RU2603675C2 - Композиция для нанесения металлического покрытия посредством электролитического осаждения, содержащая выравнивающий агент - Google Patents
Композиция для нанесения металлического покрытия посредством электролитического осаждения, содержащая выравнивающий агент Download PDFInfo
- Publication number
- RU2603675C2 RU2603675C2 RU2012157535/05A RU2012157535A RU2603675C2 RU 2603675 C2 RU2603675 C2 RU 2603675C2 RU 2012157535/05 A RU2012157535/05 A RU 2012157535/05A RU 2012157535 A RU2012157535 A RU 2012157535A RU 2603675 C2 RU2603675 C2 RU 2603675C2
- Authority
- RU
- Russia
- Prior art keywords
- copper
- deposition
- present
- electrolytic
- compound
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/0605—Polycondensates containing five-membered rings, not condensed with other rings, with nitrogen atoms as the only ring hetero atoms
- C08G73/0616—Polycondensates containing five-membered rings, not condensed with other rings, with nitrogen atoms as the only ring hetero atoms with only two nitrogen atoms in the ring
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/30—Electroplating: Baths therefor from solutions of tin
- C25D3/32—Electroplating: Baths therefor from solutions of tin characterised by the organic bath constituents used
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/58—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US35004510P | 2010-06-01 | 2010-06-01 | |
| US61/350,045 | 2010-06-01 | ||
| PCT/IB2011/052385 WO2011151785A1 (en) | 2010-06-01 | 2011-05-31 | Composition for metal electroplating comprising leveling agent |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2012157535A RU2012157535A (ru) | 2014-07-20 |
| RU2603675C2 true RU2603675C2 (ru) | 2016-11-27 |
Family
ID=45066252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2012157535/05A RU2603675C2 (ru) | 2010-06-01 | 2011-05-31 | Композиция для нанесения металлического покрытия посредством электролитического осаждения, содержащая выравнивающий агент |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US9683302B2 (OSRAM) |
| EP (1) | EP2576696B1 (OSRAM) |
| JP (1) | JP5933532B2 (OSRAM) |
| KR (3) | KR101829866B1 (OSRAM) |
| CN (1) | CN102939339B (OSRAM) |
| IL (1) | IL223183B (OSRAM) |
| MY (1) | MY164464A (OSRAM) |
| RU (1) | RU2603675C2 (OSRAM) |
| SG (2) | SG185736A1 (OSRAM) |
| TW (1) | TWI539036B (OSRAM) |
| WO (1) | WO2011151785A1 (OSRAM) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2013133648A (ru) | 2010-12-21 | 2015-01-27 | Басф Се | Композиция для электролитического осаждения металлов, содержащая выравнивающий агент |
| US9243339B2 (en) * | 2012-05-25 | 2016-01-26 | Trevor Pearson | Additives for producing copper electrodeposits having low oxygen content |
| US10196751B2 (en) | 2013-11-06 | 2019-02-05 | Rohm And Haas Electronic Materials Llc | Nitrogen containing polymers as levelers |
| WO2016020214A1 (en) * | 2014-08-06 | 2016-02-11 | Basf Se | Process for preparing polymeric, ionic imidazolium compounds of high molecular weight |
| EP3177671A1 (en) * | 2014-08-06 | 2017-06-14 | Basf Se | Improved process for preparing polymeric, ionic imidazolium compounds |
| JP2018517793A (ja) | 2015-04-28 | 2018-07-05 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | 電気めっき浴用の添加剤としてのビス無水物及びジアミンの反応生成物 |
| US9932684B2 (en) | 2015-08-06 | 2018-04-03 | Rohm And Haas Electronic Materials Llc | Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of alpha amino acids and bisepoxides |
| US10100421B2 (en) * | 2015-08-06 | 2018-10-16 | Dow Global Technologies Llc | Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of imidazole and bisepoxide compounds |
| US10006136B2 (en) * | 2015-08-06 | 2018-06-26 | Dow Global Technologies Llc | Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of imidazole compounds, bisepoxides and halobenzyl compounds |
| TWI608132B (zh) | 2015-08-06 | 2017-12-11 | 羅門哈斯電子材料有限公司 | 自含有吡啶基烷基胺及雙環氧化物之反應產物的銅電鍍覆浴液電鍍覆光阻劑限定之特徵的方法 |
| US20170067173A1 (en) * | 2015-09-09 | 2017-03-09 | Rohm And Haas Electronic Materials Llc | Acid copper electroplating bath and method for electroplating low internal stress and good ductility copper deposits |
| AU2016355706B2 (en) * | 2015-11-20 | 2020-02-06 | Hexion Inc. | Chemical products for surface protection |
| US10100420B2 (en) | 2015-12-29 | 2018-10-16 | Hong Kong Applied Science and Technology Research Institute Company Limtied | Plating leveler for electrodeposition of copper pillar |
| US10519557B2 (en) * | 2016-02-12 | 2019-12-31 | Macdermid Enthone Inc. | Leveler compositions for use in copper deposition in manufacture of microelectronics |
| US10190228B2 (en) * | 2016-03-29 | 2019-01-29 | Rohm And Haas Electronic Materials Llc | Copper electroplating baths and electroplating methods capable of electroplating megasized photoresist defined features |
| WO2018057590A1 (en) * | 2016-09-22 | 2018-03-29 | Macdermid Enthone Inc. | Copper deposition in wafer level packaging of integrated circuits |
| WO2018073011A1 (en) | 2016-10-20 | 2018-04-26 | Basf Se | Composition for metal plating comprising suppressing agent for void free submicron feature filling |
| EP3559317B1 (en) * | 2016-12-20 | 2025-02-12 | Basf Se | Composition for metal plating comprising suppressing agent for void free filling |
| US11535946B2 (en) | 2017-06-01 | 2022-12-27 | Basf Se | Composition for tin or tin alloy electroplating comprising leveling agent |
| KR102641595B1 (ko) | 2017-09-04 | 2024-02-27 | 바스프 에스이 | 평탄화 제제를 포함하는 금속 전기 도금용 조성물 |
| EP3511444B1 (en) * | 2018-01-16 | 2020-07-22 | ATOTECH Deutschland GmbH | Metal or metal alloy deposition composition and plating compound |
| KR102483615B1 (ko) * | 2018-01-24 | 2023-01-03 | 삼성전기주식회사 | 비스-아릴 암모늄 화합물을 포함하는 도금용 평탄제 및 이를 이용한 구리 도금 방법 |
| WO2019201623A2 (en) * | 2018-04-19 | 2019-10-24 | Basf Se | Composition for cobalt or cobalt alloy electroplating |
| KR102662397B1 (ko) * | 2018-10-23 | 2024-05-02 | 솔브레인 주식회사 | 전기도금 조성물 및 전기도금 방법 |
| CN114450438A (zh) | 2019-09-27 | 2022-05-06 | 巴斯夫欧洲公司 | 用于铜凸块电沉积的包含流平剂的组合物 |
| CN114514339A (zh) | 2019-09-27 | 2022-05-17 | 巴斯夫欧洲公司 | 用于铜凸块电沉积的包含流平剂的组合物 |
| CN110938847B (zh) * | 2019-10-30 | 2021-11-12 | 苏州清飙科技有限公司 | 电镀铜整平剂及其制备方法、以及电镀液 |
| EP4127025B1 (en) | 2020-04-03 | 2025-10-01 | Basf Se | Composition for copper bump electrodeposition comprising a polyaminoamide type leveling agent |
| EP3922662A1 (en) | 2020-06-10 | 2021-12-15 | Basf Se | Polyalkanolamine |
| KR20230037553A (ko) | 2020-07-13 | 2023-03-16 | 바스프 에스이 | 코발트 시드 상의 구리 전기도금을 위한 조성물 |
| KR102339868B1 (ko) * | 2021-07-30 | 2021-12-16 | 와이엠티 주식회사 | 레벨링제 및 이를 포함하는 비아홀 충진을 위한 전기도금 조성물 |
| US20250129503A1 (en) | 2021-10-01 | 2025-04-24 | Basf Se | Composition for copper electrodeposition comprising a polyaminoamide type leveling agent |
| EP4551742A1 (en) | 2022-07-07 | 2025-05-14 | Basf Se | Use of a composition comprising a polyaminoamide type compound for copper nanotwin electrodeposition |
| CN120457244A (zh) | 2022-12-19 | 2025-08-08 | 巴斯夫欧洲公司 | 用于铜纳米孪晶电沉积的组合物 |
| WO2025026863A1 (en) | 2023-08-03 | 2025-02-06 | Basf Se | Composition for copper electroplating on a metal seed |
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| KR20080027618A (ko) * | 2006-09-25 | 2008-03-28 | 에스케이에너지 주식회사 | 이미다졸린계 부식억제제 조성물 |
| RU2334831C2 (ru) * | 2006-10-31 | 2008-09-27 | Федеральное государственное унитарное предприятие "Калужский научно-исследовательский институт телемеханических устройств" | Электролит меднения |
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| JPH04202305A (ja) * | 1990-11-29 | 1992-07-23 | Sanyo Chem Ind Ltd | 4級塩変性スチレン系樹脂 |
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| FR2773991B1 (fr) | 1998-01-26 | 2000-05-26 | Oreal | Utilisation a titre d'agent protecteur des fibres keratiniques de polymeres de polyammonium quaternaire heterocyclique et compositions cosmetiques |
| JP2001073182A (ja) | 1999-07-15 | 2001-03-21 | Boc Group Inc:The | 改良された酸性銅電気メッキ用溶液 |
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| US7771579B2 (en) | 2004-12-03 | 2010-08-10 | Taiwan Semiconductor Manufacturing Co. | Electro chemical plating additives for improving stress and leveling effect |
| US7662981B2 (en) | 2005-07-16 | 2010-02-16 | Rohm And Haas Electronic Materials Llc | Leveler compounds |
| JP2008195990A (ja) * | 2007-02-09 | 2008-08-28 | Dipsol Chem Co Ltd | 電気アルミニウムめっき浴及びそれを用いためっき方法 |
| PL2229367T3 (pl) * | 2007-12-12 | 2015-08-31 | Basf Se | Sposób wytwarzania dipodstawionych soli imidazoliowych |
| EP2093278A1 (de) * | 2008-02-05 | 2009-08-26 | Evonik Goldschmidt GmbH | Performance-Additive zur Verbesserung der Benetzungseigenschaften von ionischen Flüssigkeiten auf festen Oberflächen |
| EP2199315B1 (en) | 2008-12-19 | 2013-12-11 | Basf Se | Composition for metal electroplating comprising leveling agent |
| KR101701526B1 (ko) | 2008-12-22 | 2017-02-01 | 바스프 에스이 | 중합체 이온성 이미다졸륨 화합물의 제조 방법 |
-
2011
- 2011-05-31 WO PCT/IB2011/052385 patent/WO2011151785A1/en not_active Ceased
- 2011-05-31 KR KR1020137000075A patent/KR101829866B1/ko active Active
- 2011-05-31 KR KR1020187023375A patent/KR101955869B1/ko active Active
- 2011-05-31 MY MYPI2012005096A patent/MY164464A/en unknown
- 2011-05-31 US US13/701,217 patent/US9683302B2/en active Active
- 2011-05-31 TW TW100119130A patent/TWI539036B/zh active
- 2011-05-31 CN CN201180027324.9A patent/CN102939339B/zh active Active
- 2011-05-31 KR KR1020187004069A patent/KR101891473B1/ko active Active
- 2011-05-31 SG SG2012086377A patent/SG185736A1/en unknown
- 2011-05-31 JP JP2013513029A patent/JP5933532B2/ja active Active
- 2011-05-31 SG SG10201504251WA patent/SG10201504251WA/en unknown
- 2011-05-31 EP EP11789339.6A patent/EP2576696B1/en active Active
- 2011-05-31 RU RU2012157535/05A patent/RU2603675C2/ru not_active IP Right Cessation
-
2012
- 2012-11-22 IL IL223183A patent/IL223183B/en active IP Right Grant
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080027618A (ko) * | 2006-09-25 | 2008-03-28 | 에스케이에너지 주식회사 | 이미다졸린계 부식억제제 조성물 |
| RU2334831C2 (ru) * | 2006-10-31 | 2008-09-27 | Федеральное государственное унитарное предприятие "Калужский научно-исследовательский институт телемеханических устройств" | Электролит меднения |
Also Published As
| Publication number | Publication date |
|---|---|
| MY164464A (en) | 2017-12-15 |
| IL223183A0 (en) | 2013-02-03 |
| KR20130112018A (ko) | 2013-10-11 |
| KR20180017244A (ko) | 2018-02-20 |
| KR101955869B1 (ko) | 2019-03-07 |
| KR101829866B1 (ko) | 2018-02-20 |
| CN102939339B (zh) | 2016-02-17 |
| TW201211321A (en) | 2012-03-16 |
| CN102939339A (zh) | 2013-02-20 |
| IL223183B (en) | 2018-03-29 |
| EP2576696A1 (en) | 2013-04-10 |
| KR20180094140A (ko) | 2018-08-22 |
| WO2011151785A1 (en) | 2011-12-08 |
| TWI539036B (zh) | 2016-06-21 |
| EP2576696A4 (en) | 2014-07-16 |
| SG10201504251WA (en) | 2015-07-30 |
| JP5933532B2 (ja) | 2016-06-15 |
| EP2576696B1 (en) | 2017-10-04 |
| US20130068626A1 (en) | 2013-03-21 |
| SG185736A1 (en) | 2012-12-28 |
| US9683302B2 (en) | 2017-06-20 |
| JP2013527325A (ja) | 2013-06-27 |
| RU2012157535A (ru) | 2014-07-20 |
| KR101891473B1 (ko) | 2018-08-27 |
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| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20170601 |