SG11201807251SA - Reflective mask blank, reflective mask and method of manufacturing semiconductor device - Google Patents
Reflective mask blank, reflective mask and method of manufacturing semiconductor deviceInfo
- Publication number
- SG11201807251SA SG11201807251SA SG11201807251SA SG11201807251SA SG11201807251SA SG 11201807251S A SG11201807251S A SG 11201807251SA SG 11201807251S A SG11201807251S A SG 11201807251SA SG 11201807251S A SG11201807251S A SG 11201807251SA SG 11201807251S A SG11201807251S A SG 11201807251SA
- Authority
- SG
- Singapore
- Prior art keywords
- reflective mask
- semiconductor device
- manufacturing semiconductor
- mask blank
- blank
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Drying Of Semiconductors (AREA)
- Plasma & Fusion (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016064269A JP6739960B2 (ja) | 2016-03-28 | 2016-03-28 | 反射型マスクブランク、反射型マスク及び半導体装置の製造方法 |
| PCT/JP2017/009721 WO2017169658A1 (ja) | 2016-03-28 | 2017-03-10 | 反射型マスクブランク、反射型マスク及び半導体装置の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201807251SA true SG11201807251SA (en) | 2018-09-27 |
Family
ID=59963180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201807251SA SG11201807251SA (en) | 2016-03-28 | 2017-03-10 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10871707B2 (ja) |
| JP (1) | JP6739960B2 (ja) |
| KR (2) | KR102479274B1 (ja) |
| SG (1) | SG11201807251SA (ja) |
| TW (2) | TWI775442B (ja) |
| WO (1) | WO2017169658A1 (ja) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI730139B (zh) | 2016-07-27 | 2021-06-11 | 美商應用材料股份有限公司 | 具多層吸收劑的極紫外遮罩坯料及製造方法 |
| US10468149B2 (en) * | 2017-02-03 | 2019-11-05 | Globalfoundries Inc. | Extreme ultraviolet mirrors and masks with improved reflectivity |
| KR20240025717A (ko) | 2017-03-03 | 2024-02-27 | 호야 가부시키가이샤 | 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법 |
| JP6861095B2 (ja) | 2017-03-03 | 2021-04-21 | Hoya株式会社 | 反射型マスクブランク、反射型マスク及び半導体装置の製造方法 |
| KR20210013008A (ko) | 2018-05-25 | 2021-02-03 | 호야 가부시키가이샤 | 반사형 마스크 블랭크, 반사형 마스크, 그리고 반사형 마스크 및 반도체 장치의 제조 방법 |
| KR102692564B1 (ko) * | 2018-09-21 | 2024-08-06 | 삼성전자주식회사 | 다층 박막 구조물 및 이를 이용한 위상 변환 소자 |
| TW202026770A (zh) | 2018-10-26 | 2020-07-16 | 美商應用材料股份有限公司 | 用於極紫外線掩模吸收劑的ta-cu合金材料 |
| TWI845579B (zh) | 2018-12-21 | 2024-06-21 | 美商應用材料股份有限公司 | 極紫外線遮罩吸收器及用於製造的方法 |
| JP7250511B2 (ja) | 2018-12-27 | 2023-04-03 | Hoya株式会社 | 反射型マスクブランク、反射型マスク、及び半導体装置の製造方法 |
| US11249390B2 (en) | 2019-01-31 | 2022-02-15 | Applied Materials, Inc. | Extreme ultraviolet mask absorber materials |
| TW202035792A (zh) | 2019-01-31 | 2020-10-01 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收體材料 |
| TWI828843B (zh) | 2019-01-31 | 2024-01-11 | 美商應用材料股份有限公司 | 極紫外線（ｅｕｖ）遮罩素材及其製造方法 |
| KR102214777B1 (ko) * | 2019-03-18 | 2021-02-10 | 한양대학교 산학협력단 | 극자외선 리소그래피용 마스크, 및 그 제조 방법 |
| TW202104667A (zh) | 2019-05-22 | 2021-02-01 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收材料 |
| TWI845677B (zh) | 2019-05-22 | 2024-06-21 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收材料 |
| TWI836073B (zh) | 2019-05-22 | 2024-03-21 | 美商應用材料股份有限公司 | 極紫外光遮罩坯體及其製造方法 |
| TW202104666A (zh) | 2019-05-22 | 2021-02-01 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收劑材料 |
| TWI836072B (zh) | 2019-05-22 | 2024-03-21 | 美商應用材料股份有限公司 | 具有嵌入吸收層之極紫外光遮罩 |
| US11385536B2 (en) | 2019-08-08 | 2022-07-12 | Applied Materials, Inc. | EUV mask blanks and methods of manufacture |
| JP6929340B2 (ja) * | 2019-11-21 | 2021-09-01 | Hoya株式会社 | 反射型マスクブランクおよび反射型マスク、並びに半導体装置の製造方法 |
| JPWO2021132111A1 (ja) * | 2019-12-27 | 2021-07-01 | ||
| US11630385B2 (en) | 2020-01-24 | 2023-04-18 | Applied Materials, Inc. | Extreme ultraviolet mask absorber materials |
| TWI817073B (zh) | 2020-01-27 | 2023-10-01 | 美商應用材料股份有限公司 | 極紫外光遮罩坯體硬遮罩材料 |
| TW202131087A (zh) | 2020-01-27 | 2021-08-16 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收劑材料 |
| TW202129401A (zh) | 2020-01-27 | 2021-08-01 | 美商應用材料股份有限公司 | 極紫外線遮罩坯體硬遮罩材料 |
| TW202141165A (zh) | 2020-03-27 | 2021-11-01 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收材料 |
| TWI836207B (zh) | 2020-04-17 | 2024-03-21 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收材料 |
| US11300871B2 (en) | 2020-04-29 | 2022-04-12 | Applied Materials, Inc. | Extreme ultraviolet mask absorber materials |
| KR20210155863A (ko) | 2020-06-16 | 2021-12-24 | 삼성전자주식회사 | 극자외선 리소그래피용 위상 반전 마스크 및 이를 이용한 반도체 소자의 제조 방법 |
| TW202202641A (zh) | 2020-07-13 | 2022-01-16 | 美商應用材料股份有限公司 | 極紫外線遮罩吸收劑材料 |
| US11609490B2 (en) | 2020-10-06 | 2023-03-21 | Applied Materials, Inc. | Extreme ultraviolet mask absorber materials |
| US11513437B2 (en) | 2021-01-11 | 2022-11-29 | Applied Materials, Inc. | Extreme ultraviolet mask absorber materials |
| US11940725B2 (en) | 2021-01-27 | 2024-03-26 | S&S Tech Co., Ltd. | Phase shift blankmask and photomask for EUV lithography |
| US11592738B2 (en) | 2021-01-28 | 2023-02-28 | Applied Materials, Inc. | Extreme ultraviolet mask absorber materials |
| JP2022137972A (ja) * | 2021-03-09 | 2022-09-22 | 株式会社トッパンフォトマスク | 位相シフトマスクブランク、位相シフトマスク、位相シフトマスクの製造方法及び位相シフトマスクの修正方法 |
| KR20220168108A (ko) * | 2021-06-15 | 2022-12-22 | 에스케이하이닉스 주식회사 | 극자외선 리소그래피용 위상 시프트 마스크 및 제조 방법 |
| US12066755B2 (en) | 2021-08-27 | 2024-08-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pellicle for an EUV lithography mask and a method of manufacturing thereof |
| JPWO2023190696A1 (ja) * | 2022-03-29 | 2023-10-05 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5233321B1 (ja) | 1971-07-10 | 1977-08-27 | ||
| JP2004207593A (ja) | 2002-12-26 | 2004-07-22 | Toppan Printing Co Ltd | 極限紫外線露光用マスク及びブランク並びにパターン転写方法 |
| JP2006228766A (ja) | 2005-02-15 | 2006-08-31 | Toppan Printing Co Ltd | 極端紫外線露光用マスク、マスクブランク、及び露光方法 |
| JP5294227B2 (ja) | 2006-09-15 | 2013-09-18 | Ｈｏｙａ株式会社 | マスクブランク及び転写マスクの製造方法 |
| JP5476679B2 (ja) * | 2007-09-26 | 2014-04-23 | 凸版印刷株式会社 | ハーフトーン型ｅｕｖマスク及びハーフトーン型ｅｕｖマスクの製造方法 |
| JP5233321B2 (ja) | 2008-02-27 | 2013-07-10 | 凸版印刷株式会社 | 極端紫外線露光用マスクブランク、極端紫外線露光用マスク、極端紫外線露光用マスクの製造方法及び極端紫外線露光用マスクを用いたパターン転写方法 |
| JP5282507B2 (ja) * | 2008-09-25 | 2013-09-04 | 凸版印刷株式会社 | ハーフトーン型ｅｕｖマスク、ハーフトーン型ｅｕｖマスクの製造方法、ハーフトーン型ｅｕｖマスクブランク及びパターン転写方法 |
| JP2010109336A (ja) | 2008-10-04 | 2010-05-13 | Hoya Corp | 反射型マスクの製造方法 |
| JP5372455B2 (ja) * | 2008-10-04 | 2013-12-18 | Ｈｏｙａ株式会社 | 反射型マスクブランク及び反射型マスク、並びにこれらの製造方法 |
| WO2010061725A1 (ja) * | 2008-11-27 | 2010-06-03 | Hoya株式会社 | 多層反射膜付基板及び反射型マスクブランク並びに反射型マスクの製造方法 |
| WO2013146488A1 (ja) | 2012-03-28 | 2013-10-03 | Hoya株式会社 | 多層反射膜付き基板の製造方法、反射型マスクブランクの製造方法、及び反射型マスクの製造方法 |
| JP6184026B2 (ja) * | 2012-07-31 | 2017-08-23 | Hoya株式会社 | 反射型マスクブランク及びその製造方法、反射型マスクの製造方法、並びに半導体装置の製造方法 |
| SG10201605473TA (en) * | 2012-12-28 | 2016-09-29 | Hoya Corp | Substrate for mask blank, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing for substrate for mask blank, method of manufacturing for substrate with multilayer reflective film, and method of manufacturing semiconductor device |
| KR101875790B1 (ko) | 2013-09-18 | 2018-07-06 | 호야 가부시키가이샤 | 반사형 마스크 블랭크 및 그 제조방법, 반사형 마스크 그리고 반도체 장치의 제조방법 |
| JP6301127B2 (ja) * | 2013-12-25 | 2018-03-28 | Hoya株式会社 | 反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法 |
-
2016
- 2016-03-28 JP JP2016064269A patent/JP6739960B2/ja active Active
-
2017
- 2017-03-10 US US16/084,698 patent/US10871707B2/en active Active
- 2017-03-10 WO PCT/JP2017/009721 patent/WO2017169658A1/ja active Application Filing
- 2017-03-10 KR KR1020227001343A patent/KR102479274B1/ko active IP Right Grant
- 2017-03-10 KR KR1020187030286A patent/KR102352732B1/ko active IP Right Grant
- 2017-03-10 SG SG11201807251SA patent/SG11201807251SA/en unknown
- 2017-03-24 TW TW110118052A patent/TWI775442B/zh active
- 2017-03-24 TW TW106109866A patent/TWI730071B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180129838A (ko) | 2018-12-05 |
| KR102479274B1 (ko) | 2022-12-20 |
| TWI775442B (zh) | 2022-08-21 |
| TW201800831A (zh) | 2018-01-01 |
| JP2017181571A (ja) | 2017-10-05 |
| KR20220012412A (ko) | 2022-02-03 |
| WO2017169658A1 (ja) | 2017-10-05 |
| US10871707B2 (en) | 2020-12-22 |
| TWI730071B (zh) | 2021-06-11 |
| JP6739960B2 (ja) | 2020-08-12 |
| TW202134776A (zh) | 2021-09-16 |
| US20190079383A1 (en) | 2019-03-14 |
| KR102352732B1 (ko) | 2022-01-19 |
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