SG83819A1 - Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same - Google Patents
Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising sameInfo
- Publication number
- SG83819A1 SG83819A1 SG200005733A SG200005733A SG83819A1 SG 83819 A1 SG83819 A1 SG 83819A1 SG 200005733 A SG200005733 A SG 200005733A SG 200005733 A SG200005733 A SG 200005733A SG 83819 A1 SG83819 A1 SG 83819A1
- Authority
- SG
- Singapore
- Prior art keywords
- nitrile
- copolymers
- same
- leaving groups
- photoresist compositions
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/12—Esters of monohydric alcohols or phenols
- C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
- C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
- C07C69/52—Esters of acyclic unsaturated carboxylic acids having the esterified carboxyl group bound to an acyclic carbon atom
- C07C69/533—Monocarboxylic acid esters having only one carbon-to-carbon double bond
- C07C69/54—Acrylic acid esters; Methacrylic acid esters
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/12—Esters of monohydric alcohols or phenols
- C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
- C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
- C08F220/1811—C10or C11-(Meth)acrylate, e.g. isodecyl (meth)acrylate, isobornyl (meth)acrylate or 2-naphthyl (meth)acrylate
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/42—Nitriles
- C08F220/44—Acrylonitrile
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2602/00—Systems containing two condensed rings
- C07C2602/36—Systems containing two condensed rings the rings having more than two atoms in common
- C07C2602/42—Systems containing two condensed rings the rings having more than two atoms in common the bicyclo ring system containing seven carbon atoms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/111—Polymer of unsaturated acid or ester
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials For Photolithography (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/413,763 US6692888B1 (en) | 1999-10-07 | 1999-10-07 | Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same |
Publications (1)
Publication Number | Publication Date |
---|---|
SG83819A1 true SG83819A1 (en) | 2001-10-16 |
Family
ID=23638520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200005733A SG83819A1 (en) | 1999-10-07 | 2000-10-07 | Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same |
Country Status (7)
Country | Link |
---|---|
US (2) | US6692888B1 (zh) |
EP (1) | EP1091249A1 (zh) |
JP (1) | JP2001272783A (zh) |
KR (2) | KR20010050920A (zh) |
CN (1) | CN1171125C (zh) |
SG (1) | SG83819A1 (zh) |
TW (1) | TW573212B (zh) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6692888B1 (en) * | 1999-10-07 | 2004-02-17 | Shipley Company, L.L.C. | Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same |
US6777157B1 (en) | 2000-02-26 | 2004-08-17 | Shipley Company, L.L.C. | Copolymers and photoresist compositions comprising same |
JP4517524B2 (ja) * | 2001-03-09 | 2010-08-04 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
AU2002254232A1 (en) | 2001-03-22 | 2002-10-08 | Shipley Company, L.L.C. | Photoresist composition |
US6737215B2 (en) * | 2001-05-11 | 2004-05-18 | Clariant Finance (Bvi) Ltd | Photoresist composition for deep ultraviolet lithography |
US20030232273A1 (en) * | 2001-10-09 | 2003-12-18 | Shipley Company, L.L.C. | Acetal/alicyclic polymers and photoresist compositions |
JP2003233190A (ja) * | 2001-10-09 | 2003-08-22 | Shipley Co Llc | 混合フォト酸レイビル基を有するポリマーおよび該ポリマーを含むフォトレジスト |
KR100452415B1 (ko) * | 2001-10-16 | 2004-10-12 | 주식회사 켐써치 | 포토레지스트용 감광성 고분자 |
JP3901997B2 (ja) * | 2001-11-27 | 2007-04-04 | 富士通株式会社 | レジスト材料、レジストパターン及びその製造方法、並びに、半導体装置及びその製造方法 |
KR20030055874A (ko) * | 2001-12-27 | 2003-07-04 | 주식회사 켐써치 | 트리시클로데카닐 그룹을 갖는 에스테르 유도체를 이용한감광성 고분자 및 이를 이용한 포토레지스트 조성물 |
DE10203839B4 (de) * | 2002-01-31 | 2007-10-18 | Infineon Technologies Ag | Resist für die Fotolithografie mit reaktiven Gruppen für eine nachträgliche Modifikation der Resiststrukturen |
TW200401164A (en) * | 2002-03-01 | 2004-01-16 | Shipley Co Llc | Photoresist compositions |
TW200403522A (en) * | 2002-03-01 | 2004-03-01 | Shipley Co Llc | Photoresist compositions |
US7144674B2 (en) * | 2002-03-20 | 2006-12-05 | Sumitomo Chemical Company, Limited | Positive resist composition |
JP4498690B2 (ja) * | 2002-05-30 | 2010-07-07 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | 新規樹脂およびそれを含有するフォトレジスト組成物 |
EP1574903A1 (en) * | 2004-03-08 | 2005-09-14 | Rohm and Haas Electronic Materials, L.L.C. | Photoresists comprising cyanoadamantyl moiety-containing polymers |
EP1586944A1 (en) * | 2004-03-09 | 2005-10-19 | Rohm and Haas Electronic Materials, L.L.C. | Cyanoadamantyl compounds and polymers |
US7781141B2 (en) | 2004-07-02 | 2010-08-24 | Rohm And Haas Electronic Materials Llc | Compositions and processes for immersion lithography |
KR100732301B1 (ko) | 2005-06-02 | 2007-06-25 | 주식회사 하이닉스반도체 | 포토레지스트 중합체, 포토레지스트 조성물 및 이를 이용한반도체 소자의 제조 방법 |
KR100678647B1 (ko) * | 2006-01-23 | 2007-02-06 | 삼성전자주식회사 | 포토레지스트용 감광성 고분자 및 이를 포함하는포토레지스트 조성물 |
TWI598223B (zh) | 2006-03-10 | 2017-09-11 | 羅門哈斯電子材料有限公司 | 用於光微影之組成物及製程 |
TWI370139B (en) * | 2006-07-06 | 2012-08-11 | Shinetsu Chemical Co | Ester compounds and their preparation, polymers, resist compositions and patterning process |
EP2420892A1 (en) | 2006-10-30 | 2012-02-22 | Rohm and Haas Electronic Materials LLC | Compositions and processes for immersion lithography |
EP2056162B1 (en) | 2007-11-05 | 2016-05-04 | Rohm and Haas Electronic Materials LLC | Process for immersion lithography |
JP5487784B2 (ja) * | 2008-08-07 | 2014-05-07 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
EP2189846B1 (en) | 2008-11-19 | 2015-04-22 | Rohm and Haas Electronic Materials LLC | Process for photolithography applying a photoresist composition comprising a block copolymer |
EP2189844A3 (en) | 2008-11-19 | 2010-07-28 | Rohm and Haas Electronic Materials LLC | Compositions comprising sulfonamide material and processes for photolithography |
EP3051348A1 (en) | 2008-11-19 | 2016-08-03 | Rohm and Haas Electronic Materials LLC | Compositions comprising hetero-substituted carbocyclic aryl component and processes for photolithography |
EP2189845B1 (en) | 2008-11-19 | 2017-08-02 | Rohm and Haas Electronic Materials LLC | Compositions and processes for photolithography |
EP2204392A1 (en) | 2008-12-31 | 2010-07-07 | Rohm and Haas Electronic Materials LLC | Compositions and processes for photolithography |
EP2204694A1 (en) | 2008-12-31 | 2010-07-07 | Rohm and Haas Electronic Materials LLC | Compositions and processes for photolithography |
CN101943860B (zh) | 2009-06-08 | 2013-12-11 | 罗门哈斯电子材料有限公司 | 平版印刷方法 |
EP2539316B1 (en) | 2010-02-24 | 2019-10-23 | Basf Se | Latent acids and their use |
IL213195A0 (en) | 2010-05-31 | 2011-07-31 | Rohm & Haas Elect Mat | Photoresist compositions and emthods of forming photolithographic patterns |
JP2012113302A (ja) | 2010-11-15 | 2012-06-14 | Rohm & Haas Electronic Materials Llc | 塩基反応性成分を含む組成物およびフォトリソグラフィーのための方法 |
JP6144005B2 (ja) | 2010-11-15 | 2017-06-07 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | 糖成分を含む組成物およびフォトリソグラフィ方法 |
JP6088133B2 (ja) * | 2010-12-15 | 2017-03-01 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
EP2472320A2 (en) | 2010-12-30 | 2012-07-04 | Rohm and Haas Electronic Materials LLC | Compositions comprising base-reactive component and processes for photolithography |
EP2511766B1 (en) | 2011-04-14 | 2013-07-31 | Rohm and Haas Electronic Materials LLC | Topcoat compositions for photoresist and immersion photolithography process using them |
EP3253735B1 (en) | 2015-02-02 | 2021-03-31 | Basf Se | Latent acids and their use |
KR101785426B1 (ko) | 2015-04-30 | 2017-10-17 | 롬엔드하스전자재료코리아유한회사 | 포토레지스트 조성물 및 방법 |
US11480878B2 (en) | 2016-08-31 | 2022-10-25 | Rohm And Haas Electronic Materials Korea Ltd. | Monomers, polymers and photoresist compositions |
JP6730417B2 (ja) | 2017-12-31 | 2020-07-29 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | フォトレジスト組成物および方法 |
CN110734520B (zh) * | 2019-10-09 | 2021-11-26 | 宁波南大光电材料有限公司 | 一种具有高黏附性的ArF光刻胶树脂及其制备方法 |
US11874603B2 (en) | 2021-09-15 | 2024-01-16 | Rohm And Haas Electronic Materials Korea Ltd. | Photoresist composition comprising amide compound and pattern formation methods using the same |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5381114A (en) * | 1976-12-25 | 1978-07-18 | Toshiba Corp | Radiation sensitive material |
EP0663616A2 (en) * | 1993-12-28 | 1995-07-19 | Fujitsu Limited | Radiation sensitive material and method for forming pattern |
DE19626003A1 (de) * | 1995-06-28 | 1997-01-02 | Fujitsu Ltd | Chemisch verstärkte Resist-Zusammensetzungen und Verfahren zur Herstellung von Resist-Mustern |
EP0915382A2 (en) * | 1997-11-04 | 1999-05-12 | Shipley Company LLC | Novel polymers and photoresist compositions |
EP0930542A1 (en) * | 1998-01-15 | 1999-07-21 | Shipley Company LLC | Polymers and photoresist compositions for short wavelength imaging |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989007786A1 (en) * | 1988-02-17 | 1989-08-24 | Tosoh Corporation | Photoresist composition |
US5635332A (en) * | 1993-07-14 | 1997-06-03 | Nec Corporation | Alkylsulfonium salts and photoresist compositions containing the same |
KR100195595B1 (ko) | 1994-07-11 | 1999-06-15 | 니시무로 타이죠 | 감광성 재료 |
JP3751065B2 (ja) * | 1995-06-28 | 2006-03-01 | 富士通株式会社 | レジスト材料及びレジストパターンの形成方法 |
JP3623058B2 (ja) * | 1996-06-13 | 2005-02-23 | 和光純薬工業株式会社 | 新規ポリマー及びこれを用いたレジスト組成物並びにこれを用いたパターン形成方法 |
JP3797505B2 (ja) * | 1997-02-28 | 2006-07-19 | 富士写真フイルム株式会社 | ポジ型感光性組成物 |
JP3765440B2 (ja) * | 1997-02-18 | 2006-04-12 | 富士写真フイルム株式会社 | ポジ型感光性組成物 |
JP3770694B2 (ja) * | 1997-04-30 | 2006-04-26 | 富士通株式会社 | レジスト材料及びレジストパターンの形成方法 |
JP3731776B2 (ja) * | 1997-05-09 | 2006-01-05 | 富士写真フイルム株式会社 | ポジ型感光性組成物 |
US6077643A (en) | 1997-08-28 | 2000-06-20 | Shipley Company, L.L.C. | Polymers and photoresist compositions |
JPH11102065A (ja) * | 1997-09-29 | 1999-04-13 | Hitachi Ltd | 感光性樹脂組成物、その組成物を用いたパターン形成方法、および、電子装置の製造方法 |
JP3738562B2 (ja) * | 1998-02-19 | 2006-01-25 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
US6146806A (en) | 1998-04-06 | 2000-11-14 | Nec Corporation | Negative photoresist composition using polymer having 1,2-diol structure and process for forming pattern using the same |
JPH11352693A (ja) * | 1998-06-08 | 1999-12-24 | Nippon Zeon Co Ltd | レジスト組成物およびレジストパターンの形成方法 |
JP3876571B2 (ja) * | 1998-08-26 | 2007-01-31 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
KR100574574B1 (ko) | 1998-08-26 | 2006-04-28 | 스미또모 가가꾸 가부시키가이샤 | 화학 증폭형 포지티브 내식막 조성물 |
JP3856270B2 (ja) * | 1998-09-24 | 2006-12-13 | 富士フイルムホールディングス株式会社 | ポジ型レジスト組成物 |
TWI228504B (en) | 1998-11-02 | 2005-03-01 | Shinetsu Chemical Co | Novel ester compounds, polymers, resist compositions and patterning process |
US6146808A (en) * | 1998-11-23 | 2000-11-14 | Agfa-Gevaert, N.V. | Method for preparing an imaging element for making an improved printing plate according to the silver salt diffusion transfer process |
JP4329148B2 (ja) * | 1999-03-11 | 2009-09-09 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
JP4530306B2 (ja) * | 1999-07-12 | 2010-08-25 | 三菱レイヨン株式会社 | レジスト用樹脂、化学増幅型レジスト組成物およびレジストパターン形成方法 |
JP4240786B2 (ja) * | 1999-09-17 | 2009-03-18 | Jsr株式会社 | 感放射線性樹脂組成物 |
US6692888B1 (en) | 1999-10-07 | 2004-02-17 | Shipley Company, L.L.C. | Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same |
-
1999
- 1999-10-07 US US09/413,763 patent/US6692888B1/en not_active Expired - Lifetime
-
2000
- 2000-10-06 EP EP00308825A patent/EP1091249A1/en not_active Withdrawn
- 2000-10-07 SG SG200005733A patent/SG83819A1/en unknown
- 2000-10-07 KR KR1020000059094A patent/KR20010050920A/ko not_active Application Discontinuation
- 2000-10-07 CN CNB001347349A patent/CN1171125C/zh not_active Expired - Lifetime
- 2000-10-07 TW TW89120984A patent/TW573212B/zh not_active IP Right Cessation
- 2000-10-10 JP JP2000308695A patent/JP2001272783A/ja active Pending
-
2003
- 2003-10-10 US US10/683,532 patent/US7090968B2/en not_active Expired - Lifetime
-
2007
- 2007-08-01 KR KR1020070077514A patent/KR100880409B1/ko not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5381114A (en) * | 1976-12-25 | 1978-07-18 | Toshiba Corp | Radiation sensitive material |
EP0663616A2 (en) * | 1993-12-28 | 1995-07-19 | Fujitsu Limited | Radiation sensitive material and method for forming pattern |
DE19626003A1 (de) * | 1995-06-28 | 1997-01-02 | Fujitsu Ltd | Chemisch verstärkte Resist-Zusammensetzungen und Verfahren zur Herstellung von Resist-Mustern |
EP0915382A2 (en) * | 1997-11-04 | 1999-05-12 | Shipley Company LLC | Novel polymers and photoresist compositions |
EP0930542A1 (en) * | 1998-01-15 | 1999-07-21 | Shipley Company LLC | Polymers and photoresist compositions for short wavelength imaging |
Also Published As
Publication number | Publication date |
---|---|
JP2001272783A (ja) | 2001-10-05 |
KR20010050920A (ko) | 2001-06-25 |
KR20070085185A (ko) | 2007-08-27 |
US7090968B2 (en) | 2006-08-15 |
CN1308254A (zh) | 2001-08-15 |
US20040076906A1 (en) | 2004-04-22 |
CN1171125C (zh) | 2004-10-13 |
EP1091249A1 (en) | 2001-04-11 |
US6692888B1 (en) | 2004-02-17 |
TW573212B (en) | 2004-01-21 |
KR100880409B1 (ko) | 2009-01-23 |
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