SG190511A1 - Apparatus for mounting semiconductor chips - Google Patents
Apparatus for mounting semiconductor chips Download PDFInfo
- Publication number
- SG190511A1 SG190511A1 SG2012074092A SG2012074092A SG190511A1 SG 190511 A1 SG190511 A1 SG 190511A1 SG 2012074092 A SG2012074092 A SG 2012074092A SG 2012074092 A SG2012074092 A SG 2012074092A SG 190511 A1 SG190511 A1 SG 190511A1
- Authority
- SG
- Singapore
- Prior art keywords
- support table
- semiconductor chip
- head
- carriage
- pick
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000011888 foil Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75701—Means for aligning in the lower part of the bonding apparatus, e.g. in the apparatus chuck
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75702—Means for aligning in the upper part of the bonding apparatus, e.g. in the bonding head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/758—Means for moving parts
- H01L2224/75801—Lower part of the bonding apparatus, e.g. XY table
- H01L2224/75804—Translational mechanism
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/758—Means for moving parts
- H01L2224/75821—Upper part of the bonding apparatus, i.e. bonding head
- H01L2224/75822—Rotational mechanism
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
- Y10T29/53178—Chip component
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Die Bonding (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH01886/11A CH705802B1 (de) | 2011-11-25 | 2011-11-25 | Einrichtung für die Montage von Halbleiterchips. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG190511A1 true SG190511A1 (en) | 2013-06-28 |
Family
ID=48366057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2012074092A SG190511A1 (en) | 2011-11-25 | 2012-10-04 | Apparatus for mounting semiconductor chips |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US9603294B2 (enExample) |
| JP (1) | JP6217958B2 (enExample) |
| KR (1) | KR101991965B1 (enExample) |
| CN (1) | CN103137526B (enExample) |
| CH (1) | CH705802B1 (enExample) |
| DE (1) | DE102012110604B4 (enExample) |
| FR (1) | FR2983344B1 (enExample) |
| MY (1) | MY160071A (enExample) |
| SG (1) | SG190511A1 (enExample) |
| TW (1) | TWI555110B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015038074A1 (en) * | 2013-09-13 | 2015-03-19 | Orion Systems Integration Pte Ltd | System and method for positioning a semiconductor chip with a bond head, thermal bonding system and method |
| US9136243B2 (en) * | 2013-12-03 | 2015-09-15 | Kulicke And Soffa Industries, Inc. | Systems and methods for determining and adjusting a level of parallelism related to bonding of semiconductor elements |
| EP3177128B1 (en) * | 2014-08-01 | 2020-10-14 | FUJI Corporation | Component mounting method and component mounting device |
| DE102016113328B4 (de) | 2015-08-31 | 2018-07-19 | Besi Switzerland Ag | Verfahren für die Montage von mit Bumps versehenen Halbleiterchips auf Substratplätzen eines Substrats |
| CH711536B1 (de) * | 2015-08-31 | 2019-02-15 | Besi Switzerland Ag | Verfahren für die Montage von mit Bumps versehenen Halbleiterchips auf Substratplätzen eines Substrats. |
| DE102015220746A1 (de) * | 2015-10-23 | 2017-04-27 | Ersa Gmbh | Verfahren und Vorrichtung zur Platzierung elektronischer Bauteile |
| JP7164314B2 (ja) * | 2017-04-28 | 2022-11-01 | ベシ スウィッツァーランド エージー | 部品を基板上に搭載する装置及び方法 |
| JP7340774B2 (ja) * | 2019-05-23 | 2023-09-08 | パナソニックＩｐマネジメント株式会社 | 部品圧着装置および部品圧着方法 |
| CN113471107B (zh) * | 2021-06-29 | 2022-04-19 | 深圳新益昌科技股份有限公司 | 固晶机及固晶方法 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5251266A (en) * | 1990-08-27 | 1993-10-05 | Sierra Research And Technology, Inc. | System for placement and mounting of fine pitch integrated circuit devices using a split mirror assembly |
| US5799858A (en) * | 1995-09-16 | 1998-09-01 | Samsung Aerospace Industries, Ltd. | Die bonding device |
| KR0175267B1 (ko) * | 1995-09-30 | 1999-04-01 | 김광호 | 회전운동을 하는 픽업 툴을 구비하는 다이 본딩 장치 |
| KR100319546B1 (ko) | 1996-02-29 | 2002-02-19 | 알파젬 아게 | 부품을수용,배향및조립하는방법및장치 |
| JP2002271093A (ja) * | 2001-03-07 | 2002-09-20 | Fuji Mach Mfg Co Ltd | 電気部品装着システム |
| JP2003086611A (ja) | 2001-09-07 | 2003-03-20 | Heiwa Kinzoku Kogyo Kk | Ｉｃダイボンド装置 |
| JP3636127B2 (ja) * | 2001-10-12 | 2005-04-06 | 松下電器産業株式会社 | 電子部品実装装置および電子部品実装方法 |
| KR20030046306A (ko) | 2001-12-05 | 2003-06-12 | 에섹 트레이딩 에스에이 | 반도체 칩을 설치하기 위한 장치 |
| SG104292A1 (en) | 2002-01-07 | 2004-06-21 | Advance Systems Automation Ltd | Flip chip bonder and method therefor |
| US7033842B2 (en) * | 2002-03-25 | 2006-04-25 | Matsushita Electric Industrial Co., Ltd. | Electronic component mounting apparatus and electronic component mounting method |
| JP2004179517A (ja) * | 2002-11-28 | 2004-06-24 | Shinkawa Ltd | ボンディング装置、ボンディング方法及びボンディングプログラム |
| EP1480507B1 (de) | 2003-05-21 | 2006-07-19 | Unaxis International Trading Ltd. | Halbleiter-Montageeinrichtung |
| TWI231561B (en) | 2003-05-21 | 2005-04-21 | Esec Trading Sa | Apparatus for mounting semiconductors |
| JP4156460B2 (ja) * | 2003-07-09 | 2008-09-24 | Ｔｄｋ株式会社 | ワークのピックアップ方法及びその装置、実装機 |
| WO2005041630A1 (en) * | 2003-10-24 | 2005-05-06 | Matsushita Electric Industrial Co. Ltd. | Electronic component mounting apparatus and electronic component mounting method |
| JP4111160B2 (ja) * | 2004-03-26 | 2008-07-02 | 松下電器産業株式会社 | 電子部品搭載装置および電子部品搭載方法 |
| US8137050B2 (en) * | 2005-09-29 | 2012-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Pickup device and pickup method |
| EP2005808B1 (de) | 2006-04-12 | 2010-03-17 | Kulicke & Soffa Die Bonding GmbH | Verfahren und vorrichtung zum ablegen von elektronischen bauteilen, insbesondere halbleiterchips auf einem substrat |
| KR20080041471A (ko) | 2006-11-07 | 2008-05-13 | 삼성전자주식회사 | 다이 본더 |
| CH698718B1 (de) | 2007-01-31 | 2009-10-15 | Oerlikon Assembly Equipment Ag | Vorrichtung für die Montage eines Flipchips auf einem Substrat. |
| WO2009047214A2 (en) | 2007-10-09 | 2009-04-16 | Oerlikon Assembly Equipment Ag, Steinhausen | Method for picking up semiconductor chips from a wafer table and mounting the removed semiconductor chips on a substrate |
| TW200931543A (en) | 2007-12-03 | 2009-07-16 | Panasonic Corp | Chip mounting system |
| JP4946989B2 (ja) * | 2008-07-07 | 2012-06-06 | パナソニック株式会社 | 電子部品ボンディング装置 |
| JP4788759B2 (ja) * | 2008-11-20 | 2011-10-05 | パナソニック株式会社 | 部品実装装置 |
| CN101842000B (zh) * | 2009-03-19 | 2014-04-30 | 鸿富锦精密工业（深圳）有限公司 | 贴附装置及使用该贴附装置的贴附方法 |
| JP4766144B2 (ja) * | 2009-04-08 | 2011-09-07 | パナソニック株式会社 | 電子部品実装装置 |
-
2011
- 2011-11-25 CH CH01886/11A patent/CH705802B1/de not_active IP Right Cessation
-
2012
- 2012-09-13 US US13/614,622 patent/US9603294B2/en active Active
- 2012-10-04 SG SG2012074092A patent/SG190511A1/en unknown
- 2012-10-09 MY MYPI2012700751A patent/MY160071A/en unknown
- 2012-11-01 JP JP2012241517A patent/JP6217958B2/ja active Active
- 2012-11-06 DE DE102012110604.5A patent/DE102012110604B4/de not_active Expired - Fee Related
- 2012-11-08 FR FR1260577A patent/FR2983344B1/fr active Active
- 2012-11-23 TW TW101143833A patent/TWI555110B/zh active
- 2012-11-23 KR KR1020120133579A patent/KR101991965B1/ko active Active
- 2012-11-23 CN CN201210483718.1A patent/CN103137526B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20130133188A1 (en) | 2013-05-30 |
| CN103137526B (zh) | 2017-12-19 |
| FR2983344B1 (fr) | 2019-01-25 |
| MY160071A (en) | 2017-02-15 |
| CH705802A1 (de) | 2013-05-31 |
| DE102012110604B4 (de) | 2024-05-23 |
| TW201330154A (zh) | 2013-07-16 |
| DE102012110604A1 (de) | 2013-05-29 |
| FR2983344A1 (fr) | 2013-05-31 |
| JP2013115428A (ja) | 2013-06-10 |
| CH705802B1 (de) | 2016-04-15 |
| US9603294B2 (en) | 2017-03-21 |
| KR101991965B1 (ko) | 2019-06-21 |
| JP6217958B2 (ja) | 2017-10-25 |
| KR20130058628A (ko) | 2013-06-04 |
| CN103137526A (zh) | 2013-06-05 |
| TWI555110B (zh) | 2016-10-21 |
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