TW200533251A - Surface-treated copper foil having grayed surface, process for producing the same and electromagnetic wave shielding conductive mesh for front panel of plasma display wherein use is made of the surface-treated copper foil - Google Patents

Surface-treated copper foil having grayed surface, process for producing the same and electromagnetic wave shielding conductive mesh for front panel of plasma display wherein use is made of the surface-treated copper foil Download PDF

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TW200533251A
TW200533251A TW094106234A TW94106234A TW200533251A TW 200533251 A TW200533251 A TW 200533251A TW 094106234 A TW094106234 A TW 094106234A TW 94106234 A TW94106234 A TW 94106234A TW 200533251 A TW200533251 A TW 200533251A
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treated
copper foil
gray
electromagnetic wave
treated copper
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TW094106234A
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Chinese (zh)
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TWI280079B (en
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Tsutomu Higuchi
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Mitsui Mining & Smelting Co
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0094Shielding materials being light-transmitting, e.g. transparent, translucent
    • H05K9/0096Shielding materials being light-transmitting, e.g. transparent, translucent for television displays, e.g. plasma display panel
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/34Vessels, containers or parts thereof, e.g. substrates
    • H01J11/44Optical arrangements or shielding arrangements, e.g. filters, black matrices, light reflecting means or electromagnetic shielding means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0307Providing micro- or nanometer scale roughness on a metal surface, e.g. by plating of nodules or dendrites
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

To provide a surface-treated copper foil having excellent gray color and workable in a regular copper etching process, and a conductive mesh for PDP manufactured by the surface-treated copper foil. In the surface-treated copper foil having a grayish-treated surface on one side, a cobalt sulfide plated layer is provided on a coarse surface of a copper foil layer, and a surface-treated copper foil or the like having the grayish-treated surface having a rustproof layer is employed. The surface-treated copper foil is manufactured by performing electrolysis at the predetermined current density by using cobalt plating liquid containing cobalt sulfide (7-hydrate) to form the rustproof layer on the coarse surface of an electrolytic copper foil or the like, and a method for water-rinsing and drying the rustproof layer is employed.

Description

200533251 " 九、發明說明: 【發明所屬之技術領域】 本發明係有關具有灰色化處理面之 用該表面處理銅箔之電漿顯示器前面板 ;電性網片。特別是提供適於製造電漿顯 磁波遮蔽導電性網片之表面處理銅箔。 【先前技術】 φ 電衆顯示器面板的遮蔽用導電性網 織造物變遷為導電性網片。於此導電性 種方法被確立。其一為將表面處理鋼箔 膜,使用光蝕刻法製造之。接著,另一 餘刻表面處理銅箔與支撐基材,其後, 知表面處理鋼箔單體之導電性網片。 進而’近年來由於省電力化的要求 漿產生訊唬電壓由2〇〇v降低至50V程廣 籲電壓的降低之亮度減少、使導電性網 化、藉由導電性網片減少前面玻璃面板 因此,也使導電性網片的厚度變薄,而 進行。纟中一種作法係#由錢射蒸鍍法 子(啟始處)之薄片層,其後以電解銅1 層,以光钱刻法,進行使網m冑# 的製造。 無論以哪一種方法製造導電性網片 都被組入前面板之中而可通過前面玻鴻 2213-6894-PF;Ahddub 表面處理銅猪及使 用的電磁波遮蔽導 示器則面板用的電 片,由金屬化纖維 網片的製造已有數 層疊貼合於PET薄 係以光钱刻法同時 剝離支撐基材而得 ,開發目標係使電 -,伴此而有隨著該 片的電路寬幅細窄 的覆蓋率等嘗試。 使餘刻加工更容易 形成作為電鍍的種 1鍍等形成薄的鋼 細化之導電性網片 ,導電性網片自身 7而由表面視覺確 5 200533251 認,該行業業者間都使用具備黑色化處理表面或者 化處理表面的表面處理銅箔。 木褐色 (現行之具備黑色化處理表面的表面處理銅猪) 於此導電性網片被加工的表面處理銅箱之單面, 理為黑色使透過光的亮度拉高。從前,於此處理轉用了: 了提高多層印刷電路板之内層電路與樹脂層之黏接性而开; 成氧化銅層之黑化處理等。 / 然…述的黑化處理有重大的問題。亦_, 表面附者报多銅的黑色氧化物時’確實可得良好的黑色化 面。然而’形成於銅荡表面的銅的黑色氧化物,附 多就越容易從黑色化面脫落,亦即引起所謂落粉現象,使 黑化處理面容易受損傷,處理變得困_。此外, 調安定性也有所缺乏。 …、巴的邑 發生落粉現象的話,脫落的黑色氧化物混入無用 所’在供使與前面面板玻璃一體化之透明化處理時 散於透明黏著劑層而成為使透明度劣化的重要原因。曰 另一方面,作為可以形成良好的黑色化面之里色化處 理,亦有被檢討一般的里色鉾雷妒仕 ",' 巴化處 莖/ — 、、色錄電鐘、硫化錄電鍍、銘電錢 不能夠以通常的銅钱刻程序由黑色化處理面 ==的問題。特別是具有使姑或錄充裕(rich)析出 ,化處理面的表面處理銅箱,無法解決落粉的問題, 大1使用昂貴的鎳等的緣故因而成為昂貴的製品。 (現行之具備茶褐色化處理表面之表面處理銅箔) 面電水顯不器面板的製造技術成熟,從前僅 ^良好黑色晝面的表面處理鋼箱,但伴隨著製造技 術及官理的高度化,並不必需要求高水準之電磁波遮蔽網 2213-6894-PF;Ahddub ^ 200533251 /加工而透光度安定之 網片為市場所需要。 片的黑濃度,反而是具有低價格容 高開口率的網片圖案的電磁波遮蔽 亦即,在現在市場上流通的鈷 落’產生要使用銅之蝕刻劑進行鈷 w偎囷難 改採茶褐色色調者之嘗 的問題,而有減少異種金屬之量而 試0 的確,要考慮到滿足低價的條件,200533251 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a plasma display front panel having a grayed-out surface using the surface-treated copper foil; an electrical mesh. In particular, it provides a surface-treated copper foil suitable for the manufacture of plasma-sensitive magnetic wave shielding conductive mesh. [Prior art] A conductive mesh for shielding a φ electric display panel is transformed into a conductive mesh. Here, a conductive method is established. One is to produce a surface-treated steel foil film using a photo-etching method. Next, the copper foil and the supporting substrate were surface-treated on the other surface, and then the conductive mesh of the surface-treated steel foil alone was known. Furthermore, in recent years, due to the requirements of power saving, the voltage generated by the slurry has been reduced from 2000v to 50V. The brightness of the Cheng Guangyu voltage has been reduced, the conductive network has been reduced, and the front glass panel has been reduced by the conductive mesh. It is also performed by reducing the thickness of the conductive mesh sheet. One of the methods is to use the thin layer of the coin-evaporation method (origin), and then use a layer of electrolytic copper to make the net m 胄 # using the light-money engraving method. Regardless of the method used to make the conductive mesh, it is incorporated into the front panel and can be passed through the front of Bronze 2213-6894-PF; Ahddub surface-treated copper pigs and the electromagnetic wave shielding guides are used for the panel. The metallized fiber mesh sheet has been manufactured by laminating and laminating it to PET thin film. It is obtained by peeling off the supporting substrate at the same time with a light-cut method. Narrow coverage etc. try. To make it easier to form the conductive mesh as a kind of electroplating, plating and thin steel, the conductive mesh itself 7 is confirmed by the surface vision 5 200533251. It is recognized by all industry players. Surface-treated copper foil on the surface or chemically treated surface. Wood brown (the current surface-treated copper pig with a blackened surface) The single side of the surface-treated copper box processed with this conductive mesh is treated as black to increase the brightness of transmitted light. In the past, this process was diverted: to improve the adhesion between the inner layer circuit of the multilayer printed circuit board and the resin layer; to blacken the copper oxide layer. / Of course ... the blackening process described above has major problems. It is also true that when a copper-containing black oxide is reported on the surface, a good blackened surface can be obtained. However, the black oxide of copper formed on the surface of copper is more likely to fall off the blackened surface, which causes the so-called powder falling phenomenon, which makes the blackened surface easily damaged and the processing becomes difficult. In addition, there is a lack of tuning stability. …, If the powder falling phenomenon occurs in Ba-e-eup, the black oxide falling off will be mixed and useless. It is an important cause of the deterioration of transparency when it is dispersed in the transparent adhesive layer during the transparent treatment integrated with the front panel glass. On the other hand, as a coloring treatment that can form a good blackened surface, there is also a review of the general coloring and jealousy ", 'Bahua Department Stem / — ,, color recording electric clock, sulfur recording The problem of electroplating and Mingdian cannot be treated by blackening the surface with the usual copper coin engraving procedure. In particular, it has a surface-treated copper box that enables the rich or precipitating surface to be chemically treated, which cannot solve the problem of falling powder. It is an expensive product because it uses expensive nickel or the like. (Currently, the surface-treated copper foil with tan-colored surface) The manufacturing technology of the surface electric water display panel is mature. In the past, the surface-treated steel box with only a good black daylight surface was accompanied by the advancement of manufacturing technology and official management. It is not necessary to require high-level electromagnetic shielding nets 2213-6894-PF; Ahddub ^ 200533251 / mesh with stable light transmittance is required by the market. The black density of the film is instead the electromagnetic wave shielding of the mesh pattern with a low price and high aperture ratio. That is, the cobalt falling on the market today generates cobalt using an etchant of copper. It is difficult to change the color of tea brown. It ’s a problem for those who try to reduce the amount of dissimilar metals and try 0. Indeed, we must consider that the conditions for low prices are met.

Al ju i 已經陸續檢討減少把表面處理銅箔的表面 4,Al ju i has been reviewing the reduction of the surface of copper foil with surface treatment 4,

的茶褐色狀態的始等之附著量予以減 心:匕之前 事。 叩L、、· 口至市場之情 佴走,從前之具有 "vv 1BJ 理 n 點,是其茶褐色面之顏色並不均勻, /白的缺 J J 在全面產味π仏一 _)。亦即’於同一面内無法達成茶褐色處理的均句化二 :而成以刻所得的網片的剖面形狀產生差異的原因。而 ,該I褐色面,僅只要輕輕摩擦其表面就容易受到 因此,在市場上亟需具備帶有均勻茶褐 ' 處理層,且可更容易钱刻力 、才、褐色化 又谷匆蝕刻加工的表面處理鋼箔。 然而,具備上述黑色化處理面 落,都有色調安定性的問題,為了 面的銅 ^ 局了細小各製造批次間的萁 ",必須要嚴密進行製造條件管理,、 步驟管理勞力與費[因而要降低製品價 其極限。-般被認為相關的先行技 :有 材料的技術動向,日立化成技Μ有以下的PDP 1T loc 砥技術報告第33號(1 999_7) 開千1 1 -1 86785號公報等顯示出 特 二 只丁出技術水準的相關文獻。 :、、、 ,上述之具備黑色化虛王?而欠、& a 箔,菩以/如… 化處理面及余褐色處理面的鋼 疋以在銅治的狀態下可以確認的色調為問題’並未考 22l3-6894-PF;Ahddub 7 200533251 慮到被加工為電磁波遮蔽導電性網片,被組入電浆顯示器 的前面板時之色調。 在此概略說明最一般化的前面濾波器(f i 11 e Γ )的製造 方法。在製造200 “間距,線寬2〇…乂下的導電性網片 15的場合,如第14(a)圖所示準備ρΕΤ薄膜,藉由 表 面設黏著劑層20成為顯示於第“⑻圖的狀態。接著,如 第14(c)圖所示在黏著劑2Q之上使用㈣法、無電解電鍵 法等形成ip以下的金屬遮蔽層s,其後,如第14⑷圖 所示藉由電解銅電鍍形成3…下程度的銅層c。 接著於該銅層c之上’如第14(。圖所示形成阻蝕 (etchmg resists R ’於該阻蝕層R,如第圖所示 曝光導電性網片圖案,如第15(g)圖所示顯影、餘刻成為第 _5(h)圖所不之狀恶,藉由剝離阻蝕層r成為第1 5⑴圖 示之狀態。 接著’藉由黑色化處理導電性網# 15的表面,如第 15⑴圖:示成為在導電性網片的表面形成黑色化處理層 接者’此黑色化處理結束時,把構成前面濾波 :的=1透明基板19a如第16⑴圖所示抵接按壓於已經里 色化:理的導電性網片5, ’而如第16⑴圖所示把已經: 色:處理的導電性網片15’壓入黏著劑層2〇内進行透;; :處理。接著:如第16⑷圖所示拉剝開m薄膜。最後如 —Π)圖所不’貼合黏著劑層20與第2透明基板19b, 元成刖面濾波器11。 ^以上步驟可知,即使在透明化處理前進行黑色 不見者,只要可以在透明化處理後與透明樹 5〜、明基板黏著的狀態黑色化而視覺確認導電性網 2213-6894-PF;Ahddub 〇 200533251 * 片表面者即可。 將來’無線電視的數位化已預定進行,畫像訊號的傳 達速度的尚速化也無可避免,考慮到對人體的影響,與對 其他電子機器的影響,可想像會對電磁波遮蔽有更強化的 法規限制’對使用導電性網片提供電磁波遮蔽性優異的前 面濾波器的要求,會更加提高,市場上亟需廉價且高品質 的導電性網片。 【發明内容】 在此’本案發明人等,經過銳意研究的結果,想到使 用以下所述之具備灰色化處理面的表面處理銅箱,製造電 磁波遮蔽用導電性網片。藉由使用此具備灰色化處理面的 表面處理銅泊,於電漿顯示器面板之前面濾波器的製造程 序之透明化處理前,電磁波遮蔽用導電性網片表面的色調 係灰色,在透明化處理後電磁波遮蔽用導電性網片表面黑 色化而可以視覺確認。 …The initial attachment amount of the dark brown state is reduced.叩 L 、, · The feeling from the mouth to the market is gone. In the past, it has " vv 1BJ reason n points, because the color of its brown brown surface is not uniform, and the lack of white J J is in full production. That is to say, the reason why the brown-smoothed homogenization cannot be achieved in the same plane: the reason for the difference in the cross-sectional shape of the mesh obtained by the engraving. However, the I brown surface is easily susceptible only by gently rubbing its surface. Therefore, it is urgently required to have a treatment layer with a uniform tea brown 'on the market, and it can be easier to etch money, tan, brown, and etch in a hurry. Machined surface treated steel foil. However, with the above-mentioned blackening treatments, there are problems with the stability of color tone. In order to finish the copper ^, it is necessary to strictly manage the manufacturing conditions, process management labor, and expenses in order to close the small batches. [Thus reducing the price of products to their limits. -Generally considered to be related advance technologies: there are technical trends in materials, Hitachi Chemical Technology has the following PDP 1T loc (Technical Report No. 33 (1 999_7) Kaisen 1 1 -1 86785, etc. shows two special Relevant literature on technical standards. : ,,,, the above have the blackened virtual king? But, & a foil, the steel slabs with the treatment surface and the remaining brown treatment surface have problems with the hue that can be confirmed in the state of copper treatment. "Not tested 22l3-6894-PF; Ahddub 7 200533251 Considering the color tone when processed into an electromagnetic wave shielding conductive mesh and incorporated into the front panel of a plasma display. Here, a method for manufacturing the most general front filter (f i 11 e Γ) will be briefly described. When the conductive mesh sheet 15 with a pitch of 200 "and a line width of 20" is manufactured, a pE thin film is prepared as shown in Fig. 14 (a), and an adhesive layer 20 is provided on the surface as shown in Fig. 14 status. Next, as shown in FIG. 14 (c), a metal shielding layer s below ip is formed on the adhesive 2Q by using a rhenium method, an electroless bond method, and the like, and then formed by electrolytic copper plating as shown in FIG. 14 (a). 3 ... the copper layer c below. Then, on the copper layer c, etchmg resists R are formed as shown in FIG. 14 (.), And a conductive mesh pattern is exposed on the resist layer R as shown in FIG. 15 (g). The development shown in the figure and the remaining time become as evil as shown in Figure _5 (h), and the resist layer r is peeled to the state shown in Figure 15 by peeling off. Then, the conductive mesh # 15's is processed by blackening. The surface, as shown in Fig. 15: shows that a blackened layer is formed on the surface of the conductive mesh sheet. At the end of this blackening treatment, the front filter: = 1 transparent substrate 19a is abutted as shown in Fig. 16 Press on the already colored conductive mesh 5, 'as shown in Fig. 16 (a). The color: processed conductive mesh 15' is pressed into the adhesive layer 20 for penetration; Next: Pull and peel the m film as shown in Fig.16. Finally, as shown in -II), the "adhesive layer 20" and the second transparent substrate 19b are attached to the elementary surface filter 11. ^ As can be seen from the above steps, Even if the black is not seen before the transparentization treatment, as long as it can be adhered to the transparent tree 5 ~ and the bright substrate after the transparentization treatment, it is black. You can visually check the conductive mesh 2213-6894-PF; Ahddub 〇200533251 * Only the surface is required. In the future, the digitization of 'wireless TV' is scheduled to be carried out, and the speed of transmission of image signals will also be unavoidable. Considering that The impact on the human body and other electronic devices can be imagined to have stronger legal restrictions on electromagnetic wave shielding. The requirements for front filters that use conductive meshes to provide excellent electromagnetic wave shielding properties will be further increased. An inexpensive and high-quality conductive mesh is urgently needed. [Summary of the Invention] As a result of intensive research, the inventors of the present invention have thought of using a surface-treated copper box with a grayed surface as described below to manufacture electromagnetic wave shielding. Use a conductive mesh. By using this surface-treated copper surface with a graying surface, the color tone of the surface of the conductive mesh for electromagnetic wave shielding before the transparent processing of the manufacturing process of the front filter of the plasma display panel. Gray, the surface of the conductive mesh for electromagnetic wave shielding is blackened after transparent treatment, and can be visually confirmed.

〈具備灰色化處理面之表面處理銅箔〉 理面的表面處理銅 與具備防錄處理層 但為了確保表面處 說明相關於本件發 相關於本件發明的具備灰色化處 箔,可分為不具備防銹處理層的場合, 的場合。亦即,防銹處理層並非必要, 理銅箔的長期保存性係屬必要。以下, 明的表面處理銅箔。 第1表面處理銅箔··相關於本件發明的表面處理銅 係「於電解銅箱的粗面上具備灰色化處 理 泊,該灰色化處理面,係設於銅箔層的單面之重量尸 20 0mg/m2〜35Gmg/m2之硫㈣鑛層,且其灰色化處== 2213-6894-PF;Ahddub 9 200533251 面高度在200nm以下為特徵之表面處理銅箔(以下稱為「第 1表面處理銅箔」)。第1圖係概略顯示此表面處理銅箔i a 之剖面層構成。 於此第1圖,概略記載著以在電解銅箔7的粗面形成 硫酸始鍍層4,在相反面(在電解銅箔的場合相當於光澤面)<Surface-treated copper foil with graying surface> The surface-treated copper with graying surface and the anti-recording treatment layer are provided, but in order to ensure that the surface description is relevant to this document, the foil with graying region is related to this invention, and can be classified as not having In the case of anti-rust treatment layer. That is, the anti-rust treatment layer is not necessary, and long-term storage of the copper foil is necessary. Hereinafter, the surface-treated copper foil is clear. The first surface-treated copper foil ... The surface-treated copper system related to this invention "is provided with a graying treatment on the rough surface of an electrolytic copper box, and this graying treatment surface is a weight body provided on one side of a copper foil layer. 20 0mg / m2 ~ 35Gmg / m2 thiopyrite ore layer, and its graying place == 2213-6894-PF; Ahddub 9 200533251 A surface-treated copper foil characterized by a surface height of 200 nm or less (hereinafter referred to as "the first surface Handling Copper Foil "). FIG. 1 schematically shows the cross-sectional layer structure of this surface-treated copper foil i a. Here, FIG. 1 schematically illustrates that the sulfuric acid starting plating layer 4 is formed on the rough surface of the electrolytic copper foil 7 and the opposite surface (equivalent to the glossy surface in the case of the electrolytic copper foil).

以微細銅粒3施以粗化處理的狀態的表面處理銅箔1 a為一 例。然而,此時使用的銅省的相反面,無論進行粗化處理 或者不進行粗化處理皆可。在此於第2圖,概略顯示相反 面省略粗化處理的場合之表面處理銅箔lb。以微細銅粒3 構成的粗化處理層2係以改善與基材等之黏著性等為目的 而被形成的,只要應需要而形成即可。形成此粗化處理層2 的場合的方法,可以採用如上述附著形成微細銅粒的方 法,使附著微細的氧化銅等方法,並不特別限定於粗化處 理方法。The surface-treated copper foil 1a in a state where the fine copper particles 3 are roughened is taken as an example. However, the opposite side of the copper province used at this time may be used with or without roughening. Here, FIG. 2 schematically shows the surface-treated copper foil lb when the roughening process is omitted on the opposite side. The roughening treatment layer 2 composed of the fine copper particles 3 is formed for the purpose of improving adhesion to a substrate or the like, and may be formed if necessary. The method for forming the roughening treatment layer 2 may be a method of forming fine copper particles by adhesion as described above, and a method of attaching fine copper oxide, etc., and is not particularly limited to the roughening treatment method.

接著,於此銅箔層7之呈右一々nnrT ^ W 疋凹凸的粗化面設硫酸 錄鍍層4。此處,粗面所具有的叙舻疮 另幻祖糙度,以該當於公稱厚度 3 5 // m以下的厚度的電解銅箔的粗 , J祖曲之粗糙度最為適當,以 操針先端部的曲率半徑為2 # ττο η 之彳木針式粗度計測定時之 JIS Β 060 1所定的平均粗度(R ) y牡1 · 〇 /z m以下,1 〇點羊 句粗度(Rz)為4. 0// m以下的範圍者 ” 埸入七a儿λα * 者叙佳。比此粗度還粗的 工A锢Η浓办、卩士 4 &amp; °周的女疋性,蝕刻加 工為網片形狀%之蝕刻精度會劣 蔽用導雷經I Η ώΑ制 南ϋ口質的電磁波遮 蔽用導電性網片的製造良率變差的傾 均粗孩者 更佳的平 度Ua)為〇.5/Zm以下,1〇點平 以下者。表面處理鋼箱的灰色的色,^ )為2.8㈣ 高,在電毁顯示器面板的前面面:色:女定性可飛躍地提 則面面板製造步驟進行透明化處 2213&gt;6894-PF/Ahddub Ί Λ 200533251 理後的黑色的色調也少有差異。 此處所謂硫酸鉛鑛層4,意味著使用琉酸始溶液以電鑛 法形成之層。接著,此硫酸職層4,在表面處理銅箱的狀 態可以視覺確認為灰色。然而,在上述之電聚顯示器面板 的前面面板製造步驟進行透明化處理,成為在灰色化處理 表面之上覆蓋樹脂薄膜或者黏著劑樹脂等的狀態之後,成 為可視覺碟認為黑色者。這樣的色調變化,就像是濃色調 的西服以水浸濕後,原本應該為粗糙不光滑的狀態的衣服 表面被形成水幕,因為形成光滑的表面而抑制了所照射到Next, a sulfuric acid recording plating layer 4 is provided on the roughened surface of the copper foil layer 7 which is 々nnrT ^ W 疋 uneven. Here, the rough surface has another rough ancestral roughness. The thickness of the electrolytic copper foil, which is equivalent to a nominal thickness of 3 5 // m or less, is the most suitable. The radius of curvature of the part is 2 # ττο η. The average thickness (R) determined by JIS B 060 1 at the time of cypress needle-type coarseness meter measurement, y = 1 〇 / zm or less, 1 0:00 point sentence thickness (Rz) Those who are in the range below 4. 0 // m ”are those who have entered seven a ’s λα *, and those who are better than others. A thicker job than this, a thick job, a warrior ’s son-in-law, and etching The accuracy of etching processed into the shape of the mesh is inferior to that of the conductive guide for electromagnetic wave shielding, which is used for the quality of the guillotine I, and the quality of the conductive mesh for the shielding of the electromagnetic wave is worse. ) Is less than 0.5 / Zm, and less than 10 points. The gray color of the surface-treated steel box, ^) is 2.8㈣ high, on the front of the panel of the electrically destroyed display: color: female qualitative can make a leap forward 2213 &gt; 6894-PF / Ahddub Λ Λ 200533251 After the surface panel manufacturing process is made transparent, there are also few differences in the color tone of black. The so-called lead sulfate layer 4 here means The layer formed by the electro-mine method using a starting solution of sulfuric acid was used. Then, the state of the sulfuric acid layer 4 in the surface-treated copper box can be visually confirmed to be gray. However, the manufacturing steps of the front panel of the above-mentioned electropolymer display panel are performed The transparent treatment becomes a state in which a resin film or an adhesive resin is covered on the graying treatment surface, and then it becomes a visual disc that is considered black. Such a tone change is like a thick-toned suit wet with water, The surface of the clothes, which should have been rough and matte, was formed with a water curtain, which prevents the exposure to light because it forms a smooth surface.

的光的亂反射,而可以視謦譃切么苗、曲A 尼寬罐^為更》辰色調的原理是相同 的。 此硫酸鈷鍍層4,採用後述的製造方法作為重量厚度 mmg/m2〜35〇mg/m2者’可得對銅蝕刻液溶解性優里,且可 =形成灰色化的表面。從前之使㈣層之具備黑色系電鐘 覆膜之銅笛的鈷層,其重量厚度為1〇。〇_2前後,算是非 常厚,而在鐘層的溶解性之品質上有所不同。結果,因有 厚度藉由銅姓刻液來溶解的速度變慢同時録這個元素自身 以高濃度蓄積於銅姓刻液而成為姓刻液之力價降低的重要 原因。又1本件發明之換算重量,係換算為銘重量之值。 換异重量係使表面處理銅猪溶解於酸溶液,藉由電聚發光 分光分析法等求出單位面積相當 銅箔每1平方米相當之重量。話里換异為表面處理 此外’亦瞭解到銘鑛層是否易於溶解在銅钱刻液,合 隨者進錢電鍍時的電鐘條件而受到报大的影響。a 明的表面處理銅落之製造方法時所得到 的鈷電鍍覆膜具有最佳的蝕刻特性。 2213-6894-PF/Ahddub 11 200533251 相關於本發明的表面處理銅箔所具有的第2特色,a 其灰色化處理面的表面形狀並非極粗者,該灰色化處理: 所具有的剖面高度在2〇0nm以下為重要的特徵。亦即,可 以稱之為極滑的灰色化處理面。#中,為了避免誤解而在 此予以標明的是:¾常的製造步驟的範圍内當然會 有差異,不需要在所有的位置的剖面高度都在2〇_以下, 亦會出現在反映出製造步驟的差異的程度下存在有超 剖面高度的場合。為了敎相關於本件發明的表面 處理m之硫㈣鐘層4的剖面高度,㈣m 置觀察到的剖面之FIB觀察影像顯示於第3圖。於此第、 圖,顯示在電解銅箱的光澤面形成灰色化處理面者。又, 觀察影像係由對被觀察面夾以6〇。角度的方向所奴 由此第3圖可知,灰色化處理面的剖面存在有 凹凸是很明顯的,監測這樣的凹凸的 、 ,面粗度計。然而,由第3圖的比例:可 月b以表面粗度計正確測定粗度的等級的凹凸。 ’、&quot; 明把FIB觀察影像的視野中的山部與谷 ^本發 &lt;取·大差當作「立丨1 阿又」,作為對應於以表面粗度計所 筮j里日守的Rmax。此 第3圖之中顯示「d」的處所,係第3圖的剖面 可以判斷約為80nm。而且,於第3圖,; 極為均勻的厚度沿著㈣表面的形狀形二係以 完全密接的狀態,並未見到硫酸Μ鍍層 寺不良處所,也未見會被預測有落粉的處所。 對此,形成於從前的銅箔表面的黑 、+、丄1 , U …、巴化處理面,盘卜 述相同由剖面進行fib觀察時,成為如第 /、 、5圖所示的結 22l3-6894-PF;Ahddub 12 200533251 果。亦即,可知構成黑色化 而成為由下底的銅箱突出相〜里,的形狀成長為樹枝狀, 時的剖自高度⑷時第4圖的;=的狀態。亦即,測定此 場合约Α 97η σ、、勺為480nm,而第5圖的 琢口、*〇為270nm,可理解其成 口打 樣的帶有樹技形狀的黑色化處备粗糙的表面。而且,這 可稱為容易受到損傷的表面’其樹枝狀部容易折斷 當然會發生落於,而姑μ &amp; 且’折斷的斷片脫落的話 視確上為是引起可由黑色化處理表面目 祝確5忍的色斑的原因。 心冰衣囬㈢ 二上所述之相關於本發明的表面處理銅箱, . 爿面觀察影像可以理解其具有極為切的 ^ 者’此灰色化處理面之Lab表色系之L值在43以下, 如同記載為Μ以下,°在此 左右為下限。 木衧別限疋,經驗上以38 ’相關於本件發明的表面處理銅箱的灰色化處理 产來:2的光澤’為表示其光澤的程度,以使用光澤 又來表不較佺。相關於本發明的灰色化處理面的光澤产 在電解銅箱的粗面形成該灰色化處理面的結果,以/ςThe random reflection of the light can be regarded as the principle of the same color tone. This cobalt sulfate plating layer 4 adopts a manufacturing method described later as a weight thickness of mmg / m2 to 350,000 mg / m2 'to obtain excellent solubility in a copper etchant and to form a gray surface. In the past, the cobalt layer of the copper flute provided with a black-type electric clock coating on the plutonium layer had a weight and thickness of 10%. Before and after 〇_2, it was considered very thick, but the quality of the solubility of the bell layer was different. As a result, the dissolution rate of the copper engraving solution becomes slow due to the thickness, and the element itself is accumulated in the copper engraving solution at a high concentration, which becomes an important reason for the decrease in the power value of the engraving solution. The conversion weight of this invention is the value converted to the weight of the inscription. The weight change is to dissolve the surface-treated copper pig in an acid solution, and determine the equivalent weight per square meter of copper foil per unit area by electro-luminescence spectroscopy. In other words, the change is surface treatment. In addition, I also learned whether the ore layer is easy to dissolve in the copper coin engraving solution, which is greatly affected by the condition of the electric clock when the coin is deposited. a The cobalt plating film obtained in the method for producing a surface-treated copper drop has the best etching characteristics. 2213-6894-PF / Ahddub 11 200533251 Related to the second feature of the surface-treated copper foil of the present invention, a The surface shape of the graying surface is not extremely rough, and the graying treatment: The cross-section height is Below 200 nm is an important feature. That is, it can be referred to as an extremely smooth grayed surface. In #, in order to avoid misunderstanding, it is indicated here: ¾ Of course there are differences in the scope of common manufacturing steps, and it is not necessary that the cross-sectional height of all positions is below 20 °, and it will also reflect the manufacturing There may be cases where the height of the cross-section is different to the extent of the difference in the steps. In order to correlate the cross-sectional height of the sulfide bell layer 4 with the surface treatment m of the present invention, the FIB observation image of the cross-section viewed at ㈣m is shown in FIG. 3. Here, the figure shows a case where a gray-treated surface is formed on the glossy surface of the electrolytic copper box. In addition, the observation image is 60% sandwiched between the observed surface. The direction of the angle From this figure 3, it can be seen that there is unevenness in the cross-section of the grayed-out surface. It is obvious that the unevenness of the unevenness and surface roughness are monitored. However, from the scale of Fig. 3, the roughness of the grade of roughness can be accurately measured by the surface roughness meter. ', &Quot; The mountain and valley in the field of view of the FIB observation image are clearly stated ^ Benfa &lt; taken · large difference as "Li 丨 1 Ayou", as the corresponding to the surface roughness measured Rmax. The place where "d" is shown in Fig. 3 is about 80 nm in the cross section of Fig. 3. Moreover, in Figure 3, the extremely uniform thickness along the shape of the surface of the concrete is completely in close contact with the secondary system, and no sulphuric acid coating has been found, and no premises have been predicted to fall. In this regard, the black, +, 丄 1, U, ..., Bahua processed surfaces formed on the surface of the previous copper foil, and the fibrous observations made from the cross section of the same copper plate will become the knots 22l3 shown in Figs. -6894-PF; Ahddub 12 200533251. In other words, it can be seen that the shape of the structure is blackened to become a protruding shape from the bottom of the copper box, and the shape grows into a tree shape. That is, it was determined that about A 97ησ, the spoon was 480 nm, and the cutout in Fig. 5 and * 0 was 270 nm. It can be understood that the black surface with a tree-like shape prepared by the mouth was rough. Moreover, this can be called a surface that is vulnerable to damage. Of course, the dendritic part is easily broken, and it will fall, and μ &amp; and if the broken piece falls off, it is considered to be caused by the blackened surface. 5 reasons for tolerant stains. The heart-boiled jacket is related to the surface-treated copper box of the present invention as described above. Observing the image on the surface can understand that it has a very sharp ^ 'The L value of the Lab color system of this gray-processed surface is 43 Hereinafter, it is described as M or less, and ° is the lower limit. Wood 衧 is not limited, empirically, 38 ′ is related to the graying treatment of the surface-treated copper box of the invention. Product: 2 gloss ′ is the degree of its gloss, and the use of gloss is not too bad. The glossiness of the grayed-out surface related to the present invention. The result of forming the grayed-out surface on the rough surface of the electrolytic copper box is

Ms(6(T )]為10以下較佳。光澤度若為ι〇以上,會有二 謂金屬光澤變得醒目。又,在此也不定出光澤度的下s限值, 但由經驗來說〇· 5左右為下限。更佳者為〇·5〜3〇之範 圍。此範圍之具有光澤度的場合之灰色的色調安定性最好乾 以上所述之表面處理銅箔之灰色化處理 叫 共表面密 接酉:置透明樹脂覆膜時,可以視覺確認為黑色。直接觀察 此時的灰色化處理面時黑濃度係〇 · 7〜1 · 2 (測定條件·Ms (6 (T)] is preferably 10 or less. If the glossiness is ι0 or more, metallic gloss becomes noticeable. Also, the lower limit value of glossiness is not determined here, but it is derived from experience. It is said that the lower limit is about 0.5. The more preferable range is 0.5 to 30. The gray hue stability of the occasions with gloss in this range is best to dry the graying treatment of the surface-treated copper foil described above. Called co-surface close contact: When a transparent resin film is placed, it can be visually recognized as black. When the grayed surface is directly observed at this time, the black concentration is 0 · 7 ~ 1 · 2 (Measurement conditions ·

StatusT’ Sampling aperture 1. 5 X 2mm,無偏光淚光鏡), 此灰色化處理面的表面密接配置透明樹脂覆膜時,黑濃产 13 2213-6894-PF;Ahddub 200533251 為〗· 4以上(經驗值之上限 漿顯干罘;4 ·矛王度)。從前,使用於電 水頌不裔面板的電磁波遮 伲用π电 處理面的黑濃度,在直接觀察=處理銅荡的黑色化 為1· 0以上(本件發明之發人等理面時之黑濃度約 口口 %為1.30〜le67),於此黑色化處 取传的氣 明樹脂覆膜時,黑濃度為! 5以上之表面密接配置透 定·^十古讲 上(本件發明之發明人等測 備相關於本件發明的灰色化處理面之由此,使用具 到於此表面密接配置透明樹:覆:時'表:么理鋼落,考慮 沾每H 何伽覆膜時黑濃度約為1 · 4以上 …'說疋成為充分的黑濃度。又,本 係根據Jis B 9620, ns B 9622 月之…/辰度 定條件。 ybZZ术測疋者,採用上述之測 第2表面處理銅箱··此表面處理銅箱,係在上述第工 表面處理銅落的表面形成供確保長期保存性之用的防錄處 理層二第6圖係概略例示兩面具備防銹處理層5的表面處 理銅箔lc之剖面構成。接著,於第7圖,顯示單面省略粗 化處理的場合之表面處理銅箔1 d。作為銅箔之限僅有防銹 目的下’可以廣泛使用咪唑(imidazole)、苯并三唾 Cbenzotriaz〇ie)等有機防銹、或一般所使用的藉由鋅或者 黃銅等鋅合金之無機防銹等。此外,於單面形成硫酸鈷層 的場合之防銹處理層,至少應該設於相關於本件發明的表 面處理銅箱的設有硫酸鈷鍍層之相反面,但是設於雙面亦 〇 然而,於其雙面設防銹處理層5的話,這些防銹處理 層’發揮作為粗化處理層2的防止微細銅粒脫落以及作為 硫酸錄層4的保護層的功能,同時也發揮橫跨長期間維持 2213-6894-PF;Ahddub 14 200533251 =由與硫酸始鑛層4組合使用,可以在银 姑 =4時發揮作為溶解保護層的功能。亦即,^ :層4單獨存在的場合,具備辞—錄合金層或者辞 者,其硫酸鈷鍍層4的溶解更迅速進行。StatusT 'Sampling aperture 1. 5 X 2mm, no polarizing tear mirror), when the surface of this graying surface is closely arranged with a transparent resin film, the black concentration is 13 2213-6894-PF; Ahddub 200533251 is 4 or more ( The upper limit of the experience value is dry; 4 · King of Spears). In the past, the black concentration of the π-electrically treated surface used to shield the electromagnetic waves of the electric water panel was directly observed = the blackening of the copper surface was greater than 1.0. The concentration is about 1.30 ~ le67). When the Qiming resin coating is taken from this blackened part, the black concentration is! The surface tightly arranged above 5 is transparent. ^ In ancient times (the inventor of this invention and other test equipment related to the grayed-out surface of this invention. Therefore, a transparent tree is used to tightly arrange this surface: cover: hour "Table: Meili Steel, considering that the black concentration when each H Hoga film is applied is about 1.4 or more ..." Say 疋 becomes a sufficient black concentration. In addition, this series is based on Jis B 9620, ns B 9622. The test condition of the ybZZ technique is to use the above-mentioned second surface-treated copper box. This surface-treated copper box is formed on the surface of the above-mentioned surface-treated copper drop to ensure long-term storage. Record prevention layer 2 Figure 6 is a schematic illustration of the cross-sectional structure of a surface-treated copper foil lc provided with a rust-proof treatment layer 5 on both sides. Next, Figure 7 shows the surface-treated copper foil 1 when roughening is omitted on one side. d. The limitation of copper foil is only for the purpose of rust prevention. 'Imidazole, Cbenzotriazoi, etc. can be widely used for organic rust prevention, or zinc alloys such as zinc or brass are generally used. Inorganic antirust and so on. In addition, the rust-preventive treatment layer in the case where a cobalt sulfate layer is formed on one side should be provided at least on the opposite side of the surface-treated copper box related to the invention provided with a cobalt sulfate coating, but on both sides. However, If the rust-resistant treatment layer 5 is provided on both sides, these rust-resistant treatment layers' function as a roughening treatment layer 2 to prevent the fine copper particles from falling off and as a protective layer of the sulfuric acid recording layer 4, and also to maintain the long-term maintenance 2213-6894-PF; Ahddub 14 200533251 = Used in combination with sulfuric acid starting ore layer 4 and can function as a dissolving protective layer when Yingu = 4. That is, in the case where the ^: layer 4 exists alone, if the alloy layer or the alloy layer is provided, the dissolution of the cobalt sulfate plating layer 4 proceeds more rapidly.

進而,於第8、9圖概略顯示於雙面具備防錄處理層5 ”鉻酸鹽(chromate)處理層6的表面處理銅络^之剖面層 構成。由分別對比第6圖與第8圖、第7圖與第9圖可知' 與具備防錄處理層5的表面處理銅箱之差異,僅在具備 酸鹽處理層6這一點而已,其他構成則相同。 此鉻酸鹽處理層6,在形成以鋅—鎳合金或者鋅—鈷合 金=構成的防銹處理層5之後,於單面或者雙面形成者: 接著,由於此鉻酸鹽處理層6的存在,使表面處理銅箔的 耐氧化特性顯著提咼’彳以有效防止氧化變色等裝飾性的 腐餘。 &lt;具備灰色化處理面的表面處理銅绪之製造方法&gt; (弟1表面處理銅箱之製造方法) 上述之第1表面處理銅箔之製造方法,最好是採用包 έ X下所述的步驟之製造方法。此製造方法,以採用攪拌 浴為前提。 相關於本件發明的表面處理銅箔之製造方法所使用的 銅、泊’不官在如上述於形成硫酸鈷鍍層的相反面是否進行 粗化處理。此處特別予以記載,但是施以粗化處理的場合 之條件並未有特別限定,例如,於此形成極微細銅粒的場 a &amp; 了 &amp;使用含坤的銅電解液。例如,採用硫酸銅系 2213-6894-PF;Ahddub 15 200533251 • 溶液,其中銅濃度5〜l〇g/l、硫酸濃度10〇〜I20g/1、氯 :辰度 20 〜30ppm、9-苯基 £1丫。定(9-phenylacridine)50 〜 30 0mg/l、液溫30〜40°C、電流密度5〜20A/dm2之條件等。 在a )之步驟,於上述之銅箔的粗面,使用含有硫酸鈷 (7水和物)10g/l〜40g/l、PH值為4. 〇以上、液溫30°C以 ' 下之硫酸鈷電鍍液作為攪拌浴,以4A/dm2以下的電流密度 電解,形成灰色之硫酸鈷鍍層。亦即,此處與第丨表面處 理銅箔的製造方法A之根本上的差異,在於進行硫酸鈷電 春鍍時,持續攪拌前述硫酸鈷電鍍液而進行電解這一點。此 硫酸鈷濃度,有硫酸鈷的濃度越低越可以做出良好的灰色 化狀態的傾向。然而,硫酸鈷電鍍液中的硫酸鈷(7水和物) 成為不滿10g/l時,採用攪拌浴形成的硫酸鈷鍍層的電著 速度變慢,而且硫酸鎳層的厚度變成不均勻的傾向變強, 招致工業上生產性欠缺的結果。對此,硫酸鈷(7水和物) 超過40g/l時,被形成的硫酸鈷鍍層不易形成緻密的凹凸, 結果變成不是良好的灰色狀態。 此汁,此日fFurther, Figs. 8 and 9 schematically show the cross-sectional layer structure of a surface-treated copper wire ^ provided with a recording prevention treatment layer 5 "chromate treatment layer 6 on both sides. The comparison is made by comparing Figs. 6 and 8 respectively. Figures 7 and 9 show that the difference from the surface-treated copper box provided with the anti-recording treatment layer 5 is only that the salt treatment layer 6 is provided, and the other structures are the same. This chromate treatment layer 6, After forming the rust-resistant treatment layer 5 composed of zinc-nickel alloy or zinc-cobalt alloy =, it is formed on one or both sides: Next, due to the presence of this chromate treatment layer 6, the surface treatment of the copper foil The oxidation resistance is significantly improved to effectively prevent decorative corrosion such as oxidative discoloration. &Lt; Manufacturing method of surface-treated copper thread with graying surface &gt; (1st method of manufacturing surface-treated copper box) The manufacturing method of the first surface-treated copper foil is preferably a manufacturing method using the steps described below. This manufacturing method is premised on the use of a stirred bath. The manufacturing method of the surface-treated copper foil related to this invention The used copper and moor's are not official as above Whether or not roughening is performed on the opposite side of the cobalt sulfate plating layer. It is specifically described here, but the conditions for the roughening treatment are not particularly limited. For example, a field where extremely fine copper particles are formed a &amp; &Amp; Use a copper-containing copper electrolyte. For example, use copper sulfate series 2213-6894-PF; Ahddub 15 200533251 • Solution, where the copper concentration is 5 to 10 g / l, the sulfuric acid concentration is 100 to I20 g / 1, chlorine : Chendu 20 ~ 30ppm, 9-phenyl £ 1 Ah. 9-phenylacridine 50 ~ 300mg / l, liquid temperature 30 ~ 40 ° C, current density 5 ~ 20A / dm2, etc. in a) In the step, on the rough surface of the above copper foil, cobalt sulfate electroplating containing 10 g / l to 40 g / l of cobalt sulfate (7 water and substance), a pH value of 4.0 or higher, and a liquid temperature of 30 ° C or lower is used. The liquid is used as a stirring bath, and electrolysis is performed at a current density of 4 A / dm2 or less to form a gray cobalt sulfate coating. That is, the fundamental difference between this and the 丨 surface treatment copper foil manufacturing method A is that the cobalt sulfate electric spring is used. During plating, the aforementioned cobalt sulfate plating solution is continuously stirred to perform electrolysis. The concentration of cobalt sulfate includes cobalt sulfate. The lower the degree, the better the tendency of graying. However, when the cobalt sulfate (7 hydrates) in the cobalt sulfate plating solution becomes less than 10 g / l, the electrodeposition speed of the cobalt sulfate coating layer formed by the stirring bath is used. Slower, and the tendency of the thickness of the nickel sulfate layer to become non-uniform becomes stronger, resulting in a lack of industrial productivity. For this reason, when the cobalt sulfate (7 water) exceeds 40 g / l, the formed cobalt sulfate coating is not easy. A dense unevenness is formed, and as a result, it is not in a good gray state.

4. 0以 5 〜5 _ 5 灰色的 者氫氧 鑛層的 維持於 了如此 性的鈷 或者是 ^ V ^队敗職值係以 上的範圍為目標進行調整較佳。接著,更佳者為4 的範圍。於此範圍,生產性良好,可以得到良好的 鈷鍍層。要進行此酸鹼值的調整,添加氫氧化鈉或 化鉀等其他電解值的作法並不受歡迎。因為合^ 灰色容易添上金屬色澤。 ’胃H銘 亦即,溶液酸鹼值,藉由使溶液中的金屬濃产 -定’結果可以使其技化纟4 G以上的範圍= 般使溶液中的鈷離子濃度安定化,最好是使用溶解 電極而以溶解的方式補充供給電鍍附著的鈷離=, 2213-6894-PF;Ahddub 16 200533251 * 以連續監視金屬齙早:曹痒二、态火π 孟屬離子/辰度而適當添加使用氫氧化鈷,而使 姑離子濃度安定化的手法等。 接著,此時之液溫越低,越有可得良好的灰色化處理 面的傾向。將液溫設定為3Qt:以下的話,以上述第i表面 .處理銅荡的製造方法A,可能得到比在未粗化處理的銅猪表 -面施以黑色化處理更好的灰色化處理面。 此¥之攪拌,最好是使攪拌後的溶液流速達到2〇cm/s 二^Ocm/s的範圍較佳。溶液流速不滿2〇cni/s的場合,於上 _述/合液組成,對使電著的鈷的被著面之離子供給變慢,電 著=需要的時間變長,而且所得的灰色化處理表面的色調 也谷易產生差異。另一方面,溶液的流速超過的場 合,由於攪拌所導致的離子供給速度太大,而使得灰色化 處理表面接近黑色化,而且金屬光澤變強,變成不是本件 發明的目的的灰色化處理表面。 進行電解時的電流密度,使用4A/dm2以下的電流。於 此範圍,即使銅箔表面不粗化處理,也可以形成與有機材 參等之毪接性佳的具有良好微細凹凸之硫酸鈷鍍層。通常, 要得到有凹凸的黑色係的電鍍表面,採用通入過剩的燒鍍 區域内的電解電流的方法。然而,在此使用於電解的電解 密度越小者,越有可以進行安定的良好灰色化處理的傾 向。亦即’採用可能限度下的最小電流密度即可,但是考 慮到工業上的生產性的話,可以判斷應該以電流密度 〇· 5A/dm2為下限值。另一方面,電流密度超過4α/_2的話, 有可得接近黑色化處理的色調的傾向,而失去了採用此製 造方法的意義。而且,在上述的電解密度的範圍所形成的 灰色化處理表面,並未有過落粉現象。 2213-6894-PF;Ahddub 17 200533251 在b)的步驟,將經過以上步驟的銅箔予以水洗、乾燥, 得到將硫酸銘錄層#為灰色化處理㈣表面處理銅此 處的水洗方法、乾燥方法並未有特定,可以採用 慮到的方式。 ^ (第2表面處理銅箔的製造方法) 於第2表面處理銅落的場合,與上述之第】表面處理 銅泊的製造方法相肖,製造將硫酸鈷鍍層作為灰色化處理 面的表面處理銅落,其後’進行防錄處理層的形成。亦即, 製造流程為「(a)於㈣的光澤面形成灰色的硫酸㈣層。 ⑴在形成灰色的硫酸鈷鍍層的銅箔的雙面或者單 防錄處理層。⑷其後’進行水洗、乾燥。」的過程。亦即成 只有在第1表面處理_落的製造方法上再增加防錄 的形成步驟而已。 因而,在此僅說明關於防錄處理層的形成步驟。係 結束灰色的硫酸㈣層的形成之後的之雙面面, 形成防銹處理爲。關认w 乂 处理層關於從前所習知的使用咪唑 一imi azole)、本开三唑(benz〇triaz〇ie)等有機防銹、或 :般:使用的藉由鋅或者黃銅等鋅合金之無機防銹的場 曰,並不需要特別說明只要依照常法進行即可,在此省略 詳細的說明。 牡此^略 x下說明關於使用鋅一鎳合金電鍍液或者鋅— ==理而形成的場合。首先,說明關於鋅= ^ ♦所使用的鋅一鎳合金電鍍液並未特別限 =,列可以使用硫酸鎳,其中鎳濃度、使 溫20〜· 卜焦鱗酸鈣50〜5〇〇g/1、液 、酸鹼值8〜11、電流密度〇·3〜ΙΟΑ/dm2之條 2213-6894-PP/Ahddub ^ 200533251 件等。 其次,說明鋅鈷合金雷 液並未特别限定,試舉一鍍。此處使用的鋅鈷合金電鍍 佔1〜2.5g/1、使用’可採使用錢始其中钻濃度 酸…。二:心 度U〜UUAW之條件等。0C、酸驗值8〜U、電流密 鹽處理組合而得之 :鋅鈷合金電鍍與後述之鉻酸 能。 銹处理層,顯示出特別優異的耐蝕性4. 0 It is better to adjust 5 to 5 _ 5 gray or hydroxide ore layer to maintain such cobalt or ^ V ^ team failure value is in the above range. Next, a range of 4 is more preferable. Within this range, the productivity is good, and a good cobalt plating layer can be obtained. To adjust this pH value, the addition of other electrolytic values such as sodium hydroxide or potassium chloride is not welcome. Because ^ gray is easy to add metallic color. 'Stomach H name' is the solution pH value, and the concentration of the metal in the solution can be determined. As a result, it can be technicalized. The range of 4 G or more = generally stabilizes the concentration of cobalt ions in the solution. It is the use of dissolving electrodes to supplement the supply of cobalt attached to the plating in a dissolving manner. =, 2213-6894-PF; Ahddub 16 200533251 A method such as using cobalt hydroxide to stabilize the ion concentration is added. Next, the lower the liquid temperature at this time, the more the good grayed-out surface tends to be obtained. Set the liquid temperature to 3Qt: In the following case, with the above-mentioned i-th surface. Process copper manufacturing method A, it is possible to obtain a better grayed surface than the blackened surface of the surface of the copper pig that has not been roughened. . In this case, it is preferable that the flow rate of the solution after the stirring reaches a range of 20 cm / s to 2 cm / s. When the flow rate of the solution is less than 20cni / s, the composition of the above solution / combined liquid will slow down the supply of the coated surface ions of the cobalt, which will take longer to write and the resulting graying. The hue of the treated surface is also prone to differences. On the other hand, where the flow rate of the solution exceeds, the ion supply speed caused by the stirring is too large, so that the graying treatment surface is close to blackening, and the metallic luster becomes strong, which becomes a graying treatment surface which is not the object of the invention. The current density at the time of electrolysis was 4 A / dm2 or less. Within this range, even if the surface of the copper foil is not roughened, it is possible to form a cobalt sulfate coating layer having excellent fine unevenness with good adhesion to organic materials. In general, to obtain a black-based plated surface with unevenness, a method of passing an electrolytic current in an excessively-sintered area is adopted. However, the smaller the electrolytic density used for the electrolysis here, the more stable and good graying tends to be. In other words, it is sufficient to use the minimum current density within the possible limit, but considering the industrial productivity, it can be judged that the current density should be 0.5A / dm2 as the lower limit. On the other hand, if the current density exceeds 4α / _2, the color tone approaching the blackening treatment tends to be obtained, and the significance of adopting this manufacturing method is lost. In addition, the grayed-out surface formed in the above-mentioned range of electrolytic density did not have excessive powder falling. 2213-6894-PF; Ahddub 17 200533251 In step b), the copper foil that has undergone the above steps is washed with water and dried to obtain the sulfuric acid inscription layer # grayed out. The surface treated copper is washed and dried here. It is not specific and can be considered. ^ (Manufacturing method of the second surface-treated copper foil) In the case where the second surface-treated copper is dropped, it is different from the above-mentioned method for manufacturing the surface-treated copper poise, and the surface treatment is performed using a cobalt sulfate plating layer as a graying treatment surface The copper falls, and thereafter the formation of a recording prevention layer is performed. That is, the manufacturing process is "(a) forming a gray rhenium sulfate layer on the glossy surface of ㈣. ⑴ on both sides of the copper foil forming the gray cobalt sulfate plating layer or a single anti-recording treatment layer. ⑷ ' Dry. "Process. That is to say, it is only necessary to add a step of preventing the recording from the first surface treatment method. Therefore, only the steps for forming the recording prevention processing layer will be described here. After the formation of the gray hafnium sulfate layer on both sides, antirust treatment is performed. Regarding the use of the 防 treatment layer in the conventionally known use of organic rusts such as imidazole, benzazotriazole, or the like: Ordinary: the use of zinc alloys such as zinc or brass The field of inorganic rust prevention does not need to be described in detail, but it can be performed in accordance with a conventional method, and detailed description is omitted here. The following is a description of the occasions where a zinc-nickel alloy plating solution or zinc is used. First, the description about zinc = ^ ♦ The zinc-nickel alloy plating solution used is not particularly limited. Nickel sulfate can be used in the column, where the nickel concentration and the temperature are 20 to 50 and the calcium pyrophosphate scale is 50 to 5000 g /. 1. Liquid, pH value 8 ~ 11, current density 0.3 ~ 10A / dm2 strip 2213-6894-PP / Ahddub ^ 200533251 pieces, etc. Next, it is explained that the zinc-cobalt alloy lightning solution is not particularly limited. The zinc-cobalt alloy plating used here occupies 1 ~ 2.5g / 1, the use of which can be used to drill the concentration of acid ... Second: the conditions of heart U ~ UUAW and so on. 0C, acid test value 8 ~ U, combined with current dense salt treatment: zinc-cobalt alloy plating and chromic acid energy described later. Rust-treated layer shows particularly excellent corrosion resistance

於第2表面處理銅箔的 合金層或者鋅鈷合金層等之後“:、銅為的表面形成辞鎳 優異的耐钱性。亦即,在」,形成鉻酸鹽的冑,可得更 置鉻酸鹽處理步驟即可。在 夂又 m - ^ , 在此鉻馱鹽處理步驟,不論採用 使絡ϊ夂鹽〉谷液與該銅箔表 趟、听、六+公 甶接觸之置換處理,或是在鉻酸 各種方法均可。此外,關於=覆膜的電解鉻酸鹽處理等 以使用常法所使用的範圍。接 / 合液了 丧者在其後進行水洗、择條 而得到具備灰色化處理面的表面處理銅箔。 ’、 〈電磁波遮蔽導電性網片〉 以上所述之相關於本件發明的具備《色化心面 面處理銅領,沒有由灰色化處理面落粉,巾且保持良好的 灰色’其灰色化處理層可以藉由通f的銅㈣程序來姓刻 除去。因而,使用製造印刷電路板的程序,可以容易加二 為任意形狀。考慮到這些情況,可以說是最適於組入電漿 顯示器面板的前面板之電磁波遮蔽導電性網片之用途。7 發明效果 22l3-6894-PF;Ahddub 19 200533251 具備相關於本發明的灰色化處理面的表面處理銅, 即使硫酸鈷鍍層非常薄,也呈現堪耐電漿顯示器面板的前 面面板的電磁波遮蔽導電性網片用途之良好的灰色。接 著,因為含鈷量很少,所以蝕刻特性良好,而且不會降低 通常的氯化鐵、硫酸一過氧化氫系的銅蝕刻液的力價,可 以使溶液壽命長期化。 此外,相關於本件發明的表面處理銅箔的製造方法, 可以高生產率地製造上述表面處理銅箔,採用上述製造條 件形成的硫酸鈷鍍層溶解於銅蝕刻液的效率最佳。 【實施方式】 以下,顯示製造具備上述之灰色化處理面的表面處理 銅箔,使用銅蝕刻液製造電磁波遮蔽導電性網片的結果。 苐1實施例 在本實施例,製造第1圖所示的第1表面處理銅羯1 a, 以蝕刻法試驗製造電磁波遮蔽導電性網片形狀確認钱刻性 能。 在本貫施形態,使用藉由電解硫酸銅溶液所得到的公 稱厚度1 5 // m的銅箔。接著使用硫酸濃度1 5 〇g/ i、液温3 0 C的稀硫酸溶液將銅箔浸潰於此溶液3 〇秒進行表面的清淨 化。 接著對公稱厚度1 5 # m的電解銅箔的光澤面施以粗化 處理。此時的粗化處理,係將此微細銅粒3附著形成於銅 箔7的單面,使用硫酸銅系溶液,其中銅濃度1 〇、硫酸 濃度100g/l、氯濃度20〜30ppm、氯濃度25ppm、g-苯基吖 咬(9-phenylacridine)140mg/l 、液溫 38°C ' 電流密度 2213-6894-PF;Ahddub 20 200533251 1 5 A/drn1、電解時間2秒電解條件。第丨〇圖顯示其粗化處理 後之銅箔表面。 作為(a )步驟,於該電解銅箔之粗面上形成硫酸鈷鍍 層。硫酸鈷鍍層的形成,係使用硫酸鈷(7水和物)為2〇g/卜 酸鹼值調為5· 5、液溫為27°C之硫酸鈷電鍍液作為攪拌浴, 藉由以1A/dm1的電流密度電解12秒鐘,形成灰色的硫酸鈷 鍍層(換算厚度為270mg/m1)。此時,溶液中的的鈷離子濃 度的調整並未特地進行。因為短時間電解所以認為不需要 調整金屬離子的濃度。第U及12圖顯示形成的硫酸鈷鍍 層第11圖係以低倍率觀察的掃描型電子顯微鏡影像,第 1 2圖係以兩倍率觀察到的掃描型電子顯微鏡影像。由此第 1 2圖可知,可以明確把握下底的電解銅箔的粗面形狀亦可 理解灰色化處理層自身極薄。 作為(b)步驟,以充分的純水進行淋浴洗淨,藉由電埶 器將環境溫度加熱至15(rc使滯留在乾燥爐内4秒鐘,去^ 到具備非常良好的色調之灰色化處理面之表面處理 ° &amp;又於上述之各步驟間,原則設有15秒鐘之純水 水洗步驟’防止帶入前處理步驟之溶液。 ,屯水 〈表面處理銅箔之物性〉 /、備、k過以上步驟所得到的灰色化理 銅箔的剖面以FIB驻罢# 6 ®處理 剖面,該灰色化产理\ 果’得到如第3圖所示的 火色化處理面的剖面高度⑷為80n 理的Lab表色季之τ括4 人巴化處 此外,灰以^ 卜光澤度[GS(60。)]為1.5。 # ^ 处王面未見色斑,在該表面貼上黏著性脒;^ 冉將其撕開之膠帶、、目,1 4 k f丨王I帶 、 胗f /則试也確認沒有落粉。 進而,所得到的矣 J的表面處理銅箔的灰色化處理面,被加 21 1 2l3~6894-pF;Ahddub 200533251 工為:聚顯示器用之電磁波遮蔽網片,進行在施以透明化 ,:::否看到黑色化之判斷。形成透明樹脂覆膜之前的 理面的黑濃度為〇.9,採用此灰色化處理面上塗布 = 作為透明樹脂覆膜,乾燥使硬化,透過硬化的 二妹罢曰曰察灰色化處理面的色調改變之所謂的代替 彳、,Ό ,灰色化處理面的觀察得黑濃度1 · 5的黑色。 〈電漿顯示器用的電磁波遮蔽網片的製造〉 如以上所述得到的表面處理銅箔的雙面貼人你&amp; m咖 冷扪雙面貼合作為阻蝕 ,之㈣#者’僅對灰色化處理面側之乾膜,重疊供試做 電磁波遮蔽導電性網片之用的1 、 电&quot;生凋片之用的试驗用遮罩膜’網片間距200 片線中S 10㈣、網片偏角45。、周圍以紫外線曝光 具備網片電極部的導電性網片圖孝 主— M未 此時,同時於相及 的阻蝕層之全面,II由紫外線曝光 顯影而除去者。其後,使用驗、容液心成為無法藉由之後的 便便用驗洛液顯影,形成餘刻圖案。 接者,使用銅钱刻液之氯化鐵钱刻液,由灰色化處理 面側進仃銅蝕刻,其後,藉由剝離阻蝕声, —兮; m 氣電磁波遮After the second surface-treated copper foil alloy layer or zinc-cobalt alloy layer, etc., ":, the surface of copper is formed of nickel, and it has excellent money resistance. That is," ", which forms chromate, can be further modified. The chromate treatment step is sufficient. In the case of m-^, in this chromium phosphonium salt treatment step, whether the method of contacting the complex salt> valley liquid with the copper foil surface, listening, six + public cymbals, or various methods of chromic acid Both. In addition, the electrolytic chromate treatment, etc. of the film is used in the range used in the conventional method. After receiving / combining the liquid, the mourner was washed with water and selected strips to obtain a surface-treated copper foil with a gray surface. ', <Electromagnetic wave shielding conductive mesh sheet> The above-mentioned related to the present invention is provided with a "colored core surface surface treated copper collar, without powder falling from the grayized surface, and the towel has a good gray color." Its graying treatment Layers can be removed by the copper foil program through f. Therefore, it is possible to easily add two to an arbitrary shape using a procedure for manufacturing a printed circuit board. In view of these circumstances, it can be said that it is most suitable for the use of the electromagnetic wave shielding conductive mesh in the front panel of the plasma display panel. 7 Advantages of the invention 22l3-6894-PF; Ahddub 19 200533251 The surface-treated copper provided with the grayed-out surface of the present invention, even if the cobalt sulfate plating layer is very thin, the electromagnetic wave shielding conductive screen of the front panel of the plasma-resistant display panel is exhibited Good gray for tablet use. Next, since the cobalt content is small, the etching characteristics are good, and the strength of the conventional copper chloride etching solution of ferric chloride and sulfuric acid-hydrogen peroxide is not reduced, and the life of the solution can be prolonged. In addition, the method for producing a surface-treated copper foil according to the present invention can produce the surface-treated copper foil with high productivity, and the cobalt sulfate plating layer formed by using the above-mentioned production conditions has the best efficiency in dissolving in a copper etchant. [Embodiment] The following shows the results of producing a surface-treated copper foil having the above-mentioned graying-treated surface, and producing an electromagnetic wave shielding conductive mesh using a copper etchant.苐 1 Example In this example, the first surface-treated copper 羯 1a shown in Fig. 1 was manufactured, and the shape of an electromagnetic wave-shielding conductive mesh was tested by an etching method to confirm the engraving performance. In this embodiment, a copper foil having a nominal thickness of 15 / m obtained by electrolytic copper sulfate solution is used. Next, the copper foil was immersed in this solution for 30 seconds using a dilute sulfuric acid solution having a sulfuric acid concentration of 150 g / i and a liquid temperature of 30 C to clean the surface. Then, the glossy surface of the electrolytic copper foil with a nominal thickness of 15 m was subjected to a roughening treatment. In this roughening process, the fine copper particles 3 are adhered and formed on one side of the copper foil 7, and a copper sulfate-based solution is used, in which the copper concentration is 10, the sulfuric acid concentration is 100 g / l, the chlorine concentration is 20 to 30 ppm, and the chlorine concentration 25ppm, g-phenylacridine (9-phenylacridine) 140mg / l, liquid temperature 38 ° C 'current density 2213-6894-PF; Ahddub 20 200533251 1 5 A / drn1, electrolysis time 2 seconds Electrolytic conditions. Figure 丨 〇 shows the roughened copper foil surface. As step (a), a cobalt sulfate plating layer is formed on the rough surface of the electrolytic copper foil. The formation of the cobalt sulfate plating layer is based on the use of cobalt sulfate electroplating solution with cobalt sulfate (7 water and substance) of 20 g / pH value adjusted to 5.5 and a liquid temperature of 27 ° C as a stirring bath. Electrolysis was performed at a current density of / dm1 for 12 seconds to form a gray cobalt sulfate plating layer (equivalent thickness was 270 mg / m1). At this time, the cobalt ion concentration in the solution was not specifically adjusted. Because of the short-term electrolysis, it is not considered necessary to adjust the metal ion concentration. Figures U and 12 show a scanning electron microscope image of the formed cobalt sulfate coating. Figure 11 shows a scanning electron microscope image viewed at a low magnification. Figure 12 shows a scanning electron microscope image viewed at a double magnification. From Figure 12 it can be seen that the rough shape of the bottom electrolytic copper foil can be clearly grasped, and that the graying treatment layer itself is extremely thin. As step (b), shower clean with sufficient pure water, and heat the ambient temperature to 15 ° (rc) to stay in the drying furnace for 4 seconds, and go to gray with a very good hue. The surface treatment of the treated surface ° &amp; Between the above steps, a 15-second pure water washing step is provided in principle to prevent the solution from being brought into the pre-treatment step., Water properties of surface-treated copper foil / / The cross-section of the gray-colored copper foil obtained after the above steps was treated with FIB # 6 ®, and the gray-colored texture obtained the cross-section height of the flame-colored processed surface as shown in FIG. 3. Τ is the τ of the Lab color season of 80n, including 4 people. In addition, the grayness [GS (60.)] Of gray is 1.5. There is no color spot on # ^, and the surface is adhered to the surface.脒 冉 Ran torn the tape, mesh, 14 kf 丨 Wang I belt, 胗 f / test also confirmed that there is no falling powder. Furthermore, the surface treatment of the obtained 矣 J was grayed out of the copper foil. Surface, 21 1 2l3 ~ 6894-pF is added; Ahddub 200533251 is used: the electromagnetic wave shielding mesh for the poly display, Transparent, ::: Judgment of whether blackening is seen. The black concentration of the physical surface before forming the transparent resin film is 0.9, and coating with this graying treatment surface = as a transparent resin film, drying to harden, Through the hardened Ermei, the so-called substitute 彳 ,, Ό, which observed the change in hue of the grayed surface, the blacked surface with a black density of 1.5 was observed. <Electromagnetic wave shielding mesh for plasma display Manufacture> The double-sided adhesion of the surface-treated copper foil obtained as described above can be used as a corrosion inhibitor. The "# 者 '" only overlaps the dry film on the gray-treated surface side and overlaps. 1. Test mask for electromagnetic wave shielding of conductive mesh 1. Electricity &quot; test mask film for green wither sheet; 'mesh spacing between 200 mesh lines, S 10㈣, mesh deflection angle 45., UV around Exposure of the conductive mesh with the mesh electrode part—M is not at this time, and at the same time, the entire corrosion resist layer is covered, and II is removed by ultraviolet exposure and development. After that, the test and liquid-containing core become Cannot be developed by the stool test solution after the stool, shape . I then patterned by engraving, ferric chloride, money coins engraved engraved liquid solution, the treatment by the gray side into the Ding copper etching, thereafter, the resist by peeling sound, - Xi; m electromagnetic wave shielding gas

Hf網片。結果,沒有钱刻殘留,進行 刻。於第13圖,顯示供評估蝕刻性之 义好的蝕 寬幅的電路)的蝕刻狀態。由此第、J#、圖案(1 3 # m 两凡乐U圖可知,沒有 留’可得到蝕刻參數極為優異的漂亮電路。 弟2實施例 本實施例,如第6圖所示,製造具備辞辞合金 防銹處理層之第2表面處理銅箱1 «下馬 M飾刻法試驗製造電 磁波遮蔽導電性網片形狀確認蝕刻性At 月匕。亦即,直到藉由Hf mesh. As a result, no money remains, and the carving is performed. Fig. 13 shows the etching state of a wide-etched circuit for evaluating etchability. From this, J #, pattern (1 3 # m Liang Fanle U picture can be seen, without leaving a 'can get a beautiful circuit with excellent etching parameters. Brother 2 embodiment This embodiment, as shown in Figure 6, manufacturing equipment The second surface-treated copper box 1 of the alloy anti-rust treatment layer «Under the M-M decorative test method to manufacture the electromagnetic wave shielding conductive mesh shape to confirm the etchability At Moon. That is, until by

硫酸銘鍍層形成灰色化處理層為止,I 因此僅說明防職理條件。又,灰^第1實施例共通, 及色的硫酸鈷鍍層之換算 2213-6894-PF;Ahddub 22 200533251 *厚度與第1實施例相同均為270mg/m2。 此處在第1實施例之單面結束形成灰色的硫酸鈷鍍 後之銅的雙面上,使㈣鎳合金電錢電鍵處理,^ 面形成鋅錄合金層。鋅鎳合金層,使用硫酸錄其中錄濃户 為2.0g/l、使用焦磷酸鋅其中鋅濃度為〇 5g/i、焦磷酸2 25〇g/卜液溫35。〇、酸驗值1〇、電流密度5A/dm2之條雷弓 解5秒鐘,在雙面上均勻而且平滑地電析。 接著’與第1實施例同樣以充分的純水淋浴洗淨 •由電熱器在環境溫度15〇t的乾燥爐内滯留4秒鐘,去除Z 分二得到具備非常良好的色調之灰色化處理面的表面處: 銅箱1c。又,於上述之各步驟間,原則上設有15秒鐘的純 水水洗步驟,防止前處理步驟的溶液被帶入。 〈表面處理銅箱之物性〉 # 備經過以上步驟所得到的灰色化處理面的表面處理 銅冶的d面以FIB裝置觀察的結果,得到與第3圖所示相 同的剖面,該灰_ ^卜# w &amp; Λ邑化處理面的剖面高度為75nm,該灰色化 _處理的Lab表色系之L值為39,光澤度[Gs(6〇。為2· 5。 卜Λ色化處理面未見色斑,在該表面貼上黏著性膠帶 再將其撕開之膠帶測試也確認沒有落粉。 進而所彳寸到的表面處理銅箔的灰色化處理面,被加 工為電漿顯示器用之電磁波遮蔽網片,進行在施以透明化 處理¥可否看到黑色化之判斷。形成透明樹脂覆膜之前的 火色化處理面的黑濃度為G · 9,採用與第工實施例相同的代 替套平^ K果’灰色化處理面的觀察得黑濃&amp;工· 6的黑 色。 〈電漿顯示器用的電磁波遮蔽網片的製造〉 2213-6894-PF;Ahddub „ 200533251 與第1實施例同樣,使用得到的表面處理銅箔試做電 磁波遮蔽導電性網片。結果即使存在有防銹處理層也對蝕 刻操作不妨礙,沒有蝕刻殘留,進行非常良好的蝕刻。 第3實施例 本實施例,如第8圖所示,製造作為防銹處理層具借 鋅鎳合金層及鉻酸鹽處理層之第2表面處理銅箔le,以钱 刻法試驗製造電磁波遮蔽導電性網片形狀確認其蝕刻性 月。亦即’直到藉由硫酸始鐘層形成灰色化處理層為止, 與第1實施例共通,因此僅說明防銹處理條件。又,灰色 的硫酸始鍍層之換算厚度與第i實施例同樣為27〇mg/m2。 防銹處理層的形成,與第2實施例同樣,使用鋅一錄 合金電鍍液,於雙面形成鋅鎳合金層後,於雙面進行鉻酸 鹽處理。此處採用電解鉻酸鹽處理,電解條件為鉻酸 5· 〇g/l、液溫35°C、酸鹼值U· 5、電流密度8A/dm2之條件 電解5秒鐘。 接著,結束鉻酸鹽層的形成後,以充分的純水淋浴洗 淨,藉由電熱器在環境溫度15代的乾燥爐内滯留4秒鐘, 去除水分’得到具備非常良好的色調之灰色化處理面的表 面處理銅肖lc。又,於上述之各步驟間,原則上設有Η 秒鐘的純水水洗步驟,防μ &amp; &gt;光^鄉,防止刖處理步驟的溶液被帶入。 〈表面處理銅箔之物性〉 具備經過以上步驟所得到 細狄a 』07次色化處理面的表面處理 銅泊的剖面以FIB梦詈_衮从,丄田 Η 裝置觀察的結果,得到與第3圖所示相 同的剖面,該灰色化虛採 ^ ’、相 jkjs ^ ^ 、^面尚度為7511111,該灰色化 嚴理的Lab表色系之τ佶盔/ Λ 人ο ^ ^ L值為40,光澤度[Gs(60。)]為2 ^。 此外,灰色化處理面未見多概— 」」為2.3。 未色斑,在該表面貼上黏著性膠帶 2213-6894-PF;Ahddub 。 200533251 • 再將其撕開之膠帶測試也確認沒有落粉。 進而,所得到的表面處理銅箱的灰色化處理面,被加 工為電聚顯示器用之電磁波遮蔽網片,進行在施以透明化 處理時可否看到黑色化之判斷。形成透明樹脂覆膜之前的 灰色化處理面的黑濃度為〇· 9,採用與第丨實施例相同的代 替法評價的結果,灰色化處理面的觀察得黑濃度i · 5的黑 色。 〈電漿顯示器用的電磁波遮蔽網片的製造〉 Φ 與第1實施例同樣,使用得到的表面處理銅箔試做電 磁波遮蔽導電性網片。結果,即使存在有防銹處理層也對 蝕刻操作不妨礙,沒有蝕刻殘留,進行非常良好的蝕刻。 第4實施例 本實施例,如第6圖所示,製造作為防銹處理層具備 鋅鈷合金層之第2表面處理銅箔lc,以蝕刻法試驗製造電 磁波遮蔽導電性網片形狀確認其蝕刻性能。亦即,直到藉 由硫酸鈷鍍層形成灰色化處理層為止,與第丨實施例共通, 因此僅說明防銹處理條件。又,灰色的硫酸鈷鍍層之換算 厚度與第1實施例同樣為270mg/m2。 # 此處在第1實施例之光澤面結束形成灰色的硫酸鈷鑛 層後之銅箔的雙面上’使用鋅録合金電鍍液電鍍處理,於 雙面形成辞鈷合金層。鋅鈷合金層,使用硫酸鈷其中鈷濃 度為2· Og/Ι、使用焦磷酸鋅其中鋅濃度為〇· 5g/1、焦磷酸 鈣250g/l、液溫35°C、酸鹼值10、電流密度5A/dm2之條 件電解5秒鐘,在雙面上均勻而且平滑地電析。 接著’與第1實施例同樣以充分的純水淋浴洗淨,藉 由電熱器在環境溫度15〇°C的乾燥爐内滞留4秒鐘,去除水 2213-6894-PF;Ahddub 200533251 分,得到具備非赍&amp; 銅箔lc。又,於上^之=色調之灰色化處理面的表面處理 水水洗步驟,防止前::::間,原則上設有“秒鐘的純 〈表面處理銅落之物性步驟的溶液被帶入。 具備經過以上步驟所得 銅箱的剖面以FIB裝置、Λ色化處理面的表面處理 ^ ; Μ察的結果,得到盥笫3 HI % - 1 同的剖面,該灰色化4 I、弟3圖所不相 處理的Lab表色系之尚度為8—’該灰色化 ,,.. 、 值為 40’ 光澤度[Gs(60。)]為 25。 灰色化處理面未見色斑’在該表面貼上黏著性膠帶 再將其撕開之膠帶測試也確認沒有落粉。#❹膠帶 進而’所仔到的表面處理柏 銅油的灰色化處理面,被加 為電水顯不器用之電磁波遮蔽網片,進行在施以透明化 地理時可否看到黑色化之判斷。形成透明樹脂覆膜之前的 灰色化處理面的黑濃度為〇· 93,採用與第i實施例相同的 代替法評價的結果,灰色化處理面的觀察得黑濃度 黑色。 〈電襞顯示器用的電磁波遮蔽網片的製造&gt; 與第1實施例同樣,使用得到的表面處理銅落試做電 磁波遮蔽導電性網片。結果,即使存在有防銹處理層也對 钱刻操作不妨礙,沒有蝕刻殘留,進行非常良好的餘刻。 第5實施例 本實施例’如第8圖所示’製造作為防錢處理層呈備 鋅鈷合金層及鉻酸鹽處理層之第2表面處理銅箔1 e,以钱 刻法試驗製造電磁波遮蔽導電性網片形狀確認其蝕刻性 能。亦即,直到藉由硫酸鈷鍍層形成灰色化處理層為止, 與第1實施例共通,因此僅說明防銹處理條件。又,灰色 2213 -6894-PF;Ahddub 26 200533251 的瓜魷鈷鍍層之換异厚度與第】實施例同樣為。 防錄處理層的形成,與第4實施例同樣,使用鋅—始 合金電艘液,於餘&amp; 、雙面形成鋅鈷合金層後,於雙面進行鉻酸 处 此處抓用電解鉻酸鹽處理,電解條件為鉻酸 5· 〇g/1液’服35 C、酸鹼值11· 5、電流密度8A/dm2之條件 電解5秒鐘。 一 +接著、、Ό束鉻酸鹽層的形成後,以充分的純水淋浴洗 淨,糟由電熱器在環境溫度150°C的乾燥爐内滯冑4秒鐘, 去除水刀,侍到具備非常良好的色調之灰色化處理面的表Until the sulfuric acid coating is formed into a graying treatment layer, I will only explain the precautionary conditions. In addition, the ash is common to the first embodiment, and the conversion of the colored cobalt sulfate plating layer is 2213-6894-PF; Ahddub 22 200533251 * The thickness is the same as that of the first embodiment, which is 270 mg / m2. Here, on the two sides of the first embodiment, the gray copper-plated copper sulfate plated with copper cobalt sulfate is finished on both sides, and then the nickel-nickel alloy is electro-bonded to form a zinc alloy layer. For the zinc-nickel alloy layer, the concentration of sulfuric acid was 2.0 g / l, the zinc concentration of zinc pyrophosphate was 0.5 g / i, and the pyrophosphate temperature was 225 g / liter. 〇, acid test value 10, the current density of 5A / dm2 strip bow for 5 seconds, uniform and smooth electrolysis on both sides. Next, 'show in the same way as in the first example, wash it with a shower of pure water. • The heater is left in a drying furnace at an ambient temperature of 15 t for 4 seconds, and Z is removed to obtain a grayed surface with a very good hue. Surface: Copper box 1c. In addition, between the above steps, a 15-second pure water washing step is provided in principle to prevent the solution in the pre-treatment step from being brought in. 〈Physical properties of surface-treated copper box〉 # Observe the d-side of the surface-treated copper smelter with the gray-treated surface obtained through the above steps with a FIB device. The same section as shown in Figure 3 was obtained. Bu # w &amp; Λ treatment surface has a cross-sectional height of 75 nm, the L value of the Lab color system of the graying treatment is 39, and the glossiness [Gs (60. is 2.5.) No stains were found on the surface, and adhesive tape was affixed to the surface, and then the tape was tested to confirm that there was no powder falling. The grayed surface of the surface-treated copper foil was processed into a plasma display. The electromagnetic wave was used to shield the mesh sheet, and it was judged whether the blackening can be seen before the transparent treatment was applied. The black concentration of the flame-treated surface before the transparent resin coating was formed was G · 9, which was the same as that of the first working example. In place of the flat surface ^ K's gray processing surface, the dark black & black of the black 6. <Manufacture of electromagnetic wave shielding mesh for plasma display> 2213-6894-PF; Ahddub „200533251 and the first In the same way as in the example, the obtained surface-treated copper foil was used to test electromagnetic The wave shields the conductive mesh. As a result, even if the anti-rust treatment layer is present, the etching operation is not hindered, and there is no etching residue, and very good etching is performed. This Example 3 is manufactured as shown in FIG. The rust-treated layer includes a second surface-treated copper foil le made of a zinc-nickel alloy layer and a chromate-treated layer. The shape of the electromagnetic wave-shielding conductive mesh was confirmed by a money-cut method to confirm its etching properties. Until the graying layer is formed in the first bell layer, it is the same as in the first embodiment, so only the rust prevention processing conditions will be described. The converted thickness of the gray sulfuric acid first plating layer is the same as that in the i-th example, which is 27 mg / m2. The formation of the treatment layer is the same as in the second embodiment. A zinc-nickel alloy plating solution is used to form a zinc-nickel alloy layer on both sides, followed by chromate treatment on both sides. Here, electrolytic chromate treatment is used. Electrolysis was performed for 5 seconds under the conditions of chromic acid 5.0 · g / l, liquid temperature 35 ° C, pH value U · 5, and current density 8A / dm2. Next, after the formation of the chromate layer was completed, the chromate layer was completely purified. Wash with water shower, with electric heater in the environment A 15-generation drying oven is left for 4 seconds to remove the moisture, so as to obtain a surface-treated copper lc with a grayed surface with a very good color tone. In addition, a Η second The pure water washing step prevents μ &amp; &gt; light from the township and prevents the solution from being brought in. 〈Physical properties of surface treated copper foil〉 It is equipped with the fine-colored a 『07 times coloring surface obtained through the above steps. The section of the surface-treated copper berth was observed with the FIB nightmare_ 衮, 丄 田 Η device, and the same section as that shown in Fig. 3 was obtained. The graying is imaginary ^ ', phase jkjs ^ ^, ^ face degree It is 7511111. The gray color of the Lab color system is τ 佶 helm / Λ ο ^ ^ L value is 40, gloss [Gs (60. )] Is 2 ^. In addition, there is no generality in the grayed-out surface — "" is 2.3. Unstained, apply adhesive tape 2213-6894-PF; Ahddub on this surface. 200533251 • The tape test to tear it apart also confirmed that there was no falling powder. Furthermore, the gray-treated surface of the obtained surface-treated copper box was processed into an electromagnetic wave shielding net for an electro-condensation display, and it was judged whether or not blackening was seen when the transparent treatment was applied. The black density of the gray-treated surface before the transparent resin coating was formed was 0.9. As a result of evaluation by the same substitution method as in Example 1, the gray-treated surface was observed to have a black density of i · 5. <Production of electromagnetic wave shielding mesh for plasma display> Φ As in the first embodiment, an electromagnetic wave shielding conductive mesh was trial-produced using the obtained surface-treated copper foil. As a result, even if the anti-rust treatment layer is present, the etching operation is not hindered, no etching remains, and very good etching is performed. Fourth Example In this example, as shown in FIG. 6, a second surface-treated copper foil lc having a zinc-cobalt alloy layer as a rust-preventive treatment layer was manufactured, and an electromagnetic wave shielding conductive mesh shape was manufactured by an etching method test to confirm the etching. performance. That is, until the graying treatment layer is formed by the cobalt sulfate plating layer, it is common to the first embodiment, and therefore only the rust prevention treatment conditions will be described. The converted thickness of the gray cobalt sulfate coating was 270 mg / m2 in the same manner as in the first embodiment. # Here, on the both sides of the copper foil after the gray cobalt sulfate layer is formed on the glossy side of the first embodiment, a zinc alloy plating solution is used for electroplating to form a cobalt alloy layer on both sides. Zinc-cobalt alloy layer, using cobalt sulfate with cobalt concentration of 2.0 g / 1, zinc pyrophosphate with zinc concentration of 0.5 g / 1, calcium pyrophosphate 250 g / l, liquid temperature of 35 ° C, pH value of 10, Electrolysis was performed for 5 seconds under the condition of a current density of 5 A / dm2, and electrolysis was performed uniformly and smoothly on both sides. Next, similar to the first embodiment, the shower was washed with sufficient pure water, and the electric heater was left in a drying furnace at an ambient temperature of 15 ° C for 4 seconds to remove water 2213-6894-PF; Ahddub 200533251 points to obtain With non- 赍 &amp; copper foil lc. In addition, the step of washing the surface of the gray-treated surface with the color tone of the hue is washed with water to prevent the front: ::: between, in principle, a solution of "physical properties of pure <surface treatment copper falling" is brought in The cross section of the copper box obtained through the above steps was treated with the FIB device and the surface treated with Λ-coloring treatment surface. As a result of inspection, the same section with 3 HI%-1 was obtained. The degree of color of the Lab color system that is not treated is 8—'this graying ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, ', and the gloss [Gs (60.)] Is 25. There are no stains on the graying surface. Adhesive tape was affixed to the surface, and then the tape was tested to confirm that there was no powder falling off. # ❹Tape and then the gray surface of the surface-treated patina oil was added to the electromagnetic wave for the electro-hydraulic display device. The mesh was masked to determine whether blackening was visible when transparent geography was applied. The black concentration of the grayed-out surface before forming the transparent resin film was 0.93, and was evaluated using the same substitution method as in the i-th embodiment. As a result, the blackened black was observed on the grayed-up surface. Manufacture of electromagnetic wave shielding mesh for electric display> As in the first embodiment, an electromagnetic wave shielding conductive mesh was trial-tested using the obtained surface-treated copper drop. As a result, even if a rust-preventive treatment layer is present, money is engraved. No hindrance, no etching remains, and a very good rest. 5th embodiment This embodiment 'as shown in FIG. 8' manufactures the 2nd layer which provides a zinc-cobalt alloy layer and a chromate treatment layer as a money-proof treatment layer The surface-treated copper foil 1e was produced by testing the shape of an electromagnetic wave-shielding conductive mesh using a money engraving method, and its etching performance was confirmed. That is, until a graying treatment layer was formed by a cobalt sulfate plating layer, it was common to the first embodiment, and therefore only Describe the anti-rust treatment conditions. Also, the thickness of the varnish-cobalt coating of gray 2213 -6894-PF; Ahddub 26 200533251 is the same as in the first embodiment. The formation of the anti-recording treatment layer is the same as in the fourth embodiment. Zinc-starting alloy electro-hydraulic fluid. After the zinc-cobalt alloy layer was formed on both sides, the chromic acid was treated on both sides with electrolytic chromate treatment. The electrolytic conditions were chromic acid 5.0 · g / 1. Liquid 'serving 35 C, Electrolyte for 5 seconds under the conditions of alkali number 11.5 and current density 8A / dm2. + Then, after the formation of the bundle of chromate layer, wash it with a shower of pure water, and use an electric heater at an ambient temperature of 150. Hold in a drying oven at ° C for 4 seconds, remove the water jet, and wait for the surface with a grayed surface with a very good color tone.

面處理銅箔〗P。V , L 又,於上述之各步驟間,原則上設有 秒鐘的純水水洗步驟,&amp; L 1 Α β p _ 尤艾驟防止刖處理步驟的溶液被帶入。 〈表面處理銅落之物性&gt; 具備經過以上步驟所得到的灰色化處理面處理 銅箱的剖面以FIB裝置觀察的結果,得到與第3圖所示相 同的剖面,該灰色化處理面的剖面高度為—,該灰色化 處理的Lab表色系之l值為41,光澤度[Gs(6〇。)]為24。Surface treatment copper foil〗 P. V, L In addition, between the above steps, in principle, a pure water washing step is provided for a second, and the L 1 Α β p _ Youai step prevents the solution of the limulus treatment step from being brought in. <Physical properties of the surface-treated copper drop> The cross-section of the gray-treated surface-treated copper box provided with the above steps was observed with a FIB apparatus, and the same cross-section as shown in FIG. 3 was obtained. The cross-section of the gray-treated surface The height is-, the l value of the Lab color system of the graying process is 41, and the gloss [Gs (60.)] Is 24.

卜灰色化處理面未見色斑,在該表面貼上黏著性膠帶 再將其撕開之膠帶測試也確認沒有落粉。 進而’所得到的表面處理銅箔的灰色化處理面,被加 工為電漿顯示器用之電磁波遮蔽網片,進行在施以透明化 處理時可否看到黑色化之判斷。%成透明樹脂覆臈之前的 灰色化處理面的黑濃度為〇.9’採用與第i實施例相同的代 替法評價的結果,灰色化處理面的觀察得黑濃纟I 6的黑 色0 〈電漿顯不器用的電磁波遮蔽網片的製造〉 與第1實施例同#,使用得到的表面處理鋼箱試做電 2213-6894-PF;Ahddub 27 200533251 片。結果,即使存在有防銹處理層也對 沒有兹刻殘留,進行非常良好的蝕刻。 施以粗化處理,對電解如:: W M的粗面 t電解銅治的粗面進行灰色化處理,1 第2圖所示之第^ ^ 第2表面處理銅箱lb,與第1實施例進行π 樣的評估。亦即,因盔丰_ υ退订冋 口為步驟之說明與第i實施例重複 故,在此省略記載。又,灰色之硫酸銘鍵層,換算厚声:No gray spots were observed on the grayed surface, and adhesive tape was affixed to the surface, and then the tape was peeled off. Furthermore, the gray-treated surface of the obtained surface-treated copper foil was processed into an electromagnetic wave shielding net for a plasma display, and it was judged whether or not blackening was seen when the transparent treatment was performed. The black concentration of the gray-treated surface before being coated with the transparent resin was 0.9%. As a result of the evaluation by the same substitution method as in the i-th example, the gray-treated surface was observed to have a black density of black dense I 6 0 < Manufacture of electromagnetic wave shielding mesh for plasma display device> Same as in the first embodiment, using the obtained surface-treated steel box to test electricity 2213-6894-PF; Ahddub 27 200533251. As a result, even if a rust-preventive treatment layer is present, no etching remains, and very good etching is performed. The roughening treatment is performed, and the electrolysis is as follows: The rough surface of the WM rough surface t electrolytic copper treatment is grayed out. 1 The second surface treatment copper box lb shown in FIG. 2 and the first embodiment Perform a π-like evaluation. That is, since the explanation of the steps of the helmet __ unsubscribe is the same as that of the i-th embodiment, the description is omitted here. In addition, the gray sulfate key bond layer converts thick sound:

268mg/m、形成之硫酸鈷度層的形態相 心所 觀察到的。 汉U圖所 〈表面處理銅箔之物性〉 :備經過以上步驟所得到的灰色化處理面的表面處理 銅、治的剖面以FIB穿詈趨寂λα &amp;田 置觀察的尨果,得到如第3圖所示的 口1J面,該灰色化處理面的古 、 的Lab表色季“值:广度為78nm,該灰色化處理 ’、 值為42,光澤度[Gs(60。)]為2·5βThe morphology of the 268 mg / m, cobalt sulfate layer formed was remarkably observed. The physical properties of the surface-treated copper foil in the U figure: Prepare the gray-treated surface of the gray-treated surface obtained by the above steps. The cross-section of the surface is treated with FIB, and the results are as follows: In the mouth 1J surface shown in FIG. 3, the gray and white Lab surface color season of this grayed surface is "value: 78nm in breadth, grayed", the value is 42, and the gloss [Gs (60.)] Is 2 · 5β

外,灰色化處理面去目# D Γ 在該表面貼上黏著性膠帶再In addition, the grayed surface is removed. # D Γ Put an adhesive tape on the surface.

磁波遮蔽導電性網 餘刻操作不妨礙, 第6實施例 在本實施例,與第6實施例同樣不 將其撕開之膝帶測試也確認沒有落粉。 工為Ϊ:顯所Ϊ到的表面處理鋼猪的灰色化處理面,被加 處理時;;::用之電磁波遮蔽網片,進行在施以透明化 .., 色化之判斷。形成透明樹脂覆膜之前的 灰色化處理面的黑濃度為 ^ 卢备♦似t 私用此灰色化處理面上塗布 衣虱糸树月曰作為透明樹 ^ ^ if 4 Μ „ ^ 覆膜乾展使硬化,透過硬化的 玉衣乳树月曰層觀察灰多务 法“士果,^Λ 調改變之所謂的代替 色化處理面的觀察得黑濃度1 · 6的里色。 〈電:顯—示器用的電磁波遮蔽網片的製造〉 ”’、 與第1實施例同樣’使用得到的表面處理銅猪試做電 2213-6894-PF/Ahddub 2 8 200533251 v 磁波遮蔽導電性網片。結果對蝕刻操作不妨礙,沒有蝕刻 殘留,進行非常良好的蝕刻。 第7實施例 在本實施例,與第1實施例不同,不對電解銅箔的光 澤面施以粗化處理,以下與第1實施例相同,在電解銅箱 的粗面側藉由硫酸鈷鍍層形成灰色化處理層,製造第2圖 所示之第1表面處理銅箔1 b,以钱刻法試驗製造電磁波遮 蔽導電性網片形狀確認其蝕刻性能。 φ 在本實施形態,使用藉由電解硫酸銅溶液所得到的公 稱厚度15/z m的銅箔。接著使用硫酸濃度15〇g/1、液溫3〇 C的稀硫酸溶液將銅箔浸潰於此溶液3 〇秒進行表面的清淨 化。 接著’作為(a)步驟,於該電解銅箔之粗面上形成硫酸 鈷鍍層。硫酸鈷鍍層的形成,係使用硫酸鈷(7水和物)為 2〇g/l s文驗值调為5.5、液溫為27 °C之硫酸餘電鐘液作^ 攪拌浴,藉由以2A/dm2的電流密度電解6秒鐘,形成灰色 _的硫酸鈷鍍層(換算厚度為275mg/m2)。此時,溶液中的的 鈷離子/辰度的調整並未特地進行。因為短時間電解所以嘴 =不而要調整金屬離子的濃度。形成的硫酸鈷度層的形態 與第11及1 2圖所示同樣地被觀察到。 抑作為(b)步驟,以充分的純水進行淋浴洗淨,藉由電熱 2將環境溫度加熱至15〇。〇使滞留在乾燥爐内4秒鐘,去水 具備非f良好的色調之灰色化處理面之表面處理 =。又,於上述之各步驟間,原則設有15秒鐘之純水 / v驟’防止帶入前處理步驟之溶液。 〈表面處理銅箱之物性〉 22l3'6894^F;Ahddub 29 200533251 具備經過以上步驟所得到的灰色化處理面的表面處理 銅羯的剖面以FIB裝置觀察的結果,得到如第3圖所示的 剖面’該灰色化處理面的剖面高度(d)為8〇⑽,該灰色化處 理的Lab表色系之[值》39’光澤度[Gs(6〇e ”為2_2。 此外’灰色化處理面未見色斑,纟該表面貼上黏著性膠帶 再將其撕開之膠帶測試也確認沒有落粉。 、' 所得到的表面處理銅箔的灰色化處理面,被加 工為電漿顯示^用之電磁波遮蔽網片,進行在施以透明化 處理時可否看到黑色化之判斷。形成透明樹脂覆膜之前的 灰色化處理面的黑濃度A U,採用與f !實施例相同的代 替法評價的結果’灰色化處理面的觀察得黑濃纟16的黑 色。 〈電漿顯示器用的電磁波遮蔽網片的製造〉 與第1實施例同樣,使用得到的表面處理銅箔試做電 磁波遮蔽導電性網片。結果對蝕刻操作不妨礙,沒有蝕刻 殘留’進行非常良好的钱刻。 第8實施例 在本實施例’與第6實施例同樣不對電解銅猪的光澤 面施以粗化處理,對粗面進行灰色化處理,製造第2圖所 示之第1表面處理銅箱lb,以蝕刻法試驗製造電磁波遮蔽 導電性網片形狀癌認其餘刻性能。 在本實施形態,使用藉由電解硫酸銅溶液所得到的公 稱厚度15#m的銅箱。接著使用硫酸濃度15〇g/i、液溫3〇 °C的稀硫酸溶液將銅箔浸潰於此溶液3〇秒進行表面的清淨 化。 接著,作為(a)步驟,於該電解鋼箱之粗面上形成硫酸 2213-6894-PF;Ahddub 30 •200533251 、又9。硫酸鈷鍍層的形成,係使用硫酸鈷(7水和物)為 酉欠驗值5周為5 · 5、液溫為2 7 °C之硫酸始電鍍液作為 ^.jl / ,譜由以lA/dm2的電流密度電解12秒鐘,形成灰色 的硫酸鈷鍍層(換算厚度為268mg/m2)。此時,溶液中的的 鈷離子濃度的調整並未特地進行。因為短時間電解所以認 =不而要調整金屬離子的濃度。形成的硫酸鈷度層的形態 /、第11及1 2圖所示同樣地被觀察到。 ^作為(b)步驟,以充分的純水進行淋浴洗淨,藉由電熱 _ 2將環境溫度加熱至15(rc使滯留在乾燥爐内4秒鐘,去水 刀5 &gt;1侍到具備非常良好的色調之灰色化處理面之表面處理 lb又’於上述之各步驟間,原則設有1 5秒鐘之純水 水洗步驟,防止帶入前處理步驟之溶液。 〈表面處理銅绪之物性〉 —# 備經過以上步驟所得到的灰色化處理面的表面處理 銅荡的剖面以FIB裝置觀察的結果,得到如第3圖所示的The magnetic wave shields the conductive mesh. The operation is not hindered. Sixth Embodiment In this embodiment, a knee strap test that did not tear the same as in the sixth embodiment also confirmed that there was no falling powder. Work: Ϊ: Show the grayed surface of the surface-treated steel pig, when it is added; :: Use electromagnetic waves to shield the mesh, and judge whether to apply transparency .., coloration. The black concentration of the grayed surface before forming the transparent resin coating is ^ Lu Bei ♦ It seems that t is used as a transparent tree if the grayed surface is used for private use. ^ If 4 Μ ^ The hardened, through the hardened jade clothes milk tree month layer observation gray multi-service method "Shiguo, ^ Λ tone changes the so-called replacement of the colorization treatment surface observation to obtain a black density of 1.6 color. "Electricity: Manufacturing of electromagnetic wave shielding mesh for display and display" "", same as in the first embodiment. "Using the obtained surface-treated copper pig, try to make electricity 2213 -6894-PF / Ahddub 2 8 200533251 v Magnetic wave shielding conductivity Mesh. As a result, the etching operation was not hindered, and there was no etching residue. Very good etching was performed. Example 7 In this example, unlike the first example, the glossy surface of the electrolytic copper foil was not roughened. As in the first embodiment, a graying treatment layer is formed on the rough side of the electrolytic copper box by a cobalt sulfate plating layer, and the first surface-treated copper foil 1 b shown in FIG. 2 is manufactured, and the electromagnetic wave shielding is manufactured by a money-cut method. The shape of the conductive mesh was confirmed for its etching performance. Φ In this embodiment, a copper foil having a nominal thickness of 15 / zm obtained by electrolytic copper sulfate solution was used. Next, a sulfuric acid concentration of 15 g / 1 and a liquid temperature of 30 C were used. The dilute sulfuric acid solution was used to immerse the copper foil in this solution for 30 seconds to clean the surface. Then, as step (a), a cobalt sulfate coating was formed on the rough surface of the electrolytic copper foil. The formation of the cobalt sulfate coating was Use of sulfuric acid (7 water and substance) was adjusted to 20 g / ls, the test value was 5.5, and the liquid temperature was 27 ° C. The sulfuric acid residual electric clock liquid was used as a stirring bath, and electrolysis was performed at a current density of 2 A / dm2 for 6 seconds. Formation of gray cobalt sulfate coating (converted thickness is 275mg / m2). At this time, the adjustment of cobalt ions / degrees in the solution is not specifically performed. Because of the short-term electrolysis, the mouth = not to adjust the concentration of metal ions The morphology of the formed cobalt sulfate layer was observed in the same manner as shown in Figs. 11 and 12. As a step (b), the shower was washed with sufficient pure water, and the ambient temperature was heated by electric heating 2 to 15.0 Let it stay in the drying furnace for 4 seconds, and remove the water. Surface treatment with a grayed-out surface with a non-f good hue =. In addition, between the above steps, 15 seconds of pure water is provided in principle. / v step 'to prevent the solution from being brought into the pre-treatment step. <Physical properties of surface-treated copper box> 22l3'6894 ^ F; Ahddub 29 200533251 The cross-section of the surface-treated copper cymbal with the gray-treated surface obtained through the above steps is FIB As a result of the device observation, a cross-section as shown in FIG. 3 was obtained. The cross-section height (d) of the physical surface is 80 °, and the [color value] 39 'gloss [Gs (6〇e') of the Lab color system of the graying treatment is 2_2. In addition, there is no stain on the graying treatment surface. The adhesive tape was affixed with an adhesive tape on the surface, and then the tape was tested to confirm that there was no powder falling off. "The gray surface of the surface-treated copper foil obtained was processed into an electromagnetic wave shielding net for plasma display. It is judged whether or not blackening can be seen when the transparentization treatment is applied. The black concentration AU of the grayed-out treatment surface before the transparent resin film is formed is evaluated by the same substitution method as in the f! Observation of the treated surface revealed the black color of the black dense tincture 16. <Manufacture of electromagnetic wave shielding mesh for plasma display> In the same manner as in the first embodiment, an electromagnetic wave shielding conductive mesh was trial-produced using the obtained surface-treated copper foil. As a result, the etching operation was not hindered, and very good money engraving was performed without etching residue. In the eighth embodiment, as in the sixth embodiment, the glossy surface of the electrolytic copper pig is not roughened, and the rough surface is grayed to produce the first surface-treated copper box lb shown in FIG. 2. The etching performance was used to test the electromagnetic wave shielding conductive mesh shape. In this embodiment, a copper box having a nominal thickness of 15 # m obtained by electrolytic copper sulfate solution is used. Next, the copper foil was immersed in this solution for 30 seconds using a dilute sulfuric acid solution having a sulfuric acid concentration of 15 g / i and a liquid temperature of 30 ° C to clean the surface. Next, as step (a), sulfuric acid 2213-6894-PF; Ahddub 30 • 200533251, and 9 are formed on the rough surface of the electrolytic steel box. The formation of the cobalt sulfate coating is based on the use of cobalt sulfate (7 water and substances) as the test value for 5 weeks, 5 · 5, and a liquid temperature of 27 ° C as the electroplating solution of sulphuric acid as ^ .jl /. / dm2 electrolyzed at a current density of 12 seconds to form a gray cobalt sulfate coating (equivalent thickness is 268 mg / m2). At this time, the adjustment of the cobalt ion concentration in the solution was not specifically performed. Because of short-term electrolysis, it is considered that the concentration of metal ions must be adjusted. The morphology of the formed cobalt sulfate layer / as shown in Figs. 11 and 12 was similarly observed. ^ As step (b), perform shower washing with sufficient pure water, and heat the ambient temperature to 15 by electric heating _ 2 (rc to stay in the drying furnace for 4 seconds, and remove the water knife 5 &gt; 1 The surface treatment lb of the gray-treated surface with very good color tone is provided with a pure water washing step of 15 seconds in principle between the above steps to prevent the solution from being brought into the pre-treatment step. Physical properties> — # The cross-section of the surface-treated copper surface of the gray-treated surface obtained through the above steps was observed with a FIB device, and as shown in FIG. 3

=面’該灰色化處理面的剖面高度為78nm,該灰色化處理 的Lab表色系之L值為4〇’光澤度[Gs(6〇。)]為2.6。此 外’灰色化處理面未 色斑在該表面貼上黏著性膠帶再 :撕開之膠帶測試也確認沒有落粉。 進而’所得到的表面處理銅箔的灰色化處理面,被加 =為電衆顯示器用之電磁波遮蔽網片,進行在施以透明化 化之㈣。形成透明樹脂覆膜之前 2化處理面的黑濃度為u,_與第i實施例相同的代 色法孑4貝的結果’灰色化處理面的觀察得黑濃&amp;丄.5的黑 〈電漿顯示器用的電磁波遮蔽網片的製造&gt; 2213-6894-PF;Ahddub 31 200533251 與第1實施例同樣,使用得到的表面處理銅箔試做電 磁波遮蔽導電性網片。結果對钱刻操作不妨礙,沒有钱刻 殘留,進行非常良好的钱刻。 第9實施例 在本實施例,如第7圖所示,製造作為防銹處理層具 備鋅始合金層的第2表面處理銅箔1 d,以蝕刻法試驗製造 .電磁波遮蔽導電性網片形狀確認其蝕刻性能。亦即,直到 形成硫酸錯鍛層之灰色化處理層為止,與第7實施例共通, _因此僅說明防銹處理條件。又,灰色的硫酸鈷鍍層的換算 厚度與第7實施例同為268mg/m2。 在此對第7實施例的單面結束形成灰色的硫酸鈷鍍層 之後的銅箔的雙面,以與第4實施例同樣的條件,於雙面 形成辞鈷合金層。接著,與第〗實施例同樣以充分的純水 進行淋浴洗淨,藉由電熱器將環境溫度加熱至15〇。〇使滯留 在乾燥爐内4秒鐘,去水分,得到具備非常良好的色調之 灰色化處理面之表面處理銅落1(1。又,於上述之各步驟間, 鲁=則設有15秒鐘之純水水洗步驟,防止帶人前處理步驟之 〈表面處理銅箱之物性〉 具備經過以上步驟所得到的灰色化處理面的表面产 銅箱的剖面以FIB裝置觀察的結果,得到如第: 剖面,該灰色化處理面的剖面高度為8〇nm,該灰 ^的 的Ub表色系之L值為41,光澤度[Gs(6〇。)] 处理 外’灰色化處理面未見色斑,在該表面貼上勘著性膠= 將其撕開之膠帶測試也確認沒有落粉。 ,τ 進而,所得到的表面處理銅箱的灰色化處理面,被加 2213-6894-PF;Ahddub . 200533251 •工為電聚顯示器用之電磁波遮蔽網片,進行在施以透明化 處理時可否看到黑色化之判斷。形成透明樹脂覆膜之前的 灰色化處理面的黑濃度為〇 · 9,採用與第1實施例相同的代 替法評價的結果,灰色化處理面的觀察得黑濃度丨· 5的黑 色。 〈電漿顯示器用的電磁波遮蔽網片的製造&gt; 與第1貫施例同樣,使用得到的表面處理銅箔試做電 磁波遮蔽導電性網片。結果對蝕刻操作不妨礙,沒有蝕刻 殘留,進行非常良好的蝕刻。 胃第1 0實施例 在本實施例,如第9圖所示,製造作為防銹處理層具 備辞鈷合金層及鉻酸鹽處理層的第2表面處理銅箔If,以 餘刻法試驗製造電磁波遮蔽導電性網片形狀確認其餘刻性 能。亦即,直到形成硫酸鈷鍍層之灰色化處理層為止,與 第7實施例共通,因此僅說明防銹處理條件。又,灰色的 硫酸鈷鍍層的換算厚度與第7實施例同為27〇mg/m2。 防銹處理層的形成,與第4實施例同樣,使用辞—銘 合金電鐘液,於雙面形成鋅一鈷合金層後,對雙面進行與 第5實施例同樣的鉻酸鹽處理。 接著’結束形成鉻酸鹽層時,以充分的純水進行淋浴 洗淨,藉由電熱器將環境溫度加熱至1 5 0 °C使滯留在乾燥爐 内4秒鐘,去水分,得到具備非常良好的色調之灰色化處 理面之表面處理銅殆1 f。又’於上述之各步驟間,原則設 有1 5秒鐘之純水水洗步驟’防止帶入前處理步驟之溶液。 〈表面處理銅结之物性〉 具備經過以上步驟所得到的灰色化處理面的表面處理 2213-6894-PP;Ahddub 33 200533251 二々的^面以F1 β裝置觀察的結果,得到如第3圖所示的 口1面’該灰色化處理面的剖面高度為78njn,該灰色化處理 7 Lab表色系之L值為4(),光澤度…⑽。)]為2· 4。此 • 色化處理面未見色斑,在該表面貼上黏著性朦帶再 將其撕開之膠帶測試也確認沒有落粉。 進而,所得到的表面處理銅笛的灰色化處理面,被加 工為電漿顯示器用之雷 電磁波遮蔽網片,進行在施以透明化= Face 'The cross-section height of the grayed-out surface is 78 nm, and the L value of the Lab color system of the grayed-out processing is 40%. The glossiness [Gs (60.)] Is 2.6. In addition, the non-pigmented spots on the grayed surface were coated with adhesive tape on the surface, and the peeled tape test also confirmed that there was no falling powder. Furthermore, the gray-treated surface of the obtained surface-treated copper foil was added as an electromagnetic wave shielding mesh for an electric display, and then subjected to transparency. Before forming the transparent resin film, the black density of the treated surface was u. The result of the same color substitution method as in the i-th example was 4 shells. The gray density of the treated surface was observed to be black & Manufacture of electromagnetic wave shielding mesh for plasma display> 2213-6894-PF; Ahddub 31 200533251 In the same manner as in the first embodiment, an electromagnetic wave shielding conductive mesh was produced using the obtained surface-treated copper foil. As a result, the operation of money engraving is not hindered, no money engraving remains, and very good money engraving is performed. Ninth Example In this example, as shown in FIG. 7, a second surface-treated copper foil including a zinc alloy layer as a rust-preventive treatment layer was produced for 1 d, and was experimentally manufactured by an etching method. Electromagnetic wave shielding conductive mesh shape Confirm its etching performance. That is, until the graying treatment layer of the sulfuric acid misforged layer is formed, it is common to the seventh embodiment. Therefore, only the rust prevention treatment conditions will be described. The converted thickness of the gray cobalt sulfate coating was 268 mg / m2 as in the seventh embodiment. Here, on both sides of the copper foil after the formation of a gray cobalt sulfate plating layer on one side of the seventh embodiment is completed, a cobalt alloy layer is formed on both sides under the same conditions as in the fourth embodiment. Next, similar to the first embodiment, the shower was washed with sufficient pure water, and the ambient temperature was heated to 150 by an electric heater. 〇Stay in a drying furnace for 4 seconds, remove moisture, and obtain a surface-treated copper drop 1 (1 with a grayed surface with a very good color tone. In addition, between the above steps, Lu = 15 seconds The step of pure water washing with bell to prevent the physical properties of the surface-treated copper box with the pre-treatment step. The surface of the copper box with the gray surface obtained through the above steps was observed with a FIB device. The results are as follows: In cross section, the cross section height of the grayed surface was 80 nm, the L value of the gray Ub color system was 41, and the glossiness [Gs (6〇.)] Was not seen outside the grayed surface. Spotted, affixed with adhesive tape on the surface = tested by tearing the tape to confirm that there is no falling powder., Τ Further, the gray surface of the surface-treated copper box obtained was added 2213-6894-PF; Ahddub. 200533251 • The electromagnetic wave shielding mesh used for the electro-condensation display is judged whether blackening can be seen when transparentized. The black concentration of the grayized surface before the transparent resin coating is formed is 0.9. , Using the same code as the first embodiment As a result of the method evaluation, a black surface with a black density of 丨 · 5 was observed on the grayed-out surface. <Production of Electromagnetic Wave Shielding Mesh for Plasma Display> As in the first embodiment, a test was performed using the obtained surface-treated copper foil. Electromagnetic waves were used to shield the conductive mesh. As a result, the etching operation was not hindered, and there was no etching residue. Very good etching was performed. Stomach 10th Example In this example, as shown in FIG. The second surface-treated copper foil If of the cobalt alloy layer and the chromate-treated layer was manufactured by a test method using an epitaxial method to confirm the shape of the electromagnetic shielding shielding conductive mesh. That is, until the gray treatment layer of the cobalt sulfate coating was formed. So far, it is common to the seventh embodiment, so only the rust prevention treatment conditions will be described. The converted thickness of the gray cobalt sulfate coating is the same as that of the seventh embodiment, which is 270 mg / m2. The formation of the rust prevention treatment layer is the same as that of the fourth embodiment. In the same embodiment, a zinc-cobalt alloy layer was formed on both sides using the Ci-Ming alloy electric clock liquid, and then the same chromate treatment was performed on both sides as in the fifth embodiment. Shower clean with sufficient pure water, heat the ambient temperature to 150 ° C with an electric heater and leave it in the drying furnace for 4 seconds, remove the moisture, and obtain a grayed surface with a very good color tone. Treatment of copper alloy 1 f. In addition, between the above steps, a 15-second pure water washing step is provided in principle to prevent the solution from being brought into the pre-treatment step. <Physical properties of surface-treated copper knot> Obtained surface treatment of the grayed-out surface 2213-6894-PP; Ahddub 33 200533251 Observed by the F1 β device of the two sides of the second surface, as shown in FIG. 3, the cross section of the grayed-out surface is obtained. The height is 78njn, the L value of this graying 7 Lab color system is 4 (), gloss ... )] Is 2.4. This • No stains were seen on the coloring surface. The adhesive tape was affixed to the surface, and the tape was peeled off to test it. Furthermore, the gray-treated surface of the obtained surface-treated copper flute was processed into a thunder for a plasma display, and the electromagnetic wave shielding mesh was made transparent.

f理時可否看到黑色化之判斷。形成透明樹脂覆膜之前的 :色化處理面的黑濃度為〇. 9,採用與第J實施例相同的代 評價的結果,灰色化處理面的觀察得黑濃度1.6的黑 色。 〈電漿顯示器用的電磁波遮蔽網片的製造〉 -第1 θ施例同樣’使用得到的表面處理銅箱試做電 磁波遮蔽導電性網片。結果即使存在防錢理層也對蚀刻 #作不妨礙,沒有姓刻殘留,進行非常良好的蝕刻。If you can see if you can see the blackening in the process. Prior to the formation of the transparent resin film: The black concentration of the colorization-treated surface was 0.9, and the result of the same evaluation as in Example J was used. The gray color of the treatment-treated surface was observed to have a black color of 1.6. "Production of electromagnetic wave shielding net for plasma display"-Same as in the first θ example 'Using the obtained surface-treated copper box, an electromagnetic wave shielding conductive net was tested. As a result, even if the anti-money management layer is present, the etching # is not hindered, and there is no surname engraving remaining, and a very good etching is performed.

產業上利用可能性 具備相關於本件發明之灰 人巴化處理面的表面處理銅 箔,沒有灰色化處理面的多奸, 而且也不會由該表面落粉, 而且可以使用通常的銅蝕刻液 電漿顯示器面板之前面面板的 以形成無色斑的高品質黑色遮 備灰色化處理面的表面處理銅 製造程序中的黑色化處理步驟 面的表面處理銅箔,藉由採用 前的銅箔的表面處理程序不需 進行鍅刻加工,藉由使用於 電磁波遮蔽導電性網片,可 罩。此外,可以供給作為具 治的話’可以省略前面面板 。進而,具備此灰色化處理 上述製造方法,可以應用從 要新的製造設備。亦即,因 2213-6894-ΡΡ;Ahddub 200533251 為可以高良率地製造高品質無色斑的製品,所以 產成本 可降低 生 【圖式簡單說明】 鋼箔 第1圖係概略顯示具傷灰色化處理面的表面 的剖面層構成之圖。 第2圖係概略顯示具備灰色化處理面的表 處理你從 的剖面層構成之圖。 〜冷 第3圖係具備灰色化處理面的表面處理錮〜 面層 、J v白的剖 構成之FIB觀察影像。 面層 第4圖係具備灰色化處理面的表面處理鋼嗜的立 構成之F IB觀察影像。 口 第5圖係具備灰色化處理面的表面處理鋼猪The industrial utilization possibility has a surface-treated copper foil that is related to the gray-human-treated surface of the invention. There is no treacherous gray-treated surface, and powder does not fall from the surface. Moreover, a common copper etching solution can be used. Plasma display panel The front panel of the front panel is treated with high-quality black to form a non-colored spot. The surface-treated copper foil on the surface of the blackened step in the copper manufacturing process is processed by using the front copper foil. The surface treatment process does not need to be engraved, and can be covered by using it to shield the conductive mesh by electromagnetic waves. In addition, if it can be supplied as a ', the front panel can be omitted. Furthermore, the above-mentioned manufacturing method provided with this graying process can be applied to new manufacturing equipment. That is, 2213-6894-PP; Ahddub 200533251 is a product that can produce high-quality, non-stained products with high yield, so the production cost can be reduced. [Simplified illustration of the drawing] The first picture of the steel foil shows the graying of the damage. A diagram of a cross-sectional layer structure on the surface of a treatment surface. Figure 2 is a diagram showing a table with a grayed-out surface to process the structure of the section layers you have. ~ Cold Fig. 3 is a surface-treated surface with a grayed-out surface 锢 ~ A surface FIB observation image composed of a cross-section of J v white. Surface layer Fig. 4 is an F IB observation image of a standing structure of a surface-treated steel having a grayed-out surface.口 Figure 5 is a surface-treated steel pig with a grayed-out surface

w Μ Μ 面 R 構成之F IΒ觀察影像。 曰 鋼箔 第6圖係概略顯示具備灰色化處理面的表面處理 之剖面層構成之圖。 第7圖係概略顯示具備灰色化處理面的表 之剖面層構成之圖。 第8圖係概略顯示具備灰色化處理 之剖面層構成之圖。 第9圖係概略顯示具備灰色化處理 之剖面層構成之圖。 面處理鋼箔 面的表面處理 面的表面處理 鋼落 鋼箔 第10圖係粗化處理後之銅箔表面的播 影像。 田1電子顯微鏡 第11圖係以低倍率觀察灰色的硫酸 ^ β 結錢層之掃:te而丨β 子顯微鏡影像。 描沒電 2213-6894~PF;Ahddub 35 200533251 第1 2圖係以高倍率觀察灰色的硫酸鈷鍍層之掃描型電 子顯微鏡影像。 第1 3圖係蝕刻測試圖案之掃描型電子顯微鏡影像。 第14(a)圖至第14(e)圖係從前之電漿顯示器面板之前 面板的製造流程之概略圖。 第1 5 ( f )圖至第1 5 ( j)圖係從前之電漿顯示器面板之前 面板的製造流程之概略圖。 第16(k)圖至第16(n)圖係從前之電漿顯示器面板之前 面板的製造流程之概略圖。 【主要元件符號說明】 2〜粗化處理層; 3〜微細銅粒; 4〜硫酸鈷鍍層; 6〜鉻酸鹽處理層; 7〜銅箔層; la、lb、lc、Id、le、If〜表面處理銅箔; 5〜防錄處理層(辞錄合金層或辞始合金層)。F IB observation image consisting of w Μ plane R. Fig. 6 is a diagram schematically showing the structure of a cross-sectional layer having a surface treated with a grayed-out surface. Fig. 7 is a diagram schematically showing a cross-sectional layer structure of a table having a grayed-out surface. Fig. 8 is a diagram schematically showing the structure of a cross-section layer provided with graying processing. Fig. 9 is a diagram schematically showing the configuration of a cross-section layer provided with graying processing. Surface treatment of steel foil Surface treatment of surface Surface treatment of surface Steel drop Steel foil Figure 10 is a broadcast image of the surface of copper foil after roughening treatment. Tian 1 Electron Microscope Figure 11 is a low magnification observation of the gray sulfuric acid ^ β money deposit layer sweep: te and 丨 β microscope images. Tracing electricity 2213-6894 ~ PF; Ahddub 35 200533251 Figure 12 is a scanning electron microscope image of a gray cobalt sulfate coating observed at a high magnification. Figure 13 is a scanning electron microscope image of the etching test pattern. Figures 14 (a) to 14 (e) are schematic diagrams of a manufacturing process of a front panel of a plasma display panel. Figures 15 (f) to 15 (j) are schematic diagrams of the manufacturing process of the front panel of the plasma display panel. Figures 16 (k) to 16 (n) are schematic diagrams of the manufacturing process of the front panel of the plasma display panel. [Description of main component symbols] 2 ~ roughened treatment layer; 3 ~ fine copper particles; 4 ~ cobalt sulfate coating; 6 ~ chromate treatment layer; 7 ~ copper foil layer; la, lb, lc, Id, le, If ~ Surface-treated copper foil; 5 ~ Record-proof treatment layer (dictionary alloy layer or initial alloy layer).

2213-6894-PF;Ahddub 362213-6894-PF; Ahddub 36

Claims (1)

200533251 十、申請專利範菌: 1· 一種表面處理銅箔,在電解銅箔的粗面上具有灰色 化處理面, 其特徵在於: 該灰色化處理面係設於銅箔層的單面之重量厚度為 20Omg/m2〜35Omg/m2之硫酸鈷鍍層,且其灰色化處理面之剖 面高在200nm以下。 2 _如申請專利範圍第1項之表面處理銅箔,其中於前 丨述灰色化處理面具備防錢處理層者。 3 ·如申請專利範圍第2項之表面處理銅箔,其中防錄 處理層係使用鋅或者鋅合金者。 4_如申請專利範圍第2項之具備灰色化處理面之表面 處理銅箔,其中防銹處理層係由使用鋅或者辞合金形成之 層,與鉻酸鹽處理層所構成。 5 ·如申請專利範圍第1項之表面處理銅箔,其中前述 灰色化處理面係Lab表色系之l值在43以下。 丨 6 ·如申請專利範圍第1項之表面處理銅箔,其中前述 灰色化處理面係於電解銅箔之粗面形成該灰色化處理面 者,且光澤度[Gs(60。)]在10以下。 7_如申请專利範圍第1項之表面處理銅箔,其中前述 灰色化處理面係黑濃度為〇 7〜12。 8 ·如申清專利範圍第1項之表面處理銅箔,其中前述 灰色化處理面係在使透明樹脂覆膜密接配置於其表面時, 可視覺確認為黑色者。 9 ·如申清專利範圍第1項之表面處理銅箔,其中在灰 2213-6894-PF;Ahddub 37 200533251 ‘ 色化處理面設透明樹脂覆膜時之黑濃度為1 · 2以上。 i〇· —種表面處理銅绪之製造方法,具備灰色化處理面 之表面處理銅箔之製造方法, 其特徵在於具備以下(a )、( b )步驟: (a)在銅箱的粗面,使用含有硫酸始(7水和物)i〇g/L - 〜Wg/L,pH值4.0以上,液溫30 °C以下之硫酸鈷電鍍液 | 的攪拌浴,以4A/dm2以下之電流密度電解,形成灰色之硫 酸始鍍層;以及 鲁 (b )其後,進行水洗、乾燥。 11· 一種表面處理銅箔之製造方法,具備灰色化處理面 之表面處理銅箔之製造方法, 其特徵在於具備以下(a)、(b)、(C)步驟: (a) 在銅箔的粗面,使用含有硫酸鈷(7水和物)10g/L 4 0 g / L ’ p Η值4 · 0以上’液溫3 0 C以下之硫酸始電鍍液 的攪拌浴,以4A/dm2以下之電流密度電解,形成灰色之硫 酸鈷鍍層; (b) 在形成灰色的硫酸鈷鍍層之銅箔的兩面或單面,形 成防銹處理層;以及 (c) 其後,進行水洗、乾燥。 1 2. —種電磁波遮蔽導電性網片,其特徵在於··使用具 備申請專利範圍第1項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 1 3 · —種電磁波遮蔽導電性網片,其特徵在於··使用具 備申請專利範圍第2項所述之灰色化處理面的表面處$里銅 治形成之電聚顯不前面板用的電磁波遮蔽導電性網片。 1 4 _ 一種電磁波遮蔽導電性網片,其特徵在於:使用具 2213-6894-PF;Ahddub 38 200533251 ^備申請專利範圍第3項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 1 5 · —種電磁波遮蔽導電性網片,其特徵在於··使用具 備申請專利範圍第4項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 16· —種電磁波遮蔽導電性網片,其特徵在於:使用具 f 備申請專利範圍第5項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 17. —種電磁波遮蔽導電性網片,其特徵在於··使用具 _備申請專利範圍第6項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 1 8· —種電磁波遮蔽導電性網片,其特徵在於:使用具 備申請專利範圍第7項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 19· 一種電磁波遮蔽導電性網片,其特徵在於··使用具 備申請專利範圍第8項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 _ 20· —種電磁波遮蔽導電性網片,其特徵在於:使用具 備申請專利範圍第9項所述之灰色化處理面的表面處理銅 箔形成之電漿顯示器前面板用的電磁波遮蔽導電性網片。 39 2213-6894-PF;Ahddub200533251 X. Patent application: 1. A surface-treated copper foil having a grayed surface on the rough surface of electrolytic copper foil, characterized in that the grayed surface is the weight of one side of the copper foil layer The thickness of the cobalt sulfate coating is 20Omg / m2 ~ 35Omg / m2, and the cross section of the graying treatment surface is less than 200nm. 2 _ If the surface-treated copper foil of item 1 of the scope of the patent application, the gray-treated surface is provided with an anti-money treatment layer. 3 · If the surface-treated copper foil in item 2 of the patent application scope, the anti-recording treatment layer is made of zinc or zinc alloy. 4_ For the surface-treated copper foil with gray processing surface as described in item 2 of the scope of patent application, the anti-rust treatment layer is composed of a layer made of zinc or alloy and a chromate treatment layer. 5. The surface-treated copper foil according to item 1 of the scope of patent application, in which the l value of the aforementioned gray-treated surface is Lab surface color system is 43 or less.丨 6 If the surface-treated copper foil of item 1 of the scope of patent application, wherein the gray-treated surface is formed on the rough surface of the electrolytic copper foil to form the gray-treated surface, and the glossiness [Gs (60.)] Is 10 the following. 7_ The surface-treated copper foil according to item 1 of the scope of the patent application, wherein the aforementioned graying-treated surface has a black concentration of 7-12. 8 · The surface-treated copper foil as described in item 1 of the Patent Scope, wherein the graying-treated surface is visually confirmed to be black when the transparent resin film is closely arranged on the surface. 9 · The surface-treated copper foil as described in item 1 of the Patent Scope, in which the black concentration in the ash 2213-6894-PF; Ahddub 37 200533251 ‘when the transparent resin coating is provided on the color treated surface is above 1.2. i〇 · —A method for producing a surface-treated copper thread, a method for producing a surface-treated copper foil having a gray-treated surface, which is characterized by having the following steps (a) and (b): (a) a rough surface of a copper box , Cobalt sulfate plating solution containing sulfuric acid (7 hydrates) 〇g / L-~ Wg / L, pH 4.0 or higher, liquid temperature below 30 ° C | Stirring bath, with a current below 4A / dm2 Density electrolysis to form a gray sulfuric acid initial plating layer; and (b) thereafter, washing with water and drying. 11. A method for producing a surface-treated copper foil, a method for producing a surface-treated copper foil having a grayed-out surface, characterized by having the following steps (a), (b), and (C): (a) For rough surface, use a stirred bath containing sulfuric acid starting plating solution containing cobalt sulfate (7 water and substance) 10g / L 4 0 g / L 'p Q value 4 · 0 or higher' liquid temperature 3 0 C or lower, 4 A / dm2 or less Electrolysis at a current density to form a gray cobalt sulfate plating layer; (b) forming a rust-proof treatment layer on both or one side of the copper foil forming the gray cobalt sulfate plating layer; and (c) thereafter, washing with water and drying. 1 2. An electromagnetic wave shielding conductive mesh, characterized in that the electromagnetic wave shielding conductivity for a plasma display front panel formed of a surface-treated copper foil provided with a gray-treated surface as described in item 1 of the scope of patent application is used. Mesh. 1 3-An electromagnetic wave shielding conductive mesh, characterized in that the electromagnetic wave for the front panel of the electrocondensation display panel formed by copper lining at the surface provided with the grayed-out surface described in item 2 of the patent application scope is used. Shield conductive mesh. 1 4 _ An electromagnetic wave shielding conductive mesh characterized by using a plasma-treated plasma foil formed of a surface-treated copper foil having a gray-treated surface as described in item 3 of the patent application scope 2213-6894-PF; Ahddub 38 200533251 The electromagnetic wave for the front panel of the display shields the conductive mesh. 1 5-An electromagnetic wave shielding conductive mesh, characterized in that the electromagnetic wave shielding conductivity for a plasma display front panel formed of a surface-treated copper foil provided with a gray-treated surface as described in item 4 of the scope of patent application is used. Mesh. 16. · An electromagnetic wave shielding conductive mesh, characterized in that the electromagnetic wave shielding conductivity of a plasma display front panel formed of a surface-treated copper foil with a gray-treated surface described in item 5 of the patent application scope is used. Mesh. 17. An electromagnetic wave-shielding conductive mesh, characterized in that the electromagnetic wave-shielding conductivity of a plasma display front panel formed of a surface-treated copper foil with a gray-treated surface as described in item 6 of the patent application scope is used. Sex mesh. 1 8 · — An electromagnetic wave shielding conductive mesh, characterized in that the electromagnetic wave shielding conductive mesh for a front panel of a plasma display is formed by using a surface-treated copper foil having a gray-treated surface as described in item 7 of the patent application scope. sheet. 19. An electromagnetic wave-shielding conductive mesh, characterized in that an electromagnetic wave-shielding conductive mesh for a plasma display front panel formed of a surface-treated copper foil having a gray-treated surface as described in item 8 of the scope of patent application is used. . _ 20 · —Electromagnetic wave shielding conductive mesh, characterized in that the electromagnetic wave shielding conductive mesh for the front panel of a plasma display is formed by using a surface-treated copper foil with a gray-treated surface as described in item 9 of the patent application scope. sheet. 39 2213-6894-PF; Ahddub
TW094106234A 2004-03-02 2005-03-02 Surface-treated copper foil having grayed surface, process for producing the same and electromagnetic wave shielding conductive mesh for front panel of plasma display wherein use is made of the surface-treated copper foil TWI280079B (en)

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