TW200508625A - Device for inspecting a conductive pattern - Google Patents

Device for inspecting a conductive pattern

Info

Publication number
TW200508625A
TW200508625A TW093118973A TW93118973A TW200508625A TW 200508625 A TW200508625 A TW 200508625A TW 093118973 A TW093118973 A TW 093118973A TW 93118973 A TW93118973 A TW 93118973A TW 200508625 A TW200508625 A TW 200508625A
Authority
TW
Taiwan
Prior art keywords
conductive pattern
inspecting
sensor electrode
detected
inspected
Prior art date
Application number
TW093118973A
Other languages
English (en)
Other versions
TWI289674B (en
Inventor
Toru Ohara
Takuo Itagaki
Masayuki Fujii
Original Assignee
Tokyo Cathode Lab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Cathode Lab filed Critical Tokyo Cathode Lab
Publication of TW200508625A publication Critical patent/TW200508625A/zh
Application granted granted Critical
Publication of TWI289674B publication Critical patent/TWI289674B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW093118973A 2003-07-04 2004-06-29 Device for inspecting a conductive pattern TWI289674B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003270954A JP4562358B2 (ja) 2003-07-04 2003-07-04 導電パターン検査装置

Publications (2)

Publication Number Publication Date
TW200508625A true TW200508625A (en) 2005-03-01
TWI289674B TWI289674B (en) 2007-11-11

Family

ID=34190767

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093118973A TWI289674B (en) 2003-07-04 2004-06-29 Device for inspecting a conductive pattern

Country Status (4)

Country Link
JP (1) JP4562358B2 (zh)
KR (1) KR101116164B1 (zh)
CN (1) CN100552464C (zh)
TW (1) TWI289674B (zh)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4629531B2 (ja) * 2005-08-03 2011-02-09 日置電機株式会社 短絡検査装置および短絡検査方法
JP5276774B2 (ja) * 2005-11-29 2013-08-28 株式会社日本マイクロニクス 検査方法及び装置
JP5050394B2 (ja) 2006-04-20 2012-10-17 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4915776B2 (ja) * 2006-04-27 2012-04-11 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4730904B2 (ja) * 2006-04-28 2011-07-20 日本電産リード株式会社 基板検査装置及び基板検査方法
JP2008014918A (ja) * 2006-06-30 2008-01-24 Oht Inc 回路パターン検査装置及び回路パターン検査方法
KR100799161B1 (ko) * 2006-07-20 2008-01-29 마이크로 인스펙션 주식회사 비접촉 싱글사이드 프로브와 이를 이용한 패턴전극의 단선및 단락 검사장치 및 그 방법
JP4291843B2 (ja) * 2006-10-19 2009-07-08 株式会社東京カソード研究所 パターン検査装置
JP2009121894A (ja) * 2007-11-14 2009-06-04 Fujitsu Ltd 導電体パターンの欠陥検査方法及び欠陥検査装置
JP5387818B2 (ja) * 2008-12-11 2014-01-15 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5122512B2 (ja) * 2009-04-17 2013-01-16 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5391819B2 (ja) * 2009-05-14 2014-01-15 日本電産リード株式会社 タッチパネル検査装置
JP5438538B2 (ja) 2010-02-08 2014-03-12 日本碍子株式会社 異常判定機能付き装置、及び異常判定方法
JP5533169B2 (ja) * 2010-04-13 2014-06-25 日本電産リード株式会社 検査装置
JP5305111B2 (ja) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5580247B2 (ja) * 2011-04-27 2014-08-27 株式会社ユニオンアロー・テクノロジー パターン検査装置
JP2012238066A (ja) 2011-05-10 2012-12-06 Japan Display East Co Ltd 静電容量方式のタッチパネル、および表示装置
CN103308817B (zh) * 2013-06-20 2015-11-25 京东方科技集团股份有限公司 阵列基板线路检测装置及检测方法
KR101537563B1 (ko) * 2013-11-06 2015-07-20 마이크로 인스펙션 주식회사 비접촉 프로브를 이용한 패턴전극의 결함 위치 검출 방법
CN104122689A (zh) * 2014-07-29 2014-10-29 深圳市华星光电技术有限公司 一种测试装置及其测试方法
JP6674842B2 (ja) * 2016-05-24 2020-04-01 京セラ株式会社 センサ基板およびセンサ装置
KR101823317B1 (ko) * 2016-07-01 2018-03-14 로체 시스템즈(주) 패널의 배선패턴 검사장치 및 배선패턴 검사방법
CN108226695B (zh) * 2018-01-02 2021-10-15 京东方科技集团股份有限公司 邻近金属线短路的检测及定位装置和方法
CN111007432B (zh) * 2019-12-12 2022-06-17 芜湖伦丰电子科技有限公司 一种寻找银浆开短路位置的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000227452A (ja) 1999-02-04 2000-08-15 Hioki Ee Corp 回路基板検査装置
JP4450143B2 (ja) 2001-05-24 2010-04-14 オー・エイチ・ティー株式会社 回路パターン検査装置並びに回路パターン検査方法及び記録媒体

Also Published As

Publication number Publication date
CN1576870A (zh) 2005-02-09
KR101116164B1 (ko) 2012-03-06
JP4562358B2 (ja) 2010-10-13
KR20050004046A (ko) 2005-01-12
CN100552464C (zh) 2009-10-21
JP2005024518A (ja) 2005-01-27
TWI289674B (en) 2007-11-11

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