SG10201503256VA - Valve - Google Patents

Valve

Info

Publication number
SG10201503256VA
SG10201503256VA SG10201503256VA SG10201503256VA SG10201503256VA SG 10201503256V A SG10201503256V A SG 10201503256VA SG 10201503256V A SG10201503256V A SG 10201503256VA SG 10201503256V A SG10201503256V A SG 10201503256VA SG 10201503256V A SG10201503256V A SG 10201503256VA
Authority
SG
Singapore
Prior art keywords
valve
Prior art date
Application number
SG10201503256VA
Other languages
English (en)
Inventor
Ehrne Florian
Bachmann Christof
Wozasek Matthias
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of SG10201503256VA publication Critical patent/SG10201503256VA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
SG10201503256VA 2014-04-25 2015-04-24 Valve SG10201503256VA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT2972014 2014-04-25

Publications (1)

Publication Number Publication Date
SG10201503256VA true SG10201503256VA (en) 2015-11-27

Family

ID=54334377

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201503256VA SG10201503256VA (en) 2014-04-25 2015-04-24 Valve

Country Status (6)

Country Link
US (2) US9976655B2 (ja)
JP (1) JP6860282B2 (ja)
KR (1) KR102313923B1 (ja)
CN (1) CN105042164B (ja)
SG (1) SG10201503256VA (ja)
TW (1) TWI656293B (ja)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10414083B2 (en) 2014-02-20 2019-09-17 Novatec, Inc. Multiple sensor resin delivery optimizing vacuum pump operation
US10280015B2 (en) 2014-02-20 2019-05-07 Stephen B. Maguire Method for adjustably restricting air flow and apparatus therefor
US10179708B2 (en) 2014-02-20 2019-01-15 Maguire Products, Inc. Granular material delivery system with air flow limiter
US10144598B2 (en) 2014-02-20 2018-12-04 Novatec, Inc. Variable frequency drive combined with flow limiter set for limiting flow to selected level above design choice
US10175701B2 (en) 2014-02-20 2019-01-08 Stephen B. Maguire Air flow regulator with detector and method for regulating air flow
US9937651B2 (en) 2014-02-20 2018-04-10 Novatec, Inc. Resin delivery apparatus and method with plural air flow limiters
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
US10131506B2 (en) 2014-12-09 2018-11-20 Maguire Products, Inc. Selective matrix conveyance apparatus and methods for granular resin material
US10179696B2 (en) * 2015-01-27 2019-01-15 Novatec, Inc. Variable opening slide gate for regulating material flow into airstream
US10138076B2 (en) 2015-02-25 2018-11-27 Stephen B. Maguire Method for resin delivery including metering introduction of external air to maintain desired vacuum level
KR102504622B1 (ko) * 2015-03-27 2023-02-27 배트 홀딩 아게 진공밸브
TWI705212B (zh) * 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 用於對壁中開口進行真空密封的密封裝置
TWI666401B (zh) * 2016-10-04 2019-07-21 日商愛發科股份有限公司 閘閥
WO2018077553A1 (de) * 2016-10-24 2018-05-03 Vat Holding Ag Verschlussvorrichtung
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
DE102019129344A1 (de) * 2019-10-30 2021-05-06 Vat Holding Ag Vakuumventil
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
KR102574233B1 (ko) * 2023-03-14 2023-09-04 주식회사 에스알티 U motion 게이트밸브

Family Cites Families (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1987189A (en) * 1933-01-03 1935-01-08 Gen Motors Corp Spring clip for multiple leaf springs
US2476711A (en) * 1943-11-12 1949-07-19 Samuel H Edwards Valve
US2858096A (en) * 1955-04-28 1958-10-28 Cons Electrodynamics Corp Fluid pressure actuated gate valve
US3524467A (en) * 1967-10-13 1970-08-18 Exxon Research Engineering Co Fluid expanded disk valve
DE2321190B2 (de) * 1973-04-26 1978-12-07 Stahlwerke Brueninghaus Gmbh, 5840 Schwerte Parabelfeder
US3931953A (en) * 1974-05-09 1976-01-13 Communications Satellite Corporation (Comsat) Ultra high vacuum valve
FR2283375A1 (fr) 1974-07-15 1976-03-26 Commissariat Energie Atomique Vanne a tiroir pour ultra-vide
US4039141A (en) * 1975-08-11 1977-08-02 Lindsey Keith E Grounding accessory for a bundle conductor stringing block
US4062515A (en) * 1976-05-13 1977-12-13 The United States Of America As Represented By The United States Energy Research And Development Administration Compact gate valve
JPS56113875A (en) * 1980-02-13 1981-09-08 Hitachi Ltd Valve device
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
US4408634A (en) * 1981-11-05 1983-10-11 Hps Corporation Gate stop valve
DE3224387A1 (de) * 1982-06-30 1984-01-12 Schertler, Siegfried, 9469 Haag Vakuumschieberventil
US4477052A (en) * 1983-03-18 1984-10-16 Bergwerksverband Gmbh Gate valve
US4957018A (en) * 1987-09-24 1990-09-18 Varian Associates, Inc. Mechanism for selectively locking and unlocking a translatable shaft
JPH02138577A (ja) 1988-11-18 1990-05-28 Hitachi Ltd 真空用ゲートバルブ
JPH02186172A (ja) * 1989-01-10 1990-07-20 Irie Koken Kk 無しゅう動ゲートバルブ用弁体
JPH03204483A (ja) * 1990-01-08 1991-09-06 Irie Koken Kk 無しゅう動真空ゲートバルブ
JPH0766768B2 (ja) * 1989-06-19 1995-07-19 株式会社日立製作所 粒子線を用いた表面分析装置
JPH03234979A (ja) * 1990-02-09 1991-10-18 Canon Inc 仕切り弁
US5269491A (en) * 1992-03-10 1993-12-14 Reynolds Calvin E High vacuum valve
JP2613171B2 (ja) * 1993-07-22 1997-05-21 株式会社岸川特殊バルブ ゲートバルブ
US5379983A (en) * 1993-12-21 1995-01-10 Vat Holding Ag Shut-off valves for pipelines
KR960002534A (ko) * 1994-06-07 1996-01-26 이노우에 아키라 감압·상압 처리장치
US5755255A (en) * 1996-10-29 1998-05-26 Benkan Corporation Gate valve for regulating gas flow in semiconductor manufacturing
US5881998A (en) * 1997-07-14 1999-03-16 Brenes; Arthur Half profile slot valve
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
DE19746241C2 (de) * 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung
JPH11315939A (ja) * 1998-05-08 1999-11-16 Ckd Corp ゲート式真空遮断弁
US6056267A (en) * 1998-05-19 2000-05-02 Applied Materials, Inc. Isolation valve with extended seal life
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
JP4169892B2 (ja) * 1999-12-03 2008-10-22 株式会社アルバック ゲートバルブ
JP3388435B2 (ja) * 1999-12-28 2003-03-24 株式会社ブイテックス ゲートバルブ
US6913243B1 (en) * 2000-03-30 2005-07-05 Lam Research Corporation Unitary slot valve actuator with dual valves
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP2002039401A (ja) * 2000-07-28 2002-02-06 V Tex:Kk ゲートバルブの弁板駆動装置
US6416037B1 (en) * 2001-01-11 2002-07-09 Vat Holding Ag Vacuum pipe
US6471181B2 (en) * 2001-01-11 2002-10-29 Vat Holding Ag Suspension of a valve plate of a vacuum valve
US6431518B1 (en) * 2001-01-11 2002-08-13 Vat Holding Ag Vacuum valve
US7004453B1 (en) * 2001-04-25 2006-02-28 Mykrolis Corporation Pendulum valve with a full range of position control
US6612546B2 (en) * 2001-08-01 2003-09-02 Varian, Inc. Gate valve with delayed retraction of counter plate
US6854708B2 (en) * 2002-07-22 2005-02-15 Mdc Vacuum Products Corporation High-vacuum valve with retractable valve plate to eliminate abrasion
CN100408902C (zh) * 2003-05-13 2008-08-06 应用材料股份有限公司 密封一处理室一开口的方法与装置
JP3912604B2 (ja) * 2003-11-04 2007-05-09 入江工研株式会社 ゲート弁
US20060124886A1 (en) * 2004-07-08 2006-06-15 Brenes Arthur J Gate valve
US7422653B2 (en) * 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
CA2553518A1 (en) * 2005-09-14 2007-03-14 Standens Ltd. Leaf spring assembly having safety spring with retaining elements
JP4979429B2 (ja) * 2006-03-31 2012-07-18 バット ホールディング アーゲー 真空バルブ
KR20070113122A (ko) * 2006-05-24 2007-11-28 배트 홀딩 아게 벽 내의 개구부의 진공 밀봉 폐쇄를 위한 폐쇄장치
JP2008025835A (ja) * 2006-07-18 2008-02-07 Vat Holding Ag 真空弁、及び連結棒に取り付け可能な閉鎖ディスク
DE102007030006B4 (de) * 2006-07-19 2009-12-17 Vat Holding Ag Vakuumventil
JP5080169B2 (ja) * 2006-09-20 2012-11-21 バット ホールディング アーゲー 真空バルブ
US7871061B1 (en) * 2007-04-05 2011-01-18 Mandeville Jr Matthew Kevin Dual spreading link for gate valves
DE102007023339A1 (de) * 2007-05-16 2008-11-20 Vat Holding Ag Ventil mit einem Verschlussorgan
TWI447319B (zh) * 2007-12-20 2014-08-01 Tel Solar Ag 真空室之閘閥及真空室
DE102008027944B3 (de) * 2008-06-12 2009-07-30 Vat Holding Ag Schieberventil
EP2146122A1 (de) * 2008-07-18 2010-01-20 VAT Holding AG Vakuumventil und Verschlussteller für ein Vakuumventil
DE102008049353A1 (de) 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil
DE102008051349B3 (de) * 2008-10-15 2009-11-12 Vat Holding Ag Vakuumventil
DE102008061315B4 (de) * 2008-12-11 2012-11-15 Vat Holding Ag Aufhängung einer Ventilplatte an einer Ventilstange
KR100994761B1 (ko) * 2009-10-16 2010-11-16 프리시스 주식회사 도어밸브
TWI541465B (zh) * 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 用於真空閥之封閉單元
CN102668022B (zh) * 2010-01-18 2014-12-03 普利西斯株式会社 门阀
KR101762986B1 (ko) * 2010-01-25 2017-07-28 배트 홀딩 아게 진공 밸브
CN102713388B (zh) * 2010-01-29 2014-05-07 Vat控股公司 用于封闭开口的门
US8376326B2 (en) * 2010-03-29 2013-02-19 GM Global Technology Operations LLC Rotationally restrained leaf spring clinch clip
CH704728A2 (de) * 2011-03-18 2012-09-28 Vat Holding Ag Vakuumventil zum gasdichten Schliessen eines Fliesswegs mittels einer Linearbewegung eines Verschlussglieds.
US20120247564A1 (en) * 2011-03-30 2012-10-04 Kho Jeffrey A Shockless slit valve control
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥

Also Published As

Publication number Publication date
US9976655B2 (en) 2018-05-22
TW201600777A (zh) 2016-01-01
US20180163877A1 (en) 2018-06-14
CN105042164A (zh) 2015-11-11
US20150308584A1 (en) 2015-10-29
JP2015209977A (ja) 2015-11-24
TWI656293B (zh) 2019-04-11
CN105042164B (zh) 2019-03-26
KR20150123729A (ko) 2015-11-04
JP6860282B2 (ja) 2021-04-14
KR102313923B1 (ko) 2021-10-18

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