SG100662A1 - Water-permeable adhesive tape - Google Patents

Water-permeable adhesive tape

Info

Publication number
SG100662A1
SG100662A1 SG200101951A SG200101951A SG100662A1 SG 100662 A1 SG100662 A1 SG 100662A1 SG 200101951 A SG200101951 A SG 200101951A SG 200101951 A SG200101951 A SG 200101951A SG 100662 A1 SG100662 A1 SG 100662A1
Authority
SG
Singapore
Prior art keywords
water
adhesive tape
permeable adhesive
image
base film
Prior art date
Application number
SG200101951A
Other languages
English (en)
Inventor
Eevers Walter
Issaris Ann
Mitsuoka Yoshiaki
Thys Edwin
Akada Yuuzou
Original Assignee
Nitto Denko Corp
Nitto Europe Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp, Nitto Europe Nv filed Critical Nitto Denko Corp
Publication of SG100662A1 publication Critical patent/SG100662A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/15—Sheet, web, or layer weakened to permit separation through thickness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249955—Void-containing component partially impregnated with adjacent component
    • Y10T428/249958—Void-containing component is synthetic resin or natural rubbers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249982—With component specified as adhesive or bonding agent
    • Y10T428/249984—Adhesive or bonding component contains voids
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2813—Heat or solvent activated or sealable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2813—Heat or solvent activated or sealable
    • Y10T428/2817—Heat sealable
    • Y10T428/2826—Synthetic resin or polymer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2852—Adhesive compositions
    • Y10T428/2857—Adhesive compositions including metal or compound thereof or natural rubber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
    • Y10T442/2631—Coating or impregnation provides heat or fire protection
    • Y10T442/2713—Halogen containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
    • Y10T442/2738—Coating or impregnation intended to function as an adhesive to solid surfaces subsequently associated therewith
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
    • Y10T442/2738—Coating or impregnation intended to function as an adhesive to solid surfaces subsequently associated therewith
    • Y10T442/2746—Heat-activatable adhesive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
    • Y10T442/2738—Coating or impregnation intended to function as an adhesive to solid surfaces subsequently associated therewith
    • Y10T442/2754—Pressure-sensitive adhesive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/60—Nonwoven fabric [i.e., nonwoven strand or fiber material]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/60—Nonwoven fabric [i.e., nonwoven strand or fiber material]
    • Y10T442/674—Nonwoven fabric with a preformed polymeric film or sheet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/60—Nonwoven fabric [i.e., nonwoven strand or fiber material]
    • Y10T442/674—Nonwoven fabric with a preformed polymeric film or sheet
    • Y10T442/679—Natural or synthetic rubber sheet or film

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Adhesive Tapes (AREA)
  • Dicing (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Materials For Medical Uses (AREA)
SG200101951A 2000-03-30 2001-03-28 Water-permeable adhesive tape SG100662A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00106824A EP1139415B1 (de) 2000-03-30 2000-03-30 Wasserdurchlässiges Klebeband für die Verarbeitung von Halbleitern

Publications (1)

Publication Number Publication Date
SG100662A1 true SG100662A1 (en) 2003-12-26

Family

ID=8168289

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200101951A SG100662A1 (en) 2000-03-30 2001-03-28 Water-permeable adhesive tape

Country Status (8)

Country Link
US (2) US20010055928A1 (de)
EP (1) EP1139415B1 (de)
JP (1) JP3824874B2 (de)
KR (1) KR100427566B1 (de)
AT (1) ATE424040T1 (de)
DE (1) DE60041632D1 (de)
SG (1) SG100662A1 (de)
TW (1) TW576861B (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE375603T1 (de) 2000-04-04 2007-10-15 Synova Sa Verfahren zum schneiden eines gegenstands und zur weiterverarbeitung des schnittguts sowie träger zum halten des gegenstands bzw. des schnittguts
JP3484396B2 (ja) 2000-05-09 2004-01-06 新光電気工業株式会社 ウェハーの切断方法
US6720522B2 (en) * 2000-10-26 2004-04-13 Kabushiki Kaisha Toshiba Apparatus and method for laser beam machining, and method for manufacturing semiconductor devices using laser beam machining
DE10054159A1 (de) * 2000-11-02 2002-05-16 Wacker Siltronic Halbleitermat Verfahren zur Montage von Halbleiterscheiben
US6765174B2 (en) 2001-02-05 2004-07-20 Denso Corporation Method for machining grooves by a laser and honeycomb structure forming die and method for producing the same die
JP4087144B2 (ja) * 2001-04-23 2008-05-21 古河電気工業株式会社 レーザーダイシング用粘着テープ
JP2003173988A (ja) * 2001-12-04 2003-06-20 Furukawa Electric Co Ltd:The 半導体ウェハのダイシング方法
US6777647B1 (en) * 2003-04-16 2004-08-17 Scimed Life Systems, Inc. Combination laser cutter and cleaner
KR100557875B1 (ko) * 2003-08-21 2006-03-10 주식회사 애드텍 Ｐｖｃ 지지체를 포함하는 감압형 다이싱용 점착제테이프의 제조방법 및 점착제 테이프
CN100551984C (zh) * 2004-02-27 2009-10-21 琳得科株式会社 粘接片
JP4748941B2 (ja) * 2004-02-27 2011-08-17 リンテック株式会社 粘着シート
JP4795942B2 (ja) * 2004-06-14 2011-10-19 リンテック株式会社 粘着シート
JP4018096B2 (ja) * 2004-10-05 2007-12-05 松下電器産業株式会社 半導体ウェハの分割方法、及び半導体素子の製造方法
JP4777104B2 (ja) * 2006-03-16 2011-09-21 富士通セミコンダクター株式会社 半導体装置包装用カバーテープ及び半導体装置用包装体
JP2008085303A (ja) * 2006-08-29 2008-04-10 Nitto Denko Corp ウォータージェットレーザダイシング用粘着シート
JP2008060170A (ja) * 2006-08-29 2008-03-13 Nitto Denko Corp ウォータージェットレーザダイシング用粘着シート
US9216850B2 (en) 2006-09-26 2015-12-22 Intercontinental Great Brands Llc Rupturable substrate
MX2009002954A (es) * 2006-09-26 2009-03-31 Cadbury Adams Usa Llc Empaque de burbujas rompible.
JP2008117945A (ja) * 2006-11-06 2008-05-22 Nitto Denko Corp ウォータージェットレーザダイシング用粘着シート
JP2008117943A (ja) * 2006-11-06 2008-05-22 Nitto Denko Corp ウォータージェットレーザダイシング用粘着シート
JP2008270505A (ja) * 2007-04-20 2008-11-06 Nitto Denko Corp ウォータージェットレーザダイシング用粘着シート
JP5000370B2 (ja) * 2007-04-20 2012-08-15 日東電工株式会社 ウォータージェットレーザダイシング用粘着シート
KR101182075B1 (ko) * 2007-09-07 2012-09-11 디아이씨 가부시끼가이샤 양면 점착 테이프
JP5217557B2 (ja) * 2008-03-27 2013-06-19 パナソニック株式会社 電子部品の製造方法
WO2011100751A2 (en) 2010-02-15 2011-08-18 Construction Research & Technology Gmbh Exterior finish system
KR101035353B1 (ko) * 2010-09-15 2011-05-20 주식회사 애니 테이프 통기성 자외선 핫멜트 테이프 및 그 제조방법
JP2012184324A (ja) * 2011-03-04 2012-09-27 Nitto Denko Corp 薄膜基板固定用粘接着シート
TWI409886B (zh) * 2011-08-05 2013-09-21 Powertech Technology Inc 防止晶粒破裂之晶粒拾取方法與裝置
WO2013048415A1 (en) * 2011-09-29 2013-04-04 Intel Corporation Low temperature thin wafer backside vacuum process with backgrinding tape
KR101393895B1 (ko) * 2011-11-02 2014-05-13 (주)엘지하우시스 절단성이 우수한 반도체 웨이퍼 표면보호용 점착필름
JP5950669B2 (ja) * 2012-04-16 2016-07-13 日東電工株式会社 粘着シート及び粘着剤組成物
US10147630B2 (en) * 2014-06-11 2018-12-04 John Cleaon Moore Sectional porous carrier forming a temporary impervious support
JP6301243B2 (ja) * 2014-12-11 2018-03-28 三菱電機株式会社 半導体評価装置および半導体評価方法
CN110475909B (zh) * 2017-03-30 2021-12-24 古河电气工业株式会社 表面处理铜箔及使用其的覆铜层压板
US11791212B2 (en) * 2019-12-13 2023-10-17 Micron Technology, Inc. Thin die release for semiconductor device assembly

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59158596A (ja) * 1983-02-28 1984-09-08 奥井　徳次郎 小型電子部品の収納方法
JPH0616524B2 (ja) * 1984-03-12 1994-03-02 日東電工株式会社 半導体ウエハ固定用接着薄板
JPS63136527A (ja) * 1986-11-27 1988-06-08 Nec Corp 半導体基板処理用粘着シ−ト
JPH02112258A (ja) * 1988-10-21 1990-04-24 Seiko Epson Corp 半導体装置用粘着テープ
JPH0736633B2 (ja) * 1990-10-31 1995-04-19 松下電器産業株式会社 スピーカ前面シート
JPH0621220A (ja) * 1992-07-03 1994-01-28 Seiko Epson Corp ウエハ貼付け装置
DE4418845C5 (de) * 1994-05-30 2012-01-05 Synova S.A. Verfahren und Vorrichtung zur Materialbearbeitung mit Hilfe eines Laserstrahls
JP3647546B2 (ja) * 1996-04-05 2005-05-11 日東電工株式会社 両面接着テープ
JP3195236B2 (ja) * 1996-05-30 2001-08-06 株式会社日立製作所 接着フィルムを有する配線テープ，半導体装置及び製造方法
JP3755617B2 (ja) 1996-08-30 2006-03-15 日立化成工業株式会社 ダイシング用ウエハ保持フィルム
JPH11151661A (ja) * 1997-11-20 1999-06-08 Speedfam Co Ltd 接着テープ付き研磨パッド及び研磨パッド接着方法

Also Published As

Publication number Publication date
US7608328B2 (en) 2009-10-27
US20070110955A1 (en) 2007-05-17
JP2001316648A (ja) 2001-11-16
JP3824874B2 (ja) 2006-09-20
US20010055928A1 (en) 2001-12-27
EP1139415B1 (de) 2009-02-25
ATE424040T1 (de) 2009-03-15
KR20010095140A (ko) 2001-11-03
EP1139415A1 (de) 2001-10-04
KR100427566B1 (ko) 2004-04-27
DE60041632D1 (de) 2009-04-09
TW576861B (en) 2004-02-21

Similar Documents

Publication Publication Date Title
SG100662A1 (en) Water-permeable adhesive tape
ATE362656T1 (de) Photovoltaisches modul
PT1312283E (pt) Cama empilhavel e elemento de canto para uma tal cama
DE69425527T2 (de) Oxidation von Silizium-Nitrid in der Herstellung von Halbleitenden Anordnungen
IT1302234B1 (it) Procedimento per la fabbricazione di un dispositivo a semiconduttoreimpiegando una minuta configurazione di resist, e dispositivo a
SG103296A1 (en) Thin film transistors and semiconductor device
DE69622943D1 (de) Optisches Dünnfilmmessverfahren, Filmformationsverfahren und Halbleiterlaserfabrikationsverfahren
EP0637841A3 (de) Dünnschicht Halbleiterbauelement und Verfahren zu seiner Herstellung.
SG111163A1 (en) Dicing/die-bonding film, method of fixing chipped work and semiconductor device
EP1291989A4 (de) Lichtemittierendes nitrid-halbleiterbauelement und optische vorrichtung damit
WO2002065492A3 (en) Integrated transformer
TW200513803A (en) Lithographic antireflective hardmask compositions and uses thereof
FR2806528B1 (fr) Substrat semiconducteur, dispositif a semiconducteur et leurs procedes de fabrication
EP0536682A3 (en) Semi-conductor device, method of fabrication and device used for the fabrication
DE69425930T2 (de) Integrierte Halbleiterschaltung
DE60204191D1 (de) Schutzelement, speziell für kurze Hosen
DE69425344D1 (de) Halbleiterintegrierte Leistungsverstärkerschaltung
DE69101818T2 (de) Halbleitersubstrat-Ätzgerät.
GB2362509B (en) Thin film transistor and fabrication method of the same
MY143405A (en) N-type nitride semiconductor laminate and semiconductor device using same
DE69414277T2 (de) Halbleiterwaferkassette
NL194417B (nl) Ge´ntegreerde halfgeleiderschakeling.
DE69408362T2 (de) Halbleiterintegrierte Schaltung
SE9000245L (sv) Halvledarkomponent och foerfarande foer dess framstaellning
MY122247A (en) Punched adhesive tape for semiconductor, method of manufacturing lead frame with the adhesive tape, lead frame with the adhesive tape, and semiconductor device comprising the lead frame.