KR20130045196A - 할로겐화물 입자를 포함하는 가스의 제해방법 - Google Patents

할로겐화물 입자를 포함하는 가스의 제해방법 Download PDF

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Publication number
KR20130045196A
KR20130045196A KR1020120117859A KR20120117859A KR20130045196A KR 20130045196 A KR20130045196 A KR 20130045196A KR 1020120117859 A KR1020120117859 A KR 1020120117859A KR 20120117859 A KR20120117859 A KR 20120117859A KR 20130045196 A KR20130045196 A KR 20130045196A
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KR
South Korea
Prior art keywords
gas
halide
halide particles
decontamination
decontamination agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020120117859A
Other languages
English (en)
Korean (ko)
Inventor
가즈히로 미야자와
가즈노부 시부야
마코토 사카네
데쓰야 도미타
Original Assignee
다이요 닛산 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이요 닛산 가부시키가이샤 filed Critical 다이요 닛산 가부시키가이샤
Publication of KR20130045196A publication Critical patent/KR20130045196A/ko
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/81—Solid phase processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B01D2253/1126—Metal hydrides

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Particles Using Liquids (AREA)
KR1020120117859A 2011-10-24 2012-10-23 할로겐화물 입자를 포함하는 가스의 제해방법 Ceased KR20130045196A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-232506 2011-10-24
JP2011232506A JP2013086088A (ja) 2011-10-24 2011-10-24 ハロゲン化物粒子を含むガスの除害方法

Publications (1)

Publication Number Publication Date
KR20130045196A true KR20130045196A (ko) 2013-05-03

Family

ID=48098764

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120117859A Ceased KR20130045196A (ko) 2011-10-24 2012-10-23 할로겐화물 입자를 포함하는 가스의 제해방법

Country Status (4)

Country Link
JP (1) JP2013086088A (enExample)
KR (1) KR20130045196A (enExample)
CN (1) CN103055692A (enExample)
TW (1) TW201321072A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150033265A (ko) * 2013-09-24 2015-04-01 다이요 닛산 가부시키가이샤 유해 가스의 제해 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116103515B (zh) * 2023-02-08 2025-05-13 西安交通大学 一种基于CaO滤材的硅热法炼镁低成本高效除铝方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
JP2003326128A (ja) * 2002-05-09 2003-11-18 Ebara Corp ヒ素又はヒ素化合物を含む排ガスの処理方法及び装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
JPH0716583B2 (ja) * 1990-08-10 1995-03-01 セントラル硝子株式会社 フッ化塩素を含む排ガスの乾式処理方法
JP3563758B2 (ja) * 1994-02-09 2004-09-08 住友精化株式会社 塩素含有ガスの処理方法
JP4210395B2 (ja) * 1999-08-10 2009-01-14 住友精化株式会社 ドライエッチング排ガス処理装置
JP3840877B2 (ja) * 2000-05-26 2006-11-01 昭和電工株式会社 ハロゲン系ガスの除害剤、除害方法及びその用途
JP2004073974A (ja) * 2002-08-14 2004-03-11 Sud-Chemie Catalysts Inc ハロゲンガス除去剤及びその製造方法
JP4498183B2 (ja) * 2005-03-23 2010-07-07 株式会社東芝 塩化水素ガス吸収材および塩化水素ガスの除去方法
JP2011143329A (ja) * 2010-01-12 2011-07-28 Central Glass Co Ltd 三フッ化塩素含有ガスの除害処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
JP2003326128A (ja) * 2002-05-09 2003-11-18 Ebara Corp ヒ素又はヒ素化合物を含む排ガスの処理方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150033265A (ko) * 2013-09-24 2015-04-01 다이요 닛산 가부시키가이샤 유해 가스의 제해 장치

Also Published As

Publication number Publication date
JP2013086088A (ja) 2013-05-13
TW201321072A (zh) 2013-06-01
CN103055692A (zh) 2013-04-24
TWI561293B (enExample) 2016-12-11

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