TW200728176A - Transportation system - Google Patents

Transportation system

Info

Publication number
TW200728176A
TW200728176A TW095129106A TW95129106A TW200728176A TW 200728176 A TW200728176 A TW 200728176A TW 095129106 A TW095129106 A TW 095129106A TW 95129106 A TW95129106 A TW 95129106A TW 200728176 A TW200728176 A TW 200728176A
Authority
TW
Taiwan
Prior art keywords
transportation
sheet
stack
transport
substrates
Prior art date
Application number
TW095129106A
Other languages
Chinese (zh)
Inventor
Hiroshi Fukazawa
Ryosuke Tahara
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of TW200728176A publication Critical patent/TW200728176A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/68—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor
    • B65G47/682—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor from a single conveyor lane consisting of one conveyor or several adjacent conveyors
    • B65G47/684—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor from a single conveyor lane consisting of one conveyor or several adjacent conveyors with recirculation of articles forming a buffer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B65G2201/0258—Trays, totes or bins

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

The present invention discloses a transportation system. The transportation system has: in the processing steps of liquid-crystal substrate, a single-sheet transportation space to transport the tray loaded with substrates sheet by sheet freely in the transportation path; and a stack-transportation space to transport the stack of substrates. It can also switch between the single-sheet transportation and the stack-transportation according to the condition of device 4. According to the present invention, the single-sheet transportation is carried out when the factory starts to process with a few amount of processing. When the amount processed increases but is still not stable, stack-transpiration is proceeded, so that it not only can mass-transport, but also can increase the amount of buffer of the processing device. When the steps stabilizes, it switches to high-speed single-sheet transportation, so as to supply the necessary substrates during the period required by each processing device.
TW095129106A 2006-01-16 2006-08-08 Transportation system TW200728176A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006007408A JP2007189147A (en) 2006-01-16 2006-01-16 Conveyance system

Publications (1)

Publication Number Publication Date
TW200728176A true TW200728176A (en) 2007-08-01

Family

ID=38344084

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095129106A TW200728176A (en) 2006-01-16 2006-08-08 Transportation system

Country Status (4)

Country Link
JP (1) JP2007189147A (en)
KR (1) KR20070076370A (en)
CN (1) CN101003331A (en)
TW (1) TW200728176A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010052938A (en) * 2008-08-29 2010-03-11 Ihi Corp Conveyance control device and conveyance control method
KR102173894B1 (en) * 2014-10-08 2020-11-04 두산공작기계 주식회사 Pallet transfer system
DE102015212267A1 (en) * 2015-07-01 2017-01-05 Voith Patent Gmbh Method and apparatus for determining specific energy consumption of belt conveyors
CN105921969B (en) * 2016-06-17 2018-03-02 雄华机械(苏州)有限公司 A kind of upper slide rail supply arrangement
KR102332806B1 (en) * 2016-06-28 2021-12-01 무라다기카이가부시끼가이샤 Substrate carrier transport, sorting and loading/unloading
KR102332805B1 (en) * 2016-06-28 2021-12-01 무라다기카이가부시끼가이샤 Improved High Density Tec-Cell Carrier
KR102246502B1 (en) * 2019-10-11 2021-04-29 주식회사 에스엠코어 Stocker with tray merge function
KR20220113097A (en) * 2021-02-05 2022-08-12 (주)테크윙 Handler for testing electronic components
CN117800068B (en) * 2024-03-01 2024-06-07 宁德时代新能源科技股份有限公司 Material conveying line, material conveying method and pallet material conveying control method

Also Published As

Publication number Publication date
CN101003331A (en) 2007-07-25
JP2007189147A (en) 2007-07-26
KR20070076370A (en) 2007-07-24

Similar Documents

Publication Publication Date Title
TW200728176A (en) Transportation system
TW200642933A (en) Substrate carrying device
WO2010003083A3 (en) Packaging machine and method of packaging articles
WO2007112454A3 (en) Apparatus and method for processing substrates using one or more vacuum transfer chamber units
EP1295833A3 (en) Sheet finisher and image forming system using the same
NZ589480A (en) Packaging machine and method of packaging articles
MY157503A (en) Method and device for treating silicon wafers
MX2011008986A (en) Machine for packaging articles into cartons.
WO2006113587A3 (en) Carton with support
MY162244A (en) System and method for switching between environments in a multi-environment operating system
MY148631A (en) Apparatus and methods for transporting and processing substrates
TW200709936A (en) Fluid deposition cluster tool
MX2009000733A (en) Treatment machine for bottles or similar receptacles.
TW200711027A (en) Substrate processing system and substrate processing method
TW200746345A (en) Vibration-proof mechanism for article storage container
TW200519011A (en) Substrate conveying system
TW200833581A (en) Tray for sheet transfer
TW200734263A (en) Substrate exchange apparatus and substrate processing apparatus, and substrate inspection apparatus
MX2010003831A (en) Cowling for a guideway vehicle.
TW200703537A (en) Substrate processing apparatus and substrate housing method
WO2008052977A3 (en) A cooling device
TW200942629A (en) Sprayed Si-or Si:A1-target with low iron content
WO2009078273A1 (en) Vibration conveyor
TW200801900A (en) Airflow guide device and computer chassis with airflow guide device
TW200738538A (en) Apparatus for receiving workpiece and method of receiving thereof