SG11201607222RA - High-planarity probe card for a testing apparatus for electronic devices - Google Patents

High-planarity probe card for a testing apparatus for electronic devices

Info

Publication number
SG11201607222RA
SG11201607222RA SG11201607222RA SG11201607222RA SG11201607222RA SG 11201607222R A SG11201607222R A SG 11201607222RA SG 11201607222R A SG11201607222R A SG 11201607222RA SG 11201607222R A SG11201607222R A SG 11201607222RA SG 11201607222R A SG11201607222R A SG 11201607222RA
Authority
SG
Singapore
Prior art keywords
planarity
electronic devices
probe card
testing apparatus
testing
Prior art date
Application number
SG11201607222RA
Other languages
English (en)
Inventor
Riccardo Liberini
Orto Filippo Dell
Roberto Crippa
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Publication of SG11201607222RA publication Critical patent/SG11201607222RA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
SG11201607222RA 2014-03-06 2015-03-05 High-planarity probe card for a testing apparatus for electronic devices SG11201607222RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITMI20140349 2014-03-06
PCT/IB2015/051605 WO2015132747A1 (fr) 2014-03-06 2015-03-05 Carte sonde à haute planéité pour appareil de test pour dispositifs électroniques

Publications (1)

Publication Number Publication Date
SG11201607222RA true SG11201607222RA (en) 2016-09-29

Family

ID=50733155

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201607222RA SG11201607222RA (en) 2014-03-06 2015-03-05 High-planarity probe card for a testing apparatus for electronic devices

Country Status (10)

Country Link
US (1) US10151775B2 (fr)
EP (1) EP3114488B1 (fr)
JP (1) JP6590840B2 (fr)
KR (1) KR102205429B1 (fr)
CN (1) CN106104280B (fr)
MY (1) MY179750A (fr)
PH (1) PH12016501754B1 (fr)
SG (1) SG11201607222RA (fr)
TW (1) TWI655437B (fr)
WO (1) WO2015132747A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI610080B (zh) * 2016-05-12 2018-01-01 中華精測科技股份有限公司 探針卡總成
JP6855185B2 (ja) * 2016-07-27 2021-04-07 株式会社日本マイクロニクス 電気的接続装置
IT201700046645A1 (it) * 2017-04-28 2018-10-28 Technoprobe Spa Scheda di misura per un’apparecchiatura di test di dispositivi elettronici
TWI639834B (zh) * 2017-07-14 2018-11-01 中華精測科技股份有限公司 探針卡支撐裝置及探針卡總成
US10345136B2 (en) 2017-07-14 2019-07-09 International Business Machines Corporation Adjustable load transmitter
US10527649B2 (en) 2017-07-14 2020-01-07 International Business Machines Corporation Probe card alignment
IT201700100522A1 (it) * 2017-09-07 2019-03-07 Technoprobe Spa Elemento di interfaccia per un’apparecchiatura di test di dispositivi elettronici e relativo metodo di fabbricazione
TWI632373B (zh) * 2017-10-27 2018-08-11 和碩聯合科技股份有限公司 治具平台
KR102163321B1 (ko) * 2019-02-08 2020-10-21 화인인스트루먼트 (주) 프로브 카드 및 그 제조 방법
JP7198127B2 (ja) * 2019-03-20 2022-12-28 株式会社アドバンテスト インタポーザ、ソケット、ソケット組立体、及び、配線板組立体
KR102484329B1 (ko) * 2022-08-12 2023-01-03 주식회사 비이링크 인터포저

Family Cites Families (25)

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JPH07135240A (ja) * 1993-11-10 1995-05-23 Tokyo Electron Ltd プローブ装置
US6441629B1 (en) * 2000-05-31 2002-08-27 Advantest Corp Probe contact system having planarity adjustment mechanism
JP4504541B2 (ja) * 2000-09-08 2010-07-14 株式会社ヨコオ プローブ装置
US6756797B2 (en) 2001-01-31 2004-06-29 Wentworth Laboratories Inc. Planarizing interposer for thermal compensation of a probe card
US6677771B2 (en) * 2001-06-20 2004-01-13 Advantest Corp. Probe contact system having planarity adjustment mechanism
JP3621938B2 (ja) * 2002-08-09 2005-02-23 日本電子材料株式会社 プローブカード
US20120212248A9 (en) * 2004-06-16 2012-08-23 Fu Chiung Chong Construction Structures and Manufacturing Processes for Integrated Circuit Wafer Probe Card Assemblies
US7285968B2 (en) 2005-04-19 2007-10-23 Formfactor, Inc. Apparatus and method for managing thermally induced motion of a probe card assembly
US7365553B2 (en) 2005-12-22 2008-04-29 Touchdown Technologies, Inc. Probe card assembly
US7898272B2 (en) 2006-06-08 2011-03-01 Nhk Spring Co., Ltd. Probe card
US7746089B2 (en) * 2006-09-29 2010-06-29 Formfactor, Inc. Method and apparatus for indirect planarization
CN101158700B (zh) * 2006-10-08 2011-09-28 上海华虹Nec电子有限公司 探针卡
US7471078B2 (en) * 2006-12-29 2008-12-30 Formfactor, Inc. Stiffener assembly for use with testing devices
KR100862887B1 (ko) * 2007-02-13 2008-10-13 주식회사 파이컴 평탄도 조절 어셈블리와 이를 포함하는 전기 검사 장치 및이를 이용한 평탄도 조절 방법
KR101242004B1 (ko) * 2007-03-19 2013-03-11 (주) 미코티엔 프로브 카드
DE102007047269A1 (de) * 2007-10-02 2009-04-09 Atg Luther & Maelzer Gmbh Vollrasterkassette für einen Paralleltester zum Testen einer unbestückten Leiterplatte, Federkontaktstift für eine solche Vollrasterkassette sowie Adapter für einen Paralleltester zum Testen einer unbestückten Leiterplatte
CN101889338B (zh) 2007-10-08 2012-10-24 Amst株式会社 用于晶圆测试的方法以及用于该方法的探针卡
JP5138615B2 (ja) 2008-02-15 2013-02-06 シャープ株式会社 半導体機能試験電気接続装置
DE102008034918B4 (de) * 2008-07-26 2012-09-27 Feinmetall Gmbh Elektrische Prüfeinrichtung für die Prüfung eines elektrischen Prüflings sowie elektrisches Prüfverfahren
US7960989B2 (en) * 2008-12-03 2011-06-14 Formfactor, Inc. Mechanical decoupling of a probe card assembly to improve thermal response
KR101674135B1 (ko) * 2010-01-13 2016-11-09 (주)엠투엔 프로브 카드
JP2012093328A (ja) * 2010-10-22 2012-05-17 Isao Kimoto プローブカード
JP5863168B2 (ja) * 2011-11-10 2016-02-16 株式会社日本マイクロニクス プローブカード及びその製造方法
JP5991823B2 (ja) * 2012-02-14 2016-09-14 株式会社日本マイクロニクス 電気的接続装置及びその組立方法
EP3114489B1 (fr) * 2014-03-06 2018-08-01 Technoprobe S.p.A Carte de sonde pour un appareil d'essai de dispositifs électroniques, en particulier pour des applications à des températures extrêmes

Also Published As

Publication number Publication date
WO2015132747A1 (fr) 2015-09-11
KR102205429B1 (ko) 2021-01-21
PH12016501754A1 (en) 2016-11-07
EP3114488B1 (fr) 2018-08-01
JP6590840B2 (ja) 2019-10-16
PH12016501754B1 (en) 2016-11-07
TW201534926A (zh) 2015-09-16
KR20160130448A (ko) 2016-11-11
CN106104280B (zh) 2019-08-06
US20160377655A1 (en) 2016-12-29
EP3114488A1 (fr) 2017-01-11
TWI655437B (zh) 2019-04-01
CN106104280A (zh) 2016-11-09
MY179750A (en) 2020-11-12
US10151775B2 (en) 2018-12-11
JP2017513014A (ja) 2017-05-25

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