JP2013086088A - ハロゲン化物粒子を含むガスの除害方法 - Google Patents

ハロゲン化物粒子を含むガスの除害方法 Download PDF

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Publication number
JP2013086088A
JP2013086088A JP2011232506A JP2011232506A JP2013086088A JP 2013086088 A JP2013086088 A JP 2013086088A JP 2011232506 A JP2011232506 A JP 2011232506A JP 2011232506 A JP2011232506 A JP 2011232506A JP 2013086088 A JP2013086088 A JP 2013086088A
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JP
Japan
Prior art keywords
detoxifying
halide
gas
detoxifying agent
halide particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011232506A
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English (en)
Japanese (ja)
Other versions
JP2013086088A5 (enExample
Inventor
Kazuhiro Miyazawa
和浩 宮澤
Kazunobu Shibuya
和信 渋谷
Makoto Sakane
誠 坂根
Tetsuya Tomita
哲也 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sanso Holdings Corp
Original Assignee
Nippon Sanso Holdings Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sanso Holdings Corp filed Critical Nippon Sanso Holdings Corp
Priority to JP2011232506A priority Critical patent/JP2013086088A/ja
Priority to TW101138609A priority patent/TW201321072A/zh
Priority to KR1020120117859A priority patent/KR20130045196A/ko
Priority to CN2012104103690A priority patent/CN103055692A/zh
Publication of JP2013086088A publication Critical patent/JP2013086088A/ja
Publication of JP2013086088A5 publication Critical patent/JP2013086088A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/81—Solid phase processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B01D2253/1126—Metal hydrides

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Particles Using Liquids (AREA)
JP2011232506A 2011-10-24 2011-10-24 ハロゲン化物粒子を含むガスの除害方法 Pending JP2013086088A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011232506A JP2013086088A (ja) 2011-10-24 2011-10-24 ハロゲン化物粒子を含むガスの除害方法
TW101138609A TW201321072A (zh) 2011-10-24 2012-10-19 含有鹵化物粒子的氣體之除害方法
KR1020120117859A KR20130045196A (ko) 2011-10-24 2012-10-23 할로겐화물 입자를 포함하는 가스의 제해방법
CN2012104103690A CN103055692A (zh) 2011-10-24 2012-10-24 含卤化物颗粒气体的除害方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011232506A JP2013086088A (ja) 2011-10-24 2011-10-24 ハロゲン化物粒子を含むガスの除害方法

Publications (2)

Publication Number Publication Date
JP2013086088A true JP2013086088A (ja) 2013-05-13
JP2013086088A5 JP2013086088A5 (enExample) 2014-09-25

Family

ID=48098764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011232506A Pending JP2013086088A (ja) 2011-10-24 2011-10-24 ハロゲン化物粒子を含むガスの除害方法

Country Status (4)

Country Link
JP (1) JP2013086088A (enExample)
KR (1) KR20130045196A (enExample)
CN (1) CN103055692A (enExample)
TW (1) TW201321072A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102035021B1 (ko) * 2013-09-24 2019-10-22 다이요 닛산 가부시키가이샤 유해 가스의 제해 장치
CN116103515B (zh) * 2023-02-08 2025-05-13 西安交通大学 一种基于CaO滤材的硅热法炼镁低成本高效除铝方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
JPH0494723A (ja) * 1990-08-10 1992-03-26 Central Glass Co Ltd フッ化塩素を含む排ガスの乾式処理方法
JPH07213862A (ja) * 1994-02-09 1995-08-15 Sumitomo Seika Chem Co Ltd 塩素含有ガスの処理方法
JP2001046833A (ja) * 1999-08-10 2001-02-20 Sumitomo Seika Chem Co Ltd ドライエッチング排ガス処理装置
JP2001338910A (ja) * 2000-05-26 2001-12-07 Showa Denko Kk ハロゲン系ガスの除害剤、除害方法及びその用途
JP2003326128A (ja) * 2002-05-09 2003-11-18 Ebara Corp ヒ素又はヒ素化合物を含む排ガスの処理方法及び装置
JP2006263545A (ja) * 2005-03-23 2006-10-05 Toshiba Corp 塩化水素ガス吸収材および塩化水素ガスの除去方法
JP2011143329A (ja) * 2010-01-12 2011-07-28 Central Glass Co Ltd 三フッ化塩素含有ガスの除害処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004073974A (ja) * 2002-08-14 2004-03-11 Sud-Chemie Catalysts Inc ハロゲンガス除去剤及びその製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
JPH0494723A (ja) * 1990-08-10 1992-03-26 Central Glass Co Ltd フッ化塩素を含む排ガスの乾式処理方法
JPH07213862A (ja) * 1994-02-09 1995-08-15 Sumitomo Seika Chem Co Ltd 塩素含有ガスの処理方法
JP2001046833A (ja) * 1999-08-10 2001-02-20 Sumitomo Seika Chem Co Ltd ドライエッチング排ガス処理装置
JP2001338910A (ja) * 2000-05-26 2001-12-07 Showa Denko Kk ハロゲン系ガスの除害剤、除害方法及びその用途
JP2003326128A (ja) * 2002-05-09 2003-11-18 Ebara Corp ヒ素又はヒ素化合物を含む排ガスの処理方法及び装置
JP2006263545A (ja) * 2005-03-23 2006-10-05 Toshiba Corp 塩化水素ガス吸収材および塩化水素ガスの除去方法
JP2011143329A (ja) * 2010-01-12 2011-07-28 Central Glass Co Ltd 三フッ化塩素含有ガスの除害処理装置

Also Published As

Publication number Publication date
KR20130045196A (ko) 2013-05-03
TW201321072A (zh) 2013-06-01
CN103055692A (zh) 2013-04-24
TWI561293B (enExample) 2016-12-11

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