SG130027A1 - Display panel inspection method and device, and display panel manufacturing method - Google Patents

Display panel inspection method and device, and display panel manufacturing method

Info

Publication number
SG130027A1
SG130027A1 SG200401527-7A SG2004015277A SG130027A1 SG 130027 A1 SG130027 A1 SG 130027A1 SG 2004015277 A SG2004015277 A SG 2004015277A SG 130027 A1 SG130027 A1 SG 130027A1
Authority
SG
Singapore
Prior art keywords
display panel
substrate
manufacturing
panel inspection
inspection method
Prior art date
Application number
SG200401527-7A
Other languages
English (en)
Inventor
Kuramata Osamu
Sasamoto Hiromichi
Sugihara Hiroki
Tsuda Keiji
Original Assignee
Toray Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries filed Critical Toray Industries
Publication of SG130027A1 publication Critical patent/SG130027A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/42—Measurement or testing during manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H01J11/34—Vessels, containers or parts thereof, e.g. substrates
    • H01J11/42—Fluorescent layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N2021/646—Detecting fluorescent inhomogeneities at a position, e.g. for detecting defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2217/00—Gas-filled discharge tubes
    • H01J2217/38—Cold-cathode tubes
    • H01J2217/49—Display panels, e.g. not making use of alternating current
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S345/00—Computer graphics processing and selective visual display systems
    • Y10S345/904—Display with fail/safe testing feature

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Plasma & Fusion (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
SG200401527-7A 2001-03-06 2002-02-28 Display panel inspection method and device, and display panel manufacturing method SG130027A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001061759 2001-03-06
JP2001061760 2001-03-06

Publications (1)

Publication Number Publication Date
SG130027A1 true SG130027A1 (en) 2007-03-20

Family

ID=26610688

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200401527-7A SG130027A1 (en) 2001-03-06 2002-02-28 Display panel inspection method and device, and display panel manufacturing method

Country Status (7)

Country Link
US (1) US7412088B2 (ja)
JP (1) JP4093059B2 (ja)
KR (1) KR100850490B1 (ja)
CN (1) CN1250953C (ja)
SG (1) SG130027A1 (ja)
TW (2) TW200506352A (ja)
WO (1) WO2002071023A1 (ja)

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KR100925275B1 (ko) * 2002-11-04 2009-11-05 엘지전자 주식회사 플라즈마 디스플레이 패널의 형광체 검사 장치 및 방법
JP4574280B2 (ja) * 2003-04-30 2010-11-04 日揮触媒化成株式会社 スリット板およびこれを備えた光学顕微鏡
FR2869441A1 (fr) * 2004-04-26 2005-10-28 Thomson Licensing Sa Procede de formation de charges electriques dans un panneau plasma
KR100715982B1 (ko) * 2005-07-13 2007-05-08 세메스 주식회사 기판 처리 장치
KR100740010B1 (ko) * 2005-11-18 2007-07-16 주식회사 파이컴 디스플레이 패널의 검사 시스템
JP5050398B2 (ja) * 2006-02-22 2012-10-17 パナソニック株式会社 ディスプレイパネルの検査方法および検査装置ならびに製造方法
JP2007279026A (ja) * 2006-04-03 2007-10-25 Samsung Electronics Co Ltd 基板検査装置とこれを用いた基板検査方法
US9389188B2 (en) 2010-12-22 2016-07-12 Koninklijke Philips N.V. Method and apparatus for testing optical films
TWI426227B (zh) 2010-12-30 2014-02-11 Ind Tech Res Inst 移動樣品之形貌的量測方法及其裝置
US20130171903A1 (en) 2012-01-03 2013-07-04 Andrew Zsinko Electroluminescent devices and their manufacture
US8976349B2 (en) * 2012-03-30 2015-03-10 Delta Electronics, Inc. Method of manufacturing particle-based image display
CN103245677A (zh) * 2013-05-02 2013-08-14 苏州欧菲光科技有限公司 感光光阻检验方法及装置
US9642212B1 (en) 2015-06-11 2017-05-02 Darkside Scientific, Llc Electroluminescent system and process
JP6555002B2 (ja) * 2015-08-19 2019-08-07 三星ダイヤモンド工業株式会社 スクライブラインの検査方法
JP6775332B2 (ja) * 2016-06-13 2020-10-28 協同油脂株式会社 検査装置および生産管理方法
CN106053476B (zh) * 2016-06-27 2019-06-28 昆山国显光电有限公司 可侦测基板完整性的卡匣结构和侦测基板完整性的方法
EP3491657A4 (en) 2016-07-28 2020-08-05 Darkside Scientific, LLC ELECTROLUMINESCENT SYSTEM AND ASSOCIATED PROCESS
CN106526910B (zh) * 2016-10-12 2019-08-16 昆山龙腾光电有限公司 画质检验装置和传送系统及显示器分级传送方法
CN110178014B (zh) * 2016-11-14 2023-05-02 美国西门子医学诊断股份有限公司 用于使用图案照明表征样本的方法和设备
DE102016223180A1 (de) * 2016-11-23 2018-05-24 Robert Bosch Gmbh Verfahren und System zum Detektieren eines sich innerhalb eines Parkplatzes befindenden erhabenen Objekts
DE102016223185A1 (de) * 2016-11-23 2018-05-24 Robert Bosch Gmbh Verfahren und System zum Detektieren eines sich innerhalb eines Parkplatzes befindenden erhabenen Objekts
DE102016223171A1 (de) * 2016-11-23 2018-05-24 Robert Bosch Gmbh Verfahren und System zum Detektieren eines sich innerhalb eines Parkplatzes befindenden erhabenen Objekts
WO2018176405A1 (zh) * 2017-03-31 2018-10-04 深圳市柔宇科技有限公司 一种显示屏的控制方法及装置
DE102017207069A1 (de) * 2017-04-27 2018-10-31 Robert Bosch Gmbh Prüfvorrichtung zur optischen Prüfung eines Objektes, Produktionsanlage mit der Prüfvorrichtung und Verfahren zur optischen Prüfung des Objektes mit der Prüfvorrichtung
JP2019152518A (ja) * 2018-03-02 2019-09-12 セイコーエプソン株式会社 検査装置、検査システム、及び検査方法
KR102069061B1 (ko) * 2018-03-07 2020-01-22 주식회사 트윔 플렉시블 oled 셀의 영상 획득 시스템
CN112098417B (zh) * 2020-09-07 2022-09-20 中国工程物理研究院激光聚变研究中心 环形抛光中沥青抛光盘表面钝化状态在线监测装置与方法
US12066763B2 (en) 2021-02-04 2024-08-20 Kla Corporation Sensitivity improvement of optical and SEM defection inspection
WO2022174931A1 (en) * 2021-02-22 2022-08-25 Applied Materials, Inc. Apparatus and method for inspecting a substrate in display manufacture and system for processing a substrate

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JPH11352013A (ja) * 1998-06-11 1999-12-24 Hitachi Ltd 蛍光体塗布むら検査方法
JP2000337998A (ja) * 1999-06-01 2000-12-08 Toray Ind Inc プラズマディスプレイパネルの検査装置および製造方法

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JPH1116498A (ja) * 1997-06-25 1999-01-22 Hitachi Ltd プラズマディスプレイパネル検査方法、並びにプラズマディスプレイパネル製造方法
JPH11352013A (ja) * 1998-06-11 1999-12-24 Hitachi Ltd 蛍光体塗布むら検査方法
JP2000337998A (ja) * 1999-06-01 2000-12-08 Toray Ind Inc プラズマディスプレイパネルの検査装置および製造方法

Also Published As

Publication number Publication date
KR100850490B1 (ko) 2008-08-05
TW200506352A (en) 2005-02-16
CN1457426A (zh) 2003-11-19
JPWO2002071023A1 (ja) 2004-07-02
WO2002071023A1 (fr) 2002-09-12
JP4093059B2 (ja) 2008-05-28
TWI235235B (en) 2005-07-01
US7412088B2 (en) 2008-08-12
CN1250953C (zh) 2006-04-12
KR20020094004A (ko) 2002-12-16
US20040135827A1 (en) 2004-07-15

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