CN101140245A - 外观检查用基板保持装置 - Google Patents

外观检查用基板保持装置 Download PDF

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Publication number
CN101140245A
CN101140245A CNA2007101492022A CN200710149202A CN101140245A CN 101140245 A CN101140245 A CN 101140245A CN A2007101492022 A CNA2007101492022 A CN A2007101492022A CN 200710149202 A CN200710149202 A CN 200710149202A CN 101140245 A CN101140245 A CN 101140245A
Authority
CN
China
Prior art keywords
substrate
base plate
objective table
appearance inspection
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007101492022A
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English (en)
Chinese (zh)
Inventor
冈平裕幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN101140245A publication Critical patent/CN101140245A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/36—Embedding or analogous mounting of samples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
CNA2007101492022A 2006-09-08 2007-09-06 外观检查用基板保持装置 Pending CN101140245A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006244154A JP2008064666A (ja) 2006-09-08 2006-09-08 外観検査装置の基板保持機構
JP2006244154 2006-09-08

Publications (1)

Publication Number Publication Date
CN101140245A true CN101140245A (zh) 2008-03-12

Family

ID=39192283

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007101492022A Pending CN101140245A (zh) 2006-09-08 2007-09-06 外观检查用基板保持装置

Country Status (4)

Country Link
JP (1) JP2008064666A (enrdf_load_stackoverflow)
KR (1) KR20080023142A (enrdf_load_stackoverflow)
CN (1) CN101140245A (enrdf_load_stackoverflow)
TW (1) TW200822147A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102016697A (zh) * 2008-04-30 2011-04-13 泰拉半导体株式会社 支架载置台
CN102364332A (zh) * 2011-06-10 2012-02-29 乐金化学(南京)信息电子材料有限公司 偏光板移动检测装置及方法
CN106918934A (zh) * 2017-03-27 2017-07-04 武汉华星光电技术有限公司 基板宏观检查机

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011141127A (ja) * 2010-01-05 2011-07-21 Avanstrate Taiwan Inc ガラス板の欠陥部分の目視検査方法及び目視検査装置
CN107064171A (zh) * 2017-01-26 2017-08-18 江苏东旭亿泰智能装备有限公司 检查组装件、宏观检查系统以及相关的检查方法
US11688618B2 (en) * 2020-12-10 2023-06-27 Applied Materials, Inc. Method and apparatus for continuous substrate cassette loading
US11945660B2 (en) 2021-08-09 2024-04-02 Applied Materials, Inc. Linear sorter using vacuum belt

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH036971A (ja) * 1989-06-02 1991-01-14 Fuji Photo Film Co Ltd コンバータレンズ内蔵型ビデオカメラ
JP3636235B2 (ja) * 1996-01-08 2005-04-06 オリンパス株式会社 基板ホルダ
JPH1194755A (ja) * 1997-09-24 1999-04-09 Olympus Optical Co Ltd 基板の振動防止機構
JP2003270155A (ja) * 2002-03-15 2003-09-25 Olympus Optical Co Ltd 基板保持装置及び検査装置
JP4243837B2 (ja) * 2003-03-14 2009-03-25 株式会社日立ハイテクノロジーズ 透明基板の表面検査方法及び検査装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102016697A (zh) * 2008-04-30 2011-04-13 泰拉半导体株式会社 支架载置台
CN102016697B (zh) * 2008-04-30 2013-07-03 泰拉半导体株式会社 支架载置台
CN102364332A (zh) * 2011-06-10 2012-02-29 乐金化学(南京)信息电子材料有限公司 偏光板移动检测装置及方法
CN102364332B (zh) * 2011-06-10 2014-07-30 乐金化学(南京)信息电子材料有限公司 偏光板移动检测装置及方法
CN106918934A (zh) * 2017-03-27 2017-07-04 武汉华星光电技术有限公司 基板宏观检查机

Also Published As

Publication number Publication date
TW200822147A (en) 2008-05-16
JP2008064666A (ja) 2008-03-21
KR20080023142A (ko) 2008-03-12

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Open date: 20080312