JP5964411B2 - コーティングプロセスにおいてフレキシブル基板をパッシベーションするためのデバイスおよび方法 - Google Patents
コーティングプロセスにおいてフレキシブル基板をパッシベーションするためのデバイスおよび方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 95
- 238000000034 method Methods 0.000 title claims description 32
- 239000011248 coating agent Substances 0.000 claims description 128
- 238000000926 separation method Methods 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 47
- 239000007789 gas Substances 0.000 claims description 43
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 34
- 239000001301 oxygen Substances 0.000 claims description 34
- 229910052760 oxygen Inorganic materials 0.000 claims description 34
- 229910052782 aluminium Inorganic materials 0.000 claims description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 18
- 238000004804 winding Methods 0.000 claims description 13
- 238000001704 evaporation Methods 0.000 claims description 12
- 230000008020 evaporation Effects 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 238000002161 passivation Methods 0.000 description 34
- 239000010410 layer Substances 0.000 description 33
- 239000010408 film Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- -1 polypropylene Polymers 0.000 description 5
- 239000004743 Polypropylene Substances 0.000 description 4
- 239000005026 oriented polypropylene Substances 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000005025 cast polypropylene Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Description
Claims (15)
- フレキシブル基板のコーティングをパッシベーションするための装置であって、
−前記フレキシブル基板をコーティングするためのコーティングチャンバと、
−前記コーティングチャンバをさらなるチャンバから分離するために配置されるチャンバ分離要素と、
−前記チャンバ分離要素と共に間隙を形成するコーティングドラムと、
−前記間隙の中に酸素を供給するために前記チャンバ分離要素内に配置されるガス導入口と
を含み、
前記チャンバ分離要素が前記コーティングドラムの出口側に配置され、
前記ガス導入口が、前記チャンバ分離要素内で前記さらなるチャンバよりも前記コーティングチャンバの近くに配置され、
前記装置は動作中において前記コーティングチャンバ内の圧力が前記さらなるチャンバ内の圧力よりも小さくなるように運転されるように構成されており、供給された酸素が前記間隙内で前記コーティングチャンバに向かう方向に付勢されるようになっている、装置。 - 前記ガス導入口が、動作時に第1の材料の層と、反応的に酸化された前記第1の材料の酸化層とを含むスタック層が前記フレキシブル基板上に形成されるように配置される、請求項1に記載の装置。
- 前記コーティングチャンバが蒸発源の支持体を含み、前記蒸発源が、前記コーティングドラムの堆積領域内で前記フレキシブル基板をコーティングするための第1の材料の蒸気を供給し、前記堆積領域が前記チャンバ分離要素に隣接して配置される、請求項1または2に記載の装置。
- 前記コーティングチャンバと前記さらなるチャンバとの間に配置されるさらなるチャンバ分離要素を含み、さらなるガス導入口が前記さらなるチャンバ分離要素内に配置される、請求項1ないし3のいずれか一項に記載の装置。
- 前記さらなるチャンバ分離要素が前記コーティングドラムの入口側に配置される、請求項4に記載の装置。
- 前記コーティングドラムが前記チャンバ分離要素と前記さらなるチャンバ分離要素との間に配置され、前記コーティングドラムと前記さらなるチャンバ分離要素がさらなる間隙を形成する、請求項5に記載の装置。
- 前記間隙の長さが前記間隙の幅よりも少なくとも10倍大きい、請求項1ないし6のいずれか一項に記載の装置。
- 前記ガス導入口が、前記さらなるチャンバよりも前記コーティングチャンバに少なくとも5倍近くに配置される、請求項1ないし7のいずれか一項に記載の装置。
- 前記チャンバ分離要素の一部分は前記コーティングチャンバに対する前記ガス導入口のためのバリアを形成し、前記チャンバ分離要素の別の部分は前記さらなるチャンバに対する前記ガス導入口のためのバリアを形成する、請求項1ないし8のいずれか一項に記載の装置。
- 前記さらなるチャンバが、前記フレキシブル基板を巻くための巻きデバイスを含む、請求項1ないし9のいずれか一項に記載の装置。
- 前記フレキシブル基板がウエブである、請求項1ないし10のいずれか一項に記載の装置。
- フレキシブル基板をコーティングするためのコーティングチャンバと、前記コーティングチャンバをさらなるチャンバから分離するために配置されるチャンバ分離要素と、前記チャンバ分離要素と共に間隙を形成するコーティングドラムと、前記チャンバ分離要素内に配置されるガス導入口とを含む装置内で、前記フレキシブル基板のコーティングをパッシベーションする方法であって、
−前記ガス導入口を通して前記間隙の中に酸素を酸素プラズマがない雰囲気で供給すること
を含み、
動作中において前記コーティングチャンバ内の圧力が前記さらなるチャンバ内の圧力よりも小さく、供給された酸素が前記間隙内で前記コーティングチャンバに向かう方向に付勢されるようになっている、方法。 - −蒸発源から第1の材料を蒸発させて、前記コーティングドラムの堆積領域内で前記フレキシブル基板をコーティングするステップであって、前記堆積領域が前記チャンバ分離要素に隣接して配置されるステップ
をさらに含む、請求項12に記載の方法。 - −前記フレキシブル基板上の、反応的に酸化された第1の材料から形成された酸化層の厚さを決定するステップと、
−前記決定された厚さを既定の厚さと比較するステップと、
−前記ガス導入口に供給される酸素の量を制御するステップと
をさらに含む、請求項12または13に記載の方法。 - 前記第1の材料がアルミニウムを含む、請求項13または14に記載の方法。
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PCT/EP2011/056877 WO2012146310A1 (en) | 2011-04-29 | 2011-04-29 | Devices and methods for passivating a flexible substrate in a coating process |
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US (1) | US20140178568A1 (ja) |
EP (2) | EP2702187B1 (ja) |
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KR (1) | KR20140029470A (ja) |
CN (1) | CN103502506B (ja) |
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JP6356824B2 (ja) * | 2014-04-04 | 2018-07-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | フレキシブル基板を処理するための装置、及びその処理チャンバを洗浄するための方法 |
GB2529649B (en) * | 2014-08-27 | 2016-07-27 | Bobst Manchester Ltd | Vacuum coaters and methods of operating a vacuum coater |
GB2559685B (en) | 2015-03-10 | 2019-06-12 | Bobst Manchester Ltd | Vacuum Coater For Coating A Web |
US10727073B2 (en) | 2016-02-04 | 2020-07-28 | Lam Research Corporation | Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces |
US10566212B2 (en) | 2016-12-19 | 2020-02-18 | Lam Research Corporation | Designer atomic layer etching |
US10559461B2 (en) | 2017-04-19 | 2020-02-11 | Lam Research Corporation | Selective deposition with atomic layer etch reset |
US10832909B2 (en) * | 2017-04-24 | 2020-11-10 | Lam Research Corporation | Atomic layer etch, reactive precursors and energetic sources for patterning applications |
US10796912B2 (en) | 2017-05-16 | 2020-10-06 | Lam Research Corporation | Eliminating yield impact of stochastics in lithography |
CN107177820B (zh) * | 2017-06-12 | 2019-05-24 | 哈尔滨光宇电源股份有限公司 | 高速连续卷绕式真空蒸镀锂设备及利用其实现基材蒸镀锂的方法 |
CN111108640B (zh) * | 2017-09-20 | 2023-08-18 | 应用材料公司 | 处理腔室及用于形成电化学能储存装置的元件的陶瓷层的方法、蒸发源 |
WO2020093395A1 (zh) | 2018-11-09 | 2020-05-14 | 星耀科技(深圳)有限公司 | 膜及制备工艺 |
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WO2024022578A1 (en) * | 2022-07-26 | 2024-02-01 | Applied Materials, Inc. | Processing apparatus for processing a flexible substrate and methods therefor |
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WO2002101768A1 (fr) * | 2001-06-08 | 2002-12-19 | Matsushita Electric Industrial Co., Ltd. | Procede de fabrication d'un film metallise a double surface et condensateur a film metallise utilisant ledit procede |
US7807232B2 (en) * | 2006-01-18 | 2010-10-05 | Sigma Laboratories Of Arizona, Llc | Inline passivation of vacuum-deposited aluminum on web substrate |
DE10312658A1 (de) * | 2003-03-21 | 2004-09-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Beschichtung flexibler Substrate mit Aluminium |
-
2011
- 2011-04-29 EP EP11716575.3A patent/EP2702187B1/en active Active
- 2011-04-29 EP EP18196548.4A patent/EP3441503B1/en active Active
- 2011-04-29 US US14/114,516 patent/US20140178568A1/en not_active Abandoned
- 2011-04-29 CN CN201180070477.1A patent/CN103502506B/zh active Active
- 2011-04-29 KR KR1020137031669A patent/KR20140029470A/ko active Search and Examination
- 2011-04-29 WO PCT/EP2011/056877 patent/WO2012146310A1/en active Application Filing
- 2011-04-29 JP JP2014506773A patent/JP5964411B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
WO2012146310A1 (en) | 2012-11-01 |
CN103502506A (zh) | 2014-01-08 |
JP2014521829A (ja) | 2014-08-28 |
EP2702187B1 (en) | 2018-11-14 |
KR20140029470A (ko) | 2014-03-10 |
EP2702187A1 (en) | 2014-03-05 |
US20140178568A1 (en) | 2014-06-26 |
CN103502506B (zh) | 2016-06-08 |
EP3441503B1 (en) | 2023-08-23 |
EP3441503C0 (en) | 2023-08-23 |
EP3441503A1 (en) | 2019-02-13 |
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