TW201321072A - 含有鹵化物粒子的氣體之除害方法 - Google Patents

含有鹵化物粒子的氣體之除害方法 Download PDF

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Publication number
TW201321072A
TW201321072A TW101138609A TW101138609A TW201321072A TW 201321072 A TW201321072 A TW 201321072A TW 101138609 A TW101138609 A TW 101138609A TW 101138609 A TW101138609 A TW 101138609A TW 201321072 A TW201321072 A TW 201321072A
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TW
Taiwan
Prior art keywords
pesticide
gas
halide
detoxifying
gas containing
Prior art date
Application number
TW101138609A
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English (en)
Chinese (zh)
Other versions
TWI561293B (enExample
Inventor
Kazuhiro Miyazawa
Kazunobu Shibuya
Makoto Sakane
Tetsuya Tomita
Original Assignee
Taiyo Nippon Sanso Corp
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Publication date
Application filed by Taiyo Nippon Sanso Corp filed Critical Taiyo Nippon Sanso Corp
Publication of TW201321072A publication Critical patent/TW201321072A/zh
Application granted granted Critical
Publication of TWI561293B publication Critical patent/TWI561293B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/81—Solid phase processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B01D2253/1126—Metal hydrides

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Particles Using Liquids (AREA)
TW101138609A 2011-10-24 2012-10-19 含有鹵化物粒子的氣體之除害方法 TW201321072A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011232506A JP2013086088A (ja) 2011-10-24 2011-10-24 ハロゲン化物粒子を含むガスの除害方法

Publications (2)

Publication Number Publication Date
TW201321072A true TW201321072A (zh) 2013-06-01
TWI561293B TWI561293B (enExample) 2016-12-11

Family

ID=48098764

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101138609A TW201321072A (zh) 2011-10-24 2012-10-19 含有鹵化物粒子的氣體之除害方法

Country Status (4)

Country Link
JP (1) JP2013086088A (enExample)
KR (1) KR20130045196A (enExample)
CN (1) CN103055692A (enExample)
TW (1) TW201321072A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102035021B1 (ko) * 2013-09-24 2019-10-22 다이요 닛산 가부시키가이샤 유해 가스의 제해 장치
CN116103515B (zh) * 2023-02-08 2025-05-13 西安交通大学 一种基于CaO滤材的硅热法炼镁低成本高效除铝方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
JPH0716583B2 (ja) * 1990-08-10 1995-03-01 セントラル硝子株式会社 フッ化塩素を含む排ガスの乾式処理方法
JP3563758B2 (ja) * 1994-02-09 2004-09-08 住友精化株式会社 塩素含有ガスの処理方法
JP4210395B2 (ja) * 1999-08-10 2009-01-14 住友精化株式会社 ドライエッチング排ガス処理装置
JP3840877B2 (ja) * 2000-05-26 2006-11-01 昭和電工株式会社 ハロゲン系ガスの除害剤、除害方法及びその用途
JP2003326128A (ja) * 2002-05-09 2003-11-18 Ebara Corp ヒ素又はヒ素化合物を含む排ガスの処理方法及び装置
JP2004073974A (ja) * 2002-08-14 2004-03-11 Sud-Chemie Catalysts Inc ハロゲンガス除去剤及びその製造方法
JP4498183B2 (ja) * 2005-03-23 2010-07-07 株式会社東芝 塩化水素ガス吸収材および塩化水素ガスの除去方法
JP2011143329A (ja) * 2010-01-12 2011-07-28 Central Glass Co Ltd 三フッ化塩素含有ガスの除害処理装置

Also Published As

Publication number Publication date
JP2013086088A (ja) 2013-05-13
KR20130045196A (ko) 2013-05-03
CN103055692A (zh) 2013-04-24
TWI561293B (enExample) 2016-12-11

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