SE521415C2 - Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden - Google Patents

Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden

Info

Publication number
SE521415C2
SE521415C2 SE9800462A SE9800462A SE521415C2 SE 521415 C2 SE521415 C2 SE 521415C2 SE 9800462 A SE9800462 A SE 9800462A SE 9800462 A SE9800462 A SE 9800462A SE 521415 C2 SE521415 C2 SE 521415C2
Authority
SE
Sweden
Prior art keywords
detector
conductive
ridge
ridges
column
Prior art date
Application number
SE9800462A
Other languages
English (en)
Swedish (sv)
Other versions
SE9800462D0 (sv
SE9800462L (sv
Inventor
Hans Goeran Evald Martin
Per Ove Oehman
Original Assignee
Hans Goeran Evald Martin
Per Ove Oehman
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hans Goeran Evald Martin, Per Ove Oehman filed Critical Hans Goeran Evald Martin
Priority to SE9800462A priority Critical patent/SE521415C2/sv
Publication of SE9800462D0 publication Critical patent/SE9800462D0/xx
Priority to SE9800839A priority patent/SE522989C2/sv
Priority to CA002320919A priority patent/CA2320919A1/en
Priority to JP2000531864A priority patent/JP2002503556A/ja
Priority to CA002320920A priority patent/CA2320920A1/en
Priority to EP99906636A priority patent/EP1057006B1/en
Priority to DE69943160T priority patent/DE69943160D1/de
Priority to EP99906637A priority patent/EP1057213A2/en
Priority to JP2000531725A priority patent/JP4401021B2/ja
Priority to AU26494/99A priority patent/AU2649499A/en
Priority to PCT/SE1999/000145 priority patent/WO1999041592A1/en
Priority to CNB998051241A priority patent/CN1174237C/zh
Priority to US09/622,398 priority patent/US6372542B1/en
Priority to PCT/SE1999/000146 priority patent/WO1999041772A2/en
Priority to AT99906636T priority patent/ATE497156T1/de
Priority to AU26493/99A priority patent/AU748969B2/en
Publication of SE9800462L publication Critical patent/SE9800462L/xx
Publication of SE521415C2 publication Critical patent/SE521415C2/sv

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3696—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier by moulding, e.g. injection moulding, casting, embossing, stamping, stenciling, printing, or with metallic mould insert manufacturing using LIGA or MIGA techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/81—Structural details of the junction
    • H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/034—Moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Hardware Design (AREA)
  • General Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Optical Measuring Cells (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
SE9800462A 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden SE521415C2 (sv)

Priority Applications (16)

Application Number Priority Date Filing Date Title
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden
SE9800839A SE522989C2 (sv) 1998-02-17 1998-03-13 Metod för komponentframställning
AU26493/99A AU748969B2 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
JP2000531725A JP4401021B2 (ja) 1998-02-17 1999-02-04 ガス・センサに属する検出器を製作する方法およびこの方法に従って製作した検出器
AU26494/99A AU2649499A (en) 1998-02-17 1999-02-04 A method of component manufacture
CA002320920A CA2320920A1 (en) 1998-02-17 1999-02-04 A method of component manufacture
EP99906636A EP1057006B1 (en) 1998-02-17 1999-02-04 A method of producing a detector arrangement including a gas sensor, and a detector arrangement produced in accordance with the method
DE69943160T DE69943160D1 (de) 1998-02-17 1999-02-04 Verfahren zur herstellung einer detektoranordnung einschliesslich eines gassensors und mit diesem verfahren hergestellte detektoranordnung
EP99906637A EP1057213A2 (en) 1998-02-17 1999-02-04 A method of component manufacture
CA002320919A CA2320919A1 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
JP2000531864A JP2002503556A (ja) 1998-02-17 1999-02-04 素子製造方法
PCT/SE1999/000145 WO1999041592A1 (en) 1998-02-17 1999-02-04 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
CNB998051241A CN1174237C (zh) 1998-02-17 1999-02-04 制造属于气敏传感器的检测器的方法和根据该方法制造的检测器
US09/622,398 US6372542B1 (en) 1998-02-17 1999-02-04 Method of component manufacture
PCT/SE1999/000146 WO1999041772A2 (en) 1998-02-17 1999-02-04 A method of component manufacture
AT99906636T ATE497156T1 (de) 1998-02-17 1999-02-04 Verfahren zur herstellung einer detektoranordnung einschliesslich eines gassensors und mit diesem verfahren hergestellte detektoranordnung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden

Publications (3)

Publication Number Publication Date
SE9800462D0 SE9800462D0 (sv) 1998-02-17
SE9800462L SE9800462L (sv) 1999-08-18
SE521415C2 true SE521415C2 (sv) 2003-10-28

Family

ID=20410206

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9800462A SE521415C2 (sv) 1998-02-17 1998-02-17 Metod för att framställa en gassensortillhörig detektor, samt en detektor framställd enligt metoden

Country Status (10)

Country Link
US (1) US6372542B1 (ja)
EP (2) EP1057006B1 (ja)
JP (2) JP2002503556A (ja)
CN (1) CN1174237C (ja)
AT (1) ATE497156T1 (ja)
AU (2) AU2649499A (ja)
CA (2) CA2320920A1 (ja)
DE (1) DE69943160D1 (ja)
SE (1) SE521415C2 (ja)
WO (2) WO1999041592A1 (ja)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6911349B2 (en) * 2001-02-16 2005-06-28 Boxer Cross Inc. Evaluating sidewall coverage in a semiconductor wafer
WO2004029221A2 (en) * 2002-09-27 2004-04-08 The General Hospital Corporation Microfluidic device for cell separation and uses thereof
SE526006C2 (sv) * 2003-04-29 2005-06-14 Senseair Ab Behandlat tunnfilmssubstrat
JP4547385B2 (ja) * 2003-12-12 2010-09-22 イーエルティー インコーポレイテッド ガスセンサ
KR100494103B1 (ko) * 2003-12-12 2005-06-10 (주)이엘티 광학적 가스 센서
US20090284745A1 (en) * 2004-10-18 2009-11-19 Seung-Hwan Yi Gas cell using two parabolic concave mirrors and method of producing gas sensor using the same
EP1874920A4 (en) * 2005-04-05 2009-11-04 Cellpoint Diagnostics DEVICES AND METHODS FOR ENRICHING AND MODIFYING CIRCULATING TUMOR CELLS AND OTHER PARTICLES
EP1894242A2 (en) * 2005-06-06 2008-03-05 Nxp B.V. Method for manufacturing a crossbar circuit device
US8921102B2 (en) 2005-07-29 2014-12-30 Gpb Scientific, Llc Devices and methods for enrichment and alteration of circulating tumor cells and other particles
SE0802069A1 (sv) 2008-09-30 2010-03-31 Senseair Ab Ett för en spektralanalys av höga gaskoncentrationer anpassat arrangemang
CN103582816B (zh) 2011-04-06 2017-04-19 奥索临床诊断有限公司 具有斜方形突出的测定装置
US9541480B2 (en) 2011-06-29 2017-01-10 Academia Sinica Capture, purification, and release of biological substances using a surface coating
BR102013001395A2 (pt) 2012-01-20 2015-11-17 Ortho Clinical Diagnostics Inc dispositivo de ensaio tendo múltiplas células de reagentes
JP6395999B2 (ja) 2012-01-20 2018-09-26 オーソ−クリニカル・ダイアグノスティックス・インコーポレイテッドＯｒｔｈｏ−Ｃｌｉｎｉｃａｌ Ｄｉａｇｎｏｓｔｉｃｓ， Ｉｎｃ． アッセイ装置を通じた流体流の制御
US8895293B2 (en) 2012-01-20 2014-11-25 Ortho-Clinical Diagnostics, Inc. Assay device having uniform flow around corners
WO2013109821A1 (en) 2012-01-20 2013-07-25 Ortho-Clinical Diagnostics, Inc. Assay device having multiplexing
CA2802645C (en) 2012-01-20 2020-08-11 Ortho-Clinical Diagnostics, Inc. Assay device having controllable sample size
DE102012203792A1 (de) * 2012-03-12 2013-09-12 Siemens Aktiengesellschaft Infrarotsensor, Wärmebildkamera und Verfahren zum Herstellen einer Mikrostruktur aus thermoelektrischen Sensorstäben
KR101358245B1 (ko) 2012-03-19 2014-02-07 연세대학교 산학협력단 수소 센서 및 수소 센서 제조 방법
CA2818332C (en) 2012-06-12 2021-07-20 Ortho-Clinical Diagnostics, Inc. Lateral flow assay devices for use in clinical diagnostic apparatus and configuration of clinical diagnostic apparatus for same
CA3129014A1 (en) 2012-11-15 2014-05-15 Ortho-Clinical Diagnostics, Inc. Quality/process control of a lateral flow assay device based on flow monitoring
RU2015121732A (ru) 2012-11-15 2017-01-10 Орто-Клиникал Дайэгностикс, Инк. Калибровка анализов с использованием времени реакции
CA2841692C (en) 2013-02-12 2023-08-22 Zhong Ding Reagent zone deposition pattern
EP2777499B1 (en) 2013-03-15 2015-09-16 Ortho-Clinical Diagnostics Inc Rotatable fluid sample collection device
EP2778679B1 (en) 2013-03-15 2017-09-27 Ortho-Clinical Diagnostics, Inc. Rotable disk-shaped fluid sample collection device
DE102013218840A1 (de) * 2013-09-19 2015-03-19 Robert Bosch Gmbh Mikroheizplattenvorrichtung und Sensor mit einer Mikroheizplattenvorrichtung
ES2756124T3 (es) 2013-12-06 2020-04-27 Ortho Clinical Diagnostics Inc Dispositivo de ensayo que tiene un puerto de lavado
TW201623605A (zh) 2014-04-01 2016-07-01 中央研究院 用於癌症診斷及預後之方法及系統
US10031085B2 (en) 2014-07-24 2018-07-24 Ortho-Clinical Diagnostics, Inc. Point of care analytical processing system
US10073091B2 (en) 2014-08-08 2018-09-11 Ortho-Clinical Diagnostics, Inc. Lateral flow assay device
US11033896B2 (en) 2014-08-08 2021-06-15 Ortho-Clinical Diagnostics, Inc. Lateral-flow assay device with filtration flow control
US10071373B2 (en) 2014-08-08 2018-09-11 Ortho-Clinical Diagnostics, Inc. Lateral-flow assay device having flow constrictions
US10112198B2 (en) 2014-08-26 2018-10-30 Academia Sinica Collector architecture layout design
US11002732B2 (en) 2015-05-19 2021-05-11 Ortho-Clinical Diagnostics, Inc. Method of improving liquid sample flow in assay device
US10107726B2 (en) 2016-03-16 2018-10-23 Cellmax, Ltd. Collection of suspended cells using a transferable membrane
DE102017217120A1 (de) * 2017-09-26 2019-03-28 Mahle International Gmbh Verfahren zum Beschichten von Substraten mit thermoelektrisch aktivem Material

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB849983A (en) * 1956-08-18 1960-09-28 Hartmann & Braun Ag Method and apparatus for the analysis by radiation of mixtures of gases and/or vapours
IL45788A (en) * 1974-10-04 1977-11-30 Yeda Res & Dev Thermoelectric detector
US4772790A (en) * 1986-10-14 1988-09-20 Teledyne Industries, Inc. Non-dispersive optical gas analyzer
CH680541A5 (ja) * 1990-07-12 1992-09-15 Landis & Gyr Betriebs Ag
JP3160940B2 (ja) * 1991-05-17 2001-04-25 株式会社村田製作所 サーモパイル
US5716218A (en) * 1991-06-04 1998-02-10 Micron Technology, Inc. Process for manufacturing an interconnect for testing a semiconductor die
JPH054232A (ja) * 1991-06-25 1993-01-14 Tohoku Nakatani:Kk 金型製造法
JPH0512722A (ja) * 1991-07-05 1993-01-22 Tohoku Nakatani:Kk スタンパー製造方法
JPH0614936U (ja) * 1991-10-29 1994-02-25 日本セラミック株式会社 焦電型赤外線センサ及びその電極の製造方法
US5268782A (en) * 1992-01-16 1993-12-07 Minnesota Mining And Manufacturing Company Micro-ridged, polymeric liquid crystal display substrate and display device
GB9209912D0 (en) * 1992-05-08 1992-06-24 Winslow Int Ltd Mounting arrangement for an intergrated circuit chip carrier
JP3245308B2 (ja) * 1994-08-26 2002-01-15 日本碍子株式会社 半導体装置の製造方法
JPH08225929A (ja) * 1995-02-23 1996-09-03 Matsushita Electric Ind Co Ltd レーザ・アブレーションを用いた薄膜形成法およびレーザ・アブレーション装置
JPH08306080A (ja) * 1995-04-28 1996-11-22 Sony Corp 情報記録媒体及びその成形型
JPH08306978A (ja) * 1995-05-10 1996-11-22 Hitachi Cable Ltd 酸化物薄膜の製造方法および装置
JPH0936440A (ja) * 1995-07-21 1997-02-07 Osaka Gas Co Ltd 熱電材料の作製方法
JPH09175835A (ja) * 1995-12-25 1997-07-08 Toyota Motor Corp 表面加工方法
JP2955224B2 (ja) * 1995-12-28 1999-10-04 花王株式会社 光ディスク用基板の製造方法
JPH09184803A (ja) * 1995-12-29 1997-07-15 Horiba Ltd 赤外線ガス分析計
JPH09229858A (ja) * 1996-02-20 1997-09-05 Horiba Ltd 赤外線ガス分析計
JP3376203B2 (ja) * 1996-02-28 2003-02-10 株式会社東芝 半導体装置とその製造方法及びこの半導体装置を用いた実装構造体とその製造方法
JP3716504B2 (ja) * 1996-08-05 2005-11-16 富士ゼロックス株式会社 微小構造体の製造方法および装置
GB9616809D0 (en) * 1996-08-10 1996-09-25 Eev Ltd Gas monitors
US5894108A (en) * 1997-02-11 1999-04-13 National Semiconductor Corporation Plastic package with exposed die
KR100279293B1 (ko) * 1998-09-18 2001-03-02 윤종용 마이크로 볼 그리드 어레이 패키지에 의해서 포장되는 반도체장치
KR100338983B1 (ko) * 1998-11-30 2002-07-18 윤종용 웨이퍼분리도구및이를이용하는웨이퍼분리방법
FR2787241B1 (fr) * 1998-12-14 2003-01-31 Ela Medical Sa Composant microelectronique cms enrobe, notamment pour un dispositif medical implantable actif, et son procede de fabrication
US6271048B1 (en) * 2000-10-20 2001-08-07 Unisys Corporation Process for recycling a substrate from an integrated circuit package

Also Published As

Publication number Publication date
AU748969B2 (en) 2002-06-13
ATE497156T1 (de) 2011-02-15
WO1999041772A3 (en) 1999-11-04
SE9800462D0 (sv) 1998-02-17
EP1057006B1 (en) 2011-01-26
JP4401021B2 (ja) 2010-01-20
CN1297530A (zh) 2001-05-30
WO1999041592A1 (en) 1999-08-19
SE9800462L (sv) 1999-08-18
JP2002503806A (ja) 2002-02-05
CA2320920A1 (en) 1999-08-19
EP1057213A2 (en) 2000-12-06
DE69943160D1 (de) 2011-03-10
AU2649399A (en) 1999-08-30
CA2320919A1 (en) 1999-08-19
US6372542B1 (en) 2002-04-16
WO1999041772A2 (en) 1999-08-19
JP2002503556A (ja) 2002-02-05
AU2649499A (en) 1999-08-30
CN1174237C (zh) 2004-11-03
EP1057006A1 (en) 2000-12-06

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