SG11202000675TA - Epitaxially coated semiconductor wafer of monocrystalline silicon and method for the production thereof - Google Patents

Epitaxially coated semiconductor wafer of monocrystalline silicon and method for the production thereof

Info

Publication number
SG11202000675TA
SG11202000675TA SG11202000675TA SG11202000675TA SG11202000675TA SG 11202000675T A SG11202000675T A SG 11202000675TA SG 11202000675T A SG11202000675T A SG 11202000675TA SG 11202000675T A SG11202000675T A SG 11202000675TA SG 11202000675T A SG11202000675T A SG 11202000675TA
Authority
SG
Singapore
Prior art keywords
production
semiconductor wafer
monocrystalline silicon
coated semiconductor
epitaxially coated
Prior art date
Application number
SG11202000675TA
Other languages
English (en)
Inventor
Reinhard Schauer
Jörg Haberecht
Original Assignee
Siltronic Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siltronic Ag filed Critical Siltronic Ag
Publication of SG11202000675TA publication Critical patent/SG11202000675TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/08—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/16—Controlling or regulating
    • C30B25/165—Controlling or regulating the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C30B25/20—Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/68—Crystals with laminate structure, e.g. "superlattices"
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02634—Homoepitaxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14632—Wafer-level processed structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14687—Wafer level processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
SG11202000675TA 2017-07-26 2018-07-12 Epitaxially coated semiconductor wafer of monocrystalline silicon and method for the production thereof SG11202000675TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017212799.6A DE102017212799A1 (de) 2017-07-26 2017-07-26 Epitaktisch beschichtete Halbleiterscheibe aus einkristallinem Silizium und Verfahren zu deren Herstellung
PCT/EP2018/068888 WO2019020387A1 (de) 2017-07-26 2018-07-12 Epitaktisch beschichtete halbleiterscheibe aus einkristallinem silizium und verfahren zu deren herstellung

Publications (1)

Publication Number Publication Date
SG11202000675TA true SG11202000675TA (en) 2020-02-27

Family

ID=62916662

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202000675TA SG11202000675TA (en) 2017-07-26 2018-07-12 Epitaxially coated semiconductor wafer of monocrystalline silicon and method for the production thereof

Country Status (10)

Country Link
US (1) US11578424B2 (zh)
EP (1) EP3659173A1 (zh)
JP (1) JP7059351B2 (zh)
KR (1) KR102320760B1 (zh)
CN (1) CN110998787B (zh)
DE (1) DE102017212799A1 (zh)
IL (1) IL271984B2 (zh)
SG (1) SG11202000675TA (zh)
TW (1) TWI672402B (zh)
WO (1) WO2019020387A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019216267A1 (de) 2019-10-23 2021-04-29 Siltronic Ag Verfahren zur Herstellung von Halbleiterscheiben
EP3940124B1 (de) 2020-07-14 2024-01-03 Siltronic AG Kristallstück aus monokristallinem silizium
EP3957776A1 (de) * 2020-08-17 2022-02-23 Siltronic AG Verfahren zum abscheiden einer epitaktischen schicht auf einer substratscheibe
CN114093989B (zh) * 2021-09-30 2023-11-14 华灿光电（浙江）有限公司 深紫外发光二极管外延片及其制造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441212A (en) * 1987-08-07 1989-02-13 Nec Corp Semiconductor crystal growth method
JP2781616B2 (ja) 1989-09-29 1998-07-30 株式会社日立製作所 半導体ウエハの熱処理装置
US5227330A (en) * 1991-10-31 1993-07-13 International Business Machines Corporation Comprehensive process for low temperature SI epit axial growth
JP2822756B2 (ja) * 1992-03-10 1998-11-11 日本電気株式会社 気相成長装置およびその薄膜形成方法
JP2000091237A (ja) 1998-09-09 2000-03-31 Shin Etsu Handotai Co Ltd 半導体ウェーハの製造方法
JP2002064069A (ja) * 2000-08-17 2002-02-28 Tokyo Electron Ltd 熱処理装置
US6437290B1 (en) * 2000-08-17 2002-08-20 Tokyo Electron Limited Heat treatment apparatus having a thin light-transmitting window
DE10065895C1 (de) * 2000-11-17 2002-05-23 Infineon Technologies Ag Elektronisches Bauteil mit Abschirmung und Verfahren zu seiner Herstellung
US6879777B2 (en) * 2002-10-03 2005-04-12 Asm America, Inc. Localized heating of substrates using optics
JP5216183B2 (ja) * 2004-04-13 2013-06-19 日産自動車株式会社 半導体装置
US8501594B2 (en) * 2003-10-10 2013-08-06 Applied Materials, Inc. Methods for forming silicon germanium layers
DE102004054564B4 (de) * 2004-11-11 2008-11-27 Siltronic Ag Halbleitersubstrat und Verfahren zu dessen Herstellung
DE102006055038B4 (de) 2006-11-22 2012-12-27 Siltronic Ag Epitaxierte Halbleiterscheibe sowie Vorrichtung und Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe
US7820527B2 (en) * 2008-02-20 2010-10-26 Varian Semiconductor Equipment Associates, Inc. Cleave initiation using varying ion implant dose
DE102008023054B4 (de) 2008-05-09 2011-12-22 Siltronic Ag Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe
US8048807B2 (en) 2008-09-05 2011-11-01 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for thinning a substrate
JP5141541B2 (ja) * 2008-12-24 2013-02-13 株式会社Ｓｕｍｃｏ エピタキシャルウェーハの製造方法
DE102009010556B4 (de) 2009-02-25 2013-11-07 Siltronic Ag Verfahren zur Herstellung von epitaxierten Siliciumscheiben
JP5446760B2 (ja) 2009-11-16 2014-03-19 株式会社Ｓｕｍｃｏ エピタキシャル成長方法
KR20110087440A (ko) * 2010-01-26 2011-08-03 주식회사 엘지실트론 반도체 제조용 서셉터 및 이를 포함하는 반도체 제조 장치
DE102010026351B4 (de) 2010-07-07 2012-04-26 Siltronic Ag Verfahren und Vorrichtung zur Untersuchung einer Halbleiterscheibe
JP2012146697A (ja) * 2011-01-06 2012-08-02 Shin Etsu Handotai Co Ltd エピタキシャルウェーハの製造装置及び製造方法
JP5470414B2 (ja) 2012-03-09 2014-04-16 株式会社半導体エネルギー研究所 発光装置及び電子機器
CN104142259A (zh) * 2013-05-10 2014-11-12 河南协鑫光伏科技有限公司 一种太阳能单晶硅测试样片的制作方法

Also Published As

Publication number Publication date
TWI672402B (zh) 2019-09-21
DE102017212799A1 (de) 2019-01-31
EP3659173A1 (de) 2020-06-03
IL271984B2 (en) 2023-04-01
KR20200015763A (ko) 2020-02-12
IL271984B (en) 2022-12-01
JP2020529127A (ja) 2020-10-01
IL271984A (en) 2020-02-27
US11578424B2 (en) 2023-02-14
CN110998787B (zh) 2023-11-03
JP7059351B2 (ja) 2022-04-25
TW201910571A (zh) 2019-03-16
US20210087705A1 (en) 2021-03-25
CN110998787A (zh) 2020-04-10
KR102320760B1 (ko) 2021-11-01
WO2019020387A1 (de) 2019-01-31

Similar Documents

Publication Publication Date Title
SG11202108351YA (en) Preparation method and application of monocrystalline silicon wafer
EP3352200A4 (en) SiC EPITAXIAL WAFER, SiC EPITAXIAL WAFER PRODUCTION DEVICE, SiC EPITAXIAL WATER PRODUCTION METHOD, AND SEMICONDUCTOR DEVICE
IL271984A (en) Epitaxially coated monocrystalline silicon semiconductor wafer and method for its production
EP3330415A4 (en) PROCESS FOR PREPARING AN EPITACTIC SILICON CARBIDE CRYSTAL WAFERS
SG10201706480TA (en) METHOD OF PRODUCING SiC WAFER
GB2561426B (en) Process of forming epitaxial substrate and semiconductor optical device
EP3617351A4 (en) DEVICE AND METHOD FOR HORIZONTAL GROWTH OF SILICON SLICE
SG11201803021YA (en) Monocrystalline semiconductor wafer and method for producing a semiconductor wafer
SG11201909787SA (en) Method for polishing silicon wafer
SG10201905833RA (en) Semiconductor device and manufacturing method of the semiconductor device
SG11202111703YA (en) Methods of semiconductor device fabrication
EP3396030A4 (en) SEMICONDUCTOR SUBSTRATE AND EPITACTIC WAFER AND METHOD FOR THE PRODUCTION THEREOF
IL271789B (en) Semiconductor wafer made of single-crystal silicon and process for the production thereof
GB2589335B (en) Integrated III-V/silicon optoelectronic device and method of manufacture thereof
EP3260581A4 (en) Method for producing silicon carbide single crystal epitaxial wafer and silicon carbide single crystal epitaxial wafer
EP3266907A4 (en) Sic epitaxial wafer and method for manufacturing sic epitaxial wafer
EP3904825A4 (en) SEMICONDUCTOR WAFER EVALUATION METHOD AND SEMICONDUCTOR WAFER PRODUCTION METHOD
SG11201705935YA (en) Epitaxially coated semiconductor wafer, and method for producing an epitaxially coated semiconductor wafer
SG11202100905XA (en) Semiconductor package and method of forming the same
EP3811408A4 (en) SEMICONDUCTOR DEVICE AND METHOD FOR MAKING IT
EP3671816A4 (en) METHOD AND DEVICE FOR EVALUATING THE EDGE OF A SILICON SLICE, SILICON SLICE, AND ASSOCIATED SELECTION AND MANUFACTURING METHOD
SG10201503181VA (en) Semiconductor Wafer Composed Of Silicon And Method For Producing Same
PL3775328T3 (pl) Urządzenie do wytwarzania kryształów AIII-BV oraz płytki podłożowe z nich wykonane i wolne od naprężeń szczątkowych oraz dyslokacji
GB2589092B (en) III-V / Silicon optoelectronic device and method of manufacture thereof
EP3591102A4 (en) CONNECTING SEMI-CONDUCTOR AND METHOD FOR MANUFACTURING A SINGLE CRYSTAL OF A CONNECTING SEMICONDUCTOR