SG11201706945XA - Vacuum valve - Google Patents

Vacuum valve

Info

Publication number
SG11201706945XA
SG11201706945XA SG11201706945XA SG11201706945XA SG11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA SG 11201706945X A SG11201706945X A SG 11201706945XA
Authority
SG
Singapore
Prior art keywords
vacuum valve
vacuum
valve
Prior art date
Application number
SG11201706945XA
Inventor
Florian Ehrne
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of SG11201706945XA publication Critical patent/SG11201706945XA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
SG11201706945XA 2015-03-09 2016-02-19 Vacuum valve SG11201706945XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT1252015 2015-03-09
PCT/EP2016/053526 WO2016142150A1 (en) 2015-03-09 2016-02-19 Vacuum valve

Publications (1)

Publication Number Publication Date
SG11201706945XA true SG11201706945XA (en) 2017-09-28

Family

ID=55398308

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201706945XA SG11201706945XA (en) 2015-03-09 2016-02-19 Vacuum valve

Country Status (8)

Country Link
US (1) US10302225B2 (en)
JP (1) JP6677738B2 (en)
KR (1) KR102504619B1 (en)
CN (1) CN107407443B (en)
MY (1) MY189235A (en)
SG (1) SG11201706945XA (en)
TW (1) TWI679365B (en)
WO (1) WO2016142150A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI705212B (en) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 Closure device for the vacuum-tight closure of an opening in a wall
TWI740981B (en) 2016-08-22 2021-10-01 瑞士商Ｖａｔ控股股份有限公司 Vacuum valve
JP6607428B1 (en) * 2019-05-07 2019-11-20 入江工研株式会社 Gate valve
DE102019129344A1 (en) * 2019-10-30 2021-05-06 Vat Holding Ag Vacuum valve
DE102019133555A1 (en) * 2019-12-09 2021-06-10 Vat Holding Ag Vacuum valve or vacuum door
DE102021114422A1 (en) 2021-06-04 2022-12-08 Vat Holding Ag vacuum valve
KR102574233B1 (en) * 2023-03-14 2023-09-04 주식회사 에스알티 U Motion gate valve

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JPH074966U (en) * 1993-06-28 1995-01-24 株式会社大阪真空機器製作所 Gate valve device
JP2613171B2 (en) 1993-07-22 1997-05-21 株式会社岸川特殊バルブ Gate valve
JP2958267B2 (en) 1996-05-07 1999-10-06 入江工研株式会社 Non-sliding vacuum gate valve
US5934646A (en) 1997-04-04 1999-08-10 Nok Corporation Gate valve and cylinder apparatus
JP3033529B2 (en) 1997-06-13 2000-04-17 日本電気株式会社 Gate valve for vacuum
DE19746241C2 (en) 1997-10-20 2000-05-31 Vat Holding Ag Haag Device for closing an opening
JPH11351419A (en) 1998-06-08 1999-12-24 Irie Koken Kk Non-slide gate valve
JP4092038B2 (en) * 1999-03-10 2008-05-28 新明和工業株式会社 Vacuum gate valve
US6095741A (en) 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
EP1061301B1 (en) 1999-06-14 2004-07-28 SMC Kabushiki Kaisha Gate valve
US6237892B1 (en) 2000-02-18 2001-05-29 V Tex Corporation Gate valve
US6390448B1 (en) 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
US6913243B1 (en) 2000-03-30 2005-07-05 Lam Research Corporation Unitary slot valve actuator with dual valves
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JP4304365B2 (en) 2002-12-16 2009-07-29 Ｓｍｃ株式会社 Gate valve
US6899316B2 (en) 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
EP1623149A1 (en) 2003-05-02 2006-02-08 Varian, Inc. Gate valve
JP3912604B2 (en) 2003-11-04 2007-05-09 入江工研株式会社 Gate valve
US7500649B2 (en) 2006-05-05 2009-03-10 Vat Holding Ag Vacuum valve drive
KR20070113122A (en) 2006-05-24 2007-11-28 배트 홀딩 아게 Closure device for vacuum-tight closure of an opening in a wall
JP2008025835A (en) 2006-07-18 2008-02-07 Vat Holding Ag Vacuum valve and closing disk fitted to connecting rod
DE102007030006B4 (en) 2006-07-19 2009-12-17 Vat Holding Ag vacuum valve
JP5324827B2 (en) 2007-06-08 2013-10-23 ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト Vacuum gate valve with leg elements
DE102007059039A1 (en) 2007-12-06 2009-06-18 Vat Holding Ag vacuum valve
JP2009191924A (en) 2008-02-13 2009-08-27 Tadamoto Tamai Gate valve
KR101017603B1 (en) 2008-04-23 2011-02-28 프리시스 주식회사 Bidirectional drive gate valve
US8377213B2 (en) 2008-05-05 2013-02-19 Applied Materials, Inc. Slit valve having increased flow uniformity
CN102171499B (en) * 2008-09-05 2013-03-20 Vat控股公司 Vacuum valve with gas-tight shaft penetration
DE102008049353A1 (en) * 2008-09-29 2010-04-08 Vat Holding Ag vacuum valve
DE102008051349B3 (en) * 2008-10-15 2009-11-12 Vat Holding Ag Vacuum valve e.g. pendulum valve, has pressure medium line blocked for pressurization of closing-cylinder chamber when closing valve by section of closing process and unblocked at end of section of closing process by control element
TWI541465B (en) 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 Closing unit for a vacuum valve
DE102010053411B4 (en) 2009-12-15 2023-07-06 Vat Holding Ag vacuum valve
JP2011127190A (en) 2009-12-18 2011-06-30 Showa Denko Kk In-line film forming apparatus, method for producing magnetic recording medium, and gate valve
SG182472A1 (en) * 2010-01-29 2012-08-30 Vat Holding Ag Door for sealing an opening
KR101085241B1 (en) 2010-04-23 2011-11-21 주식회사 뉴파워 프라즈마 Gate valve assembly and water processing system having the same
JP5712104B2 (en) * 2011-10-14 2015-05-07 株式会社キッツエスシーティー Vacuum gate valve
JP5533839B2 (en) * 2011-11-04 2014-06-25 Ｓｍｃ株式会社 Non-sliding gate valve
KR101293590B1 (en) 2011-12-16 2013-08-13 주식회사 뉴파워 프라즈마 Two way gate valve and substrate processing system having the same
KR101376045B1 (en) 2012-04-06 2014-03-18 프리시스 주식회사 Gate-Valve
US8960641B2 (en) 2012-11-14 2015-02-24 Vat Holding Ag Vacuum valve
EP2749798B1 (en) 2012-12-27 2016-03-02 VAT Holding AG Vacuum slide valve
JP5963091B2 (en) 2013-07-10 2016-08-03 Smc株式会社 Non-sliding gate valve
US9587749B2 (en) * 2013-08-12 2017-03-07 Applied Materials Israel, Ltd. Slit valve with a pressurized gas bearing
KR101738598B1 (en) 2015-07-31 2017-05-22 프리시스 주식회사 Bidirectional drive gate valve
TWI705212B (en) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 Closure device for the vacuum-tight closure of an opening in a wall
TWI740981B (en) 2016-08-22 2021-10-01 瑞士商Ｖａｔ控股股份有限公司 Vacuum valve

Also Published As

Publication number Publication date
US20180274695A1 (en) 2018-09-27
CN107407443B (en) 2019-05-10
JP6677738B2 (en) 2020-04-08
WO2016142150A1 (en) 2016-09-15
TW201641856A (en) 2016-12-01
JP2018507992A (en) 2018-03-22
KR20170120122A (en) 2017-10-30
TWI679365B (en) 2019-12-11
MY189235A (en) 2022-01-31
CN107407443A (en) 2017-11-28
KR102504619B1 (en) 2023-02-27
US10302225B2 (en) 2019-05-28

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