SG11201403985TA - FePt SPUTTERING TARGET AND METHOD FOR PRODUCING SAME - Google Patents
FePt SPUTTERING TARGET AND METHOD FOR PRODUCING SAMEInfo
- Publication number
- SG11201403985TA SG11201403985TA SG11201403985TA SG11201403985TA SG11201403985TA SG 11201403985T A SG11201403985T A SG 11201403985TA SG 11201403985T A SG11201403985T A SG 11201403985TA SG 11201403985T A SG11201403985T A SG 11201403985TA SG 11201403985T A SG11201403985T A SG 11201403985TA
- Authority
- SG
- Singapore
- Prior art keywords
- sputtering target
- producing same
- fept
- fept sputtering
- producing
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/04—Alloys based on a platinum group metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0466—Alloys based on noble metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
- H01J37/3429—Plural materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2201/00—Treatment under specific atmosphere
- B22F2201/03—Oxygen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/002—Ferrous alloys, e.g. steel alloys containing In, Mg, or other elements not provided for in one single group C22C38/001 - C22C38/60
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/16—Ferrous alloys, e.g. steel alloys containing copper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3322—Problems associated with coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3322—Problems associated with coating
- H01J2237/3323—Problems associated with coating uniformity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
- H01J37/3491—Manufacturing of targets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Powder Metallurgy (AREA)
- Magnetic Record Carriers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012005695 | 2012-01-13 | ||
PCT/JP2013/050429 WO2013105647A1 (ja) | 2012-01-13 | 2013-01-11 | FePt系スパッタリングターゲット及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201403985TA true SG11201403985TA (en) | 2014-10-30 |
Family
ID=48781589
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201403984PA SG11201403984PA (en) | 2012-01-13 | 2013-01-11 | FePt SPUTTERING TARGET AND METHOD FOR PRODUCING SAME |
SG11201403985TA SG11201403985TA (en) | 2012-01-13 | 2013-01-11 | FePt SPUTTERING TARGET AND METHOD FOR PRODUCING SAME |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201403984PA SG11201403984PA (en) | 2012-01-13 | 2013-01-11 | FePt SPUTTERING TARGET AND METHOD FOR PRODUCING SAME |
Country Status (6)
Country | Link |
---|---|
US (4) | US9095901B2 (zh) |
JP (2) | JP5863783B2 (zh) |
MY (2) | MY173713A (zh) |
SG (2) | SG11201403984PA (zh) |
TW (2) | TWI515316B (zh) |
WO (2) | WO2013105648A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6366095B2 (ja) * | 2014-07-29 | 2018-08-01 | 株式会社フルヤ金属 | 磁気記録媒体用スパッタリングターゲット |
JP6305881B2 (ja) * | 2014-09-05 | 2018-04-04 | Jx金属株式会社 | 磁気記録媒体用スパッタリングターゲット |
WO2017141558A1 (ja) | 2016-02-19 | 2017-08-24 | Jx金属株式会社 | 磁気記録媒体用スパッタリングターゲット及び磁性薄膜 |
CN108699679B (zh) * | 2016-03-07 | 2020-09-29 | 田中贵金属工业株式会社 | FePt-C系溅射靶 |
EP3564404B1 (en) * | 2016-12-28 | 2023-03-15 | Sumitomo Electric Industries, Ltd. | Coating |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2985545B2 (ja) | 1992-01-18 | 1999-12-06 | 日亜化学工業株式会社 | 合金粉末の製造方法 |
JP2985546B2 (ja) | 1992-01-18 | 1999-12-06 | 日亜化学工業株式会社 | 合金粉末の製造方法 |
JP2948019B2 (ja) | 1992-05-14 | 1999-09-13 | アルプス電気株式会社 | スパッタ用ターゲット |
US5736013A (en) | 1994-04-06 | 1998-04-07 | Komag, Inc. | Method for forming an improved magnetic media including sputtering of selected oxides or nitrides in the magnetic layer, and apparatus for same |
US5989728A (en) | 1994-11-02 | 1999-11-23 | International Business Machines Corporation | Thin film magnetic recording medium having high coercivity |
JPH08157904A (ja) | 1994-11-30 | 1996-06-18 | Daido Steel Co Ltd | 活性金属粉末の製造方法 |
JPH10338573A (ja) | 1997-06-03 | 1998-12-22 | Mitsui Mining & Smelting Co Ltd | 硫化亜鉛−酸化ケイ素焼結体ターゲットの製造方法 |
JP3385004B2 (ja) | 2000-10-11 | 2003-03-10 | 秋田県 | 磁気記録媒体 |
TW520519B (en) | 2001-03-02 | 2003-02-11 | Aichi Steel Corp | Fe-Pt based magnet and manufacturing method thereof |
JP4175829B2 (ja) * | 2002-04-22 | 2008-11-05 | 株式会社東芝 | 記録媒体用スパッタリングターゲットと磁気記録媒体 |
US20070189916A1 (en) | 2002-07-23 | 2007-08-16 | Heraeus Incorporated | Sputtering targets and methods for fabricating sputtering targets having multiple materials |
KR100470151B1 (ko) | 2002-10-29 | 2005-02-05 | 한국과학기술원 | FePtC 박막을 이용한 고밀도 자기기록매체 및 그제조방법 |
TWI341337B (en) | 2003-01-07 | 2011-05-01 | Cabot Corp | Powder metallurgy sputtering targets and methods of producing same |
CN1926260B (zh) | 2004-03-01 | 2010-10-06 | 日矿金属株式会社 | 表面缺陷少的溅射靶及其表面加工方法 |
US20060021871A1 (en) | 2004-07-29 | 2006-02-02 | Ching-Ray Chang | Method for fabricating L10 phase alloy film |
US20060110626A1 (en) | 2004-11-24 | 2006-05-25 | Heraeus, Inc. | Carbon containing sputter target alloy compositions |
JP2006161082A (ja) * | 2004-12-03 | 2006-06-22 | Ishifuku Metal Ind Co Ltd | スパッタリングターゲットの製造方法 |
WO2007080781A1 (ja) | 2006-01-13 | 2007-07-19 | Nippon Mining & Metals Co., Ltd. | 非磁性材粒子分散型強磁性材スパッタリングターゲット |
JP4970003B2 (ja) | 2006-11-17 | 2012-07-04 | 山陽特殊製鋼株式会社 | Co−B系ターゲット材およびその製造方法 |
CN100510190C (zh) * | 2006-11-30 | 2009-07-08 | 复旦大学 | c轴垂直取向的L10相FePt磁记录薄膜的制备方法 |
JP5155565B2 (ja) | 2007-01-04 | 2013-03-06 | 三井金属鉱業株式会社 | CoCrPt系スパッタリングターゲットおよびその製造方法 |
JP2008189996A (ja) | 2007-02-05 | 2008-08-21 | Hitachi Metals Ltd | Co−Fe系合金スパッタリングターゲット材およびその製造方法 |
US20080210555A1 (en) | 2007-03-01 | 2008-09-04 | Heraeus Inc. | High density ceramic and cermet sputtering targets by microwave sintering |
US20090053089A1 (en) | 2007-08-20 | 2009-02-26 | Heraeus Inc. | HOMOGENEOUS GRANULATED METAL BASED and METAL-CERAMIC BASED POWDERS |
JP4468461B2 (ja) | 2008-02-27 | 2010-05-26 | 三井金属鉱業株式会社 | セラミックス−金属複合材料からなるスパッタリングターゲット材の製造方法 |
US8173282B1 (en) | 2009-12-11 | 2012-05-08 | Wd Media, Inc. | Perpendicular magnetic recording medium with an ordering temperature reducing layer |
JP5428995B2 (ja) * | 2010-03-28 | 2014-02-26 | 三菱マテリアル株式会社 | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
WO2012029498A1 (ja) * | 2010-08-31 | 2012-03-08 | Jx日鉱日石金属株式会社 | Fe-Pt系強磁性材スパッタリングターゲット |
JP5590322B2 (ja) | 2010-11-12 | 2014-09-17 | 三菱マテリアル株式会社 | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
JP5290468B2 (ja) | 2010-12-20 | 2013-09-18 | Jx日鉱日石金属株式会社 | C粒子が分散したFe−Pt系スパッタリングターゲット |
WO2012086300A1 (ja) * | 2010-12-21 | 2012-06-28 | Jx日鉱日石金属株式会社 | 磁気記録膜用スパッタリングターゲット及びその製造方法 |
JP5041261B2 (ja) | 2011-01-31 | 2012-10-03 | 三菱マテリアル株式会社 | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
JP5041262B2 (ja) | 2011-01-31 | 2012-10-03 | 三菱マテリアル株式会社 | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
CN102168268A (zh) * | 2011-03-02 | 2011-08-31 | 复旦大学 | 一种金属纳米晶的制备方法 |
JP5912559B2 (ja) * | 2011-03-30 | 2016-04-27 | 田中貴金属工業株式会社 | FePt−C系スパッタリングターゲットの製造方法 |
MY167394A (en) | 2011-12-22 | 2018-08-16 | Jx Nippon Mining & Metals Corp | C grain dispersed fe-pt-based sputtering target |
-
2013
- 2013-01-09 TW TW102100715A patent/TWI515316B/zh active
- 2013-01-09 TW TW102100716A patent/TWI504768B/zh active
- 2013-01-11 WO PCT/JP2013/050430 patent/WO2013105648A1/ja active Application Filing
- 2013-01-11 SG SG11201403984PA patent/SG11201403984PA/en unknown
- 2013-01-11 MY MYPI2014701868A patent/MY173713A/en unknown
- 2013-01-11 JP JP2013514451A patent/JP5863783B2/ja active Active
- 2013-01-11 JP JP2013514450A patent/JP5863782B2/ja active Active
- 2013-01-11 WO PCT/JP2013/050429 patent/WO2013105647A1/ja active Application Filing
- 2013-01-11 SG SG11201403985TA patent/SG11201403985TA/en unknown
- 2013-01-11 MY MYPI2014701864A patent/MY174127A/en unknown
-
2014
- 2014-07-10 US US14/328,016 patent/US9095901B2/en not_active Expired - Fee Related
- 2014-07-10 US US14/328,106 patent/US9314845B2/en not_active Expired - Fee Related
- 2014-07-14 US US14/330,786 patent/US9314846B2/en not_active Expired - Fee Related
- 2014-07-14 US US14/330,775 patent/US9358612B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPWO2013105647A1 (ja) | 2015-05-11 |
US9358612B2 (en) | 2016-06-07 |
TW201341552A (zh) | 2013-10-16 |
TWI504768B (zh) | 2015-10-21 |
US9095901B2 (en) | 2015-08-04 |
MY174127A (en) | 2020-03-10 |
SG11201403984PA (en) | 2014-10-30 |
US20140322062A1 (en) | 2014-10-30 |
JP5863782B2 (ja) | 2016-02-17 |
JP5863783B2 (ja) | 2016-02-17 |
WO2013105647A1 (ja) | 2013-07-18 |
JPWO2013105648A1 (ja) | 2015-05-11 |
US20140318954A1 (en) | 2014-10-30 |
US20140322063A1 (en) | 2014-10-30 |
WO2013105648A1 (ja) | 2013-07-18 |
MY173713A (en) | 2020-02-18 |
TWI515316B (zh) | 2016-01-01 |
US9314845B2 (en) | 2016-04-19 |
TW201341553A (zh) | 2013-10-16 |
US20140318955A1 (en) | 2014-10-30 |
US9314846B2 (en) | 2016-04-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2703519A4 (en) | SPUTTERTARGET AND MANUFACTURING METHOD THEREFOR | |
GB201421783D0 (en) | Target apparattus and method | |
PL2559960T3 (pl) | Lodówka i sposób sterowania nią | |
IL231042B (en) | The purpose of the thesis and method for its production | |
SG11201403319RA (en) | Silver-alloy sputtering target for conductive-film formation, and method for producing same | |
SG11201600843XA (en) | Magnetic material sputtering target and method for producing same | |
IL230843A0 (en) | Tantalum target sputter and method for its production | |
SG11201404314WA (en) | Magnetic material sputtering target and manufacturing method for same | |
EP2784173A4 (en) | SPUTTERTARGET AND MANUFACTURING METHOD THEREFOR | |
EP2818574A4 (en) | SPRAY TARGET AND METHOD FOR PRODUCING THE SAME | |
SG11201403857TA (en) | Co-Cr-Pt-BASED SPUTTERING TARGET AND METHOD FOR PRODUCING SAME | |
SG11201506426TA (en) | FePt-C-BASED SPUTTERING TARGET AND METHOD FOR MANUFACTURING SAME | |
IL237919B (en) | Tantalum sputtering target and method for producing same | |
EP2726642A4 (en) | SPUTTERTARGET AND SPUTTERING PROCESS | |
EP2818575A4 (en) | INDIUM CYLINDRICAL CATHODIC SPUTTERING TARGET AND METHOD OF MANUFACTURING SAME | |
SG11201602431SA (en) | Sputtering target and production method | |
EP2907891A4 (en) | SINTERED TUNGSTEN BODY SPRAY TARGET AND MANUFACTURING METHOD THEREOF | |
EP2913423A4 (en) | TANTAL SPUTTER TARGET AND MANUFACTURING METHOD THEREFOR | |
EP2960355A4 (en) | Sputtering target and production method therefor | |
EP2772564A4 (en) | INDIUM SPUTTERTARGET AND MANUFACTURING METHOD THEREFOR | |
IL223754B (en) | Sputtering target and/or coil and process for producing same | |
EP2857547A4 (en) | SPRAY TARGET FOR RARE EARTH MAGNET AND PRODUCTION METHOD THEREFOR | |
SG11201501370PA (en) | Tantalum sputtering target and method for producing same | |
SG11201506950WA (en) | Cobalt sputtering target and production method therefor | |
SG11201403984PA (en) | FePt SPUTTERING TARGET AND METHOD FOR PRODUCING SAME |