SU1414878A1 - Способ ионно-плазменного напылени и устройство дл его осуществлени - Google Patents
Способ ионно-плазменного напылени и устройство дл его осуществлени Download PDFInfo
- Publication number
- SU1414878A1 SU1414878A1 SU843821699A SU3821699A SU1414878A1 SU 1414878 A1 SU1414878 A1 SU 1414878A1 SU 843821699 A SU843821699 A SU 843821699A SU 3821699 A SU3821699 A SU 3821699A SU 1414878 A1 SU1414878 A1 SU 1414878A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- vacuum chamber
- magnetron
- vacuum
- pump
- valve
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract 3
- 238000005507 spraying Methods 0.000 title claims 3
- 230000008021 deposition Effects 0.000 title abstract 3
- 239000007789 gas Substances 0.000 claims abstract 15
- 238000000576 coating method Methods 0.000 claims abstract 6
- 239000011261 inert gas Substances 0.000 claims abstract 5
- 239000011248 coating agent Substances 0.000 claims abstract 3
- 238000005516 engineering process Methods 0.000 claims abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 9
- 238000005086 pumping Methods 0.000 claims 8
- 229910052786 argon Inorganic materials 0.000 claims 6
- 238000004140 cleaning Methods 0.000 claims 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 5
- 239000000463 material Substances 0.000 claims 5
- 239000010936 titanium Substances 0.000 claims 5
- 229910052719 titanium Inorganic materials 0.000 claims 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 238000007750 plasma spraying Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- 229910052720 vanadium Inorganic materials 0.000 claims 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 2
- 241000282472 Canis lupus familiaris Species 0.000 claims 1
- 101100501245 Pythium oligandrum POD-1 gene Proteins 0.000 claims 1
- 102100033121 Transcription factor 21 Human genes 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 claims 1
- 238000011109 contamination Methods 0.000 claims 1
- 238000005247 gettering Methods 0.000 claims 1
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 abstract 3
- 238000005137 deposition process Methods 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU843821699A SU1414878A1 (ru) | 1984-12-20 | 1984-12-20 | Способ ионно-плазменного напылени и устройство дл его осуществлени |
| FR8512505A FR2575186B1 (fr) | 1984-12-20 | 1985-08-19 | Procede d'application de revetements sur des pieces par pulverisation a l'ionoplasma, installation pour sa mise en oeuvre et pieces traitees conformement audit procede |
| DE19853529813 DE3529813A1 (de) | 1984-12-20 | 1985-08-20 | Verfahren zur ionenplasma-aufdampfung und anlage zur durchfuehrung dieses verfahrens |
| JP28685185A JPS61157677A (ja) | 1984-12-20 | 1985-12-19 | イオン化プラズマ式の塗装方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU843821699A SU1414878A1 (ru) | 1984-12-20 | 1984-12-20 | Способ ионно-плазменного напылени и устройство дл его осуществлени |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU1414878A1 true SU1414878A1 (ru) | 1988-08-07 |
Family
ID=21150242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU843821699A SU1414878A1 (ru) | 1984-12-20 | 1984-12-20 | Способ ионно-плазменного напылени и устройство дл его осуществлени |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS61157677A (enrdf_load_stackoverflow) |
| DE (1) | DE3529813A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2575186B1 (enrdf_load_stackoverflow) |
| SU (1) | SU1414878A1 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3908316A1 (de) * | 1989-03-14 | 1990-09-20 | Vladimir Aleksandrovic Sagun | Vorrichtung zum auftragen von duennschichtigen ueberzuegen auf substrate im vakuum |
| RU2155242C2 (ru) * | 1998-01-13 | 2000-08-27 | Институт проблем машиноведения РАН | Устройство для нанесения покрытий в вакууме |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
| US4049533A (en) * | 1975-09-10 | 1977-09-20 | Golyanov Vyacheslav Mikhailovi | Device for producing coatings by means of ion sputtering |
| DD145283A1 (de) * | 1979-08-06 | 1980-12-03 | Helmut Bollinger | Verfahren zur herstellung von verschleissfesten und korrosionsbestaendigen schichten |
| JPS58221271A (ja) * | 1982-06-18 | 1983-12-22 | Citizen Watch Co Ltd | イオンプレ−テイング法による被膜形成方法 |
-
1984
- 1984-12-20 SU SU843821699A patent/SU1414878A1/ru active
-
1985
- 1985-08-19 FR FR8512505A patent/FR2575186B1/fr not_active Expired
- 1985-08-20 DE DE19853529813 patent/DE3529813A1/de active Granted
- 1985-12-19 JP JP28685185A patent/JPS61157677A/ja active Granted
Non-Patent Citations (1)
| Title |
|---|
| Электронна промьшшенность, 1980, 9 5, с. 52-54. Там же, 1983, 5, с. 50-53. * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2575186B1 (fr) | 1989-12-15 |
| JPS61157677A (ja) | 1986-07-17 |
| DE3529813C2 (enrdf_load_stackoverflow) | 1987-08-27 |
| DE3529813A1 (de) | 1986-07-03 |
| FR2575186A1 (fr) | 1986-06-27 |
| JPH0258349B2 (enrdf_load_stackoverflow) | 1990-12-07 |
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