TW200741870A - Method and compositions for direct copper plating and filling to form interconnects in the fabrication of semiconductor devices - Google Patents

Method and compositions for direct copper plating and filling to form interconnects in the fabrication of semiconductor devices

Info

Publication number
TW200741870A
TW200741870A TW096106492A TW96106492A TW200741870A TW 200741870 A TW200741870 A TW 200741870A TW 096106492 A TW096106492 A TW 096106492A TW 96106492 A TW96106492 A TW 96106492A TW 200741870 A TW200741870 A TW 200741870A
Authority
TW
Taiwan
Prior art keywords
copper
fabrication
filling
compositions
semiconductor devices
Prior art date
Application number
TW096106492A
Other languages
English (en)
Other versions
TWI437638B (zh
Inventor
Jose Gonzalez
Herve Monchoix
Original Assignee
Alchimer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alchimer filed Critical Alchimer
Publication of TW200741870A publication Critical patent/TW200741870A/zh
Application granted granted Critical
Publication of TWI437638B publication Critical patent/TWI437638B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
    • H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C25D5/611—Smooth layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
TW096106492A 2006-02-21 2007-02-26 用於半導體元件之製造中直接銅電鍍及填補以形成內連線之方法與組合物 TWI437638B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77467506P 2006-02-21 2006-02-21

Publications (2)

Publication Number Publication Date
TW200741870A true TW200741870A (en) 2007-11-01
TWI437638B TWI437638B (zh) 2014-05-11

Family

ID=38038534

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096106492A TWI437638B (zh) 2006-02-21 2007-02-26 用於半導體元件之製造中直接銅電鍍及填補以形成內連線之方法與組合物

Country Status (10)

Country Link
US (1) US7579274B2 (zh)
EP (1) EP1987177A1 (zh)
JP (1) JP5346215B2 (zh)
KR (1) KR101360595B1 (zh)
CN (1) CN101512048B (zh)
CA (1) CA2643018C (zh)
HK (1) HK1132768A1 (zh)
IL (1) IL193308A (zh)
TW (1) TWI437638B (zh)
WO (1) WO2007096390A1 (zh)

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* Cited by examiner, † Cited by third party
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KR100808796B1 (ko) * 2006-10-09 2008-03-03 동부일렉트로닉스 주식회사 전해 도금 방법
FR2930785B1 (fr) * 2008-05-05 2010-06-11 Alchimer Composition d'electrodeposition et procede de revetement d'un substrat semi-conducteur utilisant ladite composition
JP5388191B2 (ja) * 2009-05-26 2014-01-15 Ｊｘ日鉱日石金属株式会社 貫通シリコンビアを有するめっき物及びその形成方法
FR2949121A1 (fr) * 2009-08-12 2011-02-18 Alchimer Electrolyte et procede d''electrodeposition de cuivre sur une couche barriere, et substrat semi-conducteur obtenu par un tel procede.
US20110162701A1 (en) * 2010-01-03 2011-07-07 Claudio Truzzi Photovoltaic Cells
US20110192462A1 (en) * 2010-01-03 2011-08-11 Alchimer, S.A. Solar cells
KR20130108978A (ko) * 2010-06-11 2013-10-07 알쉬메 구리 도금 조성물 및 이 조성물을 사용한 반도체 기판에서 공동을 충진하기 위한 공정
FR2961220B1 (fr) * 2010-06-11 2012-08-17 Alchimer Composition d'electrodeposition de cuivre et procede de remplissage d'une cavite d'un substrat semi-conducteur utilisant cette composition
EP2528089B1 (en) * 2011-05-23 2014-03-05 Alchimer Method for forming a vertical electrical connection in a layered semiconductor structure
CN103426814B (zh) * 2012-05-24 2015-04-01 中芯国际集成电路制造(上海)有限公司 填充金属的方法
FR2995912B1 (fr) 2012-09-24 2014-10-10 Alchimer Electrolyte et procede d'electrodeposition de cuivre sur une couche barriere
TWI478861B (zh) * 2012-11-22 2015-04-01 Univ Nat Chunghsing Electrodeposition of copper nanoparticles
US9349636B2 (en) 2013-09-26 2016-05-24 Intel Corporation Interconnect wires including relatively low resistivity cores
CN103579101A (zh) * 2013-11-05 2014-02-12 复旦大学 采用脉冲电镀铜方式实现铜互连的方法
JP6474410B2 (ja) 2013-12-09 2019-02-27 アヴニ 電気化学的に不活性なカチオンを含む銅電着浴
JP6585434B2 (ja) * 2014-10-06 2019-10-02 株式会社荏原製作所 めっき方法
SG11201703892PA (en) * 2014-12-09 2017-06-29 Intel Corp Microelectronic substrates having copper alloy conductive route structures
US10329683B2 (en) 2016-11-03 2019-06-25 Lam Research Corporation Process for optimizing cobalt electrofill using sacrificial oxidants
FR3061601B1 (fr) 2016-12-29 2022-12-30 Aveni Solution d'electrodeposition de cuivre et procede pour des motifs de facteur de forme eleve
KR102056980B1 (ko) 2017-03-31 2019-12-17 제이엑스금속주식회사 황산구리, 황산구리 용액, 도금액, 황산구리의 제조 방법, 반도체 회로 기판의 제조 방법 및 전자기기의 제조 방법
CN110724983B (zh) * 2019-10-12 2022-02-08 天津大学 一种利用脉冲电沉积法制备纳米铜包覆碳化钨核壳结构粉体的方法
US11972973B1 (en) 2023-10-04 2024-04-30 Chun-Ming Lin Semiconductor structure and method of manufacturing a semiconductor structure

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US5151168A (en) * 1990-09-24 1992-09-29 Micron Technology, Inc. Process for metallizing integrated circuits with electrolytically-deposited copper
TWI223678B (en) 1998-03-20 2004-11-11 Semitool Inc Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper
US6309969B1 (en) * 1998-11-03 2001-10-30 The John Hopkins University Copper metallization structure and method of construction
JP3271756B2 (ja) * 1999-03-01 2002-04-08 日本電気株式会社 半導体装置の製造方法
US20050145499A1 (en) 2000-06-05 2005-07-07 Applied Materials, Inc. Plating of a thin metal seed layer
US20050006245A1 (en) 2003-07-08 2005-01-13 Applied Materials, Inc. Multiple-step electrodeposition process for direct copper plating on barrier metals
JP2002004081A (ja) * 2000-06-16 2002-01-09 Learonal Japan Inc シリコンウエハーへの電気めっき方法
US20020092673A1 (en) * 2001-01-17 2002-07-18 International Business Machines Corporation Tungsten encapsulated copper interconnections using electroplating
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Also Published As

Publication number Publication date
US7579274B2 (en) 2009-08-25
HK1132768A1 (en) 2010-03-05
JP2009527912A (ja) 2009-07-30
KR101360595B1 (ko) 2014-02-11
TWI437638B (zh) 2014-05-11
CA2643018A1 (en) 2007-08-30
KR20080100813A (ko) 2008-11-19
US20070272560A1 (en) 2007-11-29
CN101512048A (zh) 2009-08-19
JP5346215B2 (ja) 2013-11-20
CA2643018C (en) 2014-04-22
CN101512048B (zh) 2011-12-28
EP1987177A1 (en) 2008-11-05
IL193308A0 (en) 2009-05-04
IL193308A (en) 2013-06-27
WO2007096390A1 (en) 2007-08-30

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