Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
  • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING OR COUNTING
  • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
  • G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
  • G06K15/02—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
  • G06K15/12—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING OR COUNTING
  • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
  • G06K2215/00—Arrangements for producing a permanent visual presentation of the output data
  • G06K2215/0002—Handling the output data
  • G06K2215/0062—Handling the output data combining generic and host data, e.g. filling a raster
  • G06K2215/0065—Page or partial page composition
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Optics & Photonics (AREA)
• General Engineering & Computer Science (AREA)
• Theoretical Computer Science (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
• Laser Beam Printer (AREA)
• Optical Recording Or Reproduction (AREA)
• Optical Head (AREA)
• Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
• Laser Beam Processing (AREA)

Priority Applications (8)

Applications Claiming Priority (1)

Publications (3)

Family

ID=20405990

Family Applications (1)

Country Status (8)

Families Citing this family (312)

Family Cites Families (8)

• 1997
  • 1997-02-28 SE SE9700742A patent/SE509062C2/sv not_active IP Right Cessation
• 1998
  • 1998-02-26 EP EP98908378A patent/EP1012783B1/en not_active Expired - Lifetime
  • 1998-02-26 JP JP53758198A patent/JP2001513219A/ja not_active Ceased
  • 1998-02-26 AT AT98908378T patent/ATE243343T1/de not_active IP Right Cessation
  • 1998-02-26 DE DE69815697T patent/DE69815697T2/de not_active Expired - Fee Related
  • 1998-02-26 WO PCT/SE1998/000347 patent/WO1998038597A2/en active IP Right Grant
  • 1998-02-26 US US09/380,270 patent/US7088468B1/en not_active Expired - Fee Related
  • 1998-02-26 AU AU66423/98A patent/AU6642398A/en not_active Abandoned

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