RU2014126092A - Снабженный покрытием режущий инструмент - Google Patents

Снабженный покрытием режущий инструмент Download PDF

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RU2014126092A
RU2014126092A RU2014126092A RU2014126092A RU2014126092A RU 2014126092 A RU2014126092 A RU 2014126092A RU 2014126092 A RU2014126092 A RU 2014126092A RU 2014126092 A RU2014126092 A RU 2014126092A RU 2014126092 A RU2014126092 A RU 2014126092A
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layer
fwhm
hkl
ray diffraction
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Оке ЭСТЛУНД
Йонни ЭДМАН
Эрик ЛИНДАЛЬ
Ян ЭНГКВИСТ
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Сандвик Интеллекчуал Проперти Аб
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0254—Physical treatment to alter the texture of the surface, e.g. scratching or polishing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
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    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
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    • C—CHEMISTRY; METALLURGY
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/081—Oxides of aluminium, magnesium or beryllium
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2200/00—Details of cutting inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/04—Aluminium oxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/32—Titanium carbide nitride (TiCN)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition

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  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

1. Снабженный покрытием режущий инструмент, содержащий подложку и покрытие, причем покрытие содержитслой TiCN MTCVD ислой α-AlO,при этом слой α-AlOдемонстрирует рентгенодифрактограмму, измеренную с использованием излучения CuKα и развертки θ-2θ, причем коэффициент текстуры TC(hkl) определяется по формуле Харриса,где I(hkl) - измеренная интенсивность (интегрированная площадь) отражения (hkl), I(hkl) - стандартная интенсивность согласно PDF-карточке ICDD № 00-010-0173, n - число отражений, используемых при расчете,используемыми отражениями (hkl) являются (012), (104), (110), (113), (116), (300), (214) и (0 0 12), и при этом TC(0 0 12) составляет более 5, предпочтительно более 6, а наиболее предпочтительно более 7, и при этомполная ширина на половине максимума (FWHM) пика кривой качания плоскости (0 0 12) α-AlOс использованием рентгеновской дифракции, измеренной на задней поверхности режущего инструмента, составляет FWHM менее 30º, предпочтительно менее 26º, более предпочтительно менее 22º, и при этомслой TiCN демонстрирует рентгенодифрактограмму, измеренную с использованием излучения CuKα, причем отношение между интенсивностью по интегрированной площади пика 220 и интенсивностью по интегрированной площади пика 311, I/I, составляет менее 3, предпочтительно менее 2, наиболее предпочтительно менее 1.2. Режущий инструмент по п. 1, при этом разница Δ между FWHM дифракционного пика (0 0 12) при рентгеновской дифракции слоя α-AlOна передней поверхности режущего инструмента и FWHM дифракционного пика (0 0 12) при рентгеновской дифракции α-AlOна задней поверхности режущего инструмента составляет Δ >0,2, предпочтительно Δ >0,3, наиболее предпочтительно Δ >0,4.3. Режущий инструмент по п. 1, при этом разница Δ между FWHM дифракц�

Claims (6)

1. Снабженный покрытием режущий инструмент, содержащий подложку и покрытие, причем покрытие содержит
слой TiCN MTCVD и
слой α-Al2O3,
при этом слой α-Al2O3 демонстрирует рентгенодифрактограмму, измеренную с использованием излучения CuKα и развертки θ-2θ, причем коэффициент текстуры TC(hkl) определяется по формуле Харриса
Figure 00000001
,
где I(hkl) - измеренная интенсивность (интегрированная площадь) отражения (hkl), I0(hkl) - стандартная интенсивность согласно PDF-карточке ICDD № 00-010-0173, n - число отражений, используемых при расчете,
используемыми отражениями (hkl) являются (012), (104), (110), (113), (116), (300), (214) и (0 0 12), и при этом TC(0 0 12) составляет более 5, предпочтительно более 6, а наиболее предпочтительно более 7, и при этом
полная ширина на половине максимума (FWHM) пика кривой качания плоскости (0 0 12) α-Al2O3 с использованием рентгеновской дифракции, измеренной на задней поверхности режущего инструмента, составляет FWHM менее 30º, предпочтительно менее 26º, более предпочтительно менее 22º, и при этом
слой TiCN демонстрирует рентгенодифрактограмму, измеренную с использованием излучения CuKα, причем отношение между интенсивностью по интегрированной площади пика 220 и интенсивностью по интегрированной площади пика 311, I220/I311, составляет менее 3, предпочтительно менее 2, наиболее предпочтительно менее 1.
2. Режущий инструмент по п. 1, при этом разница Δ между FWHM дифракционного пика (0 0 12) при рентгеновской дифракции слоя α-Al2O3 на передней поверхности режущего инструмента и FWHM дифракционного пика (0 0 12) при рентгеновской дифракции α-Al2O3 на задней поверхности режущего инструмента составляет Δ >0,2, предпочтительно Δ >0,3, наиболее предпочтительно Δ >0,4.
3. Режущий инструмент по п. 1, при этом разница Δ между FWHM дифракционного пика (0 0 12) при рентгеновской дифракции слоя α-Al2O3 и FWHM дифракционного пика (0 0 12) при рентгеновской дифракции режущего инструмента после термообработки при 1030ºC в N2 в течение 3 часов составляет Δ >0,2, предпочтительно Δ >0,3, наиболее предпочтительно Δ >0,4.
4. Режущий инструмент по п. 1, при этом слой α-Al2O3 составляет 2-15 мкм, предпочтительно 3-7 мкм, наиболее предпочтительно 4-6 мкм.
5. Режущий инструмент по п. 1, при этом слой TiCN составляет 2-15 мкм, предпочтительно 5-12 мкм, наиболее предпочтительно 7-11 мкм.
6. Режущий инструмент по п. 1, дополнительно содержащий связующий слой толщиной 1-2 мкм между слоем TiCN MTCVD и слоем α-Al2O3.
RU2014126092A 2013-06-27 2014-06-26 Снабженный покрытием режущий инструмент RU2667187C2 (ru)

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RU2760426C2 (ru) * 2017-04-07 2021-11-25 Сандвик Интеллекчуал Проперти Аб Снабженный покрытием режущий инструмент

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EP3085478B1 (en) * 2013-12-17 2019-04-10 Kyocera Corporation Coated tool
JP6419220B2 (ja) * 2015-01-28 2018-11-07 京セラ株式会社 被覆工具
CN104985206B (zh) * 2015-03-23 2018-07-10 贵州大学 一种金属切削刀具织构结构
CN106660139B (zh) 2015-08-28 2020-02-18 住友电工硬质合金株式会社 表面被覆切削工具及其制造方法
US9849517B2 (en) * 2015-10-09 2017-12-26 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and method of manufacturing the same
EP3417965B1 (en) 2016-02-18 2020-10-21 Tungaloy Corporation Coated cutting tool
KR102375084B1 (ko) * 2016-06-21 2022-03-15 산드빅 인터렉츄얼 프로퍼티 에이비 Cvd 피복 절삭 공구
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