SG193771A1 - Workpiece carrying-in-and-out method in double-end surface grinding and double disk surface grinder - Google Patents

Workpiece carrying-in-and-out method in double-end surface grinding and double disk surface grinder Download PDF

Info

Publication number
SG193771A1
SG193771A1 SG2013024195A SG2013024195A SG193771A1 SG 193771 A1 SG193771 A1 SG 193771A1 SG 2013024195 A SG2013024195 A SG 2013024195A SG 2013024195 A SG2013024195 A SG 2013024195A SG 193771 A1 SG193771 A1 SG 193771A1
Authority
SG
Singapore
Prior art keywords
workpiece
static pressure
carrying
carrier
pressure pad
Prior art date
Application number
SG2013024195A
Other languages
English (en)
Inventor
Atsushi Shibanaka
Satoshi Kawabata
Original Assignee
Koyo Machine Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Machine Ind Co Ltd filed Critical Koyo Machine Ind Co Ltd
Publication of SG193771A1 publication Critical patent/SG193771A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
SG2013024195A 2012-04-05 2013-04-02 Workpiece carrying-in-and-out method in double-end surface grinding and double disk surface grinder SG193771A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012086335A JP5872947B2 (ja) 2012-04-05 2012-04-05 両頭平面研削におけるワーク搬入出方法及び両頭平面研削盤

Publications (1)

Publication Number Publication Date
SG193771A1 true SG193771A1 (en) 2013-10-30

Family

ID=49290307

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2013024195A SG193771A1 (en) 2012-04-05 2013-04-02 Workpiece carrying-in-and-out method in double-end surface grinding and double disk surface grinder

Country Status (5)

Country Link
JP (1) JP5872947B2 (enrdf_load_stackoverflow)
KR (1) KR102015666B1 (enrdf_load_stackoverflow)
DE (1) DE102013205446A1 (enrdf_load_stackoverflow)
SG (1) SG193771A1 (enrdf_load_stackoverflow)
TW (1) TWI574781B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9931730B2 (en) 2014-06-16 2018-04-03 Shin-Etsu Handotai Co., Ltd. Automatic handling apparatus with positioning pins

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6250435B2 (ja) * 2014-02-26 2017-12-20 光洋機械工業株式会社 両頭平面研削法
JP6383700B2 (ja) * 2015-04-07 2018-08-29 光洋機械工業株式会社 薄板状ワークの製造方法及び両頭平面研削装置
JP6707831B2 (ja) 2015-10-09 2020-06-10 株式会社Sumco 研削装置および研削方法
CN105448795B (zh) * 2015-11-30 2018-03-16 北京中电科电子装备有限公司 一种晶圆抓取系统
CN114227524A (zh) * 2021-12-30 2022-03-25 西安奕斯伟材料科技有限公司 双面研磨装置和双面研磨方法
CN115070604B (zh) * 2022-06-09 2023-09-29 西安奕斯伟材料科技股份有限公司 双面研磨装置和双面研磨方法
CN114986381B (zh) * 2022-06-16 2023-08-22 西安奕斯伟材料科技股份有限公司 双面研磨装置和双面研磨方法
CN117206999B (zh) * 2023-11-08 2024-02-20 瓦房店威远滚动体制造有限公司 一种能够提高打磨精度的双端面磨床

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10249687A (ja) * 1997-03-07 1998-09-22 Super Silicon Kenkyusho:Kk 薄板状工作物の両面研削・研磨装置
JP3951496B2 (ja) * 1999-03-30 2007-08-01 光洋機械工業株式会社 薄板円板状ワークの両面研削装置
JP4798480B2 (ja) * 2005-05-25 2011-10-19 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体ウェーハの製造方法および両面研削方法並びに半導体ウェーハの両面研削装置
JP4621261B2 (ja) * 2008-02-01 2011-01-26 株式会社住友金属ファインテック 両面研摩装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9931730B2 (en) 2014-06-16 2018-04-03 Shin-Etsu Handotai Co., Ltd. Automatic handling apparatus with positioning pins

Also Published As

Publication number Publication date
KR20130113367A (ko) 2013-10-15
DE102013205446A1 (de) 2013-10-24
JP2013215813A (ja) 2013-10-24
JP5872947B2 (ja) 2016-03-01
TW201402271A (zh) 2014-01-16
TWI574781B (zh) 2017-03-21
KR102015666B1 (ko) 2019-08-28

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