RU2540611C2 - Способ обработки монокристаллического cvd-алмаза и полученный продукт - Google Patents
Способ обработки монокристаллического cvd-алмаза и полученный продукт Download PDFInfo
- Publication number
- RU2540611C2 RU2540611C2 RU2011151979/05A RU2011151979A RU2540611C2 RU 2540611 C2 RU2540611 C2 RU 2540611C2 RU 2011151979/05 A RU2011151979/05 A RU 2011151979/05A RU 2011151979 A RU2011151979 A RU 2011151979A RU 2540611 C2 RU2540611 C2 RU 2540611C2
- Authority
- RU
- Russia
- Prior art keywords
- diamond material
- cvd
- diamond
- absorption
- concentration
- Prior art date
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 455
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 426
- 238000000034 method Methods 0.000 title claims abstract description 171
- 238000012545 processing Methods 0.000 title description 2
- 239000000463 material Substances 0.000 claims abstract description 311
- 230000007547 defect Effects 0.000 claims abstract description 133
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 128
- 238000000137 annealing Methods 0.000 claims abstract description 98
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 69
- 238000010521 absorption reaction Methods 0.000 claims description 119
- 230000008569 process Effects 0.000 claims description 55
- 238000000862 absorption spectrum Methods 0.000 claims description 53
- 239000013078 crystal Substances 0.000 claims description 38
- 230000015572 biosynthetic process Effects 0.000 claims description 33
- 229910052760 oxygen Inorganic materials 0.000 claims description 26
- 239000007789 gas Substances 0.000 claims description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 24
- 239000001301 oxygen Substances 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 15
- 229910052796 boron Inorganic materials 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 238000003786 synthesis reaction Methods 0.000 claims description 14
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims description 13
- 239000001257 hydrogen Substances 0.000 claims description 13
- 239000012634 fragment Substances 0.000 claims description 12
- 230000001678 irradiating effect Effects 0.000 claims description 11
- 239000002243 precursor Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000010572 single replacement reaction Methods 0.000 claims description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 8
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 48
- 238000001228 spectrum Methods 0.000 description 41
- 230000005855 radiation Effects 0.000 description 25
- 239000010410 layer Substances 0.000 description 19
- 230000003287 optical effect Effects 0.000 description 19
- 239000010437 gem Substances 0.000 description 13
- 230000003595 spectral effect Effects 0.000 description 12
- 238000011282 treatment Methods 0.000 description 12
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 230000007935 neutral effect Effects 0.000 description 10
- 238000004435 EPR spectroscopy Methods 0.000 description 9
- 235000019646 color tone Nutrition 0.000 description 9
- 229910001751 gemstone Inorganic materials 0.000 description 9
- 238000010186 staining Methods 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 7
- 125000004429 atom Chemical group 0.000 description 7
- 238000004040 coloring Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 238000005424 photoluminescence Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000002096 quantum dot Substances 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 239000003086 colorant Substances 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000004575 stone Substances 0.000 description 5
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 229910052805 deuterium Inorganic materials 0.000 description 4
- 238000001362 electron spin resonance spectrum Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000002609 medium Substances 0.000 description 4
- 125000004433 nitrogen atom Chemical group N* 0.000 description 4
- 238000004611 spectroscopical analysis Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000005291 magnetic effect Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000000411 transmission spectrum Methods 0.000 description 3
- 238000001429 visible spectrum Methods 0.000 description 3
- OKTJSMMVPCPJKN-IGMARMGPSA-N Carbon-12 Chemical compound [12C] OKTJSMMVPCPJKN-IGMARMGPSA-N 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- 238000004847 absorption spectroscopy Methods 0.000 description 2
- 239000000370 acceptor Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- OKTJSMMVPCPJKN-OUBTZVSYSA-N Carbon-13 Chemical compound [13C] OKTJSMMVPCPJKN-OUBTZVSYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000005355 Hall effect Effects 0.000 description 1
- 101001018064 Homo sapiens Lysosomal-trafficking regulator Proteins 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 102100033472 Lysosomal-trafficking regulator Human genes 0.000 description 1
- 235000010703 Modiola caroliniana Nutrition 0.000 description 1
- 244000038561 Modiola caroliniana Species 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 238000004854 X-ray topography Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000007707 calorimetry Methods 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000010351 charge transfer process Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001149 cognitive effect Effects 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000001963 growth medium Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 230000000155 isotopic effect Effects 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000005404 magnetometry Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000011369 optimal treatment Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000005298 paramagnetic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000013074 reference sample Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- SWGJCIMEBVHMTA-UHFFFAOYSA-K trisodium;6-oxido-4-sulfo-5-[(4-sulfonatonaphthalen-1-yl)diazenyl]naphthalene-2-sulfonate Chemical compound [Na+].[Na+].[Na+].C1=CC=C2C(N=NC3=C4C(=CC(=CC4=CC=C3O)S([O-])(=O)=O)S([O-])(=O)=O)=CC=C(S([O-])(=O)=O)C2=C1 SWGJCIMEBVHMTA-UHFFFAOYSA-K 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/25—Diamond
- C01B32/28—After-treatment, e.g. purification, irradiation, separation or recovery
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/20—Doping by irradiation with electromagnetic waves or by particle radiation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Adornments (AREA)
Applications Claiming Priority (11)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0911075.0 | 2009-06-26 | ||
| GB0911075A GB0911075D0 (en) | 2009-06-26 | 2009-06-26 | Diamond material |
| GB0917219.8 | 2009-10-01 | ||
| GB0917219A GB0917219D0 (en) | 2009-10-01 | 2009-10-01 | Diamond material |
| GBGB1003613.5A GB201003613D0 (en) | 2010-03-04 | 2010-03-04 | Diamond material |
| GB1003613.5 | 2010-03-04 | ||
| GBGB1005573.9A GB201005573D0 (en) | 2010-04-01 | 2010-04-01 | Diamond material |
| GB1005573.9 | 2010-04-01 | ||
| GBGB1007728.7A GB201007728D0 (en) | 2010-05-10 | 2010-05-10 | Diamond material |
| GB1007728.7 | 2010-05-10 | ||
| PCT/EP2010/059078 WO2010149775A1 (en) | 2009-06-26 | 2010-06-25 | Method for treating single crystal cvd diamond and product obtained |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2014133182/05A Division RU2580916C1 (ru) | 2009-06-26 | 2010-06-25 | Способ обработки монокристаллического cvd-алмаза и полученный продукт |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2011151979A RU2011151979A (ru) | 2013-08-10 |
| RU2540611C2 true RU2540611C2 (ru) | 2015-02-10 |
Family
ID=42494498
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2011151979/05A RU2540611C2 (ru) | 2009-06-26 | 2010-06-25 | Способ обработки монокристаллического cvd-алмаза и полученный продукт |
| RU2011151873/05A RU2537857C2 (ru) | 2009-06-26 | 2010-06-25 | Алмазный материал |
| RU2011151856/05A RU2497981C2 (ru) | 2009-06-26 | 2010-06-25 | Способ изготовления фантазийно окрашенного оранжевого монокристаллического cvd-алмаза и полученный продукт |
| RU2014133182/05A RU2580916C1 (ru) | 2009-06-26 | 2010-06-25 | Способ обработки монокристаллического cvd-алмаза и полученный продукт |
| RU2011151983/05A RU2540624C2 (ru) | 2009-06-26 | 2010-06-25 | Способ получения фантазийного бледно-синего или фантазийного бледного сине-зеленого монокристаллического cvd-алмаза и полученный продукт |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2011151873/05A RU2537857C2 (ru) | 2009-06-26 | 2010-06-25 | Алмазный материал |
| RU2011151856/05A RU2497981C2 (ru) | 2009-06-26 | 2010-06-25 | Способ изготовления фантазийно окрашенного оранжевого монокристаллического cvd-алмаза и полученный продукт |
| RU2014133182/05A RU2580916C1 (ru) | 2009-06-26 | 2010-06-25 | Способ обработки монокристаллического cvd-алмаза и полученный продукт |
| RU2011151983/05A RU2540624C2 (ru) | 2009-06-26 | 2010-06-25 | Способ получения фантазийного бледно-синего или фантазийного бледного сине-зеленого монокристаллического cvd-алмаза и полученный продукт |
Country Status (10)
| Country | Link |
|---|---|
| EP (4) | EP2446070B1 (enExample) |
| JP (8) | JP5891564B2 (enExample) |
| CN (5) | CN102575379B (enExample) |
| CA (4) | CA2765808C (enExample) |
| IL (4) | IL217011A (enExample) |
| MY (3) | MY159945A (enExample) |
| RU (5) | RU2540611C2 (enExample) |
| SG (5) | SG176889A1 (enExample) |
| TR (1) | TR201816224T4 (enExample) |
| WO (4) | WO2010149779A1 (enExample) |
Families Citing this family (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9255009B2 (en) * | 2009-06-26 | 2016-02-09 | Element Six Technologies Limited | Diamond material |
| EP2446070B1 (en) * | 2009-06-26 | 2018-08-08 | Element Six Technologies Limited | Method for making fancy pale blue or fancy pale blue/green single crystal cvd diamond and product obtained |
| US10273598B2 (en) | 2009-12-22 | 2019-04-30 | Element Six Technologies Limited | Synthetic CVD diamond |
| GB2476478A (en) * | 2009-12-22 | 2011-06-29 | Element Six Ltd | Chemical vapour deposition diamond synthesis |
| WO2011151414A2 (en) | 2010-06-03 | 2011-12-08 | Element Six Limited | Diamond tools |
| GB201107552D0 (en) * | 2011-05-06 | 2011-06-22 | Element Six Ltd | Diamond sensors, detectors, and quantum devices |
| US9658301B2 (en) | 2011-06-13 | 2017-05-23 | President And Fellows Of Harvard College | Absorbtion-based detection of spin impurities in solid-state spin systems |
| GB2492822A (en) * | 2011-07-14 | 2013-01-16 | Element Six Ltd | Modifying diamond components by irradiation |
| GB201121642D0 (en) | 2011-12-16 | 2012-01-25 | Element Six Ltd | Single crtstal cvd synthetic diamond material |
| EP2868780B1 (en) * | 2012-06-29 | 2020-11-04 | Sumitomo Electric Industries, Ltd. | Diamond single crystal and production method thereof, and single crystal diamond tool |
| WO2014051886A1 (en) * | 2012-08-22 | 2014-04-03 | President And Fellows Of Harvard College | Nanoscale scanning sensors |
| GB201216697D0 (en) | 2012-09-19 | 2012-10-31 | Element Six Ltd | Single crystal chemical vapour deposited synthetic diamond materials having uniform colour |
| GB201301556D0 (en) * | 2013-01-29 | 2013-03-13 | Element Six Ltd | Synthetic diamond materials for quantum and optical applications and methods of making the same |
| CN105427899B (zh) * | 2014-09-13 | 2018-08-10 | 董沛 | 反应堆器件辐射损伤的热处理恢复技术 |
| DE102014219561A1 (de) * | 2014-09-26 | 2016-03-31 | Robert Bosch Gmbh | Einrichtung zur Analyse von Substanzen in einer Probe, Atemgasanalysegerät, Kraftstoffsensor und Verfahren |
| GB2540537A (en) * | 2015-07-03 | 2017-01-25 | Univ Oxford Innovation Ltd | Crystal defects |
| US9748113B2 (en) * | 2015-07-30 | 2017-08-29 | Veeco Intruments Inc. | Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system |
| RU2616350C2 (ru) * | 2015-08-03 | 2017-04-14 | федеральное государственное бюджетное образовательное учреждение высшего образования "Санкт-Петербургский горный университет" | Способ образования центров окраски в алмазе |
| GB201522512D0 (en) * | 2015-12-21 | 2016-02-03 | Element Six Ltd | Flourescent diamond particles and methods of fabricating the same |
| GB201522650D0 (en) * | 2015-12-22 | 2016-02-03 | Element Six Technologies Ltd | Nitrogen containing single crystal diamond materials optimized for magnetometr applications |
| CN107305188A (zh) * | 2016-04-25 | 2017-10-31 | 潘栋雄 | 钻石颜色等级的检测方法 |
| GB201620415D0 (en) * | 2016-12-01 | 2017-01-18 | Element Six Tech Ltd | Single crystal synthetic diamond material via chemical vapour deposition |
| CN108385163A (zh) * | 2017-03-15 | 2018-08-10 | 杨承 | 金刚石晶体和基于金刚石量子缺陷中心的惯性运动测量装置 |
| CA3086268A1 (en) * | 2017-12-21 | 2019-06-27 | Universita Degli Studi Di Milano - Bicocca | System and method for spectroscopy analysis of diamonds |
| GB201801288D0 (en) | 2018-01-26 | 2018-03-14 | Element Six Tech Ltd | Synthetic diamond material |
| TWI804596B (zh) * | 2018-04-24 | 2023-06-11 | 美商戴蒙創新公司 | 螢光鑽石材料及製造其之方法 |
| AU2018214017A1 (en) | 2018-08-07 | 2020-02-27 | The University Of Melbourne | Quantum Spin Magnetometer |
| JP7158966B2 (ja) * | 2018-09-14 | 2022-10-24 | 株式会社東芝 | ダイヤモンド基板、量子デバイス、量子システム、及び、ダイヤモンド基板の製造方法 |
| CN109813700B (zh) * | 2019-01-23 | 2021-04-02 | 太原科技大学 | 一种金刚石本征缺陷扩散表征方法 |
| GB201904435D0 (en) | 2019-03-29 | 2019-05-15 | Element Six Tech Ltd | Single crystal synthetic diamond material |
| WO2020232140A1 (en) * | 2019-05-14 | 2020-11-19 | The Regents Of The University Of California | Wide band gap semiconductor optimization for hyperpolarization |
| CN110219043A (zh) * | 2019-05-23 | 2019-09-10 | 宁波晶钻工业科技有限公司 | 一种多色单晶金刚石生长方法 |
| DE102019117423A1 (de) * | 2019-06-27 | 2020-12-31 | Universität Leipzig | Verfahren zur Erzeugung zumindest eines deterministischen Farbzentrums in einer Diamantschicht |
| CN110395727B (zh) * | 2019-07-30 | 2020-11-24 | 中国电子科技集团公司第十三研究所 | 色心金刚石制备方法及色心金刚石 |
| WO2022026274A1 (en) * | 2020-07-29 | 2022-02-03 | Gemological Institute Of America, Inc. (Gia) | Ultraviolet-visible absorption spectroscopy for gemstone identification |
| US20230383436A1 (en) * | 2020-11-04 | 2023-11-30 | Sumitomo Electric Industries, Ltd. | Synthetic single crystal diamond and method for producing same |
| CN116981801A (zh) * | 2021-03-31 | 2023-10-31 | 住友电气工业株式会社 | 单晶金刚石以及具备该单晶金刚石的金刚石复合体 |
| US20240175167A1 (en) * | 2021-03-31 | 2024-05-30 | Sumitomo Electric Industries, Ltd. | Single-crystal diamond and method of manufacturing the same |
| WO2022230107A1 (ja) * | 2021-04-28 | 2022-11-03 | 住友電工ハードメタル株式会社 | ダイヤモンドの窒素濃度の測定方法およびダイヤモンドの窒素濃度の測定装置 |
| CN113753889B (zh) * | 2021-09-22 | 2022-12-20 | 铜仁学院 | 一种只含nv-光学色心的金刚石及其合成方法 |
| GB2614521A (en) * | 2021-10-19 | 2023-07-12 | Element Six Tech Ltd | CVD single crystal diamond |
| GB2614522B (en) | 2021-10-19 | 2024-04-03 | Element Six Tech Ltd | CVD single crystal diamond |
| GB2614068B (en) | 2021-12-21 | 2024-05-22 | Element Six Tech Ltd | Sensor device |
| GB2614240B (en) | 2021-12-21 | 2024-08-14 | Element Six Tech Ltd | Sensor device |
| GB2614530B (en) | 2021-12-23 | 2024-12-11 | Element Six Tech Ltd | Diamond sensor |
| US20230357025A1 (en) * | 2022-05-09 | 2023-11-09 | M7D Corporation | Process for isothermal diamond annealing for stress relaxation and optical enhancement by radiative heating |
| GB2623075A (en) | 2022-10-03 | 2024-04-10 | Element Six Tech Ltd | Diamond layer on photonic circuit |
| CN115463615B (zh) * | 2022-10-08 | 2023-05-26 | 四川大学 | 一种在高温高压下制备强韧性粉色钻石的方法 |
| CN115928210A (zh) * | 2022-11-09 | 2023-04-07 | 福建北电新材料科技有限公司 | 金刚石的制备方法 |
| JP7561174B2 (ja) * | 2022-12-17 | 2024-10-03 | エレメント シックス リミテッド | 半導体部材加工砥石用ダイヤモンド砥粒、および半導体部材加工砥石用ダイヤモンド砥粒の製造方法 |
| CN116081618B (zh) * | 2023-01-10 | 2025-03-04 | 武汉大学 | 金刚石镓-空位量子色心、应用及制备方法 |
| CN117604626A (zh) * | 2023-11-28 | 2024-02-27 | 合肥先端晶体科技有限责任公司 | 一种基于mpcvd法生产渐变粉色单晶金刚石的方法 |
| WO2025182851A1 (ja) * | 2024-02-28 | 2025-09-04 | 住友電気工業株式会社 | ダイヤモンドスピンセンサ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0615954A1 (en) * | 1993-03-15 | 1994-09-21 | Sumitomo Electric Industries, Limited | Red diamond, pink diamond and method of producing the same |
| RU2279908C2 (ru) * | 2000-08-11 | 2006-07-20 | Даймонд Инновейшнз Инк. | Получение алмазов под воздействием высокого давления и высокой температуры |
| GB2430194A (en) * | 2002-09-06 | 2007-03-21 | Element Six Ltd | Converting the colour of a single crystal CVD diamond |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US289282A (en) | 1883-11-27 | leadley | ||
| US2945793A (en) * | 1952-09-22 | 1960-07-19 | Dugdale Ronald Arthur | Process for coloring diamonds |
| JPH02385A (ja) * | 1987-01-12 | 1990-01-05 | Sumitomo Electric Ind Ltd | ダイヤモンド発光素子およびその製造方法 |
| EP0275063A3 (en) * | 1987-01-12 | 1992-05-27 | Sumitomo Electric Industries Limited | Light emitting element comprising diamond and method for producing the same |
| JPS6420689A (en) * | 1987-07-15 | 1989-01-24 | Sumitomo Electric Industries | Manufacture of diamond light emitting device |
| JP2571795B2 (ja) | 1987-11-17 | 1997-01-16 | 住友電気工業株式会社 | 紫色ダイヤモンドおよびその製造方法 |
| JP2571797B2 (ja) * | 1987-11-25 | 1997-01-16 | 住友電気工業株式会社 | 青緑色ダイヤモンドおよびその製造方法 |
| JP2571808B2 (ja) * | 1988-01-13 | 1997-01-16 | 住友電気工業株式会社 | 緑色ダイヤモンド及びその製造方法 |
| JPH02184600A (ja) * | 1989-01-10 | 1990-07-19 | Iwao Umeda | ダイアモンドの着色法 |
| RU1676409C (ru) * | 1989-07-18 | 1995-05-27 | Якутский Научно-Исследовательский И Проектный Институт Алмазодобывающей Промышленности | Способ образования нз-центров окраски в алмазе |
| RU2044378C1 (ru) * | 1992-08-14 | 1995-09-20 | Якутский Научно-Исследовательский И Проектный Институт Алмазодобывающей Промышленности | Вещество для пассивных затворов лазеров (варианты) |
| RU2145365C1 (ru) * | 1998-12-11 | 2000-02-10 | Эдуард Ильич Карагезов | Способ облагораживания алмазов |
| US20030063042A1 (en) | 1999-07-29 | 2003-04-03 | Asher A. Friesem | Electronic utility devices incorporating a compact virtual image display |
| WO2001009664A1 (en) | 1999-08-01 | 2001-02-08 | Deep Video Imaging Limited | Interactive three dimensional display with layered screens |
| GB0007887D0 (en) * | 2000-03-31 | 2000-05-17 | De Beers Ind Diamond | Colour change of diamond |
| GB2379451B (en) * | 2000-06-15 | 2004-05-05 | Element Six | Thick single crystal diamond layer method for making it and gemstones produced from the layer |
| WO2003014427A1 (en) * | 2001-08-08 | 2003-02-20 | Apollo Diamond, Inc. | System and method for producing synthetic diamond |
| JP2003111606A (ja) * | 2001-10-09 | 2003-04-15 | Sophia Avenir:Kk | カラーダイヤモンド |
| GB0130004D0 (en) * | 2001-12-14 | 2002-02-06 | Diamanx Products Ltd | Coloured diamond |
| GB0130005D0 (en) * | 2001-12-14 | 2002-02-06 | Diamanx Products Ltd | Boron doped diamond |
| RU2293148C2 (ru) * | 2002-07-17 | 2007-02-10 | Саито Такеши | Способ обработки алмазов |
| GB0220772D0 (en) * | 2002-09-06 | 2002-10-16 | Diamanx Products Ltd | Coloured diamond |
| EP2253746B1 (en) * | 2002-09-06 | 2015-07-22 | Element Six Technologies Limited | Coloured diamond |
| GB0227261D0 (en) * | 2002-11-21 | 2002-12-31 | Element Six Ltd | Optical quality diamond material |
| RU2237113C1 (ru) | 2003-06-26 | 2004-09-27 | Винс Виктор Генрихович | Способ получения алмазов фантазийного красного цвета |
| US7115241B2 (en) * | 2003-07-14 | 2006-10-03 | Carnegie Institution Of Washington | Ultrahard diamonds and method of making thereof |
| TW200631894A (en) * | 2004-12-09 | 2006-09-16 | Element Six Technologies Pty Ltd | A method of improving the crystalline perfection of diamond crystals |
| US7122837B2 (en) | 2005-01-11 | 2006-10-17 | Apollo Diamond, Inc | Structures formed in diamond |
| JP5457028B2 (ja) * | 2005-06-22 | 2014-04-02 | エレメント シックス リミテッド | ハイカラーのダイヤモンド層 |
| EP1990313A1 (en) * | 2007-05-10 | 2008-11-12 | INSERM (Institut National de la Santé et de la Recherche Médicale) | Method to produce light-emitting nano-particles of diamond |
| TW200923146A (en) * | 2007-10-02 | 2009-06-01 | Carnegie Inst Of Washington | Low pressure method of annealing diamonds |
| US20100028556A1 (en) | 2008-05-09 | 2010-02-04 | Apollo Diamond Gemstone Corporation | Chemical vapor deposition colored diamond |
| GB0813490D0 (en) | 2008-07-23 | 2008-08-27 | Element Six Ltd | Solid state material |
| GB0813491D0 (en) | 2008-07-23 | 2008-08-27 | Element Six Ltd | Diamond Material |
| TW201035396A (en) * | 2008-10-24 | 2010-10-01 | Carnegie Inst Of Washington | Enhanced optical properties of chemical vapor deposited single crystal diamond by low-pressure/high-temperature annealing |
| EP2446070B1 (en) * | 2009-06-26 | 2018-08-08 | Element Six Technologies Limited | Method for making fancy pale blue or fancy pale blue/green single crystal cvd diamond and product obtained |
-
2010
- 2010-06-25 EP EP10724884.1A patent/EP2446070B1/en active Active
- 2010-06-25 CN CN201080033962.7A patent/CN102575379B/zh active Active
- 2010-06-25 SG SG2011093341A patent/SG176889A1/en unknown
- 2010-06-25 WO PCT/EP2010/059084 patent/WO2010149779A1/en not_active Ceased
- 2010-06-25 MY MYPI2011006177A patent/MY159945A/en unknown
- 2010-06-25 CA CA2765808A patent/CA2765808C/en active Active
- 2010-06-25 JP JP2012516769A patent/JP5891564B2/ja active Active
- 2010-06-25 CN CN201080033965.0A patent/CN102575380B/zh active Active
- 2010-06-25 MY MYPI2011006175A patent/MY160529A/en unknown
- 2010-06-25 RU RU2011151979/05A patent/RU2540611C2/ru active
- 2010-06-25 MY MYPI2011006176A patent/MY157153A/en unknown
- 2010-06-25 WO PCT/EP2010/059081 patent/WO2010149777A1/en not_active Ceased
- 2010-06-25 WO PCT/EP2010/059080 patent/WO2010149776A1/en not_active Ceased
- 2010-06-25 EP EP10728650.2A patent/EP2446072B1/en active Active
- 2010-06-25 CA CA2765898A patent/CA2765898C/en active Active
- 2010-06-25 SG SG10201405892YA patent/SG10201405892YA/en unknown
- 2010-06-25 WO PCT/EP2010/059078 patent/WO2010149775A1/en not_active Ceased
- 2010-06-25 CN CN201080033959.5A patent/CN102471923B/zh active Active
- 2010-06-25 CN CN201410771629.6A patent/CN104630882B/zh active Active
- 2010-06-25 SG SG2011094455A patent/SG177298A1/en unknown
- 2010-06-25 RU RU2011151873/05A patent/RU2537857C2/ru active
- 2010-06-25 JP JP2012516766A patent/JP5874932B2/ja active Active
- 2010-06-25 CA CA2765901A patent/CA2765901C/en active Active
- 2010-06-25 EP EP10724883.3A patent/EP2446069B1/en active Active
- 2010-06-25 RU RU2011151856/05A patent/RU2497981C2/ru active
- 2010-06-25 EP EP10727419.3A patent/EP2446071B1/en active Active
- 2010-06-25 RU RU2014133182/05A patent/RU2580916C1/ru active
- 2010-06-25 CA CA2765804A patent/CA2765804C/en active Active
- 2010-06-25 JP JP2012516765A patent/JP5567669B2/ja active Active
- 2010-06-25 RU RU2011151983/05A patent/RU2540624C2/ru active
- 2010-06-25 CN CN201080033971.6A patent/CN102656296B/zh active Active
- 2010-06-25 SG SG2011093374A patent/SG177261A1/en unknown
- 2010-06-25 SG SG2011094448A patent/SG176933A1/en unknown
- 2010-06-25 JP JP2012516767A patent/JP5368634B2/ja active Active
- 2010-06-25 TR TR2018/16224T patent/TR201816224T4/tr unknown
-
2011
- 2011-12-15 IL IL217011A patent/IL217011A/en active IP Right Grant
- 2011-12-15 IL IL217010A patent/IL217010A/en active IP Right Grant
- 2011-12-15 IL IL217009A patent/IL217009A/en active IP Right Grant
- 2011-12-15 IL IL217012A patent/IL217012A/en active IP Right Grant
-
2014
- 2014-04-15 JP JP2014083916A patent/JP5877428B2/ja active Active
-
2015
- 2015-05-07 JP JP2015095199A patent/JP5974345B2/ja active Active
- 2015-05-07 JP JP2015095180A patent/JP2015134722A/ja not_active Withdrawn
- 2015-05-25 JP JP2015105170A patent/JP6028307B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0615954A1 (en) * | 1993-03-15 | 1994-09-21 | Sumitomo Electric Industries, Limited | Red diamond, pink diamond and method of producing the same |
| RU2279908C2 (ru) * | 2000-08-11 | 2006-07-20 | Даймонд Инновейшнз Инк. | Получение алмазов под воздействием высокого давления и высокой температуры |
| GB2430194A (en) * | 2002-09-06 | 2007-03-21 | Element Six Ltd | Converting the colour of a single crystal CVD diamond |
Non-Patent Citations (1)
| Title |
|---|
| KENNEDY T.A. et al, Long coherence times at 300K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition, Applied Physics Letters, 2003, vol. 83, no. 20, p. 4190-4192 * |
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2580916C1 (ru) | Способ обработки монокристаллического cvd-алмаза и полученный продукт | |
| US8986646B2 (en) | Diamond material | |
| US10480097B2 (en) | Synthetic CVD diamond | |
| EP2516701B1 (en) | Synthetic cvd diamond | |
| JP2024538212A (ja) | Ｃｖｄ単結晶ダイヤモンド | |
| HK1170272A (en) | Method for treating single crystal cvd diamond and product obtained | |
| HK1170272B (en) | Method for treating single crystal cvd diamond and product obtained | |
| HK1170273A (en) | Method for making fancy pale blue or fancy pale blue / green single crystal cvd diamond and product obtained | |
| HK1170273B (en) | Method for making fancy pale blue or fancy pale blue / green single crystal cvd diamond and product obtained | |
| HK1170275A (en) | Method for making fancy orange coloured single crystal cvd diamond and product obtained | |
| HK1170275B (en) | Method for making fancy orange coloured single crystal cvd diamond and product obtained | |
| HK1170274B (en) | Method for treating diamond material and product obtained |