TW201903833A - 具有原子層蝕刻重置之選擇性沉積 - Google Patents

具有原子層蝕刻重置之選擇性沉積 Download PDF

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Publication number
TW201903833A
TW201903833A TW107112841A TW107112841A TW201903833A TW 201903833 A TW201903833 A TW 201903833A TW 107112841 A TW107112841 A TW 107112841A TW 107112841 A TW107112841 A TW 107112841A TW 201903833 A TW201903833 A TW 201903833A
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substrate
deposition
deposited
chamber
processing
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TW107112841A
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Chinese (zh)
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卡蒲 瑟利西 瑞迪
梅利哈 格茲德 蘭維爾
納葛 珊卡
丹尼斯 Ｍ 豪斯曼恩
大衛 查爾斯 史密斯
卡爾提克 斯瓦哈瑪克里斯南
大衛 Ｗ 波特
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美商蘭姆研究公司
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
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    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C23C16/303—Nitrides
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
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    • C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
    • C23C16/45536—Use of plasma, radiation or electromagnetic fields
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
    • H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
    • H01L21/02178—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing aluminium, e.g. Al2O3
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    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
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    • H01L21/0234—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
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    • H01L21/31116—Etching inorganic layers by chemical means by dry-etching
    • H01L21/31122—Etching inorganic layers by chemical means by dry-etching of layers not containing Si, e.g. PZT, Al2O3
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
TW107112841A 2017-04-19 2018-04-16 具有原子層蝕刻重置之選擇性沉積 TW201903833A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762487411P 2017-04-19 2017-04-19
US62/487,411 2017-04-19
US15/581,951 US10559461B2 (en) 2017-04-19 2017-04-28 Selective deposition with atomic layer etch reset
US15/581,951 2017-04-28

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US (2) US10559461B2 (enExample)
JP (1) JP2018182322A (enExample)
KR (3) KR102608585B1 (enExample)
CN (1) CN108735675B (enExample)
SG (1) SG10201800863VA (enExample)
TW (1) TW201903833A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12398038B2 (en) 2020-04-14 2025-08-26 Kwansei Gakuin Educational Foundation Manufacturing method of modified aluminum nitride raw material, modified aluminum nitride raw material, manufacturing method of aluminum nitride crystals, and downfall defect prevention method

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9576811B2 (en) 2015-01-12 2017-02-21 Lam Research Corporation Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
US9806252B2 (en) 2015-04-20 2017-10-31 Lam Research Corporation Dry plasma etch method to pattern MRAM stack
US9870899B2 (en) 2015-04-24 2018-01-16 Lam Research Corporation Cobalt etch back
US10229837B2 (en) 2016-02-04 2019-03-12 Lam Research Corporation Control of directionality in atomic layer etching
US10727073B2 (en) 2016-02-04 2020-07-28 Lam Research Corporation Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces
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US10176984B2 (en) 2017-02-14 2019-01-08 Lam Research Corporation Selective deposition of silicon oxide
US10546748B2 (en) 2017-02-17 2020-01-28 Lam Research Corporation Tin oxide films in semiconductor device manufacturing
US10242866B2 (en) 2017-03-08 2019-03-26 Lam Research Corporation Selective deposition of silicon nitride on silicon oxide using catalytic control
US9911595B1 (en) 2017-03-17 2018-03-06 Lam Research Corporation Selective growth of silicon nitride
US10559461B2 (en) 2017-04-19 2020-02-11 Lam Research Corporation Selective deposition with atomic layer etch reset
US10832909B2 (en) 2017-04-24 2020-11-10 Lam Research Corporation Atomic layer etch, reactive precursors and energetic sources for patterning applications
US10763083B2 (en) 2017-10-06 2020-09-01 Lam Research Corporation High energy atomic layer etching
US10515815B2 (en) 2017-11-21 2019-12-24 Lam Research Corporation Atomic layer deposition and etch in a single plasma chamber for fin field effect transistor formation
US10734238B2 (en) 2017-11-21 2020-08-04 Lam Research Corporation Atomic layer deposition and etch in a single plasma chamber for critical dimension control
US10658174B2 (en) 2017-11-21 2020-05-19 Lam Research Corporation Atomic layer deposition and etch for reducing roughness
US10460930B2 (en) 2017-11-22 2019-10-29 Lam Research Corporation Selective growth of SiO2 on dielectric surfaces in the presence of copper
US10446394B2 (en) 2018-01-26 2019-10-15 Lam Research Corporation Spacer profile control using atomic layer deposition in a multiple patterning process
US11101163B2 (en) * 2018-01-30 2021-08-24 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for automated robotic arm sensing
CN111771264A (zh) 2018-01-30 2020-10-13 朗姆研究公司 在图案化中的氧化锡心轴
WO2019169335A1 (en) 2018-03-02 2019-09-06 Lam Research Corporation Selective deposition using hydrolysis
EP3776636B1 (en) 2018-03-30 2025-05-07 Lam Research Corporation Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials
KR102626263B1 (ko) * 2019-02-20 2024-01-16 에이에스엠 아이피 홀딩 비.브이. 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치
CN113924636A (zh) * 2019-05-20 2022-01-11 朗姆研究公司 作为SiCxOy的成核层的SixNy
KR20250008974A (ko) * 2019-06-27 2025-01-16 램 리써치 코포레이션 교번하는 에칭 및 패시베이션 프로세스
JP6953480B2 (ja) * 2019-07-31 2021-10-27 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 半導体装置の製造方法、基板処理装置、およびプログラム
US20210375650A1 (en) * 2020-06-01 2021-12-02 Applied Materials, Inc. High temperature and vacuum isolation processing mini-environments
US12142467B2 (en) 2020-06-02 2024-11-12 Applied Materials, Inc. Self-assembled monolayer deposition from low vapor pressure organic molecules
KR20220107635A (ko) * 2021-01-25 2022-08-02 에스케이하이닉스 주식회사 선택적 영역 증착 방법 및 이를 적용한 전자 소자의 제조 방법
CN116917535A (zh) * 2021-03-02 2023-10-20 弗萨姆材料美国有限责任公司 硅介电膜的选择性淀积
JP2024536376A (ja) 2021-10-05 2024-10-04 アプライド マテリアルズ インコーポレイテッド 低抵抗率のタングステン特徴を形成するための方法
US12159804B2 (en) 2022-03-09 2024-12-03 Applied Materials, Inc. Tungsten molybdenum structures
KR20250004311A (ko) * 2022-04-21 2025-01-07 젤리스트 인코퍼레이티드 패턴화된 기판 상에 금속 산화물 또는 유전체 층의 구역 선택적 원자 층 증착

Family Cites Families (158)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5416280B2 (enExample) 1971-12-30 1979-06-21
JPH061769B2 (ja) 1983-08-10 1994-01-05 株式会社日立製作所 アルミナ膜のパターニング方法
US4539061A (en) 1983-09-07 1985-09-03 Yeda Research And Development Co., Ltd. Process for the production of built-up films by the stepwise adsorption of individual monolayers
JPH03133128A (ja) 1989-10-19 1991-06-06 Res Dev Corp Of Japan ディジタル・エッチング方法
US5298451A (en) 1991-04-30 1994-03-29 Texas Instruments Incorporated Recessed and sidewall-sealed poly-buffered LOCOS isolation methods
DE69329536T2 (de) 1992-03-02 2001-06-07 Matsushita Electric Industrial Co., Ltd. Chemisch adsorbierter Film und Verfahren zur Herstellung desselben
US5282925A (en) 1992-11-09 1994-02-01 International Business Machines Corporation Device and method for accurate etching and removal of thin film
JPH06151382A (ja) 1992-11-11 1994-05-31 Toshiba Corp ドライエッチング方法
DE4241045C1 (de) 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
US6083413A (en) 1995-10-19 2000-07-04 Massachusetts Institute Of Technology Metals removal process
US5766971A (en) 1996-12-13 1998-06-16 International Business Machines Corporation Oxide strip that improves planarity
US6255731B1 (en) 1997-07-30 2001-07-03 Canon Kabushiki Kaisha SOI bonding structure
KR20010034127A (ko) 1998-01-13 2001-04-25 조셉 제이. 스위니 이방성 플라티늄 프로화일을 위한 에칭 방법
US6323132B1 (en) 1998-01-13 2001-11-27 Applied Materials, Inc. Etching methods for anisotropic platinum profile
US6177353B1 (en) 1998-09-15 2001-01-23 Infineon Technologies North America Corp. Metallization etching techniques for reducing post-etch corrosion of metal lines
US6423582B1 (en) 1999-02-25 2002-07-23 Micron Technology, Inc. Use of DAR coating to modulate the efficiency of laser fuse blows
JP3662472B2 (ja) 2000-05-09 2005-06-22 エム・エフエスアイ株式会社 基板表面の処理方法
US6677242B1 (en) 2000-08-12 2004-01-13 Applied Materials Inc. Integrated shallow trench isolation approach
US6527855B2 (en) 2000-10-10 2003-03-04 Rensselaer Polytechnic Institute Atomic layer deposition of cobalt from cobalt metallorganic compounds
US6448192B1 (en) 2001-04-16 2002-09-10 Motorola, Inc. Method for forming a high dielectric constant material
EP1384257A2 (en) 2001-05-04 2004-01-28 Tokyo Electron Limited Ionized pvd with sequential deposition and etching
US20080268635A1 (en) * 2001-07-25 2008-10-30 Sang-Ho Yu Process for forming cobalt and cobalt silicide materials in copper contact applications
WO2003026019A1 (en) 2001-09-12 2003-03-27 Nec Corporation Semiconductor device and production method therefor
US7553427B2 (en) 2002-05-14 2009-06-30 Tokyo Electron Limited Plasma etching of Cu-containing layers
US6884730B2 (en) 2002-07-02 2005-04-26 Headway Technologies, Inc. Method of etching a film of magnetic material and method of manufacturing a thin-film magnetic head
JP5005170B2 (ja) 2002-07-19 2012-08-22 エーエスエム アメリカ インコーポレイテッド 超高品質シリコン含有化合物層の形成方法
TWI303090B (en) 2002-08-13 2008-11-11 Lam Res Corp Method for in-situ monitoring of patterned substrate processing using reflectometry
JP4142941B2 (ja) 2002-12-06 2008-09-03 株式会社東芝 半導体装置の製造方法
US6933239B2 (en) 2003-01-13 2005-08-23 Applied Materials, Inc. Method for removing conductive residue
US6858527B2 (en) 2003-04-14 2005-02-22 Intel Corporation Method to increase electromigration resistance of copper using self-assembled organic thiolate monolayers
US6841484B2 (en) 2003-04-17 2005-01-11 Chentsau Ying Method of fabricating a magneto-resistive random access memory (MRAM) device
JP2004332045A (ja) 2003-05-07 2004-11-25 Renesas Technology Corp 多層膜材料のドライエッチング方法
US6846752B2 (en) 2003-06-18 2005-01-25 Intel Corporation Methods and devices for the suppression of copper hillock formation
US7053010B2 (en) 2004-03-22 2006-05-30 Micron Technology, Inc. Methods of depositing silicon dioxide comprising layers in the fabrication of integrated circuitry, methods of forming trench isolation, and methods of forming arrays of memory cells
US20050233555A1 (en) 2004-04-19 2005-10-20 Nagarajan Rajagopalan Adhesion improvement for low k dielectrics to conductive materials
US7115522B2 (en) 2004-07-09 2006-10-03 Kabushiki Kaisha Toshiba Method for manufacturing semiconductor device
CN100576474C (zh) 2004-07-20 2009-12-30 应用材料股份有限公司 以钽前驱物taimata进行含钽材料的原子层沉积
US7368377B2 (en) 2004-12-09 2008-05-06 Interuniversitair Microelektronica Centrum (Imec) Vzw Method for selective deposition of a thin self-assembled monolayer
US7196955B2 (en) 2005-01-12 2007-03-27 Hewlett-Packard Development Company, L.P. Hardmasks for providing thermally assisted switching of magnetic memory elements
US20060162661A1 (en) 2005-01-22 2006-07-27 Applied Materials, Inc. Mixing energized and non-energized gases for silicon nitride deposition
US7235492B2 (en) 2005-01-31 2007-06-26 Applied Materials, Inc. Low temperature etchant for treatment of silicon-containing surfaces
JP4860219B2 (ja) 2005-02-14 2012-01-25 東京エレクトロン株式会社 基板の処理方法、電子デバイスの製造方法及びプログラム
US20110178092A1 (en) 2005-06-22 2011-07-21 Akbar Ali HIV-1 Protease Inhibitors
US7214626B2 (en) 2005-08-24 2007-05-08 United Microelectronics Corp. Etching process for decreasing mask defect
US20070238301A1 (en) 2006-03-28 2007-10-11 Cabral Stephen H Batch processing system and method for performing chemical oxide removal
US7795148B2 (en) 2006-03-28 2010-09-14 Tokyo Electron Limited Method for removing damaged dielectric material
US7368393B2 (en) 2006-04-20 2008-05-06 International Business Machines Corporation Chemical oxide removal of plasma damaged SiCOH low k dielectrics
US8530361B2 (en) 2006-05-23 2013-09-10 Air Products And Chemicals, Inc. Process for producing silicon and oxide films from organoaminosilane precursors
US7875312B2 (en) 2006-05-23 2011-01-25 Air Products And Chemicals, Inc. Process for producing silicon oxide films for organoaminosilane precursors
WO2007140813A1 (en) 2006-06-02 2007-12-13 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method of forming high-k dielectric films based on novel titanium, zirconium, and hafnium precursors and their use for semiconductor manufacturing
US8278176B2 (en) * 2006-06-07 2012-10-02 Asm America, Inc. Selective epitaxial formation of semiconductor films
WO2008008319A2 (en) 2006-07-10 2008-01-17 President And Fellows Of Harvard College Selective sealing of porous dielectric materials
US9245739B2 (en) 2006-11-01 2016-01-26 Lam Research Corporation Low-K oxide deposition by hydrolysis and condensation
US20080213479A1 (en) 2007-02-16 2008-09-04 Tokyo Electron Limited SiCN film formation method and apparatus
US20080242097A1 (en) 2007-03-28 2008-10-02 Tim Boescke Selective deposition method
US7858525B2 (en) 2007-03-30 2010-12-28 Intel Corporation Fluorine-free precursors and methods for the deposition of conformal conductive films for nanointerconnect seed and fill
KR101330707B1 (ko) 2007-07-19 2013-11-19 삼성전자주식회사 반도체 장치의 형성 방법
KR100905278B1 (ko) 2007-07-19 2009-06-29 주식회사 아이피에스 박막증착장치, 박막증착방법 및 반도체 소자의 갭-필 방법
JP5535945B2 (ja) 2008-02-27 2014-07-02 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 原子層蒸着（ａｌｄ）法を用いる基板上にチタン含有層を形成する方法
US7659158B2 (en) 2008-03-31 2010-02-09 Applied Materials, Inc. Atomic layer deposition processes for non-volatile memory devices
US7948044B2 (en) 2008-04-09 2011-05-24 Magic Technologies, Inc. Low switching current MTJ element for ultra-high STT-RAM and a method for making the same
US8252194B2 (en) 2008-05-02 2012-08-28 Micron Technology, Inc. Methods of removing silicon oxide
JP5408483B2 (ja) 2009-07-03 2014-02-05 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
JP5419983B2 (ja) 2009-07-31 2014-02-19 株式会社東芝 不揮発性記憶装置
US9034768B2 (en) 2010-07-09 2015-05-19 Novellus Systems, Inc. Depositing tungsten into high aspect ratio features
US20110139748A1 (en) 2009-12-15 2011-06-16 University Of Houston Atomic layer etching with pulsed plasmas
WO2011087698A2 (en) 2009-12-22 2011-07-21 Applied Materials, Inc. Pecvd multi-step processing with continuous plasma
JP2011216862A (ja) 2010-03-16 2011-10-27 Tokyo Electron Ltd 成膜方法及び成膜装置
KR101626954B1 (ko) 2010-03-29 2016-06-03 삼성전자주식회사 반도체 장치의 캐패시터 제조 방법 및 이에 따라 제조된 반도체 장치의 캐패시터
US8956983B2 (en) 2010-04-15 2015-02-17 Novellus Systems, Inc. Conformal doping via plasma activated atomic layer deposition and conformal film deposition
US8637411B2 (en) 2010-04-15 2014-01-28 Novellus Systems, Inc. Plasma activated conformal dielectric film deposition
US9076646B2 (en) 2010-04-15 2015-07-07 Lam Research Corporation Plasma enhanced atomic layer deposition with pulsed plasma exposure
US9611544B2 (en) 2010-04-15 2017-04-04 Novellus Systems, Inc. Plasma activated conformal dielectric film deposition
US9373500B2 (en) 2014-02-21 2016-06-21 Lam Research Corporation Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications
US8357614B2 (en) 2010-04-19 2013-01-22 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Ruthenium-containing precursors for CVD and ALD
US8343881B2 (en) 2010-06-04 2013-01-01 Applied Materials, Inc. Silicon dioxide layer deposited with BDEAS
US8669185B2 (en) 2010-07-30 2014-03-11 Asm Japan K.K. Method of tailoring conformality of Si-containing film
KR101147728B1 (ko) 2010-08-02 2012-05-25 주식회사 유진테크 사이클릭 박막 증착 방법
JP5416280B2 (ja) 2010-08-19 2014-02-12 株式会社アルバック ドライエッチング方法及び半導体装置の製造方法
US8945305B2 (en) 2010-08-31 2015-02-03 Micron Technology, Inc. Methods of selectively forming a material using parylene coating
US8524612B2 (en) 2010-09-23 2013-09-03 Novellus Systems, Inc. Plasma-activated deposition of conformal films
US20120108079A1 (en) 2010-10-29 2012-05-03 Applied Materials, Inc. Atomic Layer Deposition Film With Tunable Refractive Index And Absorption Coefficient And Methods Of Making
WO2012112553A1 (en) 2011-02-14 2012-08-23 Dionex Corporation Nanometer size chemical modified materials and uses
US8592005B2 (en) 2011-04-26 2013-11-26 Asm Japan K.K. Atomic layer deposition for controlling vertical film growth
US8546263B2 (en) 2011-04-27 2013-10-01 Applied Materials, Inc. Method of patterning of magnetic tunnel junctions
JP5964411B2 (ja) 2011-04-29 2016-08-03 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ コーティングプロセスにおいてフレキシブル基板をパッシベーションするためのデバイスおよび方法
US8664126B2 (en) 2011-06-10 2014-03-04 Applied Materials, Inc. Selective deposition of polymer films on bare silicon instead of oxide surface
TW201319299A (zh) 2011-09-13 2013-05-16 Applied Materials Inc 用於低溫電漿輔助沉積的活化矽前驅物
US8921228B2 (en) 2011-10-04 2014-12-30 Imec Method for selectively depositing noble metals on metal/metal nitride substrates
TWI627303B (zh) 2011-11-04 2018-06-21 Ａｓｍ國際股份有限公司 將摻雜氧化矽沉積在反應室內的基底上的方法
US8808561B2 (en) 2011-11-15 2014-08-19 Lam Research Coporation Inert-dominant pulsing in plasma processing systems
US20130129922A1 (en) 2011-11-21 2013-05-23 Qualcomm Mems Technologies, Inc. Batch processing for electromechanical systems and equipment for same
US8633115B2 (en) 2011-11-30 2014-01-21 Applied Materials, Inc. Methods for atomic layer etching
US8883028B2 (en) 2011-12-28 2014-11-11 Lam Research Corporation Mixed mode pulsing etching in plasma processing systems
KR101996942B1 (ko) 2012-03-09 2019-07-05 버슘머트리얼즈 유에스, 엘엘씨 박막 트랜지스터 소자 상에 실리콘 함유 막을 제조하는 방법
JP2013235912A (ja) 2012-05-08 2013-11-21 Tokyo Electron Ltd 被処理基体をエッチングする方法、及びプラズマエッチング装置
US9337018B2 (en) 2012-06-01 2016-05-10 Air Products And Chemicals, Inc. Methods for depositing films with organoaminodisilane precursors
US8802572B2 (en) 2012-07-10 2014-08-12 Applied Materials, Inc. Method of patterning a low-k dielectric film
WO2014015232A1 (en) 2012-07-20 2014-01-23 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Organosilane precursors for ald/cvd silicon-containing film applications
JP2014049466A (ja) 2012-08-29 2014-03-17 Tokyo Electron Ltd エッチング処理方法及び基板処理装置
JP5918108B2 (ja) 2012-11-16 2016-05-18 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置
US9041125B2 (en) 2013-03-11 2015-05-26 Taiwan Semiconductor Manufacturing Company, Ltd. Fin shape for fin field-effect transistors and method of forming
US20140349469A1 (en) 2013-05-22 2014-11-27 Qualcomm Mems Technologies, Inc. Processing for electromechanical systems and equipment for same
US9219007B2 (en) 2013-06-10 2015-12-22 International Business Machines Corporation Double self aligned via patterning
JP6170754B2 (ja) 2013-06-18 2017-07-26 株式会社日立国際電気 半導体装置の製造方法、基板処理装置およびプログラム
US9796739B2 (en) 2013-06-26 2017-10-24 Versum Materials Us, Llc AZA-polysilane precursors and methods for depositing films comprising same
KR102205853B1 (ko) 2013-06-27 2021-01-21 인텔 코포레이션 논-리소그래피식으로 패터닝된 지향성 자가 조립 정렬 촉진 층들
US9362163B2 (en) 2013-07-30 2016-06-07 Lam Research Corporation Methods and apparatuses for atomic layer cleaning of contacts and vias
US10453675B2 (en) 2013-09-20 2019-10-22 Versum Materials Us, Llc Organoaminosilane precursors and methods for depositing films comprising same
US20150111374A1 (en) * 2013-10-18 2015-04-23 International Business Machines Corporation Surface treatment in a dep-etch-dep process
JP2015109192A (ja) 2013-12-04 2015-06-11 株式会社ジャパンディスプレイ 有機エレクトロルミネッセンス表示装置
US9076651B1 (en) 2013-12-20 2015-07-07 Intermolecular, Inc. Gate stacks and ohmic contacts for SiC devices
US9214334B2 (en) * 2014-02-18 2015-12-15 Lam Research Corporation High growth rate process for conformal aluminum nitride
US9425078B2 (en) 2014-02-26 2016-08-23 Lam Research Corporation Inhibitor plasma mediated atomic layer deposition for seamless feature fill
US9873613B2 (en) 2014-02-28 2018-01-23 Functionalize, Inc. Nano or macro material functionalization and self assembled construction mediated by tris(trimethylsilyl)silane
US9257638B2 (en) 2014-03-27 2016-02-09 Lam Research Corporation Method to etch non-volatile metal materials
US10047435B2 (en) 2014-04-16 2018-08-14 Asm Ip Holding B.V. Dual selective deposition
US9331094B2 (en) 2014-04-30 2016-05-03 Sandisk Technologies Inc. Method of selective filling of memory openings
US9881788B2 (en) 2014-05-22 2018-01-30 Lam Research Corporation Back side deposition apparatus and applications
US9773683B2 (en) 2014-06-09 2017-09-26 American Air Liquide, Inc. Atomic layer or cyclic plasma etching chemistries and processes
TW201610204A (zh) 2014-07-26 2016-03-16 應用材料股份有限公司 矽碳氮氧化物的低溫分子層沉積
US9349637B2 (en) * 2014-08-21 2016-05-24 Lam Research Corporation Method for void-free cobalt gap fill
US9627608B2 (en) * 2014-09-11 2017-04-18 Lam Research Corporation Dielectric repair for emerging memory devices
KR102258812B1 (ko) 2014-09-26 2021-06-01 인텔 코포레이션 반도체 디바이스들에 대한 선택적 게이트 스페이서들
SG11201703195QA (en) 2014-10-24 2017-05-30 Versum Materials Us Llc Compositions and methods using same for deposition of silicon-containing film
JP6317232B2 (ja) 2014-10-29 2018-04-25 東京エレクトロン株式会社 選択成長方法および基板処理装置
US9609730B2 (en) 2014-11-12 2017-03-28 Lam Research Corporation Adjustment of VUV emission of a plasma via collisional resonant energy transfer to an energy absorber gas
US10170324B2 (en) 2014-12-04 2019-01-01 Lam Research Corporation Technique to tune sidewall passivation deposition conformality for high aspect ratio cylinder etch
JP2018500767A (ja) 2014-12-18 2018-01-11 ザ リージェンツ オブ ザ ユニバーシティ オブ コロラド，ア ボディー コーポレイトＴＨＥ ＲＥＧＥＮＴＳ ＯＦ ＴＨＥ ＵＮＩＶＥＲＳＩＴＹ ＯＦ ＣＯＬＯＲＡＤＯ，ａ ｂｏｄｙ ｃｏｒｐｏｒａｔｅ 逐次的な自己制御熱反応を使用する原子層エッチング（ａｌｅ）の新規の方法
US10082187B2 (en) 2014-12-22 2018-09-25 Ford Global Technologies, Llc Mechanically roughened brake rotors
US9576811B2 (en) * 2015-01-12 2017-02-21 Lam Research Corporation Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
KR20170125876A (ko) 2015-02-26 2017-11-15 어플라이드 머티어리얼스, 인코포레이티드 자기-조립 단분자층들을 사용하는 선택적인 유전체 증착을 위한 방법들
US11001599B2 (en) 2015-03-23 2021-05-11 Gelest Technologies, Inc. N-alkyl substituted cyclic and oligomeric perhydridosilazanes, methods of preparation thereof, and silicon nitride films formed therefrom
US9828672B2 (en) 2015-03-26 2017-11-28 Lam Research Corporation Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
US9806252B2 (en) 2015-04-20 2017-10-31 Lam Research Corporation Dry plasma etch method to pattern MRAM stack
US9870899B2 (en) 2015-04-24 2018-01-16 Lam Research Corporation Cobalt etch back
TWI717260B (zh) 2015-05-01 2021-01-21 美商應用材料股份有限公司 使用表面封端化學性質的薄膜介電質之選擇性沉積
US9449843B1 (en) 2015-06-09 2016-09-20 Applied Materials, Inc. Selectively etching metals and metal nitrides conformally
CN107660307B (zh) 2015-06-26 2021-11-05 应用材料公司 氧化硅膜的选择性沉积
US11421321B2 (en) 2015-07-28 2022-08-23 Asm Ip Holding B.V. Apparatuses for thin film deposition
US20170029948A1 (en) 2015-07-28 2017-02-02 Asm Ip Holding B.V. Methods and apparatuses for temperature-indexed thin film deposition
US10428421B2 (en) 2015-08-03 2019-10-01 Asm Ip Holding B.V. Selective deposition on metal or metallic surfaces relative to dielectric surfaces
US10566185B2 (en) * 2015-08-05 2020-02-18 Asm Ip Holding B.V. Selective deposition of aluminum and nitrogen containing material
US9972504B2 (en) 2015-08-07 2018-05-15 Lam Research Corporation Atomic layer etching of tungsten for enhanced tungsten deposition fill
US9520821B1 (en) 2015-08-19 2016-12-13 Nidec Motor Corporation System and method for optimizing flux regulation in electric motors
KR20170050056A (ko) 2015-10-29 2017-05-11 삼성전자주식회사 반도체 소자의 패턴 형성 방법
US9859128B2 (en) 2015-11-20 2018-01-02 Applied Materials, Inc. Self-aligned shielding of silicon oxide
US10727073B2 (en) 2016-02-04 2020-07-28 Lam Research Corporation Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces
US9991128B2 (en) 2016-02-05 2018-06-05 Lam Research Corporation Atomic layer etching in continuous plasma
US10176984B2 (en) 2017-02-14 2019-01-08 Lam Research Corporation Selective deposition of silicon oxide
US10242866B2 (en) 2017-03-08 2019-03-26 Lam Research Corporation Selective deposition of silicon nitride on silicon oxide using catalytic control
US10043656B1 (en) 2017-03-10 2018-08-07 Lam Research Corporation Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
US9911595B1 (en) 2017-03-17 2018-03-06 Lam Research Corporation Selective growth of silicon nitride
US10559461B2 (en) 2017-04-19 2020-02-11 Lam Research Corporation Selective deposition with atomic layer etch reset
US9997371B1 (en) 2017-04-24 2018-06-12 Lam Research Corporation Atomic layer etch methods and hardware for patterning applications
US10832909B2 (en) 2017-04-24 2020-11-10 Lam Research Corporation Atomic layer etch, reactive precursors and energetic sources for patterning applications
US10494715B2 (en) 2017-04-28 2019-12-03 Lam Research Corporation Atomic layer clean for removal of photoresist patterning scum
US10460930B2 (en) 2017-11-22 2019-10-29 Lam Research Corporation Selective growth of SiO2 on dielectric surfaces in the presence of copper

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12398038B2 (en) 2020-04-14 2025-08-26 Kwansei Gakuin Educational Foundation Manufacturing method of modified aluminum nitride raw material, modified aluminum nitride raw material, manufacturing method of aluminum nitride crystals, and downfall defect prevention method

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