SG10201706373TA - Vacuum valve - Google Patents

Vacuum valve

Info

Publication number
SG10201706373TA
SG10201706373TA SG10201706373TA SG10201706373TA SG10201706373TA SG 10201706373T A SG10201706373T A SG 10201706373TA SG 10201706373T A SG10201706373T A SG 10201706373TA SG 10201706373T A SG10201706373T A SG 10201706373TA SG 10201706373T A SG10201706373T A SG 10201706373TA
Authority
SG
Singapore
Prior art keywords
vacuum valve
vacuum
valve
Prior art date
Application number
SG10201706373TA
Inventor
Florian Ehrne
Daniel Seitz
Andreas Hofer
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of SG10201706373TA publication Critical patent/SG10201706373TA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/316—Guiding of the slide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
SG10201706373TA 2016-08-22 2017-08-04 Vacuum valve SG10201706373TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT3842016 2016-08-22

Publications (1)

Publication Number Publication Date
SG10201706373TA true SG10201706373TA (en) 2018-03-28

Family

ID=61191463

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201706373TA SG10201706373TA (en) 2016-08-22 2017-08-04 Vacuum valve

Country Status (6)

Country Link
US (1) US10234059B2 (en)
KR (1) KR102274973B1 (en)
CN (1) CN107763236B (en)
MY (1) MY188531A (en)
SG (1) SG10201706373TA (en)
TW (1) TWI740981B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201706945XA (en) 2015-03-09 2017-09-28 Vat Holding Ag Vacuum valve
CN110410565A (en) * 2018-04-28 2019-11-05 佛山市顺德区美的饮水机制造有限公司 Soft water valve and water softening device
KR20200130075A (en) * 2019-05-07 2020-11-18 이리에 고켕 가부시키가이샤 Gate valve
DE102019007194A1 (en) * 2019-10-16 2021-04-22 Vat Holding Ag Adjustment device for the vacuum range with pressure measurement functionality
DE102019129344A1 (en) * 2019-10-30 2021-05-06 Vat Holding Ag Vacuum valve
DE102021114422A1 (en) * 2021-06-04 2022-12-08 Vat Holding Ag vacuum valve

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JP2958267B2 (en) 1996-05-07 1999-10-06 入江工研株式会社 Non-sliding vacuum gate valve
US5934646A (en) 1997-04-04 1999-08-10 Nok Corporation Gate valve and cylinder apparatus
JP3033529B2 (en) 1997-06-13 2000-04-17 日本電気株式会社 Gate valve for vacuum
DE19746241C2 (en) 1997-10-20 2000-05-31 Vat Holding Ag Haag Device for closing an opening
JPH11351419A (en) 1998-06-08 1999-12-24 Irie Koken Kk Non-slide gate valve
JP4092038B2 (en) 1999-03-10 2008-05-28 新明和工業株式会社 Vacuum gate valve
US6095741A (en) 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
DE60012428T2 (en) 1999-06-14 2005-07-28 Smc K.K. pusher
US6237892B1 (en) 2000-02-18 2001-05-29 V Tex Corporation Gate valve
US6390448B1 (en) 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
US6913243B1 (en) 2000-03-30 2005-07-05 Lam Research Corporation Unitary slot valve actuator with dual valves
JP3674768B2 (en) 2000-09-07 2005-07-20 Ｓｍｃ株式会社 Gate valve
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US6899316B2 (en) 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
JP3912604B2 (en) * 2003-11-04 2007-05-09 入江工研株式会社 Gate valve
US7441747B2 (en) * 2005-07-18 2008-10-28 G-Light Display Corp. Vacuum gate
KR101474786B1 (en) 2006-05-05 2014-12-22 배트 홀딩 아게 Vacuum valve drive
KR20070113122A (en) 2006-05-24 2007-11-28 배트 홀딩 아게 Closure device for vacuum-tight closure of an opening in a wall
JP2008025835A (en) 2006-07-18 2008-02-07 Vat Holding Ag Vacuum valve and closing disk fitted to connecting rod
DE102007030006B4 (en) 2006-07-19 2009-12-17 Vat Holding Ag vacuum valve
JP5324827B2 (en) 2007-06-08 2013-10-23 ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト Vacuum gate valve with leg elements
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JP2009191924A (en) 2008-02-13 2009-08-27 Tadamoto Tamai Gate valve
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US8377213B2 (en) * 2008-05-05 2013-02-19 Applied Materials, Inc. Slit valve having increased flow uniformity
DE102008049353A1 (en) 2008-09-29 2010-04-08 Vat Holding Ag vacuum valve
DE102008051349B3 (en) 2008-10-15 2009-11-12 Vat Holding Ag Vacuum valve e.g. pendulum valve, has pressure medium line blocked for pressurization of closing-cylinder chamber when closing valve by section of closing process and unblocked at end of section of closing process by control element
TWI541465B (en) 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 Closing unit for a vacuum valve
DE102010053411B4 (en) 2009-12-15 2023-07-06 Vat Holding Ag vacuum valve
JP2011127190A (en) 2009-12-18 2011-06-30 Showa Denko Kk In-line film forming apparatus, method for producing magnetic recording medium, and gate valve
KR101762984B1 (en) 2010-01-29 2017-07-28 배트 홀딩 아게 Door for sealing an opening
KR20110118342A (en) 2010-04-23 2011-10-31 (주)엘지하우시스 Ventilation equipment for window
JP5712104B2 (en) 2011-10-14 2015-05-07 株式会社キッツエスシーティー Vacuum gate valve
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US8960641B2 (en) * 2012-11-14 2015-02-24 Vat Holding Ag Vacuum valve
EP2749798B1 (en) * 2012-12-27 2016-03-02 VAT Holding AG Vacuum slide valve
JP5963091B2 (en) 2013-07-10 2016-08-03 Smc株式会社 Non-sliding gate valve
SG11201706945XA (en) 2015-03-09 2017-09-28 Vat Holding Ag Vacuum valve
KR101738598B1 (en) 2015-07-31 2017-05-22 프리시스 주식회사 Bidirectional drive gate valve
TWI705212B (en) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 Closure device for the vacuum-tight closure of an opening in a wall

Also Published As

Publication number Publication date
TWI740981B (en) 2021-10-01
US10234059B2 (en) 2019-03-19
TW201809517A (en) 2018-03-16
KR102274973B1 (en) 2021-07-08
MY188531A (en) 2021-12-20
KR20180021645A (en) 2018-03-05
CN107763236A (en) 2018-03-06
US20180051825A1 (en) 2018-02-22
CN107763236B (en) 2020-06-26

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