RU2008122971A - Полевой транзистор - Google Patents
Полевой транзистор Download PDFInfo
- Publication number
- RU2008122971A RU2008122971A RU2008122971/28A RU2008122971A RU2008122971A RU 2008122971 A RU2008122971 A RU 2008122971A RU 2008122971/28 A RU2008122971/28 A RU 2008122971/28A RU 2008122971 A RU2008122971 A RU 2008122971A RU 2008122971 A RU2008122971 A RU 2008122971A
- Authority
- RU
- Russia
- Prior art keywords
- effect transistor
- oxide layer
- interface
- amorphous oxide
- field effect
- Prior art date
Links
- 230000005669 field effect Effects 0.000 title claims abstract 9
- 229910052733 gallium Inorganic materials 0.000 claims abstract 2
- 229910052738 indium Inorganic materials 0.000 claims abstract 2
- 229910052725 zinc Inorganic materials 0.000 claims abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
- H01L29/78693—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate the semiconducting oxide being amorphous
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
- Dram (AREA)
Abstract
1. Полевой транзистор, содержащий: ! активный слой, и ! изолирующую затвор пленку, ! причем активный слой содержит слой аморфного оксида, содержащий аморфную область и кристаллическую область, и кристаллическая область находится вблизи от или в контакте с поверхностью раздела между слоем аморфного оксида и изолирующей затвор пленкой. ! 2. Полевой транзистор по п.1, в котором кристаллическая область отсутствует вблизи от второй поверхности раздела, противоположной первой поверхности раздела, которая является поверхностью раздела между слоем аморфного оксида и изолирующей затвор пленкой. ! 3. Полевой транзистор по п.1, в котором слой аморфного оксида состоит из оксида, содержащего In, Zn и Ga. ! 4. Полевой транзистор по п.1, в котором слой аморфного оксида имеет толщину 0,05 мкм или более и 1 мкм или менее.
Claims (4)
1. Полевой транзистор, содержащий:
активный слой, и
изолирующую затвор пленку,
причем активный слой содержит слой аморфного оксида, содержащий аморфную область и кристаллическую область, и кристаллическая область находится вблизи от или в контакте с поверхностью раздела между слоем аморфного оксида и изолирующей затвор пленкой.
2. Полевой транзистор по п.1, в котором кристаллическая область отсутствует вблизи от второй поверхности раздела, противоположной первой поверхности раздела, которая является поверхностью раздела между слоем аморфного оксида и изолирующей затвор пленкой.
3. Полевой транзистор по п.1, в котором слой аморфного оксида состоит из оксида, содержащего In, Zn и Ga.
4. Полевой транзистор по п.1, в котором слой аморфного оксида имеет толщину 0,05 мкм или более и 1 мкм или менее.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005323689 | 2005-11-08 | ||
JP2005-323689 | 2005-11-08 | ||
JP2006283893A JP4560505B2 (ja) | 2005-11-08 | 2006-10-18 | 電界効果型トランジスタ |
JP2006-283893 | 2006-10-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2008122971A true RU2008122971A (ru) | 2009-12-20 |
RU2390072C2 RU2390072C2 (ru) | 2010-05-20 |
Family
ID=37607109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2008122971/28A RU2390072C2 (ru) | 2005-11-08 | 2006-11-01 | Полевой транзистор |
Country Status (9)
Country | Link |
---|---|
US (1) | US7851792B2 (ru) |
EP (1) | EP1946383A1 (ru) |
JP (1) | JP4560505B2 (ru) |
KR (1) | KR100995520B1 (ru) |
CN (1) | CN101305468B (ru) |
BR (1) | BRPI0618329A2 (ru) |
RU (1) | RU2390072C2 (ru) |
TW (1) | TWI328288B (ru) |
WO (1) | WO2007055256A1 (ru) |
Families Citing this family (31)
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EP1812969B1 (en) * | 2004-11-10 | 2015-05-06 | Canon Kabushiki Kaisha | Field effect transistor comprising an amorphous oxide |
JP5305630B2 (ja) | 2006-12-05 | 2013-10-02 | キヤノン株式会社 | ボトムゲート型薄膜トランジスタの製造方法及び表示装置の製造方法 |
JP5354862B2 (ja) * | 2007-02-19 | 2013-11-27 | キヤノン株式会社 | アモルファス絶縁体膜及び薄膜トランジスタ |
EP2204867A4 (en) | 2007-09-06 | 2012-06-06 | Canon Kk | METHOD FOR PRODUCING LITHIUM ION STORAGE / RELEASE MATERIAL, LITHIUM ION STORAGE / RELEASE MATERIAL, ELECTRODE STRUCTURE USING THE MATERIAL, AND ELECTRICITY STORAGE DEVICE THEREOF |
JP5213421B2 (ja) * | 2007-12-04 | 2013-06-19 | キヤノン株式会社 | 酸化物半導体薄膜トランジスタ |
US9082857B2 (en) | 2008-09-01 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
WO2010038596A1 (en) * | 2008-10-03 | 2010-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Modulation circuit and semiconductor device including the same |
TWI656645B (zh) * | 2008-11-13 | 2019-04-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
JP2010153802A (ja) * | 2008-11-20 | 2010-07-08 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法 |
CN105448937A (zh) * | 2009-09-16 | 2016-03-30 | 株式会社半导体能源研究所 | 晶体管及显示设备 |
TWI512997B (zh) | 2009-09-24 | 2015-12-11 | Semiconductor Energy Lab | 半導體裝置,電源電路,和半導體裝置的製造方法 |
KR101980505B1 (ko) * | 2009-10-08 | 2019-05-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체층, 반도체 장치 및 그 제조 방법 |
EP2486593B1 (en) | 2009-10-09 | 2017-02-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR20230007544A (ko) | 2009-11-06 | 2023-01-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101893332B1 (ko) | 2009-11-13 | 2018-08-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 구동 방법 |
KR101800852B1 (ko) | 2009-11-20 | 2017-12-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
KR101922849B1 (ko) | 2009-11-20 | 2018-11-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011062041A1 (en) * | 2009-11-20 | 2011-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor |
KR20180030255A (ko) * | 2009-11-30 | 2018-03-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치, 액정 표시 장치의 구동 방법, 및 이 액정 표시 장치를 구비하는 전자기기 |
KR20170100065A (ko) | 2009-12-04 | 2017-09-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101773641B1 (ko) | 2010-01-22 | 2017-09-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP5923248B2 (ja) * | 2010-05-20 | 2016-05-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US8987728B2 (en) * | 2011-03-25 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
JP6023453B2 (ja) * | 2011-04-15 | 2016-11-09 | 株式会社半導体エネルギー研究所 | 記憶装置 |
JP6006572B2 (ja) * | 2011-08-18 | 2016-10-12 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP5832399B2 (ja) | 2011-09-16 | 2015-12-16 | 株式会社半導体エネルギー研究所 | 発光装置 |
CN103843145B (zh) | 2011-09-29 | 2017-03-29 | 株式会社半导体能源研究所 | 半导体装置 |
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EP1812969B1 (en) | 2004-11-10 | 2015-05-06 | Canon Kabushiki Kaisha | Field effect transistor comprising an amorphous oxide |
JP5037808B2 (ja) | 2005-10-20 | 2012-10-03 | キヤノン株式会社 | アモルファス酸化物を用いた電界効果型トランジスタ、及び該トランジスタを用いた表示装置 |
-
2006
- 2006-10-18 JP JP2006283893A patent/JP4560505B2/ja not_active Expired - Fee Related
- 2006-11-01 CN CN2006800415569A patent/CN101305468B/zh not_active Expired - Fee Related
- 2006-11-01 RU RU2008122971/28A patent/RU2390072C2/ru not_active IP Right Cessation
- 2006-11-01 WO PCT/JP2006/322327 patent/WO2007055256A1/en active Application Filing
- 2006-11-01 EP EP06823223A patent/EP1946383A1/en not_active Withdrawn
- 2006-11-01 BR BRPI0618329-8A patent/BRPI0618329A2/pt not_active Application Discontinuation
- 2006-11-01 US US12/089,907 patent/US7851792B2/en not_active Expired - Fee Related
- 2006-11-01 KR KR1020087013298A patent/KR100995520B1/ko not_active IP Right Cessation
- 2006-11-03 TW TW095140809A patent/TWI328288B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN101305468B (zh) | 2011-01-05 |
US7851792B2 (en) | 2010-12-14 |
EP1946383A1 (en) | 2008-07-23 |
CN101305468A (zh) | 2008-11-12 |
TWI328288B (en) | 2010-08-01 |
JP2007158307A (ja) | 2007-06-21 |
TW200737525A (en) | 2007-10-01 |
BRPI0618329A2 (pt) | 2012-05-08 |
JP4560505B2 (ja) | 2010-10-13 |
KR100995520B1 (ko) | 2010-11-22 |
WO2007055256A1 (en) | 2007-05-18 |
KR20080074931A (ko) | 2008-08-13 |
RU2390072C2 (ru) | 2010-05-20 |
US20090272970A1 (en) | 2009-11-05 |
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Legal Events
Date | Code | Title | Description |
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MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20171102 |