SG11201706945XA - Vacuum valve - Google Patents

Vacuum valve

Info

Publication number
SG11201706945XA
SG11201706945XA SG11201706945XA SG11201706945XA SG11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA
Authority
SG
Singapore
Prior art keywords
vacuum valve
vacuum
valve
Prior art date
Application number
SG11201706945XA
Other languages
English (en)
Inventor
Florian Ehrne
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of SG11201706945XA publication Critical patent/SG11201706945XA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
SG11201706945XA 2015-03-09 2016-02-19 Vacuum valve SG11201706945XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT1252015 2015-03-09
PCT/EP2016/053526 WO2016142150A1 (de) 2015-03-09 2016-02-19 Vakuumventil

Publications (1)

Publication Number Publication Date
SG11201706945XA true SG11201706945XA (en) 2017-09-28

Family

ID=55398308

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201706945XA SG11201706945XA (en) 2015-03-09 2016-02-19 Vacuum valve

Country Status (8)

Country Link
US (1) US10302225B2 (zh)
JP (1) JP6677738B2 (zh)
KR (1) KR102504619B1 (zh)
CN (1) CN107407443B (zh)
MY (1) MY189235A (zh)
SG (1) SG11201706945XA (zh)
TW (1) TWI679365B (zh)
WO (1) WO2016142150A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI705212B (zh) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 用於對壁中開口進行真空密封的密封裝置
TWI740981B (zh) 2016-08-22 2021-10-01 瑞士商Ｖａｔ控股股份有限公司 真空閥
CN112119247B (zh) * 2019-05-07 2021-04-30 入江工研株式会社 闸阀
DE102019129344A1 (de) * 2019-10-30 2021-05-06 Vat Holding Ag Vakuumventil
DE102021114422A1 (de) 2021-06-04 2022-12-08 Vat Holding Ag Vakuumventil
KR102574233B1 (ko) * 2023-03-14 2023-09-04 주식회사 에스알티 U motion 게이트밸브

Family Cites Families (46)

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JPH074966U (ja) * 1993-06-28 1995-01-24 株式会社大阪真空機器製作所 ゲートバルブ装置
JP2613171B2 (ja) 1993-07-22 1997-05-21 株式会社岸川特殊バルブ ゲートバルブ
JP2958267B2 (ja) 1996-05-07 1999-10-06 入江工研株式会社 無摺動真空ゲートバルブ
US5934646A (en) 1997-04-04 1999-08-10 Nok Corporation Gate valve and cylinder apparatus
JP3033529B2 (ja) 1997-06-13 2000-04-17 日本電気株式会社 真空用ゲートバルブ
DE19746241C2 (de) 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
JP4092038B2 (ja) * 1999-03-10 2008-05-28 新明和工業株式会社 真空ゲート弁
US6095741A (en) 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
EP1061301B1 (en) 1999-06-14 2004-07-28 SMC Kabushiki Kaisha Gate valve
US6237892B1 (en) 2000-02-18 2001-05-29 V Tex Corporation Gate valve
US6390448B1 (en) 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
US6913243B1 (en) 2000-03-30 2005-07-05 Lam Research Corporation Unitary slot valve actuator with dual valves
JP3674768B2 (ja) 2000-09-07 2005-07-20 Ｓｍｃ株式会社 ゲートバルブ
JP4304365B2 (ja) 2002-12-16 2009-07-29 Ｓｍｃ株式会社 ゲートバルブ
US6899316B2 (en) 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
EP1623149A1 (en) 2003-05-02 2006-02-08 Varian, Inc. Gate valve
JP3912604B2 (ja) * 2003-11-04 2007-05-09 入江工研株式会社 ゲート弁
US7500649B2 (en) 2006-05-05 2009-03-10 Vat Holding Ag Vacuum valve drive
KR20070113122A (ko) 2006-05-24 2007-11-28 배트 홀딩 아게 벽 내의 개구부의 진공 밀봉 폐쇄를 위한 폐쇄장치
JP2008025835A (ja) 2006-07-18 2008-02-07 Vat Holding Ag 真空弁、及び連結棒に取り付け可能な閉鎖ディスク
DE102007030006B4 (de) 2006-07-19 2009-12-17 Vat Holding Ag Vakuumventil
JP5324827B2 (ja) 2007-06-08 2013-10-23 ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト 脚部要素を有する真空ゲートバルブ
DE102007059039A1 (de) 2007-12-06 2009-06-18 Vat Holding Ag Vakuumventil
JP2009191924A (ja) 2008-02-13 2009-08-27 Tadamoto Tamai ゲートバルブ
KR101017603B1 (ko) 2008-04-23 2011-02-28 프리시스 주식회사 양방향 게이트 밸브
US8377213B2 (en) 2008-05-05 2013-02-19 Applied Materials, Inc. Slit valve having increased flow uniformity
KR101761245B1 (ko) 2008-09-05 2017-08-04 배트 홀딩 아게 기밀 샤프트 이동관통부를 구비하는 진공밸브
DE102008049353A1 (de) 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil
DE102008051349B3 (de) * 2008-10-15 2009-11-12 Vat Holding Ag Vakuumventil
TWI541465B (zh) 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 用於真空閥之封閉單元
DE102010053411B4 (de) 2009-12-15 2023-07-06 Vat Holding Ag Vakuumventil
JP2011127190A (ja) 2009-12-18 2011-06-30 Showa Denko Kk インライン式成膜装置、磁気記録媒体の製造方法、及びゲートバルブ
US8827241B2 (en) 2010-01-29 2014-09-09 Vat Holding Ag Door for sealing an opening
KR101085241B1 (ko) 2010-04-23 2011-11-21 주식회사 뉴파워 프라즈마 게이트밸브어셈블리와 이를 포함하는 기판처리시스템
JP5712104B2 (ja) * 2011-10-14 2015-05-07 株式会社キッツエスシーティー 真空用ゲートバルブ
JP5533839B2 (ja) 2011-11-04 2014-06-25 Ｓｍｃ株式会社 無摺動型ゲートバルブ
KR101293590B1 (ko) 2011-12-16 2013-08-13 주식회사 뉴파워 프라즈마 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템
KR101376045B1 (ko) 2012-04-06 2014-03-18 프리시스 주식회사 게이트 밸브
US8960641B2 (en) * 2012-11-14 2015-02-24 Vat Holding Ag Vacuum valve
EP2749798B1 (de) 2012-12-27 2016-03-02 VAT Holding AG Vakuumschieberventil
JP5963091B2 (ja) 2013-07-10 2016-08-03 Smc株式会社 無摺動型ゲートバルブ
US9587749B2 (en) * 2013-08-12 2017-03-07 Applied Materials Israel, Ltd. Slit valve with a pressurized gas bearing
KR101738598B1 (ko) 2015-07-31 2017-05-22 프리시스 주식회사 양방향 게이트밸브
TWI705212B (zh) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 用於對壁中開口進行真空密封的密封裝置
TWI740981B (zh) 2016-08-22 2021-10-01 瑞士商Ｖａｔ控股股份有限公司 真空閥

Also Published As

Publication number Publication date
KR102504619B1 (ko) 2023-02-27
US20180274695A1 (en) 2018-09-27
CN107407443B (zh) 2019-05-10
US10302225B2 (en) 2019-05-28
TWI679365B (zh) 2019-12-11
CN107407443A (zh) 2017-11-28
JP2018507992A (ja) 2018-03-22
MY189235A (en) 2022-01-31
KR20170120122A (ko) 2017-10-30
TW201641856A (zh) 2016-12-01
JP6677738B2 (ja) 2020-04-08
WO2016142150A1 (de) 2016-09-15

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