推送件1 8和裝架在第二軌道 30上的被處理物保持構件8的推送體用卡止片14進行卡 合，使被處理物保持構件8向左方移動。 並且，構成上述第二轉換搬運裝置3的第二軌道30 和推送機構1 6同時升降移動，在圖1的下方所示的下降 位置，將被處理物9浸漬在下一個處理槽6內’在圖1的 上方所示的上升位置，可沿著第二軌道3 0移送被處理物 -13- M338432 (11) 保持構件8(被處理物9)。另外，與第一轉換搬運裝置1 的情況相同，第二軌道3 0和推送機構1 6也可以構成爲同 時升降移動，並且，也可以構成爲只有支承被處理物保持 構件8(被處理物9)的第二軌道30進行升降移動。 將被處理物保持構件8從上述第一轉換搬運裝置1的 • 第一軌道15向搬入用托架21的轉換，是被支承在下降的 - 第一軌道1 5上的被處理物保持構件8在軌道下降位置被 | 裝架在裝架台7上，脫離第一軌道15的支承。如圖2的 軌道下降位置所示，在軌道下降位置返回到返回界限位置 / 的搬入用托架21，通過使搬入用托架21的支承部23相 對於被裝架的被處理物保持構件8的托架卡止部1 0的上 下間隔，比第一軌道1 5的支承部（軌道上端部）相對於被 裝架的被處理物保持構件8的軌道滑動部1 3的上下間隔 短，在軌道的上升過程中，搬入用托架21的支承部23先 支承被處理物保持構件8的托架卡止部1 0，可將被裝架 > 的被處理物保持構件8轉換到搬入用托架2 1上。 並且，被處理物保持構件8從搬出用托架22向第二 軌道30的轉換，是被支承在位於返回界限位置的搬出用 托架22上的被處理物保持構件8在軌道下降位置裝架到 裝架台7上，脫離搬出用托架22的支承，放置在搬出結 束位置上。在軌道下降位置，由於搬出用托架22從返回 界限位置向搬運位置進行搬運移動，在下一個軌道上升過 程中位於搬運位置，因此，被裝架在搬出結束位置上的被 處理物保持構件8在上升的第二軌道3 0被支承在軌道滑 -14- M338432 (12) 動部1 3上，被轉換到第二軌道3 0上。 本創作的被處理物搬運裝置如上上述地構成，以下就 其動作狀態的一個示例進行說明。被處理物保持構件8( 被處理物9)通過裝架卡止部11被分別裝架在上述搬入轉 換前處理槽4(4b)以及多個表面處理槽5的裝架台7上。 • 在圖1的各軌道（15、20、30)的下降位置，左側所示的搬 ， 出用托架22從搬出結束位置（搬出用托架22的返回界限 | 位置）起沿著托架用軌道20朝向下方位置、向右移動，該 下方位置可支承被選擇的下一個將從表面處理槽5搬出的 被處理物保持構件8(被處理物9)，與此同時，右側所示 的搬入用托架21沿著托架用軌道20從搬入結束位置（放 入結束位置）起向右方返回下方位置，該下方位置可支承 在搬入開始位置（在該搬入開始位置、上述被處理物保持 構件8裝架在上述搬入轉換前處理槽4b的裝架台7上）待 機的下一個被搬入的被處理物保持構件8。 I 在該狀態下，各軌道（15、20、30)從下降位置向上升 位置上升。在該軌道上升過程中，被搬出的被處理物保持 構件8被支承在搬出用托架22的支承部23，從表面處理 槽5的裝架台7轉換到搬出用托架22上，與此同時，被 搬入的被處理物保持構件8被支承在搬入用托架21的支 承部23上，從上述搬入轉換前處理槽4b的裝架台7轉換 到搬入用托架2 1。 在該上方位置，搬出用托架22沿著托架用軌道20向 左方返回、直到搬出結束位置的上方位置（在該上升位置 -15- M338432 (13) 、在此之前剛好位於搬出結束位置的被處理物保持構件8 被轉換到第二軌道3 0，通過推送機構1 6搬運到左方）。 與此同時，搬入用托架21在搬出用托架22上被沿著托架 用軌道20向左方搬運、直到剛剛搬出的表面處理槽5的 上方位置。 ' 在該狀態下，一旦各軌道（15、20、30)下降，被放置 ， 在下降位置，則裝架在搬出用托架22上的被處理物保持 | 構件8通過該保持構件的裝架卡止部1 1裝架到上述搬出 轉換下一個處理槽6a上，被處理物保持構件8脫離搬出 用托架22的支承部23 (參照圖2的下降位置），結從表面 處理槽5的搬出。與此同時，裝架在搬入用托架21上的 被處理物保持構件8的裝架卡止部1 1被裝架在空著的所 選擇的作爲目標的表面處理槽5上，被處理物保持構件8 脫離搬入用托架21的支承部23 (參照圖2的下降位置）， 結束向所選擇的表面處理槽5的搬入（放入）。在搬出結束 | 位置脫離搬出用托架22的被處理物保持構件8在各軌道 (15、20、30)的下一個上升時，被轉換到第二轉換搬運裝 置3的第二軌道30上，在上升位置通過第二轉換搬運裝 置3的推送機構1 6被依次移送到左方的下一個工序側。 通過這樣’將在搬入用托架21上進行下一個處理的 被處理物保持構件8(被處理物9)搬入（放入）在搬出用托架 22上搬出被處理物保持構件8(被處理物9)的表面處理槽 5中，返復進行這些動作。 M338432 (15) 20 托架用軌道 21 搬入用托架 22 搬出用托架 23 支承部 24 旋轉滾柱 • 25 伺服電動機 、 26 升降架設台 _ 27 齒條傳動裝置 3 0第二軌道M338432 (1) VIII. New Description [Technical Field of the Invention] The present invention relates to a workpiece handling apparatus of a surface treatment apparatus, and more particularly to a workpiece which can be quickly selected in a selected surface treatment tank in one cycle. The device that moves out and moves into the itinerary. [Prior Art] In a plating treatment apparatus such as an electrolysis or electroless electrolysis, a printed circuit held on a workpiece holding member such as a suspension jig in a pretreatment portion in which a plurality of pretreatment tanks are arranged The object to be processed such as a plate is subjected to pretreatment, and then the plating treatment process is performed on the plating treatment unit in which the plurality of surface treatment grooves are arranged, and then the object to be treated which has been subjected to the plating treatment is post-treated. The plurality of surface treatment tanks perform different plating conditions of the electroplated objects to have different plating thicknesses and the like, and the objects to be processed are subjected to a target plating time treatment in a surface treatment tank selected according to the plating condition I, and then, Move to the next step. In the workpiece conveyance device of the plating processing apparatus, a separate tray type conveyance device is used, that is, the workpiece holding member holding the workpiece is held by the conveyance bracket, and conveyed by the conveyance tray is processed. Object holding member (object to be processed). In the independent carrier type conveyance device, the workpiece holding member (object to be processed) which has been subjected to the plating treatment in the predetermined surface treatment tank is carried out by the independent conveyance bracket, and then the independent conveyance bracket is returned. 。 。 。 。 。 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A predetermined surface treatment tank (for example, a surface treatment tank that has just carried out the workpiece). However, in the independent carrier type conveyance device, there is a problem that time is wasted in the carry-out and the conveyance stroke of the workpiece holding member (object to be processed) in the selected surface treatment tank. * In view of this situation, the present invention proposes a carrier handling device which can be quickly carried out in a selected surface treatment tank in a workpiece handling device of the surface treatment device, particularly in one cycle. The moving out and moving in the processed object. [New Content] In order to achieve the above object, the present invention provides a workpiece conveying apparatus of a surface treatment apparatus, comprising: a workpiece holding member, a processing tank, a first transfer conveyance I device, and a second conversion conveyance In the above-described workpiece holding member, the bracket locking portion supported by the transport bracket is provided at the upper portion, and the rack locking portion is provided in the apparatus, the rack, and the rail for the rack that can be lifted and lowered. A holding portion of a workpiece such as a printed circuit board to be surface-treated is detachably held below the fixed portion of the tray; the processing tank is provided with a plurality of pre-treatment grooves and a plurality of surfaces in this order a treatment tank and a plurality of next treatment tanks, wherein the surface treatment tank can be placed in a workpiece to be held on the workpiece holding member; M338432 (3) The first conversion conveyance device corresponds to the pretreatment tank The upper position is provided with a first track freely lifting, and at the same time, has a first transfer mechanism (pushing mechanism), the first transfer mechanism will be freely lateral The workpiece holding member movably supported on the first rail is sequentially transferred to the next pretreatment tank side at the rising position of the first rail, and can be transferred to the pretreatment tank corresponding to the set-in shifting position, that is, The second transfer conveying device is provided with a second rail that can freely move up and down at a position corresponding to the upper position of the next processing tank, and has a second transfer mechanism (pushing mechanism). The second transfer mechanism converts the workpiece holding member supported on the second rail freely laterally at a rising position of the second rail from the next processing tank provided at the carry-out switching position, that is, the shifting out The upper position of the next processing tank is sequentially transferred to the next processing tank side; and the mounting racks are respectively disposed under the loading and unloading processing tank, the plurality of surface treatment tanks, and the loading and unloading conversion processing tank, and are processed. The mounting locking portion of the object holding member can mount the workpiece holding member on the processing tank, and can be held by the mounted rack The object to be processed on the workpiece holding member is placed in the processing tank; and the rail for freely lifting and lowering is passed through the surface treatment tank corresponding to the transfer from the processing tank to the loading and discharging to the next processing tank. The upper position of the processing tank of the horizontally long range is moved up and down together with the lifting movement of the first rail and the second rail, and at the same time, the bracket rail is provided with freely laterally movable to be mounted -6 - M338432 (4 a carriage for transporting the bracket, the transport bracket having a structure that is movably movable laterally with respect to the workpiece holding member mounted on the mount base at a lowered position of the bracket rail, and having a supportable downward support The support portion of the bracket locking portion of the workpiece holding member is provided with a tray transporting device for carrying in the transporting bracket on the side of the first switching conveyance device* The bracket and the carrying-out bracket provided on the second transfer conveying device side are configured, and the loading bracket performs the following movement strokes as one cycle, that is, The return from the loading position (the insertion end position) of the selected surface treatment tank to the conveyance end position (the loading start position) of the first transfer conveyance device in the downward position of the carrier rail Movement at the return position, as the upward movement of the carrier rail moves upward toward the ascending position; at the rising position of the carrier rail, the transport movement up to the top of the selected loading position; The position of the carriage is lowered toward the lower position by the downward movement of the carriage rail, and the carry-out carriage operates the following movement strokes as one cycle, that is, the carriage rail is lowered. The conveyance movement from the conveyance starting position (the carry-out end position) in the horizontal direction of the second transfer conveyance device to the carry-out position (the carry-out start position) of the selected surface treatment tank; The carriage moves with the ascending movement of the rail toward the ascending position; in the above bracket The returning position of the rail is up to the returning movement start position of the second transfer conveying device (the rising position of the carrying-out end position); at the return position of M338432 (5), the following rail is lowered. Moving downward and moving toward the lowering position, the return movement of the loading carriage and the conveyance movement of the loading/unloading tray are the same movement movements in one cycle operation, and the conveyance tray is moved. The return movement of the above-described carry-out carriage is the same as the movement time in one cycle operation. ♦ In the present invention, the carrier for transporting the carrier transporting device is configured by a loading tray disposed on the first transfer conveyor side and a loading tray disposed on the second transfer transport unit side. The carriage and the carry-out tray can simultaneously carry out the carry-out and carry-in stroke of the processed object in the selected surface treatment tank in one cycle. Therefore, according to the present invention, it is possible to realize a large speed increase of the carry-out and carry-in operation of the workpiece in the selected surface treatment tank. [Embodiment] An ideal embodiment of the present creation will be described based on the drawings shown. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic overall plan view of a workpiece handling device of a surface treatment apparatus of the present invention, and Fig. 2 is an enlarged schematic side elevational view. The workpiece conveyance device is configured in the order of the first transfer conveyance device 1, the carriage conveyance device 2, and the second transfer conveyance device 3 from the right side of Fig. 1 . Further, a plurality of front processing tanks 4, a plurality of surface treatment tanks 5, and a plurality of next processing tanks 6 are arranged in a unidirectional manner in order below the handling devices 1, 2, and 3. The pretreatment tank (loading pre-conversion treatment tank) 4 (4b), the plurality of surface treatment tanks 5, and the M338432 (6) disposed at the rearmost portion on the left side of Fig. 1 are the next processing tank at the forefront of the right side of Fig. 1 ( A V-shaped mounting table 7 is provided on each of the 6 (6 a) moving and unloading conversion processing tanks. In the mounting table 7, the holder holding portion of the workpiece holding member and the workpiece holding member are mounted on the processing tank, so that the workpiece holding member that has passed through the rack can be held by the workpiece holding member. The treatment is placed in the treatment tank. • Reference numeral 8 denotes a workpiece holding member, and the workpiece 9 such as a printed circuit board or a board to be subjected to surface treatment (plating treatment) can be detachably held. The workpiece holding member 8 is provided with a bracket locking portion 10 supported on the transport tray at the upper portion, and the rack locking portion ii is disposed below the bracket locking portion 10, and is freely mountable. The product holding portion 1 2 of the workpiece 9 such as a printed circuit board to be subjected to surface treatment (plating treatment) is disposed below. The above-described frame locking portion 11 is formed in an inverted trapezoid so as to be stably mounted from above to the V-shaped mounting table 7, and the workpiece holding member 8 can be held by the frame locking portion 1 1 and the mounting table 7. Mounted in a state of being spanned on the processing tank. Further, the workpiece holding member 8 has a rail sliding portion 13 formed above the cartridge locking portion 11 and a pusher card projecting from the upper portion of the bracket locking portion 1A. Stop film 1 4. The bracket locking portion 10 is supported by a support portion of the carrier holder of the tray transport device 2. Further, the rail sliding portion 13 is mounted on the rails (the first rail or the second rail) of the first and second transfer conveying devices 1, 3 to slide along the rail. Further, the pusher body locking piece 14 is engaged with the pusher of the push body of the first and second transfer conveyance devices 丨, 3. M338432 (7) The first transfer conveyance device 丨 has a start portion for transporting the workpiece holding member 8 (the workpiece 9) to the tray conveyance device (g卩, the return of the carriage for loading at the loading start position) The function of the boundary position) and the function of immersing the workpiece 9 in the pretreatment tank 4 during the transfer. The first transfer conveying device 1 is composed of a first rail 15 and a pushing mechanism 16, and the first rail 15 is laterally disposed to correspond to the upper position of the pretreatment tank 4 to perform a reverse movement; the pushing mechanism 16 The workpiece holding member 8 that has moved along the first rail > 15 via the rail sliding portion 13 is pushed to the front processing tank provided in the loading/converting position in the left direction (pre-processing disposed on the left side of Fig. 1) The groove corresponds to the upper position of the pre-conversion treatment tank 4 (4b). The push mechanism 16 has a push rod 17 that is movable in the horizontal direction and a pusher 18 that is vertically disposed on the push rod 17. When the push rod 17 is horizontally moved in the left direction in FIG. 1, the pusher 1 is pushed. 8 and the push object holding piece 14 of the workpiece holding member 8 mounted on the first rail 15 are engaged with each other, and the workpiece holding member 8 I is moved to the left. Further, the first rail 15 and the pushing mechanism 16 constituting the first transfer conveying device 1 are simultaneously moved up and down, and the workpiece 9 is immersed in the pretreatment tank 4 at the lower position shown in FIG. The object holding member 8 (object 9 to be processed) can be transferred along the first rail 15 at the above-described rising position. Further, the first rail 15 and the pushing mechanism 16 may be simultaneously moved up and down, and the first rail 15 supporting the workpiece holding member 8 (object 9 to be processed) may be configured to be moved up and down. -10- M338432 (8) The upper tray transporting device 2 includes a bracket rail 20 and a transport bracket (a loading bracket and a loading tray), and the bracket rail 20 is disposed above the processing tank. The processing tank corresponds to a horizontally long range from the plurality of surface treatment tanks 5 (4b) to the above-described carry-out conversion to the next processing tank 6 (6a); the transporting carriage can be freely moved laterally* The rack is mounted on the bracket rail 20. The bracket rail 20 is moved up and down together with the upper and lower movements of the first rail 15 and the second rail (described later). The transport bracket is composed of two transport brackets 2 1 provided on the first transfer conveyor 1 side and the carry-out carriage 22 provided on the second transfer conveyor 3 side. The transport bracket (the loading bracket 21 and the carry-out bracket 2 2) has a horizontally movable position with respect to the workpiece holding member 8 attached to the mount base 7 at the lowered position of the bracket rail 20 The structure (refer to the track down position of Fig. 2). Further, the transport bracket (the loading bracket 21 and the loading tray 22) has a support portion 2 that supports the bracket locking portion 1 of the workpiece holding member 8 from below. The following movement strokes are operated as one cycle (return movement, ascending movement, conveyance movement, and downward movement), that is, at the lowering position of the bracket rail 20 and from the loading position to the selected surface treatment tank 5 (the insertion end position) is a return movement until the conveyance end position (the carry-in start position) of the first transfer conveyance device 1 in the horizontal direction; and the return position is moved to the ascending position as the carriage rail 20 moves upward. Carrying up the movement; moving to the upper position of the bracket rail 20 up to the top of the selected loading position, and moving it; at the carrying position, following the bracket rail 20 The downward movement of the descending movement to the descending position. The carry-out tray 22 operates the following movement strokes as one cycle (transport movement, ascending movement, return movement, and descending movement), that is, from the second position conversion at the lowering position of the bracket rail 20 The lateral conveyance start position (the carry-out end position) of the conveyance device 3 serves as a conveyance movement to the carry-out position (the carry-out start position) of the selected surface treatment tank 5, and the conveyance position is used for the bracket The upward movement of the rail 20, the upward movement of the movement to the ascending position, and the return movement up to the lateral conveyance starting position of the second transfer conveyor 3 (the upper position of the carry-out end position) at the rising position of the bracket rail 20 At the return position, as the above-described carriage rail 20 moves downward, the downward movement moves toward the lowering position. The return movement of the loading tray 21 and the conveyance movement of the loading/unloading tray 22 are the same movement I strokes in one cycle operation, and the conveyance movement of the loading tray 21 and the loading tray are carried out. The return movement of 22 acts as the same moving stroke in time in a looping action. As shown in Fig. 2, the loading bracket 21 and the loading/unloading bracket 22 are mounted on the bracket rail 20 so as to be laterally movable by a rotating roller 24 or the like. The operation of transporting and returning the carriage rails 20 along the loading bracket 21 and the loading/unloading bracket 22 in the present embodiment is performed in such a manner that they are respectively provided in the brackets. The forward and reverse rotational moments of the servo motor 25 on the 2, 22 are converted into a linear motion in the transport or return direction by the rack transmission -12- M338432 (10), and the rack drive is fixed to the bracket. The lifting platform of the track is placed on the table 26. The second transfer conveyance device 3 has the workpiece holding member 8 (subject material 9) from the rear end portion of the carrier conveyance device 2 (β卩, at the carry-out end position, and the return limit position of the carry-out tray 22) The function of transferring to the next processing step and the function of immersing the workpiece 9 in the next processing tank 6 of the next processing step during the transfer. The second conversion > the conveying device 3 is constituted by the second rail 30 and the pushing mechanism 16, and the second rail 30 is laterally disposed at a position corresponding to the upper position of the next processing tank 6, and is moved up and down; the pushing mechanism 16 is held The object holding member 8 that has been transported on the carry-out tray 22 is carried out from the next processing tank (the next processing tank provided on the right side of FIG. 1) provided at the carry-out switching position, that is, the next one is carried out. The upper position corresponding to the treatment tank 6 (6a) (that is, the return limit position of the carry-out bracket 22) is pushed to the next step. The push mechanism 16 has a pusher lever 17 that is movable in the horizontal direction and a pusher 18 that is vertically disposed on the pusher lever 17, similar to the pusher of the first transfer conveyance device 1, in the pusher lever 17 In the case of moving horizontally to the left in FIG. 1, the pusher 18 is engaged with the pusher holding piece 14 of the workpiece holding member 8 mounted on the second rail 30, so that the object holding member is handled. 8 Move to the left. Further, the second rail 30 and the pushing mechanism 16 constituting the second transfer conveying device 3 are simultaneously moved up and down, and the workpiece 9 is immersed in the next processing tank 6 at the lowering position shown in the lower side of Fig. 1 The rising position shown at the top of 1 can transfer the workpiece - 13 - M338432 (11) holding member 8 (object 9 to be processed) along the second rail 30. Further, as in the case of the first transfer conveying device 1, the second rail 30 and the pushing mechanism 16 may be configured to be simultaneously moved up and down, and may be configured to support only the workpiece holding member 8 (object 9 to be processed) The second track 30 is moved up and down. The conversion of the workpiece holding member 8 from the first rail 15 of the first transfer conveying device 1 to the loading tray 21 is the workpiece holding member 8 supported on the lowered first rail 15 At the track lowering position, it is mounted on the mounting table 7, and is detached from the support of the first rail 15. As shown in the track descending position of FIG. 2, the loading bracket 21 that has returned to the returning limit position at the track lowering position, and the support portion 23 of the loading bracket 21 with respect to the workpiece holding member 8 to be mounted The upper and lower intervals of the bracket locking portion 10 are shorter than the upper and lower intervals of the support portion (the upper end portion of the rail) of the first rail 15 with respect to the rail sliding portion 13 of the workpiece holding member 8 to be mounted. During the ascending process of the rail, the support portion 23 of the loading tray 21 first supports the bracket locking portion 10 of the workpiece holding member 8, and can switch the workpiece holding member 8 to be loaded into the loading member. On the bracket 2 1. In addition, the workpiece holding member 8 is transferred from the carry-out bracket 22 to the second rail 30, and the workpiece holding member 8 supported by the carry-out bracket 22 at the return limit position is mounted at the rail lowering position. The mounting stand 7 is detached from the loading and unloading bracket 22 and placed at the carry-out end position. At the rail-down position, the carry-out bracket 22 is transported from the return limit position to the transport position, and is placed at the transport position during the next rail ascent. Therefore, the workpiece holding member 8 mounted at the carry-out end position is The ascending second track 30 is supported on the track slide-14- M338432 (12) moving portion 13 and is switched to the second track 30. The workpiece conveyance device of the present invention is configured as described above, and an example of the operation state will be described below. The workpiece holding member 8 (object to be processed 9) is attached to the mounting table 7 of the plurality of surface treatment tanks 5 by the rack locking portion 11 and the pre-transformation processing tank 4 (4b). • At the lowering position of each of the rails (15, 20, 30) in Fig. 1, the loading/unloading bracket 22 shown on the left side is carried along the tray from the loading end position (return limit | position of the carrying-out bracket 22). The rail 20 is moved to the lower position toward the lower position, and the lower position can support the selected workpiece holding member 8 (object 9 to be processed) which is to be carried out from the surface treatment tank 5, and the right side is shown. The loading bracket 21 returns to the lower position from the loading end position (the insertion end position) along the bracket rail 20, and the lower position can be supported at the loading start position (the loading start position, the processed object) The holding member 8 is mounted on the mounting stand 7 of the pre-conversion pre-treatment tank 4b, and the next object to be processed holding member 8 that is carried in standby. I In this state, each of the rails (15, 20, 30) rises from the lowered position to the raised position. In the orbital ascending process, the workpiece holding member 8 that is carried out is supported by the support portion 23 of the carry-out carrier 22, and is switched from the mount 7 of the surface treatment tank 5 to the carry-out tray 22, and at the same time. The workpiece holding member 8 that has been carried in is supported by the support portion 23 of the loading tray 21, and is transferred from the mounting table 7 of the pre-transformation processing tank 4b to the loading tray 2 1 . At the upper position, the carry-out bracket 22 returns to the left along the carrier rail 20 until the position where the carry-out end position is reached (in the raised position -15- M338432 (13), just before the carry-out end position) The workpiece holding member 8 is switched to the second rail 30 and transported to the left by the push mechanism 16. At the same time, the loading tray 21 is conveyed to the left along the carrier rail 20 on the loading tray 22 until the upper position of the surface treatment tank 5 that has just been carried out. In this state, once the respective rails (15, 20, 30) are lowered and placed, in the lowered position, the workpiece held on the carry-out tray 22 holds the member 8 through the mounting member. The locking portion 1 1 is attached to the loading/unloading conversion processing groove 6a, and the workpiece holding member 8 is separated from the support portion 23 of the loading/unloading tray 22 (see the lowered position in FIG. 2), and is bonded from the surface treatment tank 5. Move out. At the same time, the mounting locking portion 11 of the workpiece holding member 8 mounted on the loading tray 21 is mounted on the selected target surface treatment tank 5 which is empty, and the workpiece is processed. The holding member 8 is separated from the support portion 23 of the loading bracket 21 (see the lowered position in FIG. 2), and the loading (putting) into the selected surface treatment tank 5 is completed. At the end of the carry-out | the workpiece holding member 8 that has been separated from the carry-out tray 22 is switched to the second rail 30 of the second transfer conveyance device 3 when the next rail (15, 20, 30) is raised. The pushing mechanism 16 that has passed through the second transfer conveying device 3 at the rising position is sequentially transferred to the next process side on the left side. In this way, the workpiece holding member 8 (the workpiece 9) that has been subjected to the next processing in the loading tray 21 is carried in (loaded) on the loading tray 22, and the workpiece holding member 8 is carried out (processed) In the surface treatment tank 5 of the object 9), these operations are repeated. M338432 (15) 20 Bracket rail 21 Loading bracket 22 Carrying out bracket 23 Supporting part 24 Rotating roller • 25 Servo motor, 26 Lifting stand _ 27 Rack drive 3 0 Second track