DE602004019835D1 - Träger und Verfahren zur Herstellung eines Trägers - Google Patents

Träger und Verfahren zur Herstellung eines Trägers

Info

Publication number
DE602004019835D1
DE602004019835D1 DE602004019835T DE602004019835T DE602004019835D1 DE 602004019835 D1 DE602004019835 D1 DE 602004019835D1 DE 602004019835 T DE602004019835 T DE 602004019835T DE 602004019835 T DE602004019835 T DE 602004019835T DE 602004019835 D1 DE602004019835 D1 DE 602004019835D1
Authority
DE
Germany
Prior art keywords
carrier
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004019835T
Other languages
English (en)
Inventor
Noud Jan Gillisen
Joost Jeroen Ottens
Der Schoot Harmen Klaas Ven
Petrus Matthijs Henricus Vosters
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of DE602004019835D1 publication Critical patent/DE602004019835D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0091—Including arrangements for environmental or personal protection
    • B01D46/0093—Including arrangements for environmental or personal protection against fire or explosion
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62C—FIRE-FIGHTING
    • A62C35/00—Permanently-installed equipment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62C—FIRE-FIGHTING
    • A62C3/00—Fire prevention, containment or extinguishing specially adapted for particular objects or places
    • A62C3/06—Fire prevention, containment or extinguishing specially adapted for particular objects or places of highly inflammable material, e.g. light metals, petroleum products
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62C—FIRE-FIGHTING
    • A62C3/00—Fire prevention, containment or extinguishing specially adapted for particular objects or places
    • A62C3/16—Fire prevention, containment or extinguishing specially adapted for particular objects or places in electrical installations, e.g. cableways

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Management (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Business, Economics & Management (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE602004019835T 2003-04-22 2004-04-20 Träger und Verfahren zur Herstellung eines Trägers Expired - Lifetime DE602004019835D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03076171 2003-04-22
EP03077038 2003-06-30

Publications (1)

Publication Number Publication Date
DE602004019835D1 true DE602004019835D1 (de) 2009-04-23

Family

ID=33542555

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004019835T Expired - Lifetime DE602004019835D1 (de) 2003-04-22 2004-04-20 Träger und Verfahren zur Herstellung eines Trägers

Country Status (7)

Country Link
US (1) US7064808B1 (de)
JP (1) JP4032040B2 (de)
KR (1) KR100585467B1 (de)
CN (1) CN100451834C (de)
DE (1) DE602004019835D1 (de)
SG (1) SG115678A1 (de)
TW (1) TWI280935B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4738829B2 (ja) * 2005-02-09 2011-08-03 キヤノン株式会社 位置決め装置
JP4791110B2 (ja) * 2005-09-02 2011-10-12 東京エレクトロン株式会社 真空チャンバおよび真空処理装置
JP2007201177A (ja) * 2006-01-26 2007-08-09 Canon Inc 天板、位置決め装置、露光装置及びデバイス製造方法
NL1036843A1 (nl) * 2008-05-23 2009-11-24 Asml Netherlands Bv Support structure, lithographic apparatus and method.
US8997996B2 (en) * 2013-03-18 2015-04-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
WO2015153774A1 (en) * 2014-04-02 2015-10-08 Zygo Corporation Photo-masks for lithography
JP6658790B2 (ja) * 2018-04-19 2020-03-04 大日本印刷株式会社 蒸着マスク、フレーム付き蒸着マスク、蒸着マスク準備体、蒸着マスクの製造方法、有機半導体素子の製造方法、有機ｅｌディスプレイの製造方法、及びパターンの形成方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5523193A (en) 1988-05-31 1996-06-04 Texas Instruments Incorporated Method and apparatus for patterning and imaging member
US5296891A (en) 1990-05-02 1994-03-22 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Illumination device
JP2677913B2 (ja) * 1991-05-13 1997-11-17 三菱電機株式会社 半導体製造装置のシール機構および半導体装置の製造方法
US5229872A (en) 1992-01-21 1993-07-20 Hughes Aircraft Company Exposure device including an electrically aligned electronic mask for micropatterning
EP0824722B1 (de) 1996-03-06 2001-07-25 Asm Lithography B.V. Differential-interferometer-system und lithographischer "step and scan" apparat ausgestattet mit diesem system
JPH1050584A (ja) * 1996-08-07 1998-02-20 Nikon Corp マスク保持装置
DE69717975T2 (de) 1996-12-24 2003-05-28 Asml Netherlands Bv In zwei richtungen ausgewogenes positioniergerät, sowie lithographisches gerät mit einem solchen positioniergerät
DE69711929T2 (de) 1997-01-29 2002-09-05 Micronic Laser Systems Ab Taeb Verfahren und gerät zur erzeugung eines musters auf einem mit fotoresist beschichteten substrat mittels fokusiertem laserstrahl
SE509062C2 (sv) 1997-02-28 1998-11-30 Micronic Laser Systems Ab Dataomvandlingsmetod för en laserskrivare med flera strålar för mycket komplexa mikrokolitografiska mönster
USRE40043E1 (en) 1997-03-10 2008-02-05 Asml Netherlands B.V. Positioning device having two object holders
JPH11142555A (ja) * 1997-11-11 1999-05-28 Canon Inc 位置決め装置、露光装置およびデバイス製造方法
JP3483452B2 (ja) * 1998-02-04 2004-01-06 キヤノン株式会社 ステージ装置および露光装置、ならびにデバイス製造方法
DE19805875C1 (de) 1998-02-13 1999-04-08 Schott Glas Trägertisch für eine Photomaske in einer Vorrichtung zur Mikrochip-Herstellung
US6188150B1 (en) 1999-06-16 2001-02-13 Euv, Llc Light weight high-stiffness stage platen
US6353271B1 (en) 1999-10-29 2002-03-05 Euv, Llc Extreme-UV scanning wafer and reticle stages
TW504605B (en) * 1999-12-03 2002-10-01 Asm Lithography Bv Lithographic projection apparatus, method of manufacturing a device using the same, the device and mask
JP2002305138A (ja) * 2001-04-05 2002-10-18 Nikon Corp 露光装置および露光方法
US20020159046A1 (en) * 2001-04-27 2002-10-31 Nikon Corporation Base assembly for a stage chamber of a wafer manufacturing system
US7034924B2 (en) * 2004-01-12 2006-04-25 Aslm Netherlands B.V. Lithographic apparatus and device manufacturing method
US7012264B2 (en) * 2004-06-04 2006-03-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
CN1540446A (zh) 2004-10-27
SG115678A1 (en) 2005-10-28
US7064808B1 (en) 2006-06-20
JP2004343097A (ja) 2004-12-02
TWI280935B (en) 2007-05-11
TW200424106A (en) 2004-11-16
KR100585467B1 (ko) 2006-06-07
JP4032040B2 (ja) 2008-01-16
KR20040093408A (ko) 2004-11-05
CN100451834C (zh) 2009-01-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition