JPH0258349B2 - - Google Patents

Info

Publication number
JPH0258349B2
JPH0258349B2 JP28685185A JP28685185A JPH0258349B2 JP H0258349 B2 JPH0258349 B2 JP H0258349B2 JP 28685185 A JP28685185 A JP 28685185A JP 28685185 A JP28685185 A JP 28685185A JP H0258349 B2 JPH0258349 B2 JP H0258349B2
Authority
JP
Japan
Prior art keywords
vacuum chamber
pump
magnetron
vacuum
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28685185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61157677A (ja
Inventor
Petoroitsuchi Petorakofu Urajimiiru
Petoroitsuchi Minkin Gennadei
Arekusandoroitsuchi Shagun Urajimiiru
Semenoitsuchi Barikin Paueru
Isaakoitsuchi Barukuron Dauido
Arekusandoroitsuchi Domu Uradeimiiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPS61157677A publication Critical patent/JPS61157677A/ja
Publication of JPH0258349B2 publication Critical patent/JPH0258349B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP28685185A 1984-12-20 1985-12-19 イオン化プラズマ式の塗装方法及び装置 Granted JPS61157677A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU3821699 1984-12-20
SU843821699A SU1414878A1 (ru) 1984-12-20 1984-12-20 Способ ионно-плазменного напылени и устройство дл его осуществлени

Publications (2)

Publication Number Publication Date
JPS61157677A JPS61157677A (ja) 1986-07-17
JPH0258349B2 true JPH0258349B2 (enrdf_load_stackoverflow) 1990-12-07

Family

ID=21150242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28685185A Granted JPS61157677A (ja) 1984-12-20 1985-12-19 イオン化プラズマ式の塗装方法及び装置

Country Status (4)

Country Link
JP (1) JPS61157677A (enrdf_load_stackoverflow)
DE (1) DE3529813A1 (enrdf_load_stackoverflow)
FR (1) FR2575186B1 (enrdf_load_stackoverflow)
SU (1) SU1414878A1 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3908316A1 (de) * 1989-03-14 1990-09-20 Vladimir Aleksandrovic Sagun Vorrichtung zum auftragen von duennschichtigen ueberzuegen auf substrate im vakuum
RU2155242C2 (ru) * 1998-01-13 2000-08-27 Институт проблем машиноведения РАН Устройство для нанесения покрытий в вакууме

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US4049533A (en) * 1975-09-10 1977-09-20 Golyanov Vyacheslav Mikhailovi Device for producing coatings by means of ion sputtering
DD145283A1 (de) * 1979-08-06 1980-12-03 Helmut Bollinger Verfahren zur herstellung von verschleissfesten und korrosionsbestaendigen schichten
JPS58221271A (ja) * 1982-06-18 1983-12-22 Citizen Watch Co Ltd イオンプレ−テイング法による被膜形成方法

Also Published As

Publication number Publication date
FR2575186B1 (fr) 1989-12-15
JPS61157677A (ja) 1986-07-17
DE3529813C2 (enrdf_load_stackoverflow) 1987-08-27
SU1414878A1 (ru) 1988-08-07
DE3529813A1 (de) 1986-07-03
FR2575186A1 (fr) 1986-06-27

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