TW200642933A - Substrate carrying device - Google Patents

Substrate carrying device

Info

Publication number
TW200642933A
TW200642933A TW094136703A TW94136703A TW200642933A TW 200642933 A TW200642933 A TW 200642933A TW 094136703 A TW094136703 A TW 094136703A TW 94136703 A TW94136703 A TW 94136703A TW 200642933 A TW200642933 A TW 200642933A
Authority
TW
Taiwan
Prior art keywords
substrates
carrying device
substrate carrying
cassette
transfer hand
Prior art date
Application number
TW094136703A
Other languages
English (en)
Chinese (zh)
Other versions
TWI307675B (enrdf_load_stackoverflow
Inventor
Kensuke Hirata
Susumu Murayama
Original Assignee
Ishikawajima Harima Heavy Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Ind filed Critical Ishikawajima Harima Heavy Ind
Publication of TW200642933A publication Critical patent/TW200642933A/zh
Application granted granted Critical
Publication of TWI307675B publication Critical patent/TWI307675B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Specific Conveyance Elements (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Warehouses Or Storage Devices (AREA)
TW094136703A 2005-06-02 2005-10-20 Substrate carrying device TW200642933A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005162225A JP4904722B2 (ja) 2005-06-02 2005-06-02 基板搬送装置

Publications (2)

Publication Number Publication Date
TW200642933A true TW200642933A (en) 2006-12-16
TWI307675B TWI307675B (enrdf_load_stackoverflow) 2009-03-21

Family

ID=37481322

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094136703A TW200642933A (en) 2005-06-02 2005-10-20 Substrate carrying device

Country Status (5)

Country Link
JP (1) JP4904722B2 (enrdf_load_stackoverflow)
KR (1) KR101226733B1 (enrdf_load_stackoverflow)
CN (1) CN101035725B (enrdf_load_stackoverflow)
TW (1) TW200642933A (enrdf_load_stackoverflow)
WO (1) WO2006129385A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI422521B (zh) * 2011-03-02 2014-01-11 Au Optronics Corp 玻璃基板傳送裝置
TWI506716B (zh) * 2009-12-01 2015-11-01 Tokyo Electron Ltd Substrate handling device and substrate processing system

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4840595B2 (ja) * 2007-02-20 2011-12-21 株式会社Ｉｈｉ 基板搬送機
KR100973190B1 (ko) * 2008-08-22 2010-07-30 주식회사 에스에프에이 기판 이송용 카세트 및 기판 이송용 로봇, 그리고 그것들을구비한 기판 이송용 카세트 시스템
KR101037063B1 (ko) * 2008-12-30 2011-05-26 에이펫(주) 기판처리장치
JP2011051748A (ja) * 2009-09-03 2011-03-17 Murata Machinery Ltd ローダアンローダと搬送車と装置間のロードアンロード方法
JP5575689B2 (ja) * 2011-04-01 2014-08-20 株式会社 ハリーズ 薄板状物加工装置及び薄板状部材の製造方法
KR101520744B1 (ko) 2013-11-04 2015-05-15 코닝정밀소재 주식회사 비접촉 진동 억제장치 및 대상물 가공방법
CN103950716B (zh) * 2014-05-21 2016-07-27 芜湖万辰电光源科技有限公司 一种玻璃条镀膜载台的输送机构
JP6297989B2 (ja) * 2015-01-27 2018-03-20 光洋サーモシステム株式会社 搬送装置
CN107818938B (zh) * 2016-09-13 2021-07-30 台湾积体电路制造股份有限公司 运送系统及运送加工元件的方法
CN108502543B (zh) 2017-02-28 2020-01-24 上海微电子装备（集团）股份有限公司 一种基板传输装置及方法
CN111347341A (zh) * 2020-04-01 2020-06-30 长江存储科技有限责任公司 半导体制备装置和具有其的化学机械研磨设备
CN112158604A (zh) * 2020-10-13 2021-01-01 南京多脉智能设备有限公司 联排气浮式无摩擦玻璃面板转移机器人
JP7342840B2 (ja) * 2020-11-05 2023-09-12 トヨタ自動車株式会社 薄板材の搬送方法、及び搬送装置
CN118062576B (zh) * 2024-04-25 2024-06-21 肇庆南玻节能玻璃有限公司 应用于玻璃生产的柔性输送系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4558983A (en) * 1983-10-24 1985-12-17 Usm Corporation Automatic board handling mechanism
CA1234924A (en) * 1984-01-21 1988-04-05 Hideo Sakamoto Printed circuit board load-unload system with bypass route
JPS60153306A (ja) * 1984-01-21 1985-08-12 Fujitsu Ltd プリント板給排装置
JPH11227943A (ja) * 1998-02-09 1999-08-24 Ishikawajima Harima Heavy Ind Co Ltd 基板移載装置
JP4474672B2 (ja) * 2000-04-24 2010-06-09 株式会社Ｉｈｉ 基板移載装置
JP4153812B2 (ja) * 2002-07-22 2008-09-24 大日本印刷株式会社 カラーフィルター製造ラインシステム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506716B (zh) * 2009-12-01 2015-11-01 Tokyo Electron Ltd Substrate handling device and substrate processing system
TWI422521B (zh) * 2011-03-02 2014-01-11 Au Optronics Corp 玻璃基板傳送裝置

Also Published As

Publication number Publication date
CN101035725A (zh) 2007-09-12
CN101035725B (zh) 2011-04-20
TWI307675B (enrdf_load_stackoverflow) 2009-03-21
WO2006129385A1 (ja) 2006-12-07
JP2006335518A (ja) 2006-12-14
KR20080016518A (ko) 2008-02-21
KR101226733B1 (ko) 2013-01-25
JP4904722B2 (ja) 2012-03-28

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