TW200822147A - Substrate holding device for visual inspection - Google Patents
Substrate holding device for visual inspection Download PDFInfo
- Publication number
- TW200822147A TW200822147A TW096133050A TW96133050A TW200822147A TW 200822147 A TW200822147 A TW 200822147A TW 096133050 A TW096133050 A TW 096133050A TW 96133050 A TW96133050 A TW 96133050A TW 200822147 A TW200822147 A TW 200822147A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- support
- supporting
- inspection
- retreat
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 169
- 238000011179 visual inspection Methods 0.000 title claims abstract description 23
- 238000007689 inspection Methods 0.000 claims abstract description 72
- 230000007547 defect Effects 0.000 claims abstract description 34
- 230000007246 mechanism Effects 0.000 claims description 51
- 230000033001 locomotion Effects 0.000 claims description 9
- 238000005520 cutting process Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005286 illumination Methods 0.000 description 16
- 238000005452 bending Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/36—Embedding or analogous mounting of samples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006244154A JP2008064666A (ja) | 2006-09-08 | 2006-09-08 | 外観検査装置の基板保持機構 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200822147A true TW200822147A (en) | 2008-05-16 |
Family
ID=39192283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096133050A TW200822147A (en) | 2006-09-08 | 2007-09-05 | Substrate holding device for visual inspection |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008064666A (enrdf_load_stackoverflow) |
| KR (1) | KR20080023142A (enrdf_load_stackoverflow) |
| CN (1) | CN101140245A (enrdf_load_stackoverflow) |
| TW (1) | TW200822147A (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100942066B1 (ko) * | 2008-04-30 | 2010-02-11 | 주식회사 테라세미콘 | 홀더 스테이지 |
| JP2011141127A (ja) * | 2010-01-05 | 2011-07-21 | Avanstrate Taiwan Inc | ガラス板の欠陥部分の目視検査方法及び目視検査装置 |
| CN102364332B (zh) * | 2011-06-10 | 2014-07-30 | 乐金化学(南京)信息电子材料有限公司 | 偏光板移动检测装置及方法 |
| CN107064171A (zh) * | 2017-01-26 | 2017-08-18 | 江苏东旭亿泰智能装备有限公司 | 检查组装件、宏观检查系统以及相关的检查方法 |
| CN106918934A (zh) * | 2017-03-27 | 2017-07-04 | 武汉华星光电技术有限公司 | 基板宏观检查机 |
| US11688618B2 (en) * | 2020-12-10 | 2023-06-27 | Applied Materials, Inc. | Method and apparatus for continuous substrate cassette loading |
| US11945660B2 (en) | 2021-08-09 | 2024-04-02 | Applied Materials, Inc. | Linear sorter using vacuum belt |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH036971A (ja) * | 1989-06-02 | 1991-01-14 | Fuji Photo Film Co Ltd | コンバータレンズ内蔵型ビデオカメラ |
| JP3636235B2 (ja) * | 1996-01-08 | 2005-04-06 | オリンパス株式会社 | 基板ホルダ |
| JPH1194755A (ja) * | 1997-09-24 | 1999-04-09 | Olympus Optical Co Ltd | 基板の振動防止機構 |
| JP2003270155A (ja) * | 2002-03-15 | 2003-09-25 | Olympus Optical Co Ltd | 基板保持装置及び検査装置 |
| JP4243837B2 (ja) * | 2003-03-14 | 2009-03-25 | 株式会社日立ハイテクノロジーズ | 透明基板の表面検査方法及び検査装置 |
-
2006
- 2006-09-08 JP JP2006244154A patent/JP2008064666A/ja active Pending
-
2007
- 2007-09-05 KR KR1020070089794A patent/KR20080023142A/ko not_active Withdrawn
- 2007-09-05 TW TW096133050A patent/TW200822147A/zh unknown
- 2007-09-06 CN CNA2007101492022A patent/CN101140245A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN101140245A (zh) | 2008-03-12 |
| JP2008064666A (ja) | 2008-03-21 |
| KR20080023142A (ko) | 2008-03-12 |
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