SG10201603205TA - Wafer processing method - Google Patents
Wafer processing methodInfo
- Publication number
- SG10201603205TA SG10201603205TA SG10201603205TA SG10201603205TA SG10201603205TA SG 10201603205T A SG10201603205T A SG 10201603205TA SG 10201603205T A SG10201603205T A SG 10201603205TA SG 10201603205T A SG10201603205T A SG 10201603205TA SG 10201603205T A SG10201603205T A SG 10201603205TA
- Authority
- SG
- Singapore
- Prior art keywords
- processing method
- wafer processing
- wafer
- processing
- Prior art date
Links
- 238000003672 processing method Methods 0.000 title 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015101599A JP6478801B2 (ja) | 2015-05-19 | 2015-05-19 | ウエーハの加工方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201603205TA true SG10201603205TA (en) | 2016-12-29 |
Family
ID=57231806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201603205TA SG10201603205TA (en) | 2015-05-19 | 2016-04-22 | Wafer processing method |
Country Status (7)
Country | Link |
---|---|
US (1) | US9716039B2 (de) |
JP (1) | JP6478801B2 (de) |
KR (1) | KR102447146B1 (de) |
CN (1) | CN106169442A (de) |
DE (1) | DE102016208307A1 (de) |
SG (1) | SG10201603205TA (de) |
TW (1) | TWI679693B (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7032050B2 (ja) * | 2017-03-14 | 2022-03-08 | 株式会社ディスコ | レーザー加工装置 |
JP6824582B2 (ja) * | 2017-04-04 | 2021-02-03 | 株式会社ディスコ | 加工方法 |
JP6912267B2 (ja) * | 2017-05-09 | 2021-08-04 | 株式会社ディスコ | レーザ加工方法 |
JP6858455B2 (ja) * | 2017-07-24 | 2021-04-14 | 株式会社ディスコ | チップの製造方法 |
JP6830739B2 (ja) * | 2017-08-22 | 2021-02-17 | 株式会社ディスコ | チップの製造方法 |
JP7015139B2 (ja) * | 2017-10-18 | 2022-02-02 | 株式会社ディスコ | 被加工物の研削方法及び研削装置 |
JP6955975B2 (ja) * | 2017-11-21 | 2021-10-27 | 株式会社ディスコ | ウェーハの加工方法 |
JP7062449B2 (ja) * | 2018-01-23 | 2022-05-06 | 株式会社ディスコ | 被加工物の切削方法 |
JP7013276B2 (ja) * | 2018-02-23 | 2022-01-31 | 株式会社ディスコ | 加工装置 |
JP7068028B2 (ja) | 2018-05-09 | 2022-05-16 | 株式会社ディスコ | ウェーハの分割方法 |
JP7061021B2 (ja) * | 2018-06-06 | 2022-04-27 | 株式会社ディスコ | ウェーハの加工方法及び研削装置 |
JP7191563B2 (ja) * | 2018-07-03 | 2022-12-19 | 株式会社ディスコ | ウエーハの加工方法 |
JP2020017677A (ja) * | 2018-07-26 | 2020-01-30 | 株式会社ディスコ | ウェーハの加工方法 |
CN109176928A (zh) * | 2018-09-14 | 2019-01-11 | 苏州迈为科技股份有限公司 | 一种电池片划片装置及划片方法 |
DE102019201438B4 (de) * | 2019-02-05 | 2024-05-02 | Disco Corporation | Verfahren zum Herstellen eines Substrats und System zum Herstellen eines Substrats |
JP7323304B2 (ja) * | 2019-03-07 | 2023-08-08 | 株式会社ディスコ | 被加工物の分割方法 |
US11289378B2 (en) * | 2019-06-13 | 2022-03-29 | Wolfspeed, Inc. | Methods for dicing semiconductor wafers and semiconductor devices made by the methods |
US20210202318A1 (en) * | 2019-12-27 | 2021-07-01 | Micron Technology, Inc. | Methods of forming semiconductor dies with perimeter profiles for stacked die packages |
US11901232B2 (en) * | 2020-06-22 | 2024-02-13 | Applied Materials, Inc. | Automatic kerf offset mapping and correction system for laser dicing |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6336988A (ja) * | 1986-07-29 | 1988-02-17 | Rohm Co Ltd | 半導体ウエハの分割方法 |
JPH06224298A (ja) * | 1993-01-26 | 1994-08-12 | Sony Corp | ダイシング方法 |
JP2005064231A (ja) | 2003-08-12 | 2005-03-10 | Disco Abrasive Syst Ltd | 板状物の分割方法 |
US7129114B2 (en) * | 2004-03-10 | 2006-10-31 | Micron Technology, Inc. | Methods relating to singulating semiconductor wafers and wafer scale assemblies |
JP2006073690A (ja) * | 2004-09-01 | 2006-03-16 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2006140341A (ja) * | 2004-11-12 | 2006-06-01 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP4734903B2 (ja) * | 2004-11-29 | 2011-07-27 | 株式会社デンソー | 半導体ウェハのダイシング方法 |
JP4630689B2 (ja) * | 2005-03-01 | 2011-02-09 | 株式会社ディスコ | ウエーハの分割方法 |
JP2008091779A (ja) * | 2006-10-04 | 2008-04-17 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP5054496B2 (ja) * | 2007-11-30 | 2012-10-24 | 浜松ホトニクス株式会社 | 加工対象物切断方法 |
JP2009272421A (ja) * | 2008-05-07 | 2009-11-19 | Disco Abrasive Syst Ltd | デバイスの製造方法 |
US8043940B2 (en) * | 2008-06-02 | 2011-10-25 | Renesas Electronics Corporation | Method for manufacturing semiconductor chip and semiconductor device |
JP5122378B2 (ja) * | 2008-06-09 | 2013-01-16 | 株式会社ディスコ | 板状物の分割方法 |
JP5964580B2 (ja) * | 2011-12-26 | 2016-08-03 | 株式会社ディスコ | ウェーハの加工方法 |
JP6078272B2 (ja) * | 2012-09-10 | 2017-02-08 | 株式会社ディスコ | ウエーハの加工方法 |
JP6078376B2 (ja) * | 2013-02-22 | 2017-02-08 | 株式会社ディスコ | ウエーハの加工方法 |
-
2015
- 2015-05-19 JP JP2015101599A patent/JP6478801B2/ja active Active
-
2016
- 2016-04-08 TW TW105111065A patent/TWI679693B/zh active
- 2016-04-22 SG SG10201603205TA patent/SG10201603205TA/en unknown
- 2016-05-04 KR KR1020160055179A patent/KR102447146B1/ko active IP Right Grant
- 2016-05-10 US US15/151,143 patent/US9716039B2/en active Active
- 2016-05-13 DE DE102016208307.4A patent/DE102016208307A1/de active Pending
- 2016-05-17 CN CN201610325658.9A patent/CN106169442A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
KR20160136232A (ko) | 2016-11-29 |
TW201642336A (zh) | 2016-12-01 |
JP2016219564A (ja) | 2016-12-22 |
KR102447146B1 (ko) | 2022-09-23 |
US9716039B2 (en) | 2017-07-25 |
US20160343614A1 (en) | 2016-11-24 |
DE102016208307A1 (de) | 2016-11-24 |
TWI679693B (zh) | 2019-12-11 |
CN106169442A (zh) | 2016-11-30 |
JP6478801B2 (ja) | 2019-03-06 |
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